JP2007088066A - Laser light source device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser light source device requiring not so much running cost and having a simple configuration which can prevent adhesion of fine particles or contamination gas. <P>SOLUTION: The laser light source device has a case 1 having an inlet port 15 and exhaust port 16 formed thereon, and a laser light source 2 housed in the case 1, wherein the inlet port 15 is formed on the lower position of the laser light source 2 and the exhaust port 16 is formed on the upper side of the laser light source 2. Fine particles or contamination gas etc. are exhausted from the exhaust port due to chimney effect of the inlet and exhaust ports and the concentration in the case is reduced, and the chimney effect reduces the velocity of natural convection, resulting in reduction of the number of times of contact of the contamination gas etc. on an optical element in the case. Thus, adhesion of fine particles etc. to the optical element can be prevented. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a laser light source device used for laser communication, laser measurement / control, laser processing, and the like, and more particularly, to a laser light source device that prevents adhesion of fine particles and contaminant gas floating in an atmosphere.

  FIG. 6 shows a conventional laser light source device, wherein 101 is a semiconductor laser chip, 102 is a heat sink, 103 is a protective window, 105 is a case, and 108 is a gettering heater. Reference numeral 106 denotes a stem, and 107 denotes a cap. A case 105 is formed by both of them (see, for example, Patent Document 1).

  This conventional laser light source device is configured to remove the pollutant gas in the case 105 by energizing the gettering heater 108 after the semiconductor laser chip 101 is sealed inside the case 107.

  FIG. 7 shows another conventional laser light source device (see, for example, Patent Document 2). In FIG. 7, reference numeral 201 denotes a laser light source, 203 denotes a protective window, 204 denotes a condenser lens, and 205 denotes a case, which are not shown in FIG. 7, but also include a controller for driving and controlling the laser light source 201 and an external power supply device. There is a wire harness etc. connected to Reference numeral 206 denotes an intake port, 207 denotes an exhaust port, 208 denotes a cleaning medium supply source, and 209 denotes a workpiece.

The laser light source 201 is blocked by the case 205 and the protective window 203 because the loss may increase due to adhesion of fine particles or pollutant gas floating in the case 205 and the output may be reduced or damaged in the worst case. Has been. By introducing the clean medium from the clean medium supply source 208 into the case 205 in which the laser light source 201 is housed through the intake port 206 and discharging it from the exhaust port 207, the inside of the case 205 becomes a clean atmosphere. It is possible to prevent output reduction or breakage of the laser light source 201.
Japanese Patent Application Laid-Open No. 7-176821 JP 2005-142413 A

  However, in the laser light source device shown in FIG. 6, since the contaminated gas is removed by the gettering heater 108 after the laser chip 101 is sealed in the case 107, the contaminated gas generated with the passage of time after the laser chip 101 or It adheres to the protective window 103. That is, fine particles of 0.1 μm or less remaining from the metal parts inside the case 107 are gasified and convection inside the case 107, and adhere to the end face of the laser chip 101 and the protective window 103 over time. Had the problem of doing.

  In addition, the conventional laser light source device shown in FIG. 7 also removes polluted gas generated over time, but requires a clean medium supply source 208 such as a gas cylinder or an air compressor, the device is complicated, and the running cost is low. It had the problem of becoming higher.

  An object of this invention is to provide the laser light source device which solves these subjects.

  In order to solve the above problems, a laser light source device of the present invention has a case in which an air inlet and an air outlet are formed, and a laser light source accommodated in the case, and the air inlet has the laser light source. The exhaust port is formed at the upper side of the laser light source.

  The air in the case is heated by the heat generated by the laser light source and rises upward from below the laser light source, and the raised air is cooled and lowered (natural convection occurs). Then, due to the so-called chimney effect, outside air is sucked from the intake port located below the laser light source, and at the same time, the inside air is exhausted from the exhaust port located above the laser light source. Exhaust gas outside. Moreover, since the circulation speed of natural convection becomes slow due to the chimney effect, the amount of fine particles and contaminated gas adhering to the laser light source and the protective window can be reduced.

  Moreover, a filter can also be provided in an inlet port and an exhaust port. It is possible to prevent fine particles or polluted gas from entering the case from the outside.

  Further, the intake port can be provided on the lower side wall surface located on the lower side of the case. Since air is sucked from the bottom, particulates and polluted gases that are present at the bottom of the case can be reliably discharged.

  Moreover, an exhaust port can also be provided in the upper wall surface located above a case. Since exhaust is performed from the top, particulates and polluted gases can be efficiently discharged.

  Further, the intake port can be provided on a measuring wall surface located in the case measuring method. There is no need to use the bottom wall surface floating (no need to provide feet).

  Moreover, an exhaust port can also be provided in the measurement wall surface located in the measurement of a case. The exhaust port can be made inconspicuous.

  Moreover, the wall surface of the case provided with the exhaust port can be used as a high heat conduction member. Since the temperature in the vicinity of the exhaust port is lower than the temperature of the air flow, fine particles, polluted gas, and the like are likely to adhere when touching the vicinity of the exhaust port, and the concentration of the fine particles in the case can be reduced.

  According to the laser light source device of the present invention, the intake port is provided on the lower side of the laser light source that generates heat, and the exhaust port is provided on the upper side. Therefore, outside air is drawn from the intake port located on the lower side of the laser light source due to the so-called chimney effect. It is possible to inhale and exhaust the inside air from the exhaust port located above the laser light source at the same time, and to discharge the fine particles in the case, the polluted gas generated with time, etc. to the outside. Moreover, since the circulation speed of natural convection becomes slow due to the chimney effect, the amount of fine particles and contaminated gas adhering to the laser light source and the protective window can be reduced.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

(Embodiment 1)
FIG. 1 is a configuration diagram of a laser light source device according to the first embodiment. In FIG. 1, 1 is a case, and 2 is a laser light source. Although not shown in the figure, there is a wire harness connecting the laser light source 2 and the controller.

  The case 1 has a box shape (hexahedron) shape made of, for example, aluminum, and includes an upper surface plate (upper wall surface) 11a, a lower surface plate (lower wall surface) 11a ', and left and right side plates (measurement wall surface) 12a. , 12a ′, and a front side plate (measurement wall surface) 13a, 13a ′ (not shown) facing the front side plate (measurement wall surface) 13a, 13a. An intake port 15 is formed in the vicinity of the lower surface plate 11 a ′ where the laser light source 2 is attached, and an exhaust port 16 is formed in the vicinity of the upper surface plate 11 a just above the laser light source 2. Further, legs 5 are attached to the lower surface plate 11a 'so that the intake port 15 is not blocked even when the laser light source device is on a desk, for example. A laser beam emission hole 14 is formed in the side plate 12a, and a protective window 4 made of glass, for example, is attached to the emission hole 14.

  The laser light source 2 includes, for example, a semiconductor laser 21, a lens 22 that collimates a laser beam, and a heat sink 23, and is fixed to the lower surface plate 11 a ′ of the case 1.

  The intake port 15 and the exhaust port 16 are, for example, circular holes in cross section, and the hole diameter is, for example, 1 mm. The intake port 15 and the exhaust port 16 are not limited to circular holes, but may be rectangular holes, triangular holes, or the like.

  The air inlet 15 is provided at a position shifted in the front-rear direction of the paper with respect to the heat sink 23. Since the air inlet 15 is near the laser light source 2 where the temperature is high, particulates and polluted gases are removed by the rising airflow due to the temperature difference. It can be discharged efficiently.

  For the leg portion 5, for example, a rubber material can be used.

  The operation of the laser light source device configured as described above will be described below.

  The laser light source 2 operates and a laser beam 6 is emitted by electrical input from a controller (not shown). When an electrical input is input to the laser light source 2, the laser light source 2 generates heat. As a result, the air around the laser light source 2 is warmed and becomes an ascending current, which rises upward. A part of the ascending airflow is exhausted to the outside through the exhaust port 16 as an exhaust flow 7b. The rest touches the surrounding air and the upper surface plate 11a, is cooled, becomes a descending airflow, descends downward, and becomes natural convection 7. When the exhaust flow 7 b comes out from the exhaust port 16, the inside of the case 1 becomes negative pressure, so that the outside air 7 a is sucked from the intake port 15. That is, due to a kind of chimney effect, outside air is sucked from the intake port 7a and inside air is discharged from the exhaust port 7b. Particulates, polluted gases, etc. in the case 1 are carried upward by the natural convection 7, a part is discharged out of the case 1 together with the exhaust stream 7 b, and a part adheres to the upper surface plate 11 a. As a result, the concentration of fine particles and contaminated gas in the case 1 is reduced, and adhesion to the lens 22 and the protective window 4 is prevented. Moreover, since the circulation speed of natural convection becomes slow due to the chimney effect, it is possible to reduce the amount of fine particles and contaminated gas adhering to the lens 22 and the protective window 4.

  When the upper surface plate 11a is made of, for example, aluminum, the heat conductivity is high, so that the temperature rise is suppressed even when a high temperature natural convection is touched, and the contacted fine particles and contaminated gas are cooled and efficiently attached.

  Even when the laser light source device is not operated, there is a risk that fine particles and the like may enter from the outside through the intake port 15 and the exhaust port 16, but the fine particles entering from the outside are weakly adherent, and optical components such as the lens 22 and the protective window 4 There is almost no adhesion. A substance that adheres to the optical component is mainly a highly adherent substance such as siloxane that is emitted from an adhesive or the like used for a component inside the case 1, and the laser light source device of this embodiment has a strong adherence. The substance can be discharged out of the case 1 as described above.

  Further, if filters are attached to the intake port 15 and the exhaust port 16, it is possible to prevent entry of fine particles or the like into the case 1 from the outside during operation.

  In the laser light source device of the present embodiment, one intake port and one exhaust port are provided on the lower surface plate and the upper surface plate, respectively, but at least one hole of about φ1 mm may be provided on the entire six surfaces. By doing in this way, the holes attached to either surface always function as an inlet and an outlet, even when the vertical relationship changes, as in a portable type, for example, a laser light source device such as a laser pointer, During operation, fine particles and polluted gases can be discharged outside.

(Embodiment 2)
FIG. 2 is a configuration diagram of the laser light source device of the second embodiment. In the laser light source device of the present embodiment, the side plate 12a of the laser light source device of the first embodiment is used as the upper plate 11a, the side plate 12a ′ is used as the lower plate 11a ′, the lower plate 11a ′ is used as the side plate 12a, and the upper plate 11a. Is a side plate 12a '. An air inlet 15 with a hole diameter of 1.4 mm, for example, is located below the laser light source 2 on the lower surface plate 11a ′, and an exhaust gas with a hole diameter of, for example, 1 mm is located near the laser light source 2 on the upper surface plate 11a. Two mouths 16 are formed.

  Since the exhaust port 16 is formed in the upper surface plate 11a in which the hole 14 through which the laser beam 6 is emitted is formed, the laser light source device is arranged so that the laser beam 6 is emitted upward as shown in FIG. Even when used, the fine particles in the case 1 and the contaminated gas can be discharged out of the case 1 by natural convection and the chimney effect.

  Further, since there are two exhaust ports 16, fine particles and contaminated gas can be efficiently discharged from the laser light source device of the first embodiment.

  In this embodiment, since the hole diameter of the intake port 15 is 1.4 mm and larger than the hole diameter of 1 mm of the exhaust port 16, the number of the intake ports 15 may be one for two exhaust ports 16. it can.

(Embodiment 3)
FIG. 3 is a configuration diagram of the laser light source device of the third embodiment. The laser light source device of the present embodiment is the same as the laser light source device of the first embodiment except that the air inlet 15 is formed at the lower end of the side plates 12a and 12a ′, the exhaust port 16 is formed at the upper end, and the legs 5 are removed. Is the same as in the first embodiment.

  Since the air inlet 15 is provided below the laser beam emission hole 14, the air flow toward the protective window 4 is hindered by the intake air flow 7a, and the adhesion of fine particles and contaminated gas to the protective window 4 can be further reduced. Further, since the lower surface plate 11a 'has no intake port, the leg portion can be eliminated.

(Embodiment 4)
FIG. 4 is a configuration diagram of the laser light source device of the fourth embodiment. The laser light source device of the present embodiment has a plurality of intake ports and exhaust ports in the laser light source device of the first embodiment.

  Since the chimney effect is increased and the concentration of fine particles and pollutant gas in the case is lowered, adhesion to the lens 22 and the protective window 4 can be further reduced.

(Embodiment 5)
FIG. 5 is a configuration diagram of the laser light source device of the fifth embodiment. The laser light source device of this embodiment is provided with an air inlet and an air outlet on the side plate as in the third embodiment, and a plurality of air inlets on the lower surface plate and a plurality of air outlets on the upper surface plate as in the fourth embodiment. It is a thing. The intake port is composed of three holes 15a formed in the lower surface plate 11a ′ and two holes 15b formed in the lower ends of the side plates 12a and 12a ′, and the exhaust port is formed in the upper surface plate 11a. The three holes 16a and the two holes 16b formed at the upper ends of the side plates 12a and 12a ′.

  The chimney effect is further increased and the concentration of fine particles and pollutant gas in the case is lowered, so that adhesion to the lens 22 and the protective window 4 can be further reduced.

(Comparative Example 1)
The laser light source device of Comparative Example 1 is obtained by eliminating the intake port 15 and the exhaust port 16 from the laser light source device of Embodiment 1 shown in FIG.

  The case 1 has a box shape (hexahedral shape) made of an aluminum plate having a thickness of 1.5 mm, and the internal volume is 20 mm long × 120 mm wide × 70 mm deep.

  The semiconductor laser 21 has an output of 0.5 W.

  The side plate 13a has an observation window (not shown) designed so as not to disturb the system. Further, smoke as a tracer is mixed in the case 1.

  The results of operating the above laser light source device will be described below.

  After the laser light source 2 was operated and the temperature was in an equilibrium state, the surface temperature of the laser light source 2 and the air temperature in the case 1 were measured from the observation window with a radiation thermometer, and the temperature difference was about 100 ° C. Moreover, as a result of photographing and analyzing the movement of smoke in the case 1 from the observation window with a video camera, it took 2 seconds until the smoke in the vicinity of the laser light source 2 was convected and returned. When the lens 22 was observed after 100 hours of continuous operation, fogging that was observed to be caused by the adhesion of fine particles and contaminated gas was observed on the surface.

Example 1
The laser light source device of Example 1 is the laser light source device of Embodiment 1 shown in FIG.

  Case 1 is the same as Comparative Example 1, has a box shape (hexahedral shape) made of an aluminum plate having a thickness of 1.5 mm, and has an internal volume of 20 mm long × 120 mm wide × 70 mm deep.

  The intake port 15 and the exhaust port 16 are circular in cross section and both have a hole diameter of 1 mm.

  The semiconductor laser 21 is the same as the comparative example 1 and has an output of 0.5 W.

  The side plate 13a has an observation window (not shown) designed so as not to disturb the system, as in the first comparative example. Further, smoke as a tracer is mixed in the case 1.

  The results of operating the above laser light source device will be described below.

  After the laser light source 2 was operated and the temperature was in an equilibrium state, the surface temperature of the laser light source 2 and the air temperature in the case 1 were measured from the observation window with a radiation thermometer, and the temperature difference was about 100 ° C. Further, as a result of photographing and analyzing the movement of smoke in the case 1 from the observation window with a video camera, it took 10 to 20 seconds for the smoke in the vicinity of the laser light source 2 to convect and return to the original state. When the lens 22 was observed after 100 hours of continuous operation, no haze was observed on the surface, which appears to be the adhering of fine particles or polluting gas.

  Cloudiness was not observed compared to Comparative Example 1, because the chimney effect by the intake and exhaust ports caused particulates, polluted gas, smoke, etc. to be discharged from the exhaust ports, and the concentration in the case decreased. In addition, it is considered that the natural convection is decelerated by the chimney effect and the number of times that the pollutant gas contacts the lens is reduced.

  In the embodiment, the aluminum plate of the high heat conductive member is used as the material of the case. However, the case is not limited to aluminum, and a high heat conductive member such as copper or carbon may be used. The thermal conductivity of the high thermal conductivity material is preferably 100 W / (m · K) or more at room temperature, and more preferably 200 W / (m · K) or more.

  In addition, the embodiment in which the intake port is provided on the lower wall surface and the exhaust port is provided on the upper wall surface, the embodiment in which the intake port and the exhaust port are provided on the measuring wall surface, the intake port is provided on the lower wall surface, The exhaust port may be provided on the measuring wall surface, the intake port may be provided on the measuring wall surface, and the exhaust port may be provided on the upper wall surface. Alternatively, the intake port may be provided on the lower wall surface and the measuring wall surface, and the exhaust port may be provided on the upper wall surface and the measuring wall surface. Embodiment 5 can also be said to be this embodiment.

  Furthermore, in the embodiment, a rectangular parallelepiped case is used, but it is not particularly limited. Even in this case, if the intake port is provided on the lower side of the laser light source and the exhaust port is provided on the upper side of the laser light source, the same operations and effects as in the embodiment can be obtained.

1 is a configuration diagram of a laser light source device of Embodiment 1. FIG. It is a block diagram of the laser light source apparatus of Embodiment 2. It is a block diagram of the laser light source apparatus of Embodiment 3. It is a block diagram of the laser light source apparatus of Embodiment 4. It is a block diagram of the laser light source apparatus of Embodiment 5. It is a block diagram of the conventional laser light source device. It is a block diagram of another conventional laser light source apparatus.

Explanation of symbols

1 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Case 2 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Laser light source 11a ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・..Top plate (upper wall surface)
11a '..... Bottom plate (lower wall surface)
12a12a'13a13a '... side plate (measurement wall surface)
15, 15a, 15b ... Air inlet 16, 16a, 16b ... Air outlet

Claims (7)

A case in which an inlet and an exhaust port are formed;
A laser light source housed in the case,
The laser light source device according to claim 1, wherein the air inlet is formed at a position below the laser light source, and the air outlet is formed above the laser light source.   The laser light source device according to claim 1, wherein filters are provided at the intake port and the exhaust port.   3. The laser light source device according to claim 1, wherein the intake port is provided on a lower wall surface located on a lower side of the case. 4.   The laser light source device according to claim 1, wherein the exhaust port is provided on an upper wall surface located on the upper side of the case.   The laser light source device according to any one of claims 1 to 4, wherein the intake port is provided on a measurement wall surface located in the measurement of the case.   6. The laser light source device according to claim 1, wherein the exhaust port is provided on a measurement wall surface located in the measurement of the case.   The laser light source device according to claim 3, wherein a wall surface of the case provided with the exhaust port is a high heat conductive member.

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