CN110952146B - Equipment for corrosion and cleaning of quartz crystal - Google Patents
Equipment for corrosion and cleaning of quartz crystal Download PDFInfo
- Publication number
- CN110952146B CN110952146B CN201911315806.9A CN201911315806A CN110952146B CN 110952146 B CN110952146 B CN 110952146B CN 201911315806 A CN201911315806 A CN 201911315806A CN 110952146 B CN110952146 B CN 110952146B
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- Prior art keywords
- cleaning
- corrosion
- etching
- pool
- matched
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 title claims abstract description 69
- 230000007797 corrosion Effects 0.000 title claims abstract description 49
- 238000005260 corrosion Methods 0.000 title claims abstract description 49
- 239000013078 crystal Substances 0.000 title claims abstract description 41
- 239000010453 quartz Substances 0.000 title claims abstract description 41
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 230000007246 mechanism Effects 0.000 claims abstract description 45
- 238000002791 soaking Methods 0.000 claims abstract description 30
- 238000005530 etching Methods 0.000 claims abstract description 28
- 230000009471 action Effects 0.000 claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/08—Etching
- C30B33/10—Etching in solutions or melts
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/18—Quartz
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Liquid Crystal (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention aims to provide equipment for etching and cleaning quartz crystals, which has the advantages of high working efficiency, lower cost and etching and cleaning functions. The invention comprises a rotary module, at least one corrosion pool and a plurality of cleaning pools are sequentially arranged on one side of the conveying direction of the rotary module, a plurality of swinging soaking mechanisms matched with the corrosion pool and the cleaning pools are arranged on the rotary module, each swinging soaking mechanism comprises a lifting device, a swinging mechanism is arranged at the action end of each lifting device, a connecting fork rod is arranged at the movable end of each swinging mechanism, the connecting fork rods are positioned above the corrosion pool or the cleaning pool, and a carrying frame is arranged on each connecting fork rod and is matched with the corrosion pool or the cleaning pool. The invention is applied to the technical field of production equipment.
Description
Technical Field
The invention is applied to the technical field of production equipment, and particularly relates to equipment for corrosion and cleaning of quartz crystals.
Background
In the production process of quartz crystals in the quartz resonator, after the quartz crystals are subjected to cutting, grinding and other working procedures, a damage layer with a certain thickness is generated on the surface of the quartz crystals, and the damage layer can increase the loss of the energy of the quartz crystal resonator, so that the resonance resistance of the quartz crystal resonator is increased. After the quartz resonator is manufactured, the problems of frequency drift or unstable electrodes of the quartz resonator and the like can be caused by falling of quartz scraps. Therefore, the quartz crystal must be uniformly corroded to remove the damaged layer, improve the surface state of the wafer, greatly reduce the electrical performance parameters such as the resistance and the aging rate of the resonator, and improve the production qualification rate of the quartz crystal resonator.
The traditional method is that quartz crystals are placed in a crystal basket, then placed in a corrosive liquid tank, the crystal is corroded by shaking the corrosive basket, and then the crystal basket is placed in a cleaning tank after corrosion, and is shaken for cleaning. In the prior art, the crystal basket is manually operated, and is manually shaken to be cleaned, so that the labor intensity of workers is high, the labor cost is high, and the production efficiency is low. In order to solve this problem, an apparatus having both the function of etching the quartz crystal and the function of cleaning is required.
Disclosure of Invention
The invention aims to solve the technical problem of providing equipment for corrosion and cleaning of quartz crystals, which has the advantages of high working efficiency, lower cost and corrosion and cleaning functions.
The technical scheme adopted by the invention is as follows: the device comprises a rotary module, wherein at least one corrosion pool and a plurality of cleaning pools are sequentially arranged on one side of the conveying direction of the rotary module, a plurality of swinging soaking mechanisms matched with the corrosion pool and the cleaning pools are arranged on the rotary module, each swinging soaking mechanism comprises a lifting device, a swinging mechanism is arranged at the action end of each lifting device, a connecting fork rod is arranged at the movable end of each swinging mechanism, each connecting fork rod is positioned above one of the corrosion pool and the cleaning pool, and a carrying frame is arranged on each connecting fork rod and matched with one of the corrosion pool and the cleaning pool;
The swing mechanism comprises a driving motor and a fixing frame which are arranged on the lifting device, the fixing frame is located at the front side of the driving motor, a fixed transverse plate is arranged at the upper end of the fixing frame, a fixing piece is arranged on the upper end face of the fixed transverse plate, a cam matched with the fixing piece is arranged below the fixed transverse plate, the cam is rotatably arranged at the lower end of the fixing piece, a round wheel is arranged on an output shaft of the driving motor, a connecting rod is hinged to the round wheel, one end of the connecting rod, which is far away from the round wheel, is hinged to a convex section of the cam, and the upper end of the connecting fork rod is fixedly arranged on the cam.
Further, the gyration module includes the bottom plate, be provided with left sprocket and right sprocket on the bottom plate, left sprocket with the cooperation is provided with the drive chain on the right sprocket, swing soaking mechanism is fixed to be set up on the drive chain, left sprocket with be provided with drive arrangement between the right sprocket, drive arrangement with left sprocket with right sprocket transmission cooperation.
Further, both sides of the transmission chain are provided with rotary guide rails, a plurality of support columns are arranged on the bottom plate along the projection of the transmission chain, the rotary guide rails are arranged on the support columns, a plurality of mounting plates are fixedly arranged on the transmission chain, the mounting plates are matched with the rotary guide rails, and the swinging soaking mechanism is arranged on the mounting plates.
Further, a plurality of rotating wheels are arranged on the rotary guide rail and are matched with the mounting plate.
Further, the number of the corrosion tanks is two, and the corrosion tanks are respectively arranged at the front side and the rear side of the rotary module.
Further, the upper end of the cleaning tank is provided with four end-to-end water tanks in a surrounding mode, at least one water tank is provided with a drain hole, and the drain hole is communicated with a drain outlet arranged at the lower end of the cleaning tank.
Further, a heater is arranged in the cleaning tank.
Further, four protection plates are arranged on the corrosion pool, and matching ports are arranged on the protection plates close to the swing soaking mechanism.
Further, the frame surface of the carrying frame is of a screen structure.
The beneficial effects of the invention are as follows: because the invention adopts the rotary module, at least one corrosion pool and a plurality of cleaning pools are sequentially arranged along one side of the conveying direction of the rotary module, a plurality of swinging soaking mechanisms matched with the corrosion pool and the cleaning pools are arranged on the rotary module, each swinging soaking mechanism comprises a lifting device, a swinging mechanism is arranged at the action end of the lifting device, a connecting fork rod is arranged at the movable end of the swinging mechanism, the connecting fork rod is positioned above the corrosion pool or the cleaning pool, and a carrying frame is arranged on the connecting fork rod and is matched with the corrosion pool or the cleaning pool. Compared with the prior art, the invention has the following characteristics: according to the invention, the rotary module is arranged, the corrosion pool and the cleaning pool are arranged on one side of the rotary module, the swinging soaking mechanism is arranged on the rotary module and moves in a rotary way along with the rotary module, the swinging soaking mechanism comprises the object carrying frame for carrying the quartz crystal, the object carrying frame is matched with the corrosion pool and the cleaning pool to realize corrosion and cleaning of the quartz crystal, and the corrosion pool and the cleaning pool are arranged in sequence, so that the cleaning work can be performed after the corrosion work is completed; therefore, the invention has the functions of corrosion and cleaning, realizes the pipelined corrosion and cleaning work, has high working efficiency, can reduce the number of operators and saves the cost.
Drawings
FIG. 1 is a plan layout view of a first view angle of the present invention;
FIG. 2 is a plan view of the swing mechanism of the present invention from a second view angle;
FIG. 3 is an enlarged view of portion A of FIG. 1;
FIG. 4 is a schematic illustration of the mating relationship of the cam and circular wheel of the present invention;
FIG. 5 is a schematic plan view of a cleaning tank of the present invention at a first view;
FIG. 6 is a schematic perspective view of the corrosion cell of the present invention;
Fig. 7 is an enlarged view of a portion B in fig. 3.
Detailed Description
As shown in fig. 1 to 7, the specific embodiments of the present invention are: the invention comprises a rotary module 1, at least one corrosion pool 2 and a plurality of cleaning pools 3 are sequentially arranged along one side of the conveying direction of the rotary module 1, a plurality of swinging soaking mechanisms 4 matched with the corrosion pool 2 and the cleaning pools 3 are arranged on the rotary module 1, each swinging soaking mechanism 4 comprises a lifting device 41, a swinging mechanism 42 is arranged on the action end of the lifting device 41, a connecting fork rod 43 is arranged on the action end of the swinging mechanism 42, the connecting fork rod 43 is positioned above the corrosion pool 2 or the cleaning pools 3, a carrying frame 44 is arranged on the connecting fork rod 43, and the carrying frame 44 is matched with the corrosion pool 2 or the cleaning pools 3. The rotary module 1 performs rotary motion and is used for driving the swing soaking mechanism 4 arranged on the structure of the rotary module to perform rotary motion; the corrosion pool 2 is used for corroding quartz crystals and loading corrosion liquid, is used as a corrosion work place, and the cleaning pool is used for loading cleaning liquid, is used as a cleaning work place; the swing soaking mechanism 4 mainly comprises the lifting device 41, the swing mechanism 42, the connecting fork rod 43 and the carrying frame 44, wherein the lifting device 41 is used for driving other mechanisms arranged on the action end of the lifting device to perform up-and-down actions so as to realize up-and-down flushing of products; the swinging mechanism 42 is used for driving the connecting fork rod 43 to swing back and forth so as to drive the carrying frame 44 to swing and clean, and the carrying frame 44 is used for containing quartz crystals. The working principle of the invention is as follows: the quartz crystal is placed on the carrying frame 44 corresponding to the etching tank 2, then the lifting device 41 descends until the carrying frame 44 is completely soaked by etching liquid in the etching tank 2, then the swinging mechanism 42 drives the carrying frame 44 to swing back and forth and simultaneously the lifting device 41 performs the up and down reciprocating motion, the carrying frame 44 does not expose the liquid level of the etching liquid every time upwards, when the etching operation is completed, the lifting device 41 brings the carrying frame 44 away from the etching tank 2, then the rotary module 1 moves the quartz crystal with the soaking operation to the position above the first cleaning tank 3, then the quartz crystal is placed on the new carrying frame 44 which is moved to the position above the etching tank 2, then the carrying frame 44 with the soaking operation is matched with the cleaning tank 3, the carrying frame 44 without the soaking operation and the etching tank 2 perform the etching operation, the whole working procedure is like the above-mentioned circulation, and the number of times is consistent with the number of the cleaning tanks 3, when the carrying frame 44 completes the cleaning operation in the last cleaning tank 3, the whole etching operation is completed, the quartz crystal in the carrying frame 44 can be taken out, and the quartz crystal in the carrying frame 44 can be immediately taken out after the quartz crystal is moved to the position above the etching tank 2, and the quartz crystal is immediately moved again, and the quartz crystal is put into the next stage after the etching operation is completed. Therefore, the invention has the functions of corrosion and cleaning, realizes the pipelined corrosion and cleaning work, has high overall working efficiency and good economic benefit, can reduce the number of operators, and is beneficial to reducing the production cost.
In this embodiment, the rocking mechanism 42 includes a driving motor 421 and a fixing frame 422 disposed on the lifting device 41, the fixing frame 422 is located at a front side of the driving motor 421, a fixed transverse plate 423 is disposed at an upper end of the fixing frame 422, a fixing member 424 is disposed at an upper end surface of the fixed transverse plate 423, a cam 425 matched with the fixing member 424 is disposed below the fixed transverse plate 423, the cam 425 is rotatably disposed at a lower end of the fixing member 424, a round wheel 426 is disposed on an output shaft of the driving motor 421, a connecting rod 427 is hinged on the round wheel 426, one end of the connecting rod 427 away from the round wheel 426 is hinged with a protruding section of the cam 425, and an upper end of the connecting fork 43 is fixedly disposed on the cam 425. The driving motor 421 is a driving source, and is used as a power source for a swinging motion, the fixing frame 422 plays a role of fixing and supporting and is used for installing the fixing cross plate 423, the fixing piece 424 is arranged on the upper end face of the front end of the fixing cross plate 423, the lower end of the fixing piece 424 passes through the fixing cross plate 423, the cam 425 is rotatably arranged at the lower end of the fixing piece 424, the circle center of the cam 425 is collinear with the center of the fixing piece 424, the cam 425 is limited by the fixing piece 424 and cannot fall off from the fixing piece 424, the circle center of the round wheel 426 coincides with the center line of the output shaft of the driving motor 421, one end of the connecting rod 427 is hinged on the upper surface of the round wheel 426 and is close to the outer edge, the other end of the connecting rod 427 is hinged on a convex section of the cam 425, when the driving motor 421 rotates, the connecting rod 427 reciprocates to drive the cam 425 to move, and as the connecting rod 427 articulates with the convex section of the cam 425, the cam 425 does not rotate, but moves in a certain range, and the fork 4 moves back and forth, and forth on the supporting frame 44 is driven by the connecting rod 4.
In this embodiment, the rotary module 1 includes a bottom plate 11, a left sprocket 12 and a right sprocket 13 are disposed on the bottom plate 11, a transmission chain 14 is disposed on the left sprocket 12 and the right sprocket 13 in a matched manner, the swing soaking mechanism 4 is fixedly disposed on the transmission chain 14, a driving device 15 is disposed between the left sprocket 12 and the right sprocket 13, and the driving device 15 is in transmission fit with the left sprocket 12 and the right sprocket 13. The left chain wheel 12 and the right chain wheel 13 are parallel to the bottom plate 11 and are rotatably arranged on the bottom plate 11, the left chain wheel 12 and the right chain wheel 13 are in transmission fit through the transmission chain 14, the driving device 15 can drive the left chain wheel 12 and the right chain wheel 13 to rotate simultaneously, when the driving device 15 acts, the left chain wheel 12 and the right chain wheel 13 rotate simultaneously, the transmission chain 14 performs rotary motion, and the swinging soaking mechanism 4 performs rotary motion in a following manner.
In this embodiment, both sides of the driving chain 14 are provided with a rotating guide rail 16, a plurality of support columns 17 are disposed on the bottom plate 11 along the projection of the driving chain 14, the rotating guide rail 16 is disposed on the support columns 17, a plurality of mounting plates 18 are fixedly disposed on the driving chain 14, the mounting plates 18 are matched with the rotating guide rail 16, and the rocking soaking mechanism 4 is disposed on the mounting plates 18. Be provided with a plurality of support column 17 on the bottom plate 11, the support column 17 is followed the projection of gyration guide rail 16 carries out the interval setting, mounting panel 18 is used for the installation of rocking soaking mechanism 4, mounting panel 18 with gyration guide rail 16 cooperation sets up gyration guide rail 16 with mounting panel 18 can be used for undertaking rocking soaking mechanism 4's weight alleviates the pressure of drive chain 14 to guarantee the motion precision, reduce wearing and tearing, increase of service life.
In this embodiment, a plurality of rotating wheels 19 are disposed on the rotating rail 16, and the rotating wheels 19 are matched with the mounting plate 18. By providing the rotatable wheel 19 on the rotatable rail 16, the friction between the mounting plate 18 and the rotatable rail 16 is substantially reduced, reducing the extent of frictional damage.
In this embodiment, the number of the corrosion tanks 2 is two and the corrosion tanks are respectively disposed on the front and rear sides of the swing module 1. The number of the etching tanks 2 is two, and the etching tanks are respectively arranged at the sides of the transmission chains 14 which horizontally move at two positions of the rotary module 1, namely, each time the rotary module 1 completes one rotary period, the etching cleaning work of quartz crystals of the two carrying frames 44 can be realized.
In this embodiment, the upper end of the cleaning tank 3 is provided with four water tanks 31 connected end to end, at least one water tank 31 is provided with a drain hole 32, and the drain hole 32 is communicated with a drain outlet 33 provided at the lower end of the cleaning tank 3. The four water tanks 31 are communicated in a shape of a Chinese character kou, are distributed on four sides of the cleaning tank 3, can drain overflowed liquid during cleaning, are provided with inclination, are convenient for guiding water to the drain holes 32, and drain the water through the drain holes 32.
In this embodiment, a heater 34 is provided in the cleaning tank 3. The warmer 34 is provided to heat the liquid in the washing tank 3 to enhance the washing effect.
In this embodiment, four protection plates 22 are disposed on the etching tank 2, and a fitting opening 23 is disposed on the protection plate 22 near the rocking soaking mechanism 4. The protection plate 22 is used for preventing the corrosion liquid in the corrosion pool 2 from splashing and being ejected four times when working, and has a protection function, and the matching opening 23 is used for giving the action space of the swinging soaking mechanism 4 and preventing motion interference.
In this embodiment, the frame surface of the carrying frame 44 is a screen structure. The carrying frame 44 has a screen structure, and is densely provided with meshes, so that liquid can flow in and out conveniently, and quartz crystals can be corroded and cleaned conveniently.
While the embodiments of this invention have been described in terms of practical aspects, they are not to be construed as limiting the meaning of this invention, and modifications to the embodiments and combinations with other aspects thereof will be apparent to those skilled in the art from this description.
Claims (9)
1. An apparatus for etching and cleaning quartz crystals, characterized in that: the device comprises a rotary module (1), at least one corrosion pool (2) and a plurality of cleaning pools (3) are sequentially arranged on one side of the conveying direction of the rotary module (1), a plurality of swinging soaking mechanisms (4) matched with the corrosion pool (2) and the cleaning pools (3) are arranged on the rotary module (1), each swinging soaking mechanism (4) comprises a lifting device (41), a swinging mechanism (42) is arranged at the action end of each lifting device (41), a connecting fork rod (43) is arranged at the movable end of each swinging mechanism (42), each connecting fork rod (43) is located above each corrosion pool (2) or each cleaning pool (3), a carrying frame (44) is arranged on each connecting fork rod (43), and each carrying frame (44) is matched with each corrosion pool (2) or each cleaning pool (3); the swing mechanism (42) comprises a driving motor (421) and a fixing frame (422) which are arranged on the lifting device (41), the fixing frame (422) is located on the front side of the driving motor (421), a fixed transverse plate (423) is arranged at the upper end of the fixing frame (422), a fixing piece (424) is arranged on the upper end face of the fixed transverse plate (423), a cam (425) matched with the fixing piece (424) is arranged below the fixed transverse plate (423), the cam (425) is rotatably arranged at the lower end of the fixing piece (424), a round wheel (426) is arranged on an output shaft of the driving motor (421), a connecting rod (427) is hinged to the round wheel (426), one end, away from the round wheel (426), of the connecting rod (427) is hinged to a convex section of the cam (425), and the upper end of the connecting fork rod (43) is fixedly arranged on the cam (425).
2. An apparatus for etching and cleaning quartz crystals as claimed in claim 1, wherein: the swing module (1) comprises a bottom plate (11), a left chain wheel (12) and a right chain wheel (13) are arranged on the bottom plate (11), a transmission chain (14) is matched on the left chain wheel (12) and the right chain wheel (13), the swing soaking mechanism (4) is fixedly arranged on the transmission chain (14), a driving device (15) is arranged between the left chain wheel (12) and the right chain wheel (13), and the driving device (15) is matched with the left chain wheel (12) and the right chain wheel (13) in a transmission manner.
3. An apparatus for etching and cleaning quartz crystals as claimed in claim 2, wherein: both sides of drive chain (14) all are provided with gyration guide rail (16), follow on bottom plate (11) the projection of drive chain (14) is provided with a plurality of spinal branch daggers (17), gyration guide rail (16) set up on support column (17), fixedly on drive chain (14) be provided with a plurality of mounting panel (18), mounting panel (18) with gyration guide rail (16) cooperate, swing soaking mechanism (4) set up on mounting panel (18).
4. A device for etching and cleaning quartz crystals as claimed in claim 3, characterized in that: the rotary guide rail (16) is provided with a plurality of rotating wheels (19), and the rotating wheels (19) are matched with the mounting plate (18).
5. An apparatus for etching and cleaning quartz crystals as claimed in claim 1, wherein: the number of the corrosion tanks (2) is two, and the corrosion tanks are respectively arranged at the front side and the rear side of the rotary module (1).
6. An apparatus for etching and cleaning quartz crystals as claimed in claim 1, wherein: four water tanks (31) connected end to end are arranged on the upper end of the cleaning tank (3) in a surrounding mode, drain holes (32) are formed in at least one water tank (31), and the drain holes (32) are communicated with a drain outlet (33) formed in the lower end of the cleaning tank (3).
7. An apparatus for etching and cleaning quartz crystals as claimed in claim 1, wherein: a heater (34) is arranged in the cleaning tank (3).
8. An apparatus for etching and cleaning quartz crystals as claimed in claim 1, wherein: four protection plates (22) are arranged on the corrosion pool (2), and matching ports (23) are arranged on the protection plates (22) close to the swing soaking mechanism (4).
9. An apparatus for etching and cleaning quartz crystals as claimed in claim 1, wherein: the frame surface of the carrying frame (44) is of a screen structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911315806.9A CN110952146B (en) | 2019-12-19 | 2019-12-19 | Equipment for corrosion and cleaning of quartz crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911315806.9A CN110952146B (en) | 2019-12-19 | 2019-12-19 | Equipment for corrosion and cleaning of quartz crystal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110952146A CN110952146A (en) | 2020-04-03 |
| CN110952146B true CN110952146B (en) | 2024-05-10 |
Family
ID=69982778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911315806.9A Active CN110952146B (en) | 2019-12-19 | 2019-12-19 | Equipment for corrosion and cleaning of quartz crystal |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110952146B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115159855B (en) * | 2022-07-22 | 2023-10-27 | 重庆华渝电气集团有限公司 | Full-automatic swing piece corrosion equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH115065A (en) * | 1997-06-16 | 1999-01-12 | Takamura Kogyosho:Kk | Cleaning device |
| CN202159647U (en) * | 2011-06-13 | 2012-03-07 | 湖北致源电子股份有限公司 | Wafer etching device |
| CN104593855A (en) * | 2014-05-08 | 2015-05-06 | 田武军 | Electroplating cleaning apparatus |
| CN206343424U (en) * | 2016-08-31 | 2017-07-21 | 惠州市科诚机械设备有限公司 | A kind of swing automatic cleaning product line |
| CN211620666U (en) * | 2019-12-19 | 2020-10-02 | 珠海东锦石英科技有限公司 | Be used for quartz crystal to corrode and abluent equipment |
-
2019
- 2019-12-19 CN CN201911315806.9A patent/CN110952146B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH115065A (en) * | 1997-06-16 | 1999-01-12 | Takamura Kogyosho:Kk | Cleaning device |
| CN202159647U (en) * | 2011-06-13 | 2012-03-07 | 湖北致源电子股份有限公司 | Wafer etching device |
| CN104593855A (en) * | 2014-05-08 | 2015-05-06 | 田武军 | Electroplating cleaning apparatus |
| CN206343424U (en) * | 2016-08-31 | 2017-07-21 | 惠州市科诚机械设备有限公司 | A kind of swing automatic cleaning product line |
| CN211620666U (en) * | 2019-12-19 | 2020-10-02 | 珠海东锦石英科技有限公司 | Be used for quartz crystal to corrode and abluent equipment |
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| Publication number | Publication date |
|---|---|
| CN110952146A (en) | 2020-04-03 |
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