CN111001553A - 一种可调谐的超声传感器阵列 - Google Patents
一种可调谐的超声传感器阵列 Download PDFInfo
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- CN111001553A CN111001553A CN201911308045.4A CN201911308045A CN111001553A CN 111001553 A CN111001553 A CN 111001553A CN 201911308045 A CN201911308045 A CN 201911308045A CN 111001553 A CN111001553 A CN 111001553A
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- 238000003475 lamination Methods 0.000 claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
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- 238000002604 ultrasonography Methods 0.000 claims description 21
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112452694A (zh) * | 2020-09-23 | 2021-03-09 | 长江大学 | 多频压电式微型超声换能器单元、阵列和方法 |
CN112871614A (zh) * | 2021-01-12 | 2021-06-01 | 武汉大学 | 高发射性能的mems超声换能器 |
CN113019872A (zh) * | 2021-04-25 | 2021-06-25 | 广州蜂鸟传感科技有限公司 | 一种用于扫描成像的双频率超声换能器 |
CN113286222A (zh) * | 2021-07-26 | 2021-08-20 | 成都纤声科技有限公司 | Mems芯片、耳机和电子设备 |
CN113560158A (zh) * | 2021-08-27 | 2021-10-29 | 南京声息芯影科技有限公司 | 压电微机械超声换能器、阵列芯片及制造方法 |
CN114160399A (zh) * | 2021-12-02 | 2022-03-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | 同频异构的压电超声波换能器及其制备方法 |
WO2022220142A1 (ja) * | 2021-04-13 | 2022-10-20 | 三菱電機株式会社 | 超音波トランスデューサー、距離測定装置および超音波トランスデューサーの製造方法 |
WO2022219717A1 (ja) * | 2021-04-13 | 2022-10-20 | 三菱電機株式会社 | 超音波トランスデューサ、測距装置および超音波トランスデューサの製造方法 |
CN115532572A (zh) * | 2022-10-14 | 2022-12-30 | 浙江大学 | 一种多频压电微机械超声换能器及制备方法 |
CN115971021A (zh) * | 2022-12-19 | 2023-04-18 | 京东方科技集团股份有限公司 | 超声换能基板、换能基板的制作方法以及检测方法 |
WO2024049447A1 (en) * | 2022-09-02 | 2024-03-07 | Exo Imaging, Inc. | Dual and multiple membrane micromachined ultrasound transducers |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1143184A (zh) * | 1995-08-14 | 1997-02-19 | 日本碍子株式会社 | 传感器部件和颗粒传感器 |
US20050203397A1 (en) * | 2004-02-27 | 2005-09-15 | Georgia Tech Research Corporation | Asymetric membrane cMUT devices and fabrication methods |
CN101359882A (zh) * | 2008-08-29 | 2009-02-04 | 清华大学 | 谐振频率可调的压电振动能量收集装置 |
US20130155817A1 (en) * | 2011-12-19 | 2013-06-20 | Samsung Electronics Co., Ltd. | Cell, element of ultrasonic transducer, ultrasonic transducer including the same, and method of manufacturing cell of ultrasonic transducer |
CN103182372A (zh) * | 2011-12-30 | 2013-07-03 | 广州市番禺奥迪威电子有限公司 | 一种超声波发射压电元件 |
CN104821745A (zh) * | 2015-05-29 | 2015-08-05 | 重庆大学 | 基于亥姆霍兹效应的低频压电振动能量收集器及其制作工艺 |
CN105375899A (zh) * | 2014-08-19 | 2016-03-02 | 英诺晶片科技股份有限公司 | 压电装置以及包含压电装置的电子装置 |
CN103097041B (zh) * | 2010-07-30 | 2016-03-30 | 皇家飞利浦电子股份有限公司 | 薄膜超声换能器 |
CN110277977A (zh) * | 2019-07-03 | 2019-09-24 | 武汉大学 | 一种双面集成的单片体声波双工器 |
CN110560352A (zh) * | 2019-08-15 | 2019-12-13 | 武汉大学 | 基于Helmholtz共振腔的可调频超声传感器阵列 |
-
2019
- 2019-12-18 CN CN201911308045.4A patent/CN111001553B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1143184A (zh) * | 1995-08-14 | 1997-02-19 | 日本碍子株式会社 | 传感器部件和颗粒传感器 |
US20050203397A1 (en) * | 2004-02-27 | 2005-09-15 | Georgia Tech Research Corporation | Asymetric membrane cMUT devices and fabrication methods |
CN101359882A (zh) * | 2008-08-29 | 2009-02-04 | 清华大学 | 谐振频率可调的压电振动能量收集装置 |
CN103097041B (zh) * | 2010-07-30 | 2016-03-30 | 皇家飞利浦电子股份有限公司 | 薄膜超声换能器 |
US20130155817A1 (en) * | 2011-12-19 | 2013-06-20 | Samsung Electronics Co., Ltd. | Cell, element of ultrasonic transducer, ultrasonic transducer including the same, and method of manufacturing cell of ultrasonic transducer |
CN103182372A (zh) * | 2011-12-30 | 2013-07-03 | 广州市番禺奥迪威电子有限公司 | 一种超声波发射压电元件 |
CN105375899A (zh) * | 2014-08-19 | 2016-03-02 | 英诺晶片科技股份有限公司 | 压电装置以及包含压电装置的电子装置 |
CN104821745A (zh) * | 2015-05-29 | 2015-08-05 | 重庆大学 | 基于亥姆霍兹效应的低频压电振动能量收集器及其制作工艺 |
CN110277977A (zh) * | 2019-07-03 | 2019-09-24 | 武汉大学 | 一种双面集成的单片体声波双工器 |
CN110560352A (zh) * | 2019-08-15 | 2019-12-13 | 武汉大学 | 基于Helmholtz共振腔的可调频超声传感器阵列 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112452694A (zh) * | 2020-09-23 | 2021-03-09 | 长江大学 | 多频压电式微型超声换能器单元、阵列和方法 |
CN112871614B (zh) * | 2021-01-12 | 2022-03-15 | 武汉大学 | 高发射性能的mems超声换能器 |
CN112871614A (zh) * | 2021-01-12 | 2021-06-01 | 武汉大学 | 高发射性能的mems超声换能器 |
WO2022219717A1 (ja) * | 2021-04-13 | 2022-10-20 | 三菱電機株式会社 | 超音波トランスデューサ、測距装置および超音波トランスデューサの製造方法 |
WO2022220142A1 (ja) * | 2021-04-13 | 2022-10-20 | 三菱電機株式会社 | 超音波トランスデューサー、距離測定装置および超音波トランスデューサーの製造方法 |
WO2022219716A1 (ja) * | 2021-04-13 | 2022-10-20 | 三菱電機株式会社 | 超音波トランスデューサー、距離測定装置および超音波トランスデューサーの製造方法 |
CN113019872A (zh) * | 2021-04-25 | 2021-06-25 | 广州蜂鸟传感科技有限公司 | 一种用于扫描成像的双频率超声换能器 |
CN113286222A (zh) * | 2021-07-26 | 2021-08-20 | 成都纤声科技有限公司 | Mems芯片、耳机和电子设备 |
CN113560158A (zh) * | 2021-08-27 | 2021-10-29 | 南京声息芯影科技有限公司 | 压电微机械超声换能器、阵列芯片及制造方法 |
CN114160399A (zh) * | 2021-12-02 | 2022-03-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | 同频异构的压电超声波换能器及其制备方法 |
CN114160399B (zh) * | 2021-12-02 | 2022-12-02 | 中国科学院苏州纳米技术与纳米仿生研究所 | 同频异构的压电超声波换能器及其制备方法 |
WO2024049447A1 (en) * | 2022-09-02 | 2024-03-07 | Exo Imaging, Inc. | Dual and multiple membrane micromachined ultrasound transducers |
CN115532572A (zh) * | 2022-10-14 | 2022-12-30 | 浙江大学 | 一种多频压电微机械超声换能器及制备方法 |
CN115532572B (zh) * | 2022-10-14 | 2024-05-07 | 浙江大学 | 一种多频压电微机械超声换能器及制备方法 |
CN115971021A (zh) * | 2022-12-19 | 2023-04-18 | 京东方科技集团股份有限公司 | 超声换能基板、换能基板的制作方法以及检测方法 |
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Effective date of registration: 20220411 Address after: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee after: Ningbo Huazhang enterprise management partnership (L.P.) Address before: 430072 No. 299 Bayi Road, Wuchang District, Hubei, Wuhan Patentee before: WUHAN University |
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Effective date of registration: 20220831 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee before: Ningbo Huazhang enterprise management partnership (L.P.) |
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