CN110900015B - Multi-laser composite precision machining method for free-form surface optical lens - Google Patents

Multi-laser composite precision machining method for free-form surface optical lens Download PDF

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CN110900015B
CN110900015B CN202010001589.2A CN202010001589A CN110900015B CN 110900015 B CN110900015 B CN 110900015B CN 202010001589 A CN202010001589 A CN 202010001589A CN 110900015 B CN110900015 B CN 110900015B
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laser
optical
prefabricated
optical fiber
lens
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CN110900015A (en
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周天丰
刘朋
官祖伟
于谦
颜培
梁志强
刘志兵
焦黎
解丽静
赵文祥
王西彬
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Chongqing Innovation Center of Beijing University of Technology
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Chongqing Innovation Center of Beijing University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50Working by transmitting the laser beam through or within the workpiece
    • B23K26/53Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks

Abstract

The patent relates to the technical field of optical material processing equipmentThe method for precisely machining the free-form surface optical lens by multiple laser compounds comprises the following steps: the method comprises the following steps: determining the positions and the number of prefabricated points; step two: preparing a curved surface prefabricated point, adjusting and focusing an ultrafast laser focus on the position of the prefabricated point through a focusing system, and preparing the prefabricated point in the optical material one by using ultrafast laser; step three: laser cutting, namely shaping the optical fiber laser by using a continuous optical fiber laser separation device, then injecting the optical fiber laser into an optical material, enabling a prefabricated point to absorb laser energy to generate a high-temperature area at the prefabricated point, and then enabling the optical fiber laser to move, so that the high-temperature area moves along with the laser; step four: CO22The laser acts on the cut separation surface. The processing method provided by the scheme is used for completing three-dimensional cutting of laser, directly generating curved surface structures required by optical components such as optical lenses and the like, and performing post-treatment to generate the optical surface with the roughness of nanometer magnitude.

Description

Multi-laser composite precision machining method for free-form surface optical lens
Technical Field
The invention relates to the technical field of optical material processing equipment, in particular to a multi-laser compound precision processing method of a free-form surface optical lens.
Background
The optical lens is made of optical materials, such as optical glass, quartz, sapphire, optical crystal and other transparent optical materials with certain refractive index. The free-form surface lens is made of an optical material with a special three-dimensional structure, such as a micro-lens array, a free-form surface prism, a Fresnel lens, a toroidal lens, a fly-eye lens and the like, and has wide application in the fields of optics, sensing, imaging, buildings, automobiles and the like.
At present, the preparation method of the optical lens, especially the preparation of the quartz lens, is still performed by the traditional mechanical polishing method, such as separation of broken pieces after scribing by a diamond cutter, saw cutting, wire saw cutting and the like, and faces a series of problems of poor cutting quality, slow cutting speed, complex process flow, need of subsequent polishing and the like. Moreover, for some quartz lenses with special structures, such as fresnel lenses, the traditional mechanical preparation method is extremely difficult to realize.
The mold pressing manufacture is an effective method for manufacturing the optical lens with high precision and high efficiency. However, this method cannot achieve efficient production of optical lenses. First, press-molding is only suitable for the preparation of low-melting glass materials with a melting point below 600 ℃, whereas for quartz materials with a melting point of about 1500 ℃, press-molding is difficult to realize because the mold material is extremely difficult to withstand such high temperatures. Secondly, in some special application occasions, the number of required optical glass micro lenses is small, and the die opening is needed to be carried out by utilizing machining methods such as machinery and electric spark in the die pressing manufacturing process, so that the preparation of a high-precision die is realized; the mold opening process requires an extremely long cycle and has high processing cost, even dozens of thousands of yuan, so the method is not suitable for preparing small-batch customized optical lenses.
The laser cutting can effectively solve the problem of mechanically cutting the brittle material at the present stage. However, the conventional laser cutting and separating method can only cut and separate a planar material, and the cutting and separating surface of the conventional laser cutting and separating method is also a regular planar structure, so that a free-form surface structure required by an optical material cannot be cut and separated, and the high-quality cutting and separating of the optical material is difficult to realize. Meanwhile, the surface roughness of the traditional laser cutting method is often higher, the surface roughness of the traditional laser cutting method is often in the micron order under the condition of better cutting quality, and an optical surface with the roughness of the nanometer order required by an optical lens is extremely difficult to generate.
Disclosure of Invention
The invention aims to provide a multi-laser compound precision machining method of a free-form surface optical lens, and provides a machining method for finishing three-dimensional cutting of laser, directly generating a curved surface structure required by optical components such as an optical lens and the like, and performing post-treatment to generate an optical surface with the roughness of nanometer level.
In order to achieve the above object, the basic scheme of the invention is as follows:
a multi-laser compound precision machining method for a free-form surface optical lens comprises the following steps:
the method comprises the following steps: determining the positions and the number of the prefabricated points, and fitting the complex curved surface structure into a plurality of points by using three-dimensional software according to the specific three-dimensional structure of the optical material;
step two: preparing a curved surface prefabricated point, adjusting and focusing an ultrafast laser focus on the position of the prefabricated point through a focusing system, and preparing the prefabricated point in the optical material one by using ultrafast laser;
step three: laser cutting, namely shaping the optical fiber laser by using a continuous optical fiber laser separation device, then injecting the optical fiber laser into an optical material, enabling a prefabricated point to absorb laser energy to generate a high-temperature area at the prefabricated point, and then enabling the optical fiber laser to move, so that the high-temperature area moves along with the laser;
step four: CO22The laser acts on the cut separation surface.
Further, in the second step, the optical material is placed on a three-dimensional motion platform, the galvanometer scanning is utilized to drive the ultrafast laser beam to move in two dimensions, and the preparation of the series of prefabricated points is realized by matching with the three-dimensional motion platform.
Further, in the second step, the optical material is placed on a rotating platform, the ultrafast laser focus moves up and down to be matched with the rotating platform to drive the optical material to rotate at a high speed, and a series of prefabricated points are prepared in the optical material.
Further, a three-dimensional motion platform is arranged below the rotating platform.
Furthermore, the continuous fiber laser separation device in the third step comprises a continuous fiber laser, a fiber coupler, a laser beam expanding lens, a focusing lens and a vertical movement mechanism, wherein the continuous fiber laser, the fiber coupler and the laser beam expanding lens are sequentially connected, the focusing lens is positioned below the laser beam expanding lens, and the focusing lens is fixed on the vertical movement mechanism.
Further, the ultrafast laser in the second step is a picosecond laser or a femtosecond laser.
The beneficial effect of this scheme: (1) according to the scheme, a series of prefabricated points matched with the complex micro-nano structure can be prepared in the optical material as required, then continuous optical fiber laser is incident into the optical material, the prefabricated points absorb laser energy and generate a high-temperature area, the high-temperature area moves along with the movement of the optical fiber laser, and a series of prefabricated cracks can be generated in the material and can be expanded, so that the optical material is separated.
(2) According to the scheme, the prefabricated points prepared by the ultrafast laser form a complex micro-nano structure, so that the separation surface has the same complex micro-nano structure, and the preparation of the complex micro-nano structure of the optical material is realized. Meanwhile, the complex micro-nano structure of the separation surface and the laser prefabricated points can form a two-stage/multi-stage micro-nano structure, and the preparation of surfaces with special functions such as hydrophilic/hydrophobic surfaces, high/low friction surfaces and the like is realized.
(3) Compared with a mechanical cutting method, the method is non-contact processing, and surface damage of a material cutting surface is avoided, so that processing quality is guaranteed, and processing efficiency is greatly improved.
(4) Compared with the method for directly removing the ultrafast laser material, the method for directly preparing the complex micro-nano structure by adopting the cutting method avoids the problem of extremely low efficiency of directly removing the ultrafast laser material, has great practical industrial application value, and can be used for batch processing and preparation of the complex micro-nano structure.
(5) According to the scheme, the CO2 laser is applied to the cutting separation surface, and the optical material has extremely high absorptivity to the CO2 laser, so that extremely high temperature is generated on the surface of the material. The temperature will cause the material surface to generate remelting, thereby changing the series of prefabricated points prepared by ultrafast laser into smooth areas, obtaining nanometer level roughness surface, and achieving the optical quality requirement of optical lens laser.
Drawings
FIG. 1 is a schematic diagram illustrating operation of step two in the embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating operation of step three in the present embodiment;
FIG. 3 is a diagram illustrating operation of step four in the embodiment of the present invention.
Detailed Description
The following is further detailed by way of specific embodiments:
reference numerals in the drawings of the specification include: optical material 1, rotary platform 2, three-dimensional motion platform 3, ultrafast laser 4, fiber laser 5, CO2A laser 6.
Examples
A multi-laser compound precision machining method for a free-form surface optical lens comprises the following steps:
the method comprises the following steps: determining the positions and the number of the prefabricated points, and fitting the complex curved surface structure into a plurality of points by using three-dimensional software according to the specific three-dimensional structure of the optical material 1;
step two: preparing curved surface prefabricated points, placing an optical material 1 on a rotary platform 2 as shown in a figure 1, arranging a three-dimensional motion platform 3 below the rotary platform 2, utilizing galvanometer scanning to drive a beam of ultrafast laser 4 (picosecond laser or femtosecond laser) to move in two dimensions, matching the movement of the ultrafast laser 4 with the movement of the rotary platform 2 to drive the optical material 1 to rotate at a high speed and the three-dimensional motion platform 3 to move, and preparing a series of prefabricated points inside the optical material 1 and utilizing the ultrafast laser 4 to prepare the prefabricated points inside the optical material 1 one by one;
step three: laser cutting, as shown in fig. 2, shaping the fiber laser 5 by using a continuous fiber laser separation device, then injecting the fiber laser 5 into the optical material 1, enabling the prefabricated point to absorb laser energy to generate a high-temperature area at the prefabricated point, and then enabling the fiber laser 5 to move, so that the high-temperature area moves along with the laser; the continuous optical fiber laser separation device in the third step comprises a continuous optical fiber laser, an optical fiber coupler, a laser beam expanding lens, a focusing lens and a vertical movement mechanism, wherein the continuous optical fiber laser, the optical fiber coupler and the laser beam expanding lens are sequentially connected, the focusing lens is positioned below the laser beam expanding lens, and the focusing lens is fixed on the vertical movement mechanism.
Step four: CO22The laser 6 acts on the cut and separated surface, and the optical material 1 is coupled with CO as shown in FIG. 32The laser light 6 has a very high absorption rate, resulting in a very high temperature at the surface of the material. The material surface is remelted at the temperature, so that a series of prefabricated points prepared by the ultrafast laser 4 are changed into smooth areas, and a nano-scale roughness surface is obtained.
The foregoing is merely an example of the present invention and common general knowledge in the art of specific structures and/or features of the invention has not been set forth herein in any way. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several changes and modifications can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent. The scope of the claims of the present application shall be determined by the contents of the claims, and the description of the embodiments and the like in the specification shall be used to explain the contents of the claims.

Claims (5)

1. A multi-laser compound precision machining method for a free-form surface optical lens is characterized by comprising the following steps:
the method comprises the following steps: determining the positions and the number of the prefabricated points, and fitting the complex curved surface structure into a plurality of points by using three-dimensional software according to the specific three-dimensional structure of the optical material;
step two: preparing a curved surface prefabricated point, adjusting and focusing an ultrafast laser focus on the position of the prefabricated point through a focusing system, preparing the prefabricated points in an optical material one by using ultrafast laser, placing the optical material on a three-dimensional motion platform, driving the ultrafast laser beam to move in two dimensions by using galvanometer scanning, and matching with the three-dimensional motion platform to realize the preparation of a series of prefabricated points;
step three: laser cutting, namely shaping the optical fiber laser by using a continuous optical fiber laser separation device, then injecting the optical fiber laser into an optical material, enabling a prefabricated point to absorb laser energy to generate a high-temperature area at the prefabricated point, and then enabling the optical fiber laser to move, so that the high-temperature area moves along with the laser;
step four: CO22The laser acts on the cut separation surface.
2. The multi-laser compound precision machining method of the free-form surface optical lens according to claim 1, characterized in that: and in the second step, the optical material is placed on a rotating platform, the ultrafast laser focus moves up and down to be matched with the rotating platform to drive the optical material to rotate at a high speed, and a series of prefabricated points are prepared in the optical material.
3. The multi-laser compound precision machining method of the free-form surface optical lens according to claim 2, characterized in that: and a three-dimensional motion platform is arranged below the rotating platform.
4. The multi-laser compound precision machining method of the free-form surface optical lens according to claim 1, characterized in that: the continuous optical fiber laser separation device in the third step comprises a continuous optical fiber laser, an optical fiber coupler, a laser beam expanding lens, a focusing lens and a vertical movement mechanism, wherein the continuous optical fiber laser, the optical fiber coupler and the laser beam expanding lens are sequentially connected, the focusing lens is positioned below the laser beam expanding lens, and the focusing lens is fixed on the vertical movement mechanism.
5. The multi-laser compound precision machining method of the free-form surface optical lens according to any one of claims 1 to 4, characterized in that: the ultrafast laser in the second step is picosecond laser or femtosecond laser.
CN202010001589.2A 2020-01-02 2020-01-02 Multi-laser composite precision machining method for free-form surface optical lens Active CN110900015B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012091233A (en) * 2009-08-03 2012-05-17 Hamamatsu Photonics Kk Laser beam machining method
CN102665999A (en) * 2009-11-25 2012-09-12 浜松光子学株式会社 Laser processing method
CN103831527A (en) * 2014-02-28 2014-06-04 华中科技大学 Method and device for quickly separating optical crystals by using laser light
CN105665949A (en) * 2014-12-04 2016-06-15 株式会社迪思科 Wafer producing method
CN105772946A (en) * 2016-03-10 2016-07-20 中国科学院上海光学精密机械研究所 CO2 laser beam polishing device
CN106102986A (en) * 2016-06-08 2016-11-09 大族激光科技产业集团股份有限公司 method and device for cutting sapphire
CN109590603A (en) * 2019-01-07 2019-04-09 中国科学院上海光学精密机械研究所 The laser beam polishing method of fused quartz optical glass

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012091233A (en) * 2009-08-03 2012-05-17 Hamamatsu Photonics Kk Laser beam machining method
CN102665999A (en) * 2009-11-25 2012-09-12 浜松光子学株式会社 Laser processing method
CN103831527A (en) * 2014-02-28 2014-06-04 华中科技大学 Method and device for quickly separating optical crystals by using laser light
CN105665949A (en) * 2014-12-04 2016-06-15 株式会社迪思科 Wafer producing method
CN105772946A (en) * 2016-03-10 2016-07-20 中国科学院上海光学精密机械研究所 CO2 laser beam polishing device
CN106102986A (en) * 2016-06-08 2016-11-09 大族激光科技产业集团股份有限公司 method and device for cutting sapphire
CN109590603A (en) * 2019-01-07 2019-04-09 中国科学院上海光学精密机械研究所 The laser beam polishing method of fused quartz optical glass

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