CN110926347A - Micro-displacement sensor based on micro-nano optical waveguide evanescent field coupling effect - Google Patents
Micro-displacement sensor based on micro-nano optical waveguide evanescent field coupling effect Download PDFInfo
- Publication number
- CN110926347A CN110926347A CN201911273065.2A CN201911273065A CN110926347A CN 110926347 A CN110926347 A CN 110926347A CN 201911273065 A CN201911273065 A CN 201911273065A CN 110926347 A CN110926347 A CN 110926347A
- Authority
- CN
- China
- Prior art keywords
- micro
- waveguide
- displacement
- detector
- nano optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention belongs to the technical field of displacement sensors, and particularly relates to a micro-displacement sensor based on a micro-nano optical waveguide evanescent field coupling effect, which comprises a displacement sensing module and a signal processing module; the displacement sensing module comprises a light source, a micro-nano waveguide and a detector, wherein the micro-nano waveguide consists of three waveguides, is arranged on the low-refraction substrate in a serial and parallel arrangement mode, and can realize efficient evanescent field coupling among the waveguides; the signal processing module comprises an amplifying circuit, a shaping circuit, a subdivision circuit, an A/D converter, a singlechip processing circuit and the like. Compared with the existing optical micro-displacement sensor, the micro-nano displacement sensor adopts the micro-nano waveguide with the transverse dimension of only 100nm magnitude as a main optical element, has compact structure and reduced volume, and is beneficial to the miniaturization and integration of the devices. The invention is used for measuring the micro displacement.
Description
Technical Field
The invention belongs to the technical field of displacement sensors, and particularly relates to a micro-displacement sensor based on a micro-nano optical waveguide evanescent field coupling effect.
Background
With the rapid development of the disciplines of mechanical manufacturing, metrology science, material science and the like, the high-precision micro-displacement measurement technology is increasingly concerned by people and is more and more widely applied to the fields of microelectronic systems, micro-optical subsystems, precision machinery, instruments and the like. The optical micro-displacement sensor has the advantages of high corresponding speed, no electromagnetic interference, no contact and damage, high sensitivity and the like, so the optical micro-displacement sensor becomes an important development direction of the high-precision micro-displacement sensor.
At present, the optical micro-displacement sensor mainly uses principles such as optical interference and diffraction, and is based on optical structures such as a beam splitter prism (a high-precision laser micro-displacement sensing and positioning method and device, CN 103712562A), a photonic crystal (micro-displacement sensor, CN 100582653C), and a grating (CN 106524921A), and has been well applied. However, the optical micro-displacement sensor is limited by the working principle, and the conventional optical micro-displacement sensor is generally complex in structure and large in volume (the size of an optical path is 1-10 cm), so that the micro-displacement sensor is not favorable for further development towards integration and miniaturization.
Disclosure of Invention
Aiming at the technical problems, the invention provides the micro-displacement sensor based on the evanescent field coupling effect of the micro-nano optical waveguide, which has the advantages of simple structure, small volume and high precision.
In order to solve the technical problems, the invention adopts the technical scheme that:
a micro-displacement sensor based on a micro-nano optical waveguide evanescent field coupling effect comprises a displacement sensing module and a signal processing module, wherein the displacement sensing module comprises a base, a substrate, a slide rail, a sliding base, a micro-nano optical waveguide, a light source and a detector, the substrate is arranged above the base, the slide rail is arranged in the middle of the base, the sliding base is arranged on the slide rail, the micro-nano optical waveguide comprises an input waveguide, a displacement waveguide and an output waveguide, the displacement waveguide is fixed on the sliding base, the input waveguide and the output waveguide are fixed on the substrate, the input waveguide, the displacement waveguide and the output waveguide are arranged in parallel in a series connection mode, the light source is arranged at one end of the input waveguide, the detector comprises a first detector and a second detector, the other end of the input waveguide is connected with the first detector, and the terminal of the output waveguide is connected with, and the first detector and the second detector are both connected with a signal processing module.
The light source adopts LD or LED, the light emitted by the light source is output light, the wavelength of the output light is within the range of 500-1550 nm, the output light is coupled into the input waveguide through a micro-nano optical fiber or a lens, the coupling efficiency of the output light is more than 70%, and the spectral full width at half maximum of the output light is less than 10 nm.
The distance among the input waveguide, the displacement waveguide and the output waveguide is not more than 50 nm.
The micro-nano optical waveguide can adopt a circular waveguide or a rectangular waveguide, the diameter of the circular waveguide is 200-800 nm, the width of the rectangular waveguide is 200-800 nm, the height of the rectangular waveguide is not more than 500nm, and the optical transmission loss of the micro-nano optical waveguide at the working wavelength is less than 1 dB/mm.
The substrate adopts MgF2A substrate or a sapphire substrate.
The signal processing module comprises an amplifying circuit, a shaping circuit, a subdivision circuit, an A/D converter and a single chip microcomputer processing circuit, wherein the amplifying circuit is connected with the detector through a lead, the amplifying circuit is connected with the subdivision circuit through the shaping circuit, and the subdivision circuit is connected with the single chip microcomputer processing circuit through the A/D converter.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, a micro-nano optical waveguide with the transverse size of 100nm is used as a core optical component, and the evanescent field coupling effect of the micro-nano optical waveguide is utilized to realize high-precision micro-displacement sensing; compared with the existing optical micro-displacement sensor based on the grating, the photonic crystal, the beam splitter prism and the like, the micro-displacement sensor has the advantages of simple structure and small volume, is favorable for realizing the integration and the miniaturization of the devices, and can be applied to the related fields of micro-optical electromechanical systems and the like.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic cross-sectional view of the present invention;
FIG. 3 is a schematic diagram of a signal processing module according to the present invention;
FIG. 4 is an evanescent field coupling electric field distribution diagram of the micro-nano optical waveguide of the present invention;
FIG. 5 is a graph of variation of transmitted light intensity with displacement for an input/output waveguide in accordance with the present invention;
wherein: the device comprises a base 1, a substrate 2, a slide rail 3, a sliding base 4, a micro-nano optical waveguide 5, a light source 6, a first detector 7, a second detector 8, a signal processing module 9, an amplifying circuit 10, a shaping circuit 11, a subdivision circuit 12, an A/D converter 13, a single-chip microcomputer processing circuit 14, an input waveguide 501, a displacement waveguide 502 and an output waveguide 503.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
A micro-displacement sensor based on a micro-nano optical waveguide evanescent field coupling effect comprises a displacement sensing module and a signal processing module, as shown in figures 1 and 2, wherein the displacement sensing module comprises a base 1, a substrate 2, a slide rail 3, a slide base 4, a micro-nano optical waveguide 5, a light source 6 and a detector, the substrate 2 is arranged above the base 1, the slide rail 3 is arranged in the middle of the base 1, the slide rail 3 is provided with the slide base 4, the micro-nano optical waveguide 5 comprises an input waveguide 501, a displacement waveguide 502 and an output waveguide 503, the displacement waveguide 502 is fixed on the slide base 4, the input waveguide 501 and the output waveguide 503 are fixed on the substrate 2, the input waveguide 501, the displacement waveguide 502 and the output waveguide 503 are arranged in parallel in a series connection mode, one end of the input waveguide 501 is provided with the light source 6, the detector comprises a first detector 7 and a second detector 8, the other end of the input, the second detector 8 is connected to the terminal of the output waveguide 503, the first detector 7 and the second detector 8 are both connected to the signal processing module 9, the output light emitted by the light source 6 is coupled into the input waveguide 501, after transmission over a distance, a portion of the energy enters the displaced waveguide 502 by evanescent coupling, another part of the energy continues to remain transmitted in the input waveguide 501 and is finally detected by the first detector 7, the light component entering the displaced waveguide 502, continues to be transmitted along the waveguide, a portion of the energy is coupled again into the output waveguide 503 by evanescent field, and is finally received and detected by the second detector 8, when the object to be measured is slightly displaced, the displacement waveguide 502 is driven to move along the direction of the slide rail, therefore, the coupling state between the micro-nano optical waveguides 5 changes, and the output light intensity of the input waveguide 501 and the output waveguide 503 changes dramatically. The first detector 7 and the second detector 8 then detect this change and send it in the form of a primary electrical signal to the signal processing module 9 for analysis.
Further, preferably, the light source 6 is an LD or an LED, the light emitted by the light source 6 is output light, the wavelength of the output light is within the range of 500-.
Further, it is preferable that the distance between the input waveguide 501, the displacement waveguide 502, and the output waveguide 503 is not more than 50 nm.
Further, preferably, the micro-nano optical waveguide 5 can adopt a circular waveguide or a rectangular waveguide, the diameter of the circular waveguide is 200-.
Further, it is preferable that MgF is used for the substrate 12The refractive index of the material is low, and good optical wave guiding can be realized.
Further, the signal processing module 9 includes an amplifying circuit 10, a shaping circuit 11, a subdividing circuit 12, an a/D converter 13, and a single chip processing circuit 14, the amplifying circuit 10 is connected with the detector through a wire, the amplifying circuit 10 is connected with the subdividing circuit 12 through the shaping circuit 11, the subdividing circuit 12 is connected with the single chip processing circuit 14 through the a/D converter 13, the first detector 7 and the second detector 8 send the primary electric signals to the signal processing module 9 in the form of primary electric signals for analysis processing, and the primary electric signals enter the single chip processing circuit 14 for data analysis and processing after amplification, shaping, subdividing, and a/D conversion, and finally obtain output signals.
The working principle of the invention is as follows: output light emitted by a light source is coupled into an input waveguide through a micro-nano optical fiber or a lens, after the output light is transmitted for a certain distance, a part of energy enters a displacement waveguide through an evanescent field coupling mode, the other part of energy is continuously kept in the input waveguide for transmission and is finally detected by a first detector, light components entering the displacement waveguide continue to be transmitted along the waveguide, a part of energy enters an output waveguide through the evanescent field coupling again and is finally received and detected by a second detector, and when a detected object is subjected to micro-displacement, the displacement waveguide is driven to move along the sliding rail direction, so that the coupling state between the micro-nano optical waveguides is changed, and the output light intensity of the input waveguide and the output waveguide is changed violently. The first detector and the second detector detect the change immediately, send the change to the signal processing module in the form of primary electric signals for analysis and processing, enter the singlechip processing circuit for data analysis and processing after amplification, reshaping, subdivision and A/D conversion in sequence, and finally obtain output signals.
In the evanescent field coupling process, as shown in fig. 5, the relationship between the coupling efficiency and the coupling length satisfies a cosine curve, when the displacement waveguide displaces △ L relative to the input waveguide, the coupling length between the two is changed by △ L, so that the coupling efficiency between the two is changed, and the transmission intensity of the input waveguide is changed, meanwhile, the displacement waveguide also displaces △ L relative to the output waveguide, and because the three waveguides are arranged in parallel in series, the coupling length between the two is changed by- △ L, which also causes the change of the coupling efficiency and the change of the transmission intensity of the output waveguide.
From the above analysis, it can be seen that, for the input waveguide, the final transmitted light intensity and the displacement satisfy the relationship of cos (al), where a is a constant related to the waveguide parameter, and L is the coupling length. For the output waveguide, since the light component finally transmitted and output passes through two evanescent field coupling processes (from the input waveguide to the displacement waveguide and from the displacement waveguide to the output waveguide), when the coupling lengths between the three sections of micro-nano optical waveguides satisfy the coupling length difference of 1/4 light wavelengths, the transmission light intensity and the displacement amount satisfy the sin (2AL) relationship. The graph of the variation of the transmitted light intensity of the input/output waveguide with displacement is shown in fig. 5. The variation period of the output signal is 6 μm, so that when the subdivision multiple of the subdivision circuit is 100, the sensitivity can reach 10 nm. In addition, as can be seen from fig. 5, the abscissa positions corresponding to the positions where the slopes of the two curves are 0 are different, so that the requirement of subsequent signal processing is met, and the device is finally guaranteed to have higher response sensitivity to micro-displacement within the full-scale range.
Although only the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art, and all changes are encompassed in the scope of the present invention.
Claims (6)
1. A micro-displacement sensor based on the evanescent field coupling effect of a micro-nano optical waveguide is characterized in that: the displacement sensor comprises a displacement sensing module and a signal processing module, wherein the displacement sensing module comprises a base (1), a substrate (2), a sliding rail (3), a sliding base (4), a micro-nano optical waveguide (5), a light source (6) and a detector, the substrate (2) is arranged above the base (1), the sliding rail (3) is arranged in the middle of the base (1), the sliding base (4) is arranged on the sliding rail (3), the micro-nano optical waveguide (5) comprises an input waveguide (501), a displacement waveguide (502) and an output waveguide (503), the displacement waveguide (502) is fixed on the sliding base (4), the input waveguide (501) and the output waveguide (503) are fixed on the substrate (2), the input waveguide (501), the displacement waveguide (502) and the output waveguide (503) are arranged in parallel in a series connection mode, and the light source (6) is arranged at one end of the input waveguide (501), the detector comprises a first detector (7) and a second detector (8), the other end of the input waveguide (501) is connected with the first detector (7), the terminal of the output waveguide (503) is connected with the second detector (8), and the first detector (7) and the second detector (8) are both connected with a signal processing module (9).
2. The micro-displacement sensor based on the evanescent field coupling effect of the micro-nano optical waveguide is characterized in that: the light source (6) adopts LD or LED, the light emitted by the light source (6) is output light, the wavelength of the output light is within the range of 500-1550 nm, the output light is coupled into the input waveguide (501) through a micro-nano optical fiber or a lens, the coupling efficiency of the output light is more than 70%, and the spectral full width at half maximum of the output light is less than 10 nm.
3. The micro-displacement sensor based on the evanescent field coupling effect of the micro-nano optical waveguide is characterized in that: the distance among the input waveguide (501), the displacement waveguide (502) and the output waveguide (503) is not more than 50 nm.
4. The micro-displacement sensor based on the evanescent field coupling effect of the micro-nano optical waveguide is characterized in that: the micro-nano optical waveguide (5) can adopt a circular waveguide or a rectangular waveguide, the diameter of the circular waveguide is 200-800 nm, the width of the rectangular waveguide is 200-800 nm, the height of the rectangular waveguide is not more than 500nm, and the optical transmission loss of the micro-nano optical waveguide (5) at the working wavelength is less than 1 dB/mm.
5. The micro-displacement sensor based on the evanescent field coupling effect of the micro-nano optical waveguide is characterized in that: the substrate (1) adopts MgF2A substrate or a sapphire substrate.
6. The micro-displacement sensor based on the evanescent field coupling effect of the micro-nano optical waveguide is characterized in that: the signal processing module (9) comprises an amplifying circuit (10), a shaping circuit (11), a subdivision circuit (12), an A/D converter (13) and a single chip microcomputer processing circuit (14), wherein the amplifying circuit (10) is connected with the detector through a lead, the amplifying circuit (10) is connected with the subdivision circuit (12) through the shaping circuit (11), and the subdivision circuit (12) is connected with the single chip microcomputer processing circuit (14) through the A/D converter (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911273065.2A CN110926347A (en) | 2019-12-12 | 2019-12-12 | Micro-displacement sensor based on micro-nano optical waveguide evanescent field coupling effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911273065.2A CN110926347A (en) | 2019-12-12 | 2019-12-12 | Micro-displacement sensor based on micro-nano optical waveguide evanescent field coupling effect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110926347A true CN110926347A (en) | 2020-03-27 |
Family
ID=69859170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911273065.2A Withdrawn CN110926347A (en) | 2019-12-12 | 2019-12-12 | Micro-displacement sensor based on micro-nano optical waveguide evanescent field coupling effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110926347A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114137254A (en) * | 2021-11-30 | 2022-03-04 | 中北大学 | Micro-nano waveguide evanescent field coupling-based single-chip optical MEMS accelerometer |
| WO2022104906A1 (en) * | 2020-11-17 | 2022-05-27 | 中国科学院上海微系统与信息技术研究所 | Micro-displacement mechanism with non-hermitian coupling angle detection and correction device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002001146A1 (en) * | 2000-06-28 | 2002-01-03 | The Charles Stark Draper Laboratory, Inc. | Optical microcavity resonator sensor |
| CN101171504A (en) * | 2005-05-11 | 2008-04-30 | 惠普开发有限公司 | Autonomous evanescent optical nanosensor |
| CN101387496A (en) * | 2008-09-25 | 2009-03-18 | 中北大学 | Micro-displacement sensor based on ring micro-chamber and cantilever beam of integration plane |
| CN105445494A (en) * | 2015-12-10 | 2016-03-30 | 中北大学 | MOEMS accelerometer based on planar ring cavity, and manufacturing method of the same |
-
2019
- 2019-12-12 CN CN201911273065.2A patent/CN110926347A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002001146A1 (en) * | 2000-06-28 | 2002-01-03 | The Charles Stark Draper Laboratory, Inc. | Optical microcavity resonator sensor |
| CN101171504A (en) * | 2005-05-11 | 2008-04-30 | 惠普开发有限公司 | Autonomous evanescent optical nanosensor |
| CN101387496A (en) * | 2008-09-25 | 2009-03-18 | 中北大学 | Micro-displacement sensor based on ring micro-chamber and cantilever beam of integration plane |
| CN105445494A (en) * | 2015-12-10 | 2016-03-30 | 中北大学 | MOEMS accelerometer based on planar ring cavity, and manufacturing method of the same |
Non-Patent Citations (2)
| Title |
|---|
| B.卡尔肖: "《光纤传感器》", 31 July 1997 * |
| 达里宇舒•萨义德齐亚: "《太赫兹成像传感及通信技术手册》", 31 May 2016 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022104906A1 (en) * | 2020-11-17 | 2022-05-27 | 中国科学院上海微系统与信息技术研究所 | Micro-displacement mechanism with non-hermitian coupling angle detection and correction device |
| CN114137254A (en) * | 2021-11-30 | 2022-03-04 | 中北大学 | Micro-nano waveguide evanescent field coupling-based single-chip optical MEMS accelerometer |
| CN114137254B (en) * | 2021-11-30 | 2023-08-04 | 中北大学 | Monolithic optical MEMS accelerometer based on micro-nano waveguide evanescent field coupling |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9702738B2 (en) | Apparatus for measuring mechanical measurands with optical sensor | |
| US20070280605A1 (en) | Fiber bragg grating sensor interrogator and manufacture thereof | |
| US20070280601A1 (en) | Fiber bragg grating sensor interrogator and manufacture thereof | |
| CN103743552B (en) | A kind of caliberating device of wide range continuous light path delay line | |
| CN110926347A (en) | Micro-displacement sensor based on micro-nano optical waveguide evanescent field coupling effect | |
| CN107727365A (en) | A kind of system that optical waveguide loss is measured using reflectance spectrum fineness | |
| CN110018428B (en) | Magnetic field sensor based on silicon-based micro-ring resonator and preparation method thereof | |
| US7421163B1 (en) | High speed free space optical detection with grating assisted waveguide | |
| TWM241892U (en) | A silicon optical bench based bi-directional transceiver module | |
| CN201373781Y (en) | Semiconductor absorption optical fiber temperature detection device | |
| CN108151663B (en) | Prism air layer thickness measuring device and measuring method | |
| CN215767429U (en) | Multichannel polarization interference type optical fiber temperature sensing device | |
| Golnabi | Design and operation of different optical fiber sensors for displacement measurements | |
| CN215448235U (en) | Silicon optical chip temperature sensor | |
| CN106785901B (en) | A kind of silicon substrate tunable laser and its implementation based on mode converter | |
| RU81574U1 (en) | FIBER OPTICAL MEASURING SYSTEM (OPTIONS) | |
| CN202255625U (en) | Spectrometer based on fiber grating time domain reflection technology | |
| CN111609873A (en) | Waveguide interferometer sensor | |
| CN112665749B (en) | Silicon optical chip temperature sensor for echelle grating | |
| CN112985634A (en) | Silicon optical chip temperature sensor | |
| CN111637980A (en) | Integrated optical autocorrelator based on two-dimensional material transverse double frequency effect | |
| KR101006959B1 (en) | Optical waveguide grating coupler with non-uniform duty ratio | |
| JP2002098849A (en) | Optical probe | |
| CN108120461A (en) | A kind of Fiber Bragg Grating FBG demodulation method and its device based on chaos light source | |
| CN112180514B (en) | Optical fiber surface waveguide mode resonance generating device and regulating and controlling method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20200327 |