CN110883425A - Cutting equipment pump drainage device - Google Patents

Cutting equipment pump drainage device Download PDF

Info

Publication number
CN110883425A
CN110883425A CN201911202206.1A CN201911202206A CN110883425A CN 110883425 A CN110883425 A CN 110883425A CN 201911202206 A CN201911202206 A CN 201911202206A CN 110883425 A CN110883425 A CN 110883425A
Authority
CN
China
Prior art keywords
airflow
housing
enclosure
air
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201911202206.1A
Other languages
Chinese (zh)
Inventor
程建林
张鹏远
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Precision Measurement Semiconductor Technology Inc
Original Assignee
Shanghai Precision Measurement Semiconductor Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Precision Measurement Semiconductor Technology Inc filed Critical Shanghai Precision Measurement Semiconductor Technology Inc
Priority to CN201911202206.1A priority Critical patent/CN110883425A/en
Publication of CN110883425A publication Critical patent/CN110883425A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1435Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
    • B23K26/1436Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means for pressure control
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles

Abstract

The embodiment of the invention provides a cutting equipment pump drainage device, which comprises: the device comprises a light emitting module, a housing, an airflow module, a dust exhaust module and a carrying platform; the cover shell is a cavity at least the bottom of which is provided with an opening; the light emitting module comprises a laser and a field lens; the airflow module comprises at least two airflow units: the first airflow unit and the second airflow unit are used for forming a first airflow and a second airflow, the first airflow is used for blowing the particles close to the material, the second airflow is used for blowing the particles close to the field lens, and the dust exhaust module is used for exhausting the waste airflow to the corresponding treatment area. The pumping device for the cutting equipment provided by the embodiment of the invention reduces the carbonization phenomenon of the cut material in the laser processing process and reduces the pollution of particles to the field lens and the surface of the cut material.

Description

Cutting equipment pump drainage device
Technical Field
The embodiment of the invention relates to the technical field of laser cutting, in particular to a pumping device of cutting equipment.
Background
An Organic Light-Emitting Diode (OLED) display panel is a new flat panel display device, and has many advantages such as self-luminescence, low driving voltage, high Light-Emitting efficiency, short response time, and a viewing angle of nearly 180 °, so that it is considered as the display device with the most potential for development in the industry. Currently, dual lasers (one CO) are commonly used2Laser, a UV laser) to cut the organic light emitting OLED panels, first using CO2Laser half-cutting the panel and then cutting it at CO2The panel was cut with a UV laser at the same position of the laser cut.
CO2In the laser cutting process, the heat of release can produce the melting phenomenon near panel cutting way, forms the pollution of flame form to the organic material of cutting way department reacts with the oxygen in the atmosphere and produces the carbonization and form the carbide layer, provides the passageway direct action for static and forms the panel, thereby causes the damage to the inside circuit of panel, and the smoke and dust of release can diffuse other positions of panel simultaneously and form particle pollution.
In the UV laser cutting process, the molecular bond of the material to be cut is broken by high energy of laser, the volume of the material to be cut is rapidly expanded to form high-speed jet particles, and the jet particles can be adhered to an optical glass element of cutting equipment to cause damage, so that the cutting quality is influenced.
Disclosure of Invention
The embodiment of the invention provides a pumping device of cutting equipment, which solves the problem of carbonization of a cut material in the cutting process and reduces pollution of particles generated in the cutting process to a field lens or the surface of the cut material.
To achieve the purpose, the embodiment of the invention provides a cutting equipment pumping device, which comprises: the device comprises a light emitting module, a housing, an airflow module, a dust exhaust module and a carrying platform;
the cover shell is a cavity at least the bottom of which is provided with an opening and is positioned between the light emitting module and the carrying platform, the shell of the cover shell comprises a top part and a bottom part in the vertical direction, a first side and a second side in the horizontal direction, the first side of the cover shell is provided with a first cover shell input end and a second cover shell input end, and the second side of the cover shell is provided with a cover shell output end;
the carrying platform is positioned on the outer side of the bottom of the housing and used for carrying materials to be cut;
the light emitting module is positioned on the outer side of the top of the housing and comprises a laser and a field lens, the laser is used for emitting a laser beam, and the laser beam is incident through the field lens and penetrates through the top of the housing to the surface of the material to be cut for cutting;
the airflow module is disposed outside of the first side of the enclosure, the airflow module including at least two airflow units: the first airflow unit and the second airflow unit are respectively connected with the input end of the first housing and the input end of the second housing and used for forming a first airflow and a second airflow, the first airflow is used for blowing particles close to the material, and the second airflow is used for blowing particles close to the field lens;
the dust exhaust module is arranged on the second side of the housing, is connected with the output end of the housing and is used for exhausting the waste gas flow to the corresponding treatment area.
Optionally, the first air flow unit includes a first air tap and a first air flow pressure regulating valve, the second air flow unit includes a second air tap and a second air flow pressure regulating valve, an input end of the first air tap is connected to the first air flow pressure regulating valve, an output end of the first air tap is connected to an input end of the first enclosure, an input end of the second air tap is connected to the second air flow pressure regulating valve, an output end of the second air tap is connected to an input end of the second enclosure, the second air tap and the first air tap are sequentially distributed along a propagation direction of the laser beam in the enclosure, the first air tap is close to the stage, and the second air tap is close to the field lens; the first air nozzle is used for generating a first air flow to blow to the particles close to the material under the regulation control of the first air flow pressure regulating valve, and the second air nozzle is used for generating a second air flow to blow to the particles close to the field lens under the regulation control of the second air flow pressure regulating valve;
optionally, the first gas flow and the second gas flow are both nitrogen gas flows, and the flow rate of the second gas flow is greater than the flow rate of the first gas flow.
Optionally, the enclosure further comprises a third enclosure input located on the first side of the enclosure, the third enclosure input located between the first enclosure input and the second enclosure input and disposed opposite the enclosure output;
the airflow module also includes a third airflow unit for generating a third airflow to blow the particulate matter away from the enclosure.
Optionally, the third air flow unit includes a third air tap and a third air flow pressure regulating valve, an input end of the third air tap is connected to the third air flow pressure regulating valve, an output end of the third air tap is connected to an input end of the third enclosure, and the third air tap is used for generating a third air flow under the regulation control of the third air flow pressure regulating valve so as to blow the particulate matter away from the enclosure.
Optionally, the third gas stream is a nitrogen gas stream, and the third gas stream has a flow rate greater than or equal to 5 times the flow rate of the first gas stream.
Optionally, an opening is formed in the top of the cover, and the opening, the protection module, and the field lens are arranged at the opening and overlap with each other in projection on a plane where the stage is located.
Optionally, the protection module comprises goggles and a shock pad, and the goggles are clamped at the opening of the housing through the shock pad.
Optionally, the dust removal device further comprises a dust separation structure, wherein the dust separation structure is located on the second side of the housing and connected with the top and the bottom of the housing and one end of the output end, and the other end of the output end is connected with the dust removal module;
the dust separation structure comprises: the dust separation device comprises a dust separation housing and a dust separation film, wherein the dust separation film is fixed through a first dust separation film fixing ring and a second dust separation film fixing ring which are arranged at two ends of the dust separation housing and attached to the dust separation housing.
Optionally, the dust separation housing includes inboard housing, outside housing and dust separation membrane, inboard housing with constitute the vacuum cavity between the housing of the outside, simultaneously inboard housing is provided with the vacuum hole, the outside housing is connected with the vacuum regulator, the vacuum regulator is used for making the vacuum cavity forms local negative pressure so that the dust separation membrane passes through the vacuum hole adsorbs on the inboard housing.
According to the pumping device for the cutting equipment, provided by the embodiment of the invention, the second airflow unit and the first airflow unit are sequentially distributed along the propagation direction of the laser beam in the housing, the first airflow unit is arranged at a position close to the carrying platform, and the second airflow unit is arranged at a position close to the field lens; the first airflow unit generates first airflow to blow particles generated by the material in the cutting process away from the surface of the material in time, so that the particles are prevented from being adhered to the surface of the cut material, the pollution of the particles to the surface of the cut material is reduced, and the surface temperature of the material can be reduced, so that the phenomenon of carbonization of the cut material is prevented; produce the second air current through the second air current unit, will spread the inside particulate matter of housing and blow away from the field lens surface, prevent the particulate matter adhesion on the field lens surface, cause the harm to the field lens, utilize the dust exhaust module at last inside the particulate matter discharge housing that first air current and second air current brought, further reduce the particulate matter to the field lens and by the pollution of cutting material, the cutting effect has been strengthened, the maintenance cycle of pump drainage system has been reduced, the effect of cutting process has been strengthened, the yields of product has been improved.
Drawings
Fig. 1 is a schematic structural diagram of a cutting device pumping device according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of another cutting device pumping device provided by the embodiment of the invention.
Fig. 3 is a schematic structural diagram of a protection module according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a pumping device of another cutting apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the embodiments of the present invention clearer, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some but not all of the relevant aspects of the present invention are shown in the drawings.
Fig. 1 is a schematic structural diagram of a cutting device pumping device according to an embodiment of the present invention, and as shown in fig. 1, the cutting device pumping device includes: the device comprises a light emitting module 1, a housing 2, an airflow module 3, a dust exhaust module 4 and a carrying platform 5;
the cover 2 is a cavity with an opening at least at the bottom, and is positioned between the light emitting module 1 and the carrier 5 and between the light emitting module 1 and the carrier 5, the shell of the cover 2 comprises a top and a bottom in the vertical direction and a first side and a second side in the horizontal direction, the first side of the cover 2 is provided with a first cover input end 21 and a second cover input end 22, and the second side of the cover 2 is provided with a cover output end 24;
the carrier 5 is positioned at the outer side of the bottom of the housing 2 and is used for bearing materials to be cut;
the light emitting module 1 is positioned on the outer side of the top of the housing 2 and comprises a laser 11 and a field lens 13, the laser 11 is used for emitting laser beams, and the laser beams are incident through the field lens 13 and penetrate through the top of the housing 2 to the surface of a material to be cut for cutting;
the airflow module 3 is arranged outside the first side of the housing 2, the airflow module 3 comprising at least two airflow units: the device comprises a first airflow unit and a second airflow unit, wherein the first airflow unit and the second airflow unit are respectively connected with a first housing input end 21 and a second housing input end 22 to form a first airflow 101 and a second airflow 102, the first airflow 101 is blown to particles close to a material, and the second airflow 102 is blown to the particles close to a field lens;
the dust extraction module 4 is arranged on a second side of the housing 2 and is connected to a housing outlet 24 for discharging the exhaust gas flow to a corresponding treatment zone. Optionally, the dust exhaust module 4 includes: a fan 41 and a dust exhaust pipe (not shown), wherein the fan 41 is connected with the output end 24 of the housing.
According to the pumping device for the cutting equipment, provided by the embodiment of the invention, the cover 2 is made of a transparent material, optionally, the cover is made of glass, the cover 2 is a cavity with an opening at least at the bottom, the shell of the cover 2 comprises a top and a bottom in the vertical direction and a first side and a second side in the horizontal direction, and the cover 2 is positioned between the light emitting module 1 and the stage 5, wherein the bottom of the cover 2 is close to the stage 5, and the top is close to the field lens 13. Laser light is emitted by a laser 11, which is directed into the housing 2 through a field lens 13, through the top of the housing 2 to the surface of the material to be cut for cutting, optionally a galvanometer 12 may be provided in the path of the laser beam between the laser 11 and the field lens 13, the direction of the laser beam being changed by the galvanometer 12. The air flow module 3 includes at least two air flow units, for example, in the embodiment of the present invention, a first air flow unit and a second air flow unit are taken as an example, the first air flow unit includes a first air nozzle 311 and a first air flow pressure regulating valve 312, the second air flow unit includes a second air nozzle 321 and a second air flow pressure regulating valve 322, an input end of the first air nozzle 311 is connected to the first air flow pressure regulating valve 312, an output end of the first air nozzle 311 is connected to the first enclosure input end 21, an input end of the second air nozzle 321 is connected to the second air flow pressure regulating valve 322, an output end of the second air nozzle 321 is connected to the second enclosure input end 22, the second air nozzle 321 and the first air nozzle 311 are sequentially distributed along a propagation direction of the laser beam in the enclosure 2, the first air nozzle 321 is close to the stage 5, and the second air nozzle 321; the first air nozzle 311 is used for generating a first air flow 101 to blow towards the particles near the material under the regulation control of the first air flow pressure regulating valve 312, and the second air nozzle 321 is used for generating a second air flow 102 to blow towards the particles near the field lens under the regulation control of the second air flow pressure regulating valve 322. Because the first air nozzle 311 is arranged at a position close to the carrier 5, the generated first air flow 101 blows the particles generated in the cutting process away from the surface of the cut material in time, so that the particles are prevented from being adhered to the surface of the cut material, the pollution of the particles to the surface of the cut material is reduced, and the heat released in the cutting process is reduced; and second air cock 321 sets up in the position that is close to field lens 13, produced second air current 102 will spread the inside particulate matter of housing 2 and blow away from field lens 13 surface, prevent that the particulate matter from adhering on field lens 13 surface, cause the harm to field lens 13, then, the particulate matter that first air current 101 and second air current 102 wrapped up in by hand passes through inside fan 41 discharge housing, the gathering in cutting space of particulate matter has effectively been prevented, thereby particulate matter pollution during cutting process has been reduced, the effect of cutting process has been improved, the yields of product has been improved.
Optionally, the first gas flow 101 and the second gas flow 102 are both nitrogen gas flows, and the flow rate of the second gas flow 102 is greater than that of the first gas flow 101, so that the nitrogen gas causes the oxygen content in the enclosed space to be reduced, thereby reducing the carbonization phenomenon.
Under the high temperature environment, the cut processing material is easy to combine with oxygen to generate oxide and generate carbonization, so that the first airflow 101 and the second airflow 102 are set to be nitrogen airflows, on one hand, the nitrogen airflows are used as cooling gases, heat generated during processing can be taken away, the average temperature of a processing space is reduced, on the other hand, nitrogen filling effectively reduces the content of oxygen in the processing space, and the probability of carbonization of the processed material and the oxygen in the high temperature environment is further reduced.
Optionally, the flow rate of the first air flow 101 is in the range of 4-8 m/s, and the flow rate of the second air flow 102 is greater than or equal to 5 times the flow rate of the first air flow 101.
The difficult too big of velocity of flow of first air current 101, too big then can make the discharge housing 2 that most particulate matter can not be accurate, the air current can make the particulate matter produce the backward flow phenomenon for the particulate matter fills in the cutting process space, and the heat that produces during cutting process can not effectively be taken away to the undersize of air current, thereby can not effectively restrain the phenomenon of being cut the material and taking place the carbonization. Illustratively, the flow velocity range of the first air flow 101 is 4-8 m/s, which can not only blow the particles off the surface of the processed material, but also can not cause the particles to generate a backflow phenomenon. The too small velocity of flow of second air current 102 can not effectually prevent that the particulate matter from adhering on the field lens, can not reach the effect of protection field lens, too big then can make housing 2 produce the gas vibration, influences processing, and is exemplary, and the velocity of flow of second air current 102 is the velocity of flow of first air current 101 of 8 times and is suitable, can enough blow away the particulate matter from field lens 13, can prevent again that equipment from taking place the gas vibration.
Fig. 2 is a schematic structural diagram of another cutting equipment exhaust device according to an embodiment of the present invention, and as shown in fig. 2, optionally, the housing 2 further includes a third housing input 23 located at the first side of the housing 2, the third housing input 23 is located between the first housing input 21 and the second housing input 22 and is opposite to the housing output 24, and the airflow module 3 further includes a third airflow unit for generating a third airflow to blow the particulate matter out of the housing. The third air flow unit comprises a third air tap 331 and a third air flow pressure regulating valve 332, the input end of the third air tap 331 is connected to the third air flow pressure regulating valve 332, the output end of the third air tap 331 is connected to the third enclosure input end 23, and the third air tap 331 is adapted to generate a third air flow 103 under the regulating control of the third air flow pressure regulating valve 332 to blow the particulate matter out of the enclosure.
Through increasing a third air current unit between first air current unit and second air current unit to make third air cock 331 of third air current unit set up with housing output 24 relatively, the effectual particulate matter of having guaranteed is along with accurate passing through housing output 24 discharge housing 2 of air current, further reduces the particulate matter density in the processing space, reduces the particulate matter to field lens 13 and by the pollution of processing material, improves the product yields.
Optionally, the first air pressure regulating valve 312, the second air pressure regulating valve 322 and the third air pressure regulating valve 332 are independent from each other, and the first air nozzle, the second air nozzle and the third air nozzle output three layers of independent air flows correspondingly.
Illustratively, the first air flow pressure regulating valve 312, the second air flow pressure regulating valve 322 and the third air flow pressure regulating valve 332 are independent from each other, so that the generated air flows are convenient to flexibly control, operators can conveniently and respectively adjust the sizes of the air flows, the equipment controllability is increased, the first air flow 101 blows particles away from the surface of the processed material, the temperature during cutting is effectively reduced, and the material carbonization phenomenon caused by heat influence is reduced; the second air flow 102 discharges the particles carried by the air flow out of the housing 2, so that the particle density of the cutting processing space is reduced, and the cutting quality of the product is improved; the third air flow 103 prevents the particles from adhering to the field lens 13 to cause damage and affect the cutting effect.
Optionally, the third gas stream 103 is a nitrogen gas stream, and the flow rate of the third gas stream 103 is greater than or equal to 5 times the flow rate of the first gas stream 101.
Third air current 103 also sets up to the nitrogen gas air current, further reduces the heat that the cutting produced, reduces the density of cutting space oxygen, and simultaneously, third air current 103 undersize then can not guarantee to blow to housing output 24 with the particulate matter is accurate, particulate matter in the discharge housing 2 that can not the maximize, too big then causes housing 2 to take place the gas vibration easily, influences processing. The flow rate of the third air flow 103 can be optionally determined to be 8 times the flow rate of the first air flow 101, which can effectively blow the particulate matter toward the housing output end 24 without occurrence of air vibration.
Optionally, the top of the housing 2 has an opening, the opening is provided with the protection module 6, and the projection of the opening, the protection module 6 and the field lens 13 on the plane of the stage 5 overlap each other.
Illustratively, the protection module 6 is snapped into the opening of the housing 2, or the protection module 6 covers the opening of the housing 2. Through the opening part with protection module 6 block at housing 2, perhaps cover protection module 6 at the opening part of housing 2, make things convenient for operating personnel to take out at any time and install, save the process of dismantling. The protection module 6 is arranged at one end, close to the field lens 13, of the housing 2, so that direct contact between particles and the field lens 13 is avoided, the possibility that the particles are adhered to the surface of the field lens 13 is reduced, and the field lens 13 is effectively protected.
Fig. 3 is a schematic structural diagram of a protection module according to an embodiment of the present invention, as shown in fig. 3, optionally, the protection module 6 is clamped at an opening of the housing, the protection module 6 includes a pair of goggles 61 and a shock pad 62, and the goggles 61 are clamped at the opening of the housing through the shock pad 62.
The protection module 6 isolates the particles from the field lens through the protection lens 61, and prevents the particles from polluting the field lens. The protective glasses 61 is clamped at the opening of the housing through the shock absorption pads 62, and the shock absorption pads 62 reduce the vibration of the protective glasses 61 in the machining process, reduce the influence of the vibration on the laser light path, improve the stability of laser cutting, increase the precision of the laser cutting and improve the yield. Exemplarily, the shock pad 62 places the goggles 61 on the housing through the rubber ring of U type recess, has reduced the vibration of goggles 61 when cutting processing on the one hand, and on the other hand sets up protection module 6, can be through independently unpicking and washing goggles 61, and the pump drainage device of being convenient for clean fast and maintaining improves the operating time of whole cutting production system, improves productivity.
Fig. 4 is a schematic structural diagram of another cutting equipment pumping and exhausting device provided by an embodiment of the present invention, as shown in fig. 4, optionally, the cutting equipment pumping and exhausting device further includes a dust-isolating structure 42, the dust-isolating structure 42 is located at the second side of the housing 2 and is connected to the top and bottom of the housing and one end of the output end 24, and the other end of the output end 24 is connected to the dust-exhausting module;
the dust separation structure 42 includes: the dust separation device comprises a dust separation cover 423 and a dust separation film 45, wherein the dust separation film 45 is fixed by a first dust separation film fixing ring 421 and a second dust separation film fixing ring 422 which are arranged at two ends of the dust separation cover 423 and is attached to the dust separation cover 423.
A dust separation structure 42 is provided on the second side of the housing 2, which is connected to the housing outlet 24, to further reduce the pollution of the processing apparatus by the particles generated during the processing. Through the fixed dust proof membrane 45 of first dust proof membrane retainer plate 421 and second dust proof membrane retainer plate 422, can prevent that the particulate matter gathering that the dust exhaust in-process passes through along with the air current is in the second side of housing 2, has further reduced the pollution of particulate matter to the processing space. Optionally, the dust exhaust module is a fan 41.
Alternatively, the dust separation housing 423 includes an inner housing 4231, an outer housing 4232, a vacuum chamber 4233 is formed between the inner housing 4231 and the outer housing 4232, the inner housing 4231 is provided with a vacuum hole 43, the outer housing 4232 is connected with a vacuum pressure regulating device 44, and the vacuum pressure regulating device 44 is used for forming a partial negative pressure in the vacuum chamber 4233 so that the dust separation film 45 is adsorbed on the inner housing 4231 through the vacuum hole 43.
The inner housing 4231 is distributed with vacuum holes 43, the vacuum pressure regulating device 44 is connected to the outer housing 4232, air in the vacuum cavity 4233 is pumped out through the vacuum holes 43 to form a vacuum environment, and the dust isolating film 45 is adsorbed on the inner housing 4231 through the vacuum holes 43, so that the cutting equipment is prevented from being influenced by vibration generated by air flow, and the cutting precision is improved.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims (10)

1. A cutting apparatus pump drainage device, comprising: the device comprises a light emitting module, a housing, an airflow module, a dust exhaust module and a carrying platform;
the cover shell is a cavity at least the bottom of which is provided with an opening and is positioned between the light emitting module and the carrying platform, the shell of the cover shell comprises a top part and a bottom part in the vertical direction, and a first side and a second side in the horizontal direction, the first side of the cover shell is provided with a first cover shell input end and a second cover shell input end, and the second side of the cover shell is provided with a cover shell output end;
the carrying platform is positioned on the outer side of the bottom of the housing and used for carrying materials to be cut;
the light emitting module is positioned on the outer side of the top of the housing and comprises a laser and a field lens, the laser is used for emitting a laser beam, and the laser beam is incident through the field lens and penetrates through the top of the housing to the surface of the material to be cut for cutting;
the airflow module is disposed outside of the first side of the enclosure, the airflow module including at least two airflow units: the first airflow unit and the second airflow unit are respectively connected with the input end of the first housing and the input end of the second housing and used for forming a first airflow and a second airflow, the first airflow is used for blowing particles close to the material, and the second airflow is used for blowing particles close to the field lens;
the dust exhaust module is arranged on the second side of the housing, is connected with the output end of the housing and is used for exhausting the waste gas flow to the corresponding treatment area.
2. The extraction and exhaust device for cutting equipment according to claim 1, wherein the first air flow unit comprises a first air nozzle and a first air flow pressure regulating valve, the second air flow unit comprises a second air nozzle and a second air flow pressure regulating valve, an input end of the first air nozzle is connected with the first air flow pressure regulating valve, an output end of the first air nozzle is connected with an input end of the first cover, an input end of the second air nozzle is connected with the second air flow pressure regulating valve, an output end of the second air nozzle is connected with an input end of the second cover, the second air nozzle and the first air nozzle are sequentially distributed along the propagation direction of the laser beam in the cover, the first air nozzle is close to the stage, and the second air nozzle is close to the field lens; the first air nozzle is used for generating first air current under the regulation control of the first air current pressure regulating valve so as to blow to the particles close to the material, and the second air nozzle is used for generating second air current under the regulation control of the second air current pressure regulating valve so as to blow to the particles close to the field lens.
3. The cutting apparatus extraction device of claim 1 or claim 2, wherein the first and second gas flows are both nitrogen gas flows, the second gas flow having a greater flow rate than the first gas flow.
4. The cutting apparatus extraction device of claim 1 or claim 2, wherein the enclosure further comprises a third enclosure input located on the first side of the enclosure, the third enclosure input located between the first enclosure input and the second enclosure input and disposed opposite the enclosure output;
the airflow module also includes a third airflow unit for generating a third airflow to blow the particulate matter away from the enclosure.
5. The cutting apparatus extraction apparatus as claimed in claim 4, wherein said third air flow unit includes a third air nozzle having an input connected to said third air flow regulator valve and an output connected to said third housing input, and a third air flow regulator valve for regulating said third air nozzle to generate a third air flow to blow the particulate material off of the housing.
6. The cutting apparatus extraction device of claim 4, wherein the third gas flow is a nitrogen gas flow having a flow rate greater than or equal to 5 times the flow rate of the first gas flow.
7. The cutting equipment pumping device of claim 1 or claim 2, wherein the top of the casing has an opening, a protection module is disposed at the opening, and projections of the opening, the protection module and the field lens on a plane where the stage is located overlap with each other.
8. The cutting apparatus extraction device of claim 7, wherein the protective module includes protective goggles and a shock pad through which the protective goggles are snapped into the opening of the casing.
9. The cutting equipment pumping device according to claim 1 or claim 2, further comprising a dust separation structure located on the second side of the casing and connected to the top and bottom of the casing and one end of the output end, the other end of the output end being connected to the dust exhaust module;
the dust separation structure comprises: the dust separation device comprises a dust separation housing and a dust separation film, wherein the dust separation film is fixed through a first dust separation film fixing ring and a second dust separation film fixing ring which are arranged at two ends of the dust separation housing and attached to the dust separation housing.
10. The pumping device for cutting equipment as claimed in claim 9, wherein the dust-proof enclosure comprises an inner enclosure and an outer enclosure, a vacuum cavity is formed between the inner enclosure and the outer enclosure, a vacuum hole is formed in the inner enclosure, the outer enclosure is connected with a vacuum pressure regulating device, and the vacuum pressure regulating device is used for enabling the vacuum cavity to form local negative pressure so that the dust-proof film is adsorbed on the inner enclosure through the vacuum hole.
CN201911202206.1A 2019-11-29 2019-11-29 Cutting equipment pump drainage device Pending CN110883425A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911202206.1A CN110883425A (en) 2019-11-29 2019-11-29 Cutting equipment pump drainage device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911202206.1A CN110883425A (en) 2019-11-29 2019-11-29 Cutting equipment pump drainage device

Publications (1)

Publication Number Publication Date
CN110883425A true CN110883425A (en) 2020-03-17

Family

ID=69749610

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911202206.1A Pending CN110883425A (en) 2019-11-29 2019-11-29 Cutting equipment pump drainage device

Country Status (1)

Country Link
CN (1) CN110883425A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112846530A (en) * 2020-12-29 2021-05-28 武汉华工激光工程有限责任公司 Curved thick glass cutting and splitting method and system
CN112917019A (en) * 2021-01-21 2021-06-08 京东方科技集团股份有限公司 Laser cutting apparatus and control method thereof
CN116275605A (en) * 2023-02-17 2023-06-23 苏州天准科技股份有限公司 Laser drilling equipment for on-line hole inspection

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61273294A (en) * 1985-05-27 1986-12-03 Nec Corp Laser marking device
EP1419848A2 (en) * 2002-11-14 2004-05-19 TMS Produktionssysteme GmbH Welding device and process for welding
CN206356741U (en) * 2016-11-23 2017-07-28 苏州瑞日纺织科技有限公司 A kind of carbon dioxide laser rig of rapid drilling
CN107297577A (en) * 2017-07-31 2017-10-27 惠州市格农科技有限公司 Cutting processing system
CN207824185U (en) * 2017-12-26 2018-09-07 大族激光科技产业集团股份有限公司 Dust-extraction unit and laser cutting device
CN108620731A (en) * 2018-06-27 2018-10-09 南京惠镭光电科技有限公司 A kind of Intelligent Laser carving Control System
EP3404396A1 (en) * 2017-05-17 2018-11-21 Roche Diagnostics GmbH System for processing a dried fluid sample substrate, and method therefor
CN110125559A (en) * 2019-06-13 2019-08-16 苏州镭扬激光科技有限公司 A kind of laser cutting device suitable for being cut to sheet metal with film
CN209647855U (en) * 2018-12-27 2019-11-19 合肥国轩高科动力能源有限公司 A kind of laser-beam welding machine with absorption flue dust function

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61273294A (en) * 1985-05-27 1986-12-03 Nec Corp Laser marking device
EP1419848A2 (en) * 2002-11-14 2004-05-19 TMS Produktionssysteme GmbH Welding device and process for welding
CN206356741U (en) * 2016-11-23 2017-07-28 苏州瑞日纺织科技有限公司 A kind of carbon dioxide laser rig of rapid drilling
EP3404396A1 (en) * 2017-05-17 2018-11-21 Roche Diagnostics GmbH System for processing a dried fluid sample substrate, and method therefor
CN107297577A (en) * 2017-07-31 2017-10-27 惠州市格农科技有限公司 Cutting processing system
CN207824185U (en) * 2017-12-26 2018-09-07 大族激光科技产业集团股份有限公司 Dust-extraction unit and laser cutting device
CN108620731A (en) * 2018-06-27 2018-10-09 南京惠镭光电科技有限公司 A kind of Intelligent Laser carving Control System
CN209647855U (en) * 2018-12-27 2019-11-19 合肥国轩高科动力能源有限公司 A kind of laser-beam welding machine with absorption flue dust function
CN110125559A (en) * 2019-06-13 2019-08-16 苏州镭扬激光科技有限公司 A kind of laser cutting device suitable for being cut to sheet metal with film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112846530A (en) * 2020-12-29 2021-05-28 武汉华工激光工程有限责任公司 Curved thick glass cutting and splitting method and system
CN112917019A (en) * 2021-01-21 2021-06-08 京东方科技集团股份有限公司 Laser cutting apparatus and control method thereof
CN116275605A (en) * 2023-02-17 2023-06-23 苏州天准科技股份有限公司 Laser drilling equipment for on-line hole inspection

Similar Documents

Publication Publication Date Title
CN110883425A (en) Cutting equipment pump drainage device
JP4055353B2 (en) Optical processing equipment
JP5063239B2 (en) Dust collector for laser processing
JP2011020147A (en) Dust collecting/discharging apparatus for laser beam machining
KR102212629B1 (en) Lens contamination prevention device and method
CN103658984A (en) Plasma side-suction negative pressure device and laser welding system in laser welding process
CN208051182U (en) Dust-extraction unit
CN108418083A (en) A kind of window structure and excimer laser for laser
CN103111441A (en) Device and method for cleaning partial pollutant on surfaces of clean materials
JP2007194583A (en) Light source device for peripheral exposure
TW201921129A (en) Objective lens protection device, objective lens system and lithographic device
CN204382669U (en) Be applied to prevention and print the device that dust causes laser printing defect
JP2008296069A (en) Air cleaner for eliminating fine particle or fine particle and harmful gas in sheet-like object manufacturing apparatus
JP3186507B2 (en) Laser processing equipment
JP2007088066A (en) Laser light source device
CN102790351B (en) Semiconductor laser
CN201236209Y (en) Reaction cavity with window slice shielding gas channel
KR102115460B1 (en) Light irradiation apparatus
TWI678272B (en) Multi-layer manufacturing window module
CN100437901C (en) Particle sticking prevention apparatus and plasma processing apparatus
CN202752748U (en) Semiconductor laser unit
JP4285210B2 (en) Laser processing equipment
JP4452977B2 (en) Ultraviolet irradiation device and gas releasing method thereof
CN102896422A (en) Carbon dioxide laser
CN111906439B (en) Laser shock peening light path protection device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20200317