CN115159855A - Full-automatic swing piece corrosion equipment - Google Patents

Full-automatic swing piece corrosion equipment Download PDF

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Publication number
CN115159855A
CN115159855A CN202210863184.9A CN202210863184A CN115159855A CN 115159855 A CN115159855 A CN 115159855A CN 202210863184 A CN202210863184 A CN 202210863184A CN 115159855 A CN115159855 A CN 115159855A
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CN
China
Prior art keywords
corrosion
water bath
pool
full
box body
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Granted
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CN202210863184.9A
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Chinese (zh)
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CN115159855B (en
Inventor
梁文科
陈邦力
阎文龙
方伟
彭华文
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Chongqing Huayu Electric Instrument Group Co Ltd
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Chongqing Huayu Electric Instrument Group Co Ltd
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Priority to CN202210863184.9A priority Critical patent/CN115159855B/en
Publication of CN115159855A publication Critical patent/CN115159855A/en
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Publication of CN115159855B publication Critical patent/CN115159855B/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention discloses full-automatic pendulous reed corrosion equipment, which comprises a closed box body, wherein the lower part of the box body is provided with a cleaning pool and a corrosion pool, and the corrosion pool is provided with a heating device; a horizontal guide rail and a driving motor are arranged at the upper part of the box body, a sliding block corresponding to the positions of the cleaning pool and the corrosion pool is arranged on the guide rail, and the driving motor can drive the sliding block to move between the cleaning pool and the corrosion pool along the guide rail; the mounting frame is connected with the sliding block through a lifting mechanism and a swinging mechanism, the lifting mechanism can drive the mounting frame to vertically lift, and the swinging mechanism can drive the mounting frame to swing in a vertical plane; the heating device, the driving motor, the lifting mechanism and the swinging mechanism are all connected with the electric control system. The invention can effectively improve the working efficiency, improve the processing precision and the qualification rate of the pendulous reed and reduce the harm of harmful substances to human bodies and the environment as much as possible.

Description

Full-automatic swing sheet corrosion equipment
Technical Field
The invention relates to the technical field of quartz pendulous reed processing, in particular to full-automatic pendulous reed corrosion equipment.
Background
The corrosion of the pendulums is an important process for processing the pendulums, manual operation is mostly adopted at present, the operation process is complicated, the working environment is severe, the efficiency is low, errors are easy to occur, and a large amount of pendulums are easily scrapped. The heating temperature of the corrosive solution is uneven, the temperature range fluctuates greatly and the like, so that the precision of the pendulum piece corrosion is ultra-poor or inconsistent, the manual corrosion and cleaning interconversion is more time-consuming and dangerous, and the harm to the body caused by toxic and harmful gases is great. Finally, the generated waste water and waste gas can not be effectively treated, thereby polluting the environment.
Disclosure of Invention
Aiming at the defects of the prior art, the technical problems to be solved by the invention are as follows: the full-automatic swinging piece corrosion equipment is provided, the working efficiency can be effectively improved, the swinging piece processing precision and the qualified rate are improved, and the harm of harmful substances to human bodies and the environment can be reduced as far as possible.
In order to solve the technical problems, the invention adopts the following technical scheme:
a full-automatic swing sheet corrosion device comprises a closed box body, wherein a box door is arranged in the middle of the front side of the box body; a cleaning pool and a corrosion pool are transversely arranged in parallel at the lower part of the box body, and a heating device is arranged outside the corrosion pool; a horizontal guide rail and a driving motor are arranged at the upper part of the box body, the horizontal guide rail is positioned above the cleaning pool and the corrosion pool, a sliding block corresponding to the positions of the cleaning pool and the corrosion pool is arranged on the guide rail, and the driving motor can drive the sliding block to move between the cleaning pool and the corrosion pool along the guide rail; an installation frame is arranged below the sliding block, the installation frame is connected with the sliding block through a lifting mechanism and a swinging mechanism, the lifting mechanism can drive the installation frame to lift vertically, and the swinging mechanism can drive the installation frame to swing in a vertical plane;
and an electric control cabinet is arranged on one side of the box body, an electric control system is arranged in the electric control cabinet, and the heating device, the driving motor, the lifting mechanism and the swinging mechanism are all connected with the electric control system.
Preferably, the heating device comprises a water bath, the corrosion pool is sleeved in the water bath, an electric heater is arranged in the water bath, and the electric heater is connected with an electric control system.
Preferably, a circulating stirring system communicated with the water bath is arranged in the water bath and comprises a circulating water pump, and the water inlet end and the water outlet end of the circulating water pump are communicated with the water bath through pipelines.
Preferably, a water bath cooler is further arranged at the water outlet end of the circulating water pump, the water inlet end of the water bath cooler is connected with the water outlet end of the circulating water pump, and the water outlet end of the water bath cooler is communicated with the water bath pool.
Preferably, the driving motor is connected with a screw rod, the screw rod is arranged in parallel with the guide rail, the sliding block is connected with the screw rod in a threaded fit manner, and the driving motor drives the sliding block to move along the guide rail through the rotation of the driving screw rod.
And as optimization, the washing device further comprises a wastewater pool, and the washing pool and the water bath pool are communicated with the wastewater pool through pipelines.
As optimization, the lifting mechanism adopts a linear motor, and a lifting rod is formed by vertically arranging a motor shaft.
Preferably, the swing mechanism comprises a cam arranged on the sliding block, the lifting mechanism is connected with the cam in a matching mode, the cam is connected with a swing motor arranged on the sliding block, and when the swing motor drives the cam to rotate, the lifting mechanism can be driven to swing in a vertical plane.
As an optimization, an exhaust pipe is arranged at the top of the box body, an air inlet end of the exhaust pipe is communicated with the interior of the box body, a filtering device is arranged at an air outlet end, and an air outlet end of the filtering device is connected with a row of fans.
Compared with the prior art, the application has the following beneficial effects:
according to the invention, the installation frame capable of automatically moving between the corrosion tank and the cleaning tank is arranged, the workpiece can be placed in the solution through the lifting mechanism by the installation frame, and the workpiece swings up and down at a certain frequency through the swinging mechanism during corrosion, so that the corrosion uniformity of the swinging piece is ensured; and the uniformity of the temperature of the etching solution and the stability of temperature control during heating are improved in a water bath heating mode, so that the influence of the temperature on the etching rate is further improved. In addition, aiming at the conditions of long corrosion time, easy forgetting, easy occurrence of unattended monitoring, occurrence of over-tolerance of corrosion time and the like, the invention sets an electric control system for the equipment, and timely reminds an operator to lift a workpiece out of the surface of the solution by time control, electric bell alarm and the like to enter the next process. The invention also aims at the problem that the original corrosion box works in an open environment and has great harm to the environment and human bodies, a completely closed box body is designed and can be arranged on an operation panel of an electric control system, waste gas is effectively treated by a high-power exhaust system and a filtering device after corrosion is finished and then is discharged, and meanwhile, a waste water treatment tank is arranged at a drainage position for treatment and then is discharged.
Drawings
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a side view of the present invention;
in the figure, 1 a box door, 2 a mounting frame, 3 a corrosion tank, 4 an electric heater, 5 a temperature sensor, 6 a water bath cooler, 7 an exhaust fan, 8 a filtering device, 9 a swing motor, 10 a lifting mechanism, 11 an alarm lamp electric bell, 12 a driving motor, 13 a screw rod, 14 a slide block, 15 a guide rail, 16 a softened water switch, 17 a wastewater tank, 18 a cleaning tank, 19 an electric control cabinet, 20 a lighting lamp, 21 a circulating stirring system, 22 a water bath tank and 23 a cam.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
In the specific implementation: with reference to figures 1-2 of the drawings,
the utility model provides a full-automatic pendulum piece corrosion equipment, includes a sealed box, is equipped with in the lower part of box and washs pond 18 and corruption pond 3 be equipped with heating device on the corruption pond 3, be equipped with chamber door 1 in the box position corresponding to corruption pond 3 for add the corrosive liquids in to corroding pond 3. Heating device includes water bath 22, 3 covers in the water bath 22 of corruption pond 3 be equipped with electric heater 4 in the water bath 22 be equipped with agitating unit in the water bath 22. The water bath 22 and the cleaning tank 18 are both connected with an external softened water delivery pipe, and a softened water switch 16 is arranged on the delivery pipe. In this embodiment, the stirring device includes a circulation stirring system 21 communicated with the water bath 22, the circulation stirring system 21 includes a circulation water pump, and a water inlet end and a water outlet end of the circulation water pump are both communicated with the water bath 22. And the water outlet end of the circulating water pump is also provided with a water bath cooler 6, the water inlet end of the water bath cooler 6 is connected with the water outlet end of the circulating water pump, and the water outlet end of the water bath cooler 6 is communicated with the water bath 22. The water bath 22 is also provided with a temperature sensor 5, the temperature sensor 5 is connected with an electric control system, so as to feed back a temperature signal to the electric control system, and the electric control system controls the working states of the electric heater 4 and the water bath cooler 6 according to the temperature signal, so as to better regulate the heating temperature of the water bath 22, wherein the electric control system is integrated in an electric control cabinet 19 outside the box body.
The upper part of the box body is provided with a horizontal guide rail 15 and a driving motor 12, the guide rail 15 is provided with a sliding block 14 corresponding to the positions of the cleaning pool 18 and the corrosion pool 3, the driving motor 12 can drive the sliding block 14 to move between the cleaning pool 18 and the corrosion pool 3 along the guide rail 15, specifically, the driving motor 12 is connected with the sliding block 14 through a screw rod 13, and the driving motor 12 drives the sliding block 14 to move along the guide rail 15 through the rotation of the driving screw rod 13.
Be equipped with mounting bracket 2 on slider 14 for the quartz pendulum piece that processing is waited to fixed mounting, mounting bracket 2 is connected with slider 14 through an elevating system 10 and swing mechanism, elevating system 10 can drive mounting bracket 2 along vertical lift, swing mechanism can drive mounting bracket 2 along vertical swing with predetermineeing the range. Specifically, the lifting mechanism 10 adopts a linear motor, and a motor shaft of the linear motor is vertically arranged to form a lifting rod. Swing mechanism is including setting up cam 23 or the eccentric wheel mechanism on slider 14, elevating system's upper end is connected with this cam 23 cooperation, and this cam 23 is connected with swing motor 9 (or gear motor etc.) of setting on slider 14, and when swing motor 9 drive cam 23 rotated, can drive the lifter and swing in vertical plane to drive 2 vertical oscillations of mounting bracket, make the contact of pendulum piece on the mounting bracket 2 and corrosive liquid more even.
And the wastewater treatment device also comprises a wastewater tank 17, wherein the wastewater tank 17 is communicated with the cleaning tank 18 and the water bath 22, and a valve is arranged on a connecting pipeline so as to conveniently treat wastewater.
The top of box is equipped with exhaust column and light 20, the air inlet end of exhaust column communicates with each other with the box is inside, and the air-out end is equipped with filter equipment 8, filter equipment 8's air-out end is connected with a row of fan 7.
The equipment provided by the invention mainly comprises a closed box body for providing an operating environment, a lifting mounting frame 2 with a motor is used for hanging a workpiece, a special mechanical eccentric structure is used for adjusting the vertical swing amplitude of the workpiece, and the vertical movement frequency of the workpiece is controlled through a rotating frequency converter of a reducer motor, so that the corrosion precision is ensured. And then the temperature of the chemical corrosive liquid is controlled by a high-precision digital temperature controller in a water bath indirect heating mode, and a circulating stirring system 21 is arranged in a water bath 22 to ensure the heating uniformity of the water bath and improve the consistency and precision of corrosion. A sliding guide rail 15 is arranged on the mounting frame 2 and is driven by a motor to move between the cleaning tank and the corrosion tank 3. When the corrosion and cleaning are carried out, a time controller is arranged, when the time reaches, an alarm electric bell automatically gives an alarm, and an operator can start the next procedure in time. Finally, the waste water and the waste gas are filtered and discharged, so that pollution is prevented.
The specific working process of the invention is as follows: and opening a softened water inlet switch to enable softened water to reach the water level of the cleaning pool 18 and the water bath pool 22, and stopping water injection. Pouring the prepared corrosive solution into the corrosion tank 3, installing the workpiece to be corroded on the mounting frame 2, and quickly closing the box door 1 to ensure that the corrosion process is completely carried out in a closed space. The main power switch of the electric control cabinet 19 is turned on, the illuminating lamp 20 is normally on, the heating switch and the circulating water pump switch of the electric control cabinet 19 are turned on simultaneously, the stainless steel electric heater 4 starts to work to heat softened water in the water bath 22, and the circulating stirring system 21 starts to work to enable water to flow circularly and heat uniformly. The temperature sensor 5 automatically samples and monitors the environmental temperature in the water bath 22, and when the environmental temperature is higher than a set value, the stainless steel water bath cooler 6 is automatically started at a temperature control STlal alarm point, and when the environmental temperature is lower than the set temperature, the stainless steel water bath cooler is automatically closed. After the heat preservation time is reached, setting a swing speed regulation parameter, and adjusting the swing distance of the workpiece and controlling the swing frequency of the workpiece by using a cam 23 (a mechanical eccentric cam structure) and a swing motor 9 (a reducer motor with a frequency converter). The contact between the workpiece and the acid liquor is more sufficient and uniform when the workpiece is corroded, and the corrosion effect is better. Setting corrosion time, pressing a lifting start key, starting manufacture, timing a timing relay, timing, and after the time is up, alarming by an alarm lamp bell 11, starting a lifting mechanism 10 by an operator to lift a workpiece out of the surface of a solution, entering the next cleaning workpiece, driving a screw rod 13 to rotate by using a driving motor 12, fixing a slide block 14 connected with the screw rod 13 on a guide rail 15, thereby realizing left-right back-and-forth movement, moving the workpiece to a cleaning pool 18, pressing a stop button, putting the mounting frame 2 into the cleaning pool 18 for cleaning in the same way, and adjusting the cleaning times and frequency as required. And finally, the exhaust fan and the wastewater tank 17 are opened simultaneously, the waste gas is treated by the filtering device 8, and the wastewater is discharged into the wastewater tank 17 for treatment, so that the influence of toxic and harmful substances on the environment is effectively reduced.
According to the invention, the installation frame capable of automatically moving between the corrosion tank and the cleaning tank is arranged, the workpiece can be placed in the solution through the lifting mechanism by the installation frame, and the workpiece swings up and down at a certain frequency through the swinging mechanism during corrosion, so that the corrosion uniformity of the swinging piece is ensured; and the uniformity of the temperature of the etching solution and the stability of temperature control during heating are improved in a water bath heating mode, so that the influence of the temperature on the etching rate is further improved. In addition, aiming at the conditions of long corrosion time, easy forgetting, easy occurrence of unsupervised monitoring, occurrence of over-poor corrosion time and the like, the invention sets an electric control system for the equipment, and timely reminds operators to lift workpieces out of the surface of the solution by time control, electric bell alarm and other modes to enter the next process. The invention also aims at the problem that the original corrosion box works in an open environment and has great harm to the environment and human bodies, a completely closed box body is designed and can be carried out on an operation panel of an electric control system, waste gas is effectively treated and discharged through a high-power exhaust system and a filtering device after corrosion is finished, and meanwhile, a waste water treatment tank is arranged at a drainage position for treatment and discharge.
In summary, in the present invention, the first and second electrodes,
1. realize corroding the automatic switch-over in pond and wasing the pond, avoid the circumstances such as inefficiency, fragile, operation danger that manual operation caused.
2. The up-and-down motion amplitude of the workpiece is adjusted by utilizing the mechanical eccentric structure and the reducer motor, and the up-and-down motion frequency of the mounting frame is controlled by the frequency converter, so that the corrosion precision of the pendulous reed is ensured. Meanwhile, the temperature of the chemical corrosive liquid is controlled by indirect heating of the water bath, a circulating stirring system is arranged, the uniformity of the temperature of the water bath is guaranteed, a digital temperature controller is adopted, the temperature precision is guaranteed within the range of +/-1 ℃, the corrosion precision and consistency are better improved, and the corrosion size precision is controlled within +/-0.001 mm.
3. The device is provided with a digital time controller and an electric bell for timely alarming and reminding, and can remind an operator to lift a workpiece out of the surface of the solution in time.
4. The equipment is provided with a waste gas and waste water filtering system, so that the harm to the environment and human bodies is avoided.
5. PVC panel that adopts in the box scribbles anti-corrosion coating, bonds through special gluey and weld forming, makes equipment more durable, installs the sealed chamber door of taking the anticorrosion to use, and airtight space of formation that can be good, environmental protection more.
Although embodiments of the present invention have been shown and described, it will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents, and thus the embodiments of the present invention are to be considered as illustrative examples of the invention, and not restrictive in any sense.

Claims (9)

1. The full-automatic swing piece corrosion equipment is characterized by comprising a closed box body, wherein the middle part of the front side of the box body is provided with a box door; a cleaning pool and a corrosion pool are transversely arranged in parallel at the lower part of the box body, and a heating device is arranged outside the corrosion pool; a horizontal guide rail and a driving motor are arranged at the upper part of the box body, the horizontal guide rail is positioned above the cleaning pool and the corrosion pool, a sliding block corresponding to the positions of the cleaning pool and the corrosion pool is arranged on the guide rail, and the driving motor can drive the sliding block to move between the cleaning pool and the corrosion pool along the guide rail; an installation frame is arranged below the sliding block, the installation frame is connected with the sliding block through a lifting mechanism and a swinging mechanism, the lifting mechanism can drive the installation frame to vertically lift, and the swinging mechanism can drive the installation frame to swing in a vertical plane;
and an electric control cabinet is arranged on one side of the box body, an electric control system is arranged in the electric control cabinet, and the heating device, the driving motor, the lifting mechanism and the swinging mechanism are all connected with the electric control system.
2. The full-automatic swing piece corrosion device according to claim 1, wherein the heating device comprises a water bath, the corrosion bath is sleeved in the water bath, an electric heater is arranged in the water bath, and the electric heater is connected with an electric control system.
3. The full-automatic oscillating piece corrosion equipment according to claim 2, wherein a circulating stirring system communicated with the water bath is arranged in the water bath, the circulating stirring system comprises a circulating water pump, and a water inlet end and a water outlet end of the circulating water pump are both communicated with the water bath through pipelines.
4. The full-automatic oscillating piece corrosion device according to claim 3, wherein a water bath cooler is further arranged at the water outlet end of the circulating water pump, the water inlet end of the water bath cooler is connected with the water outlet end of the circulating water pump, and the water outlet end of the water bath cooler is communicated with the water bath.
5. The full-automatic pendulum slice etching equipment of any one of claims 1 to 4, wherein the driving motor is connected with a lead screw, the lead screw is arranged in parallel with the guide rail, the slide block is connected with the lead screw in a threaded fit manner, and the driving motor drives the slide block to move along the guide rail by driving the lead screw to rotate.
6. The full-automatic pendulum slice corrosion apparatus according to claim 5, further comprising a wastewater basin, wherein the cleaning basin and the water bath are communicated with the wastewater basin through a pipeline.
7. The full-automatic wobble plate corrosion apparatus according to claim 5, wherein the lifting mechanism is a linear motor, and a motor shaft is vertically arranged to form a lifting rod.
8. The full-automatic oscillating piece corrosion device according to claim 7, wherein the oscillating mechanism comprises a cam arranged on the slide block, the lifting mechanism is connected with the cam in a matching way, the cam is connected with an oscillating motor arranged on the slide block, and when the oscillating motor drives the cam to rotate, the lifting mechanism can be driven to oscillate in a vertical plane.
9. The full-automatic pendulum slice corrosion equipment of any one of claims 6-8, wherein an exhaust pipe is arranged at the top of the box body, an air inlet end of the exhaust pipe is communicated with the inside of the box body, an air outlet end of the exhaust pipe is provided with a filtering device, and an air outlet end of the filtering device is connected with a row of fans.
CN202210863184.9A 2022-07-22 2022-07-22 Full-automatic swing piece corrosion equipment Active CN115159855B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210863184.9A CN115159855B (en) 2022-07-22 2022-07-22 Full-automatic swing piece corrosion equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210863184.9A CN115159855B (en) 2022-07-22 2022-07-22 Full-automatic swing piece corrosion equipment

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CN115159855A true CN115159855A (en) 2022-10-11
CN115159855B CN115159855B (en) 2023-10-27

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Citations (17)

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Publication number Priority date Publication date Assignee Title
JP2004335669A (en) * 2003-05-06 2004-11-25 Sumitomo Electric Ind Ltd Etching equipment
KR100780062B1 (en) * 2006-05-24 2007-11-28 명지대학교 산학협력단 Automatic etching apparatus for bottle
CN201272743Y (en) * 2008-05-28 2009-07-15 深圳泰美克晶体技术有限公司 Quartz wafer etching machine
CN202038992U (en) * 2011-04-28 2011-11-16 国电宁夏太阳能有限公司 Graphite piece corroding and cleaning machine
CN202159647U (en) * 2011-06-13 2012-03-07 湖北致源电子股份有限公司 Wafer etching device
CN102489226A (en) * 2011-11-23 2012-06-13 清华大学 Sol boiling system
CN102910830A (en) * 2012-11-15 2013-02-06 徐培炎 Quartz crystal wafer corrosion machine
CN104445969A (en) * 2014-12-31 2015-03-25 成都工投电子设备有限公司 Spray etching machine
CN106186712A (en) * 2016-07-14 2016-12-07 成都工投电子设备有限公司 Top-jet-type spray etching machine
CN208776585U (en) * 2019-02-27 2019-04-23 西南科技大学 A kind of piezoelectric quartz frequency chip etching machine based on QMEMS technique
CN208810110U (en) * 2018-09-29 2019-05-03 上海昌吉地质仪器有限公司 A kind of realization device of multifunctional circulation water-bath
CN110952146A (en) * 2019-12-19 2020-04-03 珠海东锦石英科技有限公司 Be used for quartz crystal to corrode and abluent equipment
CN210304821U (en) * 2019-05-22 2020-04-14 苏州施密科微电子设备有限公司 Wafer corrosion polishing mechanism
CN211620666U (en) * 2019-12-19 2020-10-02 珠海东锦石英科技有限公司 Be used for quartz crystal to corrode and abluent equipment
CN213824897U (en) * 2020-11-04 2021-07-30 遂成药业股份有限公司 Intelligent constant-temperature water bath device
CN213977960U (en) * 2020-06-24 2021-08-17 常州光晶光电科技有限公司 Corrosion machine for corroding amorphous bodies on surface of substrate of crystal oscillator plate
US20230038976A1 (en) * 2020-07-30 2023-02-09 The 13Th Research Institute Of China Electronics Technology Group Corporation Rocking type seed crystal surface corrosion, cleaning and drying device and process method

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004335669A (en) * 2003-05-06 2004-11-25 Sumitomo Electric Ind Ltd Etching equipment
KR100780062B1 (en) * 2006-05-24 2007-11-28 명지대학교 산학협력단 Automatic etching apparatus for bottle
CN201272743Y (en) * 2008-05-28 2009-07-15 深圳泰美克晶体技术有限公司 Quartz wafer etching machine
CN202038992U (en) * 2011-04-28 2011-11-16 国电宁夏太阳能有限公司 Graphite piece corroding and cleaning machine
CN202159647U (en) * 2011-06-13 2012-03-07 湖北致源电子股份有限公司 Wafer etching device
CN102489226A (en) * 2011-11-23 2012-06-13 清华大学 Sol boiling system
CN102910830A (en) * 2012-11-15 2013-02-06 徐培炎 Quartz crystal wafer corrosion machine
CN104445969A (en) * 2014-12-31 2015-03-25 成都工投电子设备有限公司 Spray etching machine
CN106186712A (en) * 2016-07-14 2016-12-07 成都工投电子设备有限公司 Top-jet-type spray etching machine
CN208810110U (en) * 2018-09-29 2019-05-03 上海昌吉地质仪器有限公司 A kind of realization device of multifunctional circulation water-bath
CN208776585U (en) * 2019-02-27 2019-04-23 西南科技大学 A kind of piezoelectric quartz frequency chip etching machine based on QMEMS technique
CN210304821U (en) * 2019-05-22 2020-04-14 苏州施密科微电子设备有限公司 Wafer corrosion polishing mechanism
CN110952146A (en) * 2019-12-19 2020-04-03 珠海东锦石英科技有限公司 Be used for quartz crystal to corrode and abluent equipment
CN211620666U (en) * 2019-12-19 2020-10-02 珠海东锦石英科技有限公司 Be used for quartz crystal to corrode and abluent equipment
CN213977960U (en) * 2020-06-24 2021-08-17 常州光晶光电科技有限公司 Corrosion machine for corroding amorphous bodies on surface of substrate of crystal oscillator plate
US20230038976A1 (en) * 2020-07-30 2023-02-09 The 13Th Research Institute Of China Electronics Technology Group Corporation Rocking type seed crystal surface corrosion, cleaning and drying device and process method
CN213824897U (en) * 2020-11-04 2021-07-30 遂成药业股份有限公司 Intelligent constant-temperature water bath device

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