CN110952146A

CN110952146A - Be used for quartz crystal to corrode and abluent equipment

Info

Publication number: CN110952146A
Application number: CN201911315806.9A
Authority: CN
Inventors: 刘兴波
Original assignee: Zhuhai Dongjin Quartz Technology Co ltd
Current assignee: Zhuhai Dongjin Quartz Technology Co ltd
Priority date: 2019-12-19
Filing date: 2019-12-19
Publication date: 2020-04-03
Anticipated expiration: 2039-12-19

Abstract

The invention aims to provide equipment for quartz crystal corrosion and cleaning, which has high working efficiency and lower cost and has corrosion and cleaning functions. The device comprises a rotary module, wherein at least one corrosion tank and a plurality of cleaning tanks are sequentially arranged along one side of the conveying direction of the rotary module, a plurality of swinging soaking mechanisms matched with the corrosion tank and the cleaning tanks are arranged on the rotary module, each swinging soaking mechanism comprises a lifting device, a swinging mechanism is arranged on the action end of the lifting device, a connecting fork rod is arranged on the movable end of each swinging mechanism and positioned above the corrosion tank or the cleaning tank, a carrying frame is arranged on each connecting fork rod, and the carrying frame is matched with the corrosion tank or the cleaning tank. The invention is applied to the technical field of production equipment.

Description

Be used for quartz crystal to corrode and abluent equipment

Technical Field

The invention is applied to the technical field of production equipment, and particularly relates to equipment for corroding and cleaning quartz crystals.

Background

In the production process of the quartz crystal in the quartz resonator, after the quartz crystal is subjected to cutting, grinding and other processes, a damage layer with a certain thickness is generated on the surface of the quartz crystal, and the damage layer can increase the loss of the kinetic energy of the quartz crystal resonator, so that the resonance resistance of the quartz crystal resonator is increased. After the quartz resonator is manufactured, the frequency drift or the electrode infirm of the quartz resonator can be caused by the falling of quartz debris. Therefore, the quartz crystal must be uniformly etched to remove the damaged layer and improve the surface state of the wafer, so that electrical performance parameters such as the resistance and the aging rate of the resonator are greatly reduced, and the production yield of the quartz crystal resonator is improved.

The traditional method is to put quartz crystal in a crystal basket, then put the crystal basket in an etching liquid pool, shake the etching basket to etch the crystal, put the crystal basket in a cleaning pool after etching, shake and clean. All adopt manual operation's form among the prior art, hold the crystal basket with the hand, wash by manual rocking, use this kind of mode not only workman intensity of labour big, the cost of labor is high, and production efficiency is low moreover. In order to solve this problem, an apparatus is needed which can etch quartz crystals and also has a cleaning function.

Disclosure of Invention

The invention aims to provide equipment for quartz crystal corrosion and cleaning, which has the advantages of high working efficiency, low cost and corrosion and cleaning functions.

The technical scheme adopted by the invention is as follows: the device comprises a rotary module, wherein at least one corrosion tank and a plurality of cleaning tanks are sequentially arranged along one side of the conveying direction of the rotary module, a plurality of swinging soaking mechanisms matched with the corrosion tank and the cleaning tanks are arranged on the rotary module, each swinging soaking mechanism comprises a lifting device, a swinging mechanism is arranged on the action end of the lifting device, a connecting fork rod is arranged on the movable end of each swinging mechanism and positioned above the corrosion tank or the cleaning tank, a carrying frame is arranged on each connecting fork rod, and the carrying frame is matched with the corrosion tank or the cleaning tank.

Further, the wabbler mechanism is including setting up last driving motor and the mount of elevating gear, the mount is located driving motor's front side, the upper end of mount is provided with fixed diaphragm, the up end of fixed diaphragm is provided with the mounting, the below of fixed diaphragm be provided with mounting matched with cam, the cam rotates the setting and is in the lower extreme of mounting, be provided with the round wheel on driving motor's the output shaft, it has the connecting rod to articulate on the round wheel, the connecting rod is kept away from the one end of round wheel with the protruding section of cam is articulated mutually, the upper end of connecting the fork arm is fixed to be set up on the cam.

Further, the gyration module includes the bottom plate, be provided with left sprocket and right sprocket on the bottom plate, left side sprocket with the cooperation is provided with the driving chain on the right sprocket, it is fixed to set up to sway the soaking mechanism on the driving chain, left side sprocket with be provided with drive arrangement between the right sprocket, drive arrangement with left side sprocket with right sprocket transmission cooperation.

Further, the both sides of driving chain all are provided with swing guide, follow on the bottom plate the projection of driving chain is provided with a plurality of support columns, swing guide sets up on the support column, the last fixed a plurality of mounting panel that is provided with of driving chain, the mounting panel with swing guide cooperatees, it sets up to sway soaking mechanism on the mounting panel.

Furthermore, a plurality of rotating wheels are arranged on the rotary guide rail, and the rotating wheels are matched with the mounting plate.

Furthermore, the number of the corrosion tanks is two and the corrosion tanks are respectively arranged on the front side and the rear side of the rotary module.

Furthermore, the upper end of the cleaning pool is provided with four end-to-end water tanks in a surrounding manner, at least one water tank is provided with a water drainage hole, and the water drainage hole is communicated with a water drainage port arranged at the lower end of the cleaning pool.

Furthermore, a heater is arranged in the cleaning tank.

Furthermore, four protection plates are arranged on the corrosion tank, and matching openings are formed in the protection plates close to the swing soaking mechanism.

Furthermore, the frame surface of the carrying frame is of a screen mesh structure.

The invention has the beneficial effects that: the cleaning device comprises a rotary module, at least one corrosion tank and a plurality of cleaning tanks are sequentially arranged along one side of the conveying direction of the rotary module, a plurality of swinging soaking mechanisms matched with the corrosion tanks and the cleaning tanks are arranged on the rotary module, each swinging soaking mechanism comprises a lifting device, a swinging mechanism is arranged on the action end of each lifting device, a connecting fork rod is arranged on the movable end of each swinging mechanism and positioned above the corrosion tanks or the cleaning tanks, and a carrying frame is arranged on each connecting fork rod and matched with the corrosion tanks or the cleaning tanks. Compared with the prior art, the invention has the following characteristics: according to the quartz crystal cleaning device, the rotary module is arranged, the corrosion tank and the cleaning tank are arranged on one side of the rotary module, the swinging soaking mechanism is arranged on the rotary module and rotates along with the rotary module, the swinging soaking mechanism comprises a carrying frame for loading quartz crystals, the carrying frame is matched with the corrosion tank and the cleaning tank to realize corrosion and cleaning of the quartz crystals, and the corrosion tank and the cleaning tank are arranged in sequence, so that cleaning work can be carried out after the corrosion work is finished; therefore, the invention has the functions of corrosion and cleaning, realizes the production line type corrosion and cleaning work, has high working efficiency, can reduce the number of operators and saves the cost.

Drawings

FIG. 1 is a plan layout view from a first perspective of the present invention;

FIG. 2 is a plan view of the swing module and the swing mechanism of the present invention from a second perspective;

FIG. 3 is an enlarged view of portion A of FIG. 1;

FIG. 4 is a schematic view of the mating relationship of the cam and the circular wheel of the present invention;

FIG. 5 is a schematic plan view of a first perspective of the cleaning tank of the present invention;

FIG. 6 is a schematic perspective view of an etching bath according to the present invention;

fig. 7 is an enlarged view of a portion B in fig. 3.

Detailed Description

As shown in fig. 1 to 7, the embodiment of the present invention is: the device comprises a rotary module 1, wherein at least one corrosion pool 2 and a plurality of cleaning pools 3 are sequentially arranged on one side of the rotary module 1 along the conveying direction, a plurality of swinging soaking mechanisms 4 matched with the corrosion pools 2 and the cleaning pools 3 are arranged on the rotary module 1, each swinging soaking mechanism 4 comprises a lifting device 41, a swinging mechanism 42 is arranged on the action end of each lifting device 41, a connecting fork rod 43 is arranged on the movable end of each swinging mechanism 42, each connecting fork rod 43 is positioned above the corrosion pool 2 or the cleaning pool 3, a carrying frame 44 is arranged on each connecting fork rod 43, and each carrying frame 44 is matched with the corrosion pool 2 or the cleaning pool 3. The rotary module 1 makes rotary motion and is used for driving the swinging soaking mechanism 4 arranged on the structure to rotate; the corrosion tank 2 is used for corrosion of quartz crystals and loading corrosive liquid, and is a place for corrosion work, and the cleaning tank is used for loading cleaning liquid, and is a place for cleaning work; the swinging soaking mechanism 4 mainly comprises the lifting device 41, the swinging mechanism 42, the connecting fork rod 43 and the carrying frame 44, and the lifting device 41 is used for driving other mechanisms arranged on the action end of the lifting device to move up and down so as to realize the up-and-down washing of products; the swing mechanism 42 is used for driving the connecting fork rod 43 to swing back and forth so as to drive the carrying frame 44 to swing and clean, and the carrying frame 44 is used for containing quartz crystals. The working principle of the invention is as follows: placing the quartz crystal on a carrying frame 44 corresponding to the corrosion tank 2, then lowering the lifting device 41 until the carrying frame 44 is completely soaked by the corrosion liquid in the corrosion tank 2, then driving the carrying frame 44 to swing back and forth by the swing mechanism 42, and simultaneously carrying out reciprocating actions from bottom to top by the lifting device 41, wherein the carrying frame 44 does not expose the liquid level of the corrosion liquid when the carrying frame is upward each time, after the corrosion work is completed, the lifting device 41 takes the carrying frame 44 away from the corrosion tank 2, then the rotary module 1 acts to move the quartz crystal which is completed with the soaking work to the upper part of the first cleaning tank 3, then the new carrying frame 44 which is moved to the upper part of the corrosion tank 2 is placed with the quartz crystal, then the carrying frame 44 which is completed with the soaking work is matched with the cleaning tank 3 to carry out the cleaning work, the carrying frame 44 which is not performed with the soaking work and the corrosion tank 2 carry out the corrosion work, and, and the number of times of washing is identical to the number of the washing pools 3, when the object carrying frame 44 finishes washing in the last washing pool 3, the whole corrosion washing work is finished, the quartz crystal in the object carrying frame 44 can be taken out, and at the moment, the object carrying frame 44 rotates for a circle, namely, the object carrying frame 44 moves once again to reach the upper part of the corrosion pool 1, so that a new quartz crystal is put in immediately after the quartz crystal is taken out, and the cycle work is realized. Therefore, the invention has the functions of corrosion and cleaning, realizes the production line type corrosion and cleaning work, has high overall working efficiency and good economic benefit, can reduce the number of operators and is beneficial to reducing the production cost.

In this embodiment, the swing mechanism 42 includes a driving motor 421 and a fixing frame 422 disposed on the lifting device 41, the fixing frame 422 is located at the front side of the driving motor 421, a fixing transverse plate 423 is disposed at the upper end of the fixing frame 422, a fixing member 424 is disposed on the upper end surface of the fixing transverse plate 423, a cam 425 matched with the fixing member 424 is disposed below the fixing transverse plate 423, the cam 425 is rotatably disposed at the lower end of the fixing member 424, a circular wheel 426 is disposed on an output shaft of the driving motor 421, a connecting rod 427 is hinged to the circular wheel 426, one end of the connecting rod 427 away from the circular wheel 426 is hinged to a convex section of the cam 425, and the upper end of the connecting fork 43 is fixedly disposed on the cam 425. The driving motor 421 is a driving source, and is a power source of the swing motion, the fixing frame 422 has a fixing and supporting function and is used for installing the fixing transverse plate 423, the fixing member 424 is arranged on the upper end surface of the front end of the fixing transverse plate 423, the lower end of the fixing member 424 penetrates through the fixing transverse plate 423, the cam 425 is rotatably arranged at the lower end of the fixing member 424, the circle center of the cam 425 is collinear with the center of the fixing member 424, the cam 425 is limited by the fixing member 424 and cannot fall off from the fixing member 424, the circle center of the rotating wheel 426 is overlapped with the center line of the output shaft of the driving motor 421, one end of the connecting rod 427 is hinged on the upper surface of the rotating wheel 426 and is close to the outer edge, the other end of the connecting rod 427 is hinged on the convex section of the cam 425, and when the driving motor 421 rotates, the, the cam 425 is driven to move, because the connecting rod 427 is hinged with the convex section of the cam 425, the cam 425 does not rotate but does a back-and-forth curvilinear motion within a certain range, and the connecting fork rod 4 is fixedly arranged on the cam 425, so that the carrying frame 44 is driven to swing.

In this embodiment, the rotation module 1 includes a bottom plate 11, be provided with left sprocket 12 and right sprocket 13 on the bottom plate 11, left side sprocket 12 with the cooperation is provided with driving chain 14 on the right sprocket 13, it is fixed to set up to sway soaking mechanism 4 on the driving chain 14, left side sprocket 12 with be provided with drive arrangement 15 between the right sprocket 13, drive arrangement 15 with left side sprocket 12 with right sprocket 13 transmission fit. The left side sprocket 12 with the right side sprocket 13 all with bottom plate 11 is parallel and rotate the setting and be in on the bottom plate 11, left side sprocket 12 with right side sprocket 13 passes through drive chain 14 realizes the transmission cooperation, drive arrangement 15 can drive left side sprocket 12 with right side sprocket 13 rotates simultaneously, works as when drive arrangement 15 moves, left side sprocket 12 with right side sprocket 13 rotates simultaneously, drive chain 14 carries out rotary motion, swing soaks mechanism 4 and follows and carry out rotary motion.

In this embodiment, both sides of driving chain 14 all are provided with rotary guide 16, follow on the bottom plate 11 the projection of driving chain 14 is provided with a plurality of support columns 17, rotary guide 16 sets up on the support column 17, the last fixed a plurality of mounting panel 18 that is provided with of driving chain 14, mounting panel 18 with rotary guide 16 cooperatees, it sets up to sway soaking mechanism 4 on mounting panel 18. Be provided with a plurality of support column 17 on the bottom plate 11, support column 17 along the interval setting is carried out in the projection of slewing guide 16, mounting panel 18 is used for sway and soak the installation of mechanism 4, mounting panel 18 with slewing guide 16 cooperation sets up slewing guide 16 with mounting panel 18 can be used to undertake sway and soak the weight of mechanism 4, alleviate the pressure of driving chain 14 to guarantee the motion precision, reduce wearing and tearing, increase of service life.

In this embodiment, the turning guide rail 16 is provided with a plurality of turning wheels 19, and the turning wheels 19 are matched with the mounting plate 18. By providing the rotatable wheel 19 on the rotatable guide rail 16, the friction between the mounting plate 18 and the rotatable guide rail 16 is substantially reduced, and the degree of friction damage is reduced.

In this embodiment, the number of the etching baths 2 is two and the two etching baths are respectively disposed on the front side and the rear side of the rotation module 1. The number of the corrosion tanks 2 is two, and the corrosion tanks are respectively arranged at two sides of the transmission chain 14 which performs horizontal motion at two positions of the rotary module 1, that is, the rotary module 1 can realize the corrosion cleaning work of two quartz crystals of the carrying frame 44 every time one rotary cycle is completed.

In this embodiment, four end-to-end water tanks 31 are disposed around the upper end of the cleaning tank 3, at least one water tank 31 is provided with a water drainage hole 32, and the water drainage hole 32 is communicated with a water drainage port 33 disposed at the lower end of the cleaning tank 3. The four water tanks 31 are communicated in a shape of a Chinese character 'kou' and distributed on four sides of the cleaning pool 3, so that overflowing liquid can be drained away during cleaning, and each water tank 31 is provided with an inclination angle to guide water to the drain hole 7 and then drain the water through the drain hole 32.

In this embodiment, a heater 34 is provided in the cleaning tank 3. The warmer 34 is provided to heat the liquid in the washing tank 3 to enhance the washing effect.

In this embodiment, four protection plates 22 are disposed on the corrosion tank 2, and a matching opening 23 is disposed on the protection plate 22 close to the swing soaking mechanism 4. The protection plate 22 is used for preventing the corrosive liquid in the corrosion tank 2 from splashing and spraying at four times during working, so as to play a protection role, and the matching port 23 is used for providing an action space for the swinging soaking mechanism 4 and preventing movement interference.

In this embodiment, the frame surface of the carrier frame 44 is a screen structure. The object carrying frame 44 is of a screen mesh structure, and is densely provided with meshes, so that liquid can flow in and out conveniently, and quartz crystals can be corroded and cleaned conveniently.

While the embodiments of the present invention have been described in terms of practical embodiments, they are not to be construed as limiting the meaning of the present invention, and modifications of the embodiments and combinations with other embodiments will be apparent to those skilled in the art in light of the present description.

Claims

1. An apparatus for etching and cleaning quartz crystals, characterized by: comprises a rotary module (1), at least one corrosion tank (2) and a plurality of cleaning tanks (3) are sequentially arranged along one side of the conveying direction of the rotary module (1), a plurality of swinging soaking mechanisms (4) matched with the corrosion tank (2) and the cleaning tank (3) are arranged on the rotary module (1), the swinging soaking mechanism (4) comprises a lifting device (41), a swinging mechanism (42) is arranged on the action end of the lifting device (41), a connecting fork rod (43) is arranged at the movable end of the swinging mechanism (42), the connecting fork rod (43) is positioned above the corrosion tank (2) or the cleaning tank (3), the connecting fork rod (43) is provided with a loading frame (44), and the loading frame (44) is matched with the corrosion tank (2) or the cleaning tank (3).

2. The apparatus of claim 1, wherein: the swing mechanism (42) comprises a driving motor (421) arranged on the lifting device (41) and a fixed frame (422), the fixing frame (422) is positioned at the front side of the driving motor (421), a fixing transverse plate (423) is arranged at the upper end of the fixing frame (422), a fixing piece (424) is arranged on the upper end surface of the fixing transverse plate (423), a cam (425) matched with the fixing piece (424) is arranged below the fixing transverse plate (423), the cam (425) is rotationally arranged at the lower end of the fixed part (424), a round wheel (426) is arranged on the output shaft of the driving motor (421), a connecting rod (427) is hinged on the round wheel (426), one end of the connecting rod (427) far away from the round wheel (426) is hinged with the convex section of the cam (425), the upper end of the connecting fork rod (43) is fixedly arranged on the cam (425).

3. The apparatus of claim 1, wherein: gyration module (1) includes bottom plate (11), be provided with left sprocket (12) and right sprocket (13) on bottom plate (11), left side sprocket (12) with the cooperation is provided with driving chain (14) on right sprocket (13), it is fixed to set up to sway soaking mechanism (4) on driving chain (14), left side sprocket (12) with be provided with drive arrangement (15) between right sprocket (13), drive arrangement (15) with left side sprocket (12) with right sprocket (13) transmission cooperation.

4. The apparatus of claim 3, wherein: the both sides of driving chain (14) all are provided with rotary guide (16), follow on bottom plate (11) the projection of driving chain (14) is provided with a plurality of support columns (17), rotary guide (16) set up on support column (17), the fixed a plurality of mounting panel (18) that is provided with on driving chain (14), mounting panel (18) with rotary guide (16) cooperate, it sets up to sway soaking mechanism (4) on mounting panel (18).

5. The apparatus of claim 4, wherein: the rotary guide rail (16) is provided with a plurality of rotating wheels (19), and the rotating wheels (19) are matched with the mounting plate (18).

6. The apparatus of claim 1, wherein: the number of the corrosion tanks (2) is two and the corrosion tanks are respectively arranged on the front side and the rear side of the rotary module (1).

7. The apparatus of claim 1, wherein: the upper end of the cleaning pool (3) is provided with four end-to-end water tanks (31) in a surrounding manner, at least one water tank (31) is provided with a drain hole (32), and the drain hole (32) is communicated with a drain outlet (33) arranged at the lower end of the cleaning pool (3).

8. The apparatus of claim 1, wherein: a heater (34) is arranged in the cleaning pool (3).

9. The apparatus of claim 1, wherein: four protection plates (22) are arranged on the corrosion tank (2), and matching openings (23) are formed in the protection plates (22) close to the swing soaking mechanism (4).

10. The apparatus of claim 1, wherein: the frame surface of the carrying frame (44) is of a screen mesh structure.