CN111032285B - 表面突起抛光垫 - Google Patents

表面突起抛光垫 Download PDF

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Publication number
CN111032285B
CN111032285B CN201880054222.8A CN201880054222A CN111032285B CN 111032285 B CN111032285 B CN 111032285B CN 201880054222 A CN201880054222 A CN 201880054222A CN 111032285 B CN111032285 B CN 111032285B
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CN
China
Prior art keywords
protrusions
polishing pad
article
major surface
polishing
Prior art date
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CN201880054222.8A
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English (en)
Chinese (zh)
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CN111032285A (zh
Inventor
陈联舜
埃里克·C·科德
贾斯廷·W·勒巴肯
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication date
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Publication of CN111032285A publication Critical patent/CN111032285A/zh
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Publication of CN111032285B publication Critical patent/CN111032285B/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CN201880054222.8A 2017-08-25 2018-08-21 表面突起抛光垫 Active CN111032285B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762550055P 2017-08-25 2017-08-25
US62/550,055 2017-08-25
PCT/IB2018/056320 WO2019038675A1 (en) 2017-08-25 2018-08-21 SURFACE SURFACE SURFACE POLISHING PAD

Publications (2)

Publication Number Publication Date
CN111032285A CN111032285A (zh) 2020-04-17
CN111032285B true CN111032285B (zh) 2022-07-19

Family

ID=65439977

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880054222.8A Active CN111032285B (zh) 2017-08-25 2018-08-21 表面突起抛光垫

Country Status (4)

Country Link
US (1) US12048980B2 (https=)
JP (1) JP7273796B2 (https=)
CN (1) CN111032285B (https=)
WO (1) WO2019038675A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230106863A (ko) * 2022-01-07 2023-07-14 삼성전자주식회사 연마 패드, 그를 포함하는 화학적 기계적 연마 장치, 및 그를 이용하는 반도체 소자의 제조 방법
US20230219189A1 (en) * 2022-01-07 2023-07-13 Applied Materials, Inc. Apparatus and method for selective material removal during polishing

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JPS61187657U (https=) 1985-05-17 1986-11-22
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US5177908A (en) * 1990-01-22 1993-01-12 Micron Technology, Inc. Polishing pad
US5489233A (en) * 1994-04-08 1996-02-06 Rodel, Inc. Polishing pads and methods for their use
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US6206759B1 (en) 1998-11-30 2001-03-27 Micron Technology, Inc. Polishing pads and planarizing machines for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods for making and using such pads and machines
US8485862B2 (en) * 2000-05-19 2013-07-16 Applied Materials, Inc. Polishing pad for endpoint detection and related methods
US20020090901A1 (en) 2000-11-03 2002-07-11 3M Innovative Properties Company Flexible abrasive product and method of making and using the same
US6612917B2 (en) * 2001-02-07 2003-09-02 3M Innovative Properties Company Abrasive article suitable for modifying a semiconductor wafer
US6949128B2 (en) 2001-12-28 2005-09-27 3M Innovative Properties Company Method of making an abrasive product
US8864859B2 (en) * 2003-03-25 2014-10-21 Nexplanar Corporation Customized polishing pads for CMP and methods of fabrication and use thereof
US7160178B2 (en) 2003-08-07 2007-01-09 3M Innovative Properties Company In situ activation of a three-dimensional fixed abrasive article
US7066795B2 (en) * 2004-10-12 2006-06-27 Applied Materials, Inc. Polishing pad conditioner with shaped abrasive patterns and channels
US7449124B2 (en) 2005-02-25 2008-11-11 3M Innovative Properties Company Method of polishing a wafer
US20070243798A1 (en) 2006-04-18 2007-10-18 3M Innovative Properties Company Embossed structured abrasive article and method of making and using the same
TWI409136B (zh) * 2006-07-19 2013-09-21 Innopad Inc 表面具微溝槽之化學機械平坦化墊
US20090011679A1 (en) * 2007-04-06 2009-01-08 Rajeev Bajaj Method of removal profile modulation in cmp pads
JP2009082995A (ja) 2007-09-27 2009-04-23 Covalent Materials Corp ラッピング用研磨布、プラズマエッチング装置用シリコン電極のラッピング方法
JP5555453B2 (ja) 2008-07-24 2014-07-23 スリーエム イノベイティブ プロパティズ カンパニー 研磨材製品、その製造方法及び使用方法
KR101161015B1 (ko) * 2010-09-10 2012-07-02 신한다이아몬드공업 주식회사 Ｃｍｐ 패드 컨디셔너 및 그 제조방법
SG11201402224WA (en) * 2011-11-29 2014-09-26 Nexplanar Corp Polishing pad with foundation layer and polishing surface layer
KR101389572B1 (ko) * 2012-04-23 2014-04-29 주식회사 디어포스 다방향성 연마돌기를 갖는 연마제품
JP6188286B2 (ja) * 2012-07-13 2017-08-30 スリーエム イノベイティブ プロパティズ カンパニー 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法
KR102148050B1 (ko) * 2012-11-06 2020-10-14 캐보트 마이크로일렉트로닉스 코포레이션 오프셋 동심형 그루빙 패턴을 갖는 폴리싱 패드, 및 이로써 기판을 폴리싱하는 방법
US20150038066A1 (en) 2013-07-31 2015-02-05 Nexplanar Corporation Low density polishing pad
SG11201602206PA (en) 2013-09-25 2016-04-28 3M Innovative Properties Co Composite ceramic abrasive polishing solution
WO2015048011A1 (en) 2013-09-25 2015-04-02 3M Innovative Properties Company Multi-layered polishing pads
JP2017503670A (ja) * 2014-01-24 2017-02-02 スリーエム イノベイティブ プロパティズ カンパニー 構造化表面を有する研磨材料
JP6376922B2 (ja) * 2014-02-18 2018-08-22 株式会社松風 歯科用研磨器具
SG11201608134YA (en) * 2014-04-03 2016-10-28 3M Innovative Properties Co Polishing pads and systems and methods of making and using the same
US20150306737A1 (en) * 2014-04-23 2015-10-29 Taiwan Semiconductor Manufacturing Co., Ltd. Chemical mechanical polishing pad
US10105812B2 (en) * 2014-07-17 2018-10-23 Applied Materials, Inc. Polishing pad configuration and polishing pad support
US10946495B2 (en) * 2015-01-30 2021-03-16 Cmc Materials, Inc. Low density polishing pad
US10556316B2 (en) 2015-05-13 2020-02-11 3M Innovative Properties Company Polishing pads and systems for and methods of using same
US9539694B1 (en) 2015-06-26 2017-01-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Composite polishing layer chemical mechanical polishing pad
TWI769988B (zh) 2015-10-07 2022-07-11 美商3M新設資產公司 拋光墊與系統及其製造與使用方法
CN106853610B (zh) * 2015-12-08 2019-11-01 中芯国际集成电路制造(北京)有限公司 抛光垫及其监测方法和监测系统

Also Published As

Publication number Publication date
JP2020531298A (ja) 2020-11-05
US20200171619A1 (en) 2020-06-04
JP7273796B2 (ja) 2023-05-15
CN111032285A (zh) 2020-04-17
WO2019038675A1 (en) 2019-02-28
US12048980B2 (en) 2024-07-30

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