CN110877155A - System for femtosecond laser parallel processing machine sealing surface micropore texture - Google Patents

System for femtosecond laser parallel processing machine sealing surface micropore texture Download PDF

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Publication number
CN110877155A
CN110877155A CN201911038678.8A CN201911038678A CN110877155A CN 110877155 A CN110877155 A CN 110877155A CN 201911038678 A CN201911038678 A CN 201911038678A CN 110877155 A CN110877155 A CN 110877155A
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femtosecond laser
convex lens
lens
spatial light
light modulator
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CN201911038678.8A
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闫剑锋
谢家旺
李永健
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Tsinghua University
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Tsinghua University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/355Texturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/032Observing, e.g. monitoring, the workpiece using optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention relates to a system for processing a microporous texture of a sealing surface of a machine by femtosecond laser in parallel, belonging to the technical field of femtosecond laser application. The method loads the phase to the femtosecond laser through the spatial light modulator, modulates the spatial distribution of the light field at the focus of the femtosecond laser, and focuses the light beam on the surface of the sealing device to be processed through the 4F system. Through the cooperation of the spatial light modulation and the six-dimensional translation table, the micropore texture on the surface of the sealing device of the parallel rapid processing machine can be realized. The system can obtain light beams with any shapes including circular, triangular and the like by performing light beam space shaping through the spatial light modulator, and the shape of the micropore has any adjustability. The invention has the advantages of parallel processing, high efficiency and good working condition, the shape of the micropore can be adjusted at will, and the material of the sealing device is not limited basically.

Description

System for femtosecond laser parallel processing machine sealing surface micropore texture
Technical Field
The invention relates to a system for processing a microporous texture of a sealing surface of a machine by femtosecond laser in parallel, belonging to the technical field of femtosecond laser application.
Background
Mechanical sealing is the most common technology in modern industry, and surface texture technology has wide application in mechanical sealing surfaces. The micropore texture of the sealing end face can store lubricating oil and form an oil film during working to reduce friction, and can store abrasive dust and reduce abrasion caused by the abrasive dust. Through the reasonable design of the surface micropore texture, the friction can be effectively reduced, the sealing effect is improved, and the service life of the sealing surface is prolonged.
Common materials for mechanical sealing devices are silicon carbide, ceramics and cemented carbides. These materials have a very high hardness and it is not practical to machine a micro-porous texture on their surface in the conventional way. Patent CN103922743A discloses a method for obtaining micropores by high-temperature sintering after adding pore-forming agent. The method can prepare spherical microporous structures with the pore diameter of 15-105 um. However, the method needs high-temperature sintering, the working condition is severe, the energy consumption is high, and the micropore distribution is not uniform. Patent CN205190749U discloses a method for laser processing surface texture, which can process arc-shaped concave cavities with diameter of 60-400um and depth of 3-30 um. However, the method adopts a single-point processing technology, and has low processing efficiency and low speed.
The space beam shaping technology can modulate the space distribution of the femtosecond laser light intensity to obtain the light intensity distribution with a specific shape, and the shaped light beam can be used for processing the specific shape quickly and parallelly. The spatial light modulator is a common spatial light beam shaping tool, and can change the phase of laser light to enable the laser light bands at different positions to have different phases, and the laser light with special phase distribution can obtain a light field with a specific shape after being focused.
Disclosure of Invention
The invention aims to provide a system for processing a microporous texture on a sealing surface of a machine by femtosecond laser in parallel, wherein different phases are loaded on a spatial light modulator, so that a focusing light spot with a specific shape is obtained after the femtosecond laser is focused, and the requirement of rapidly processing the microporous texture on the mechanical sealing surface is met.
The system for processing the microporous texture of the sealing surface of the machine in parallel by the femtosecond laser utilizes a spatial light modulation system to perform spatial modulation on the femtosecond laser so as to realize rapid parallel processing of the microporous texture, and comprises a femtosecond laser, a correction lens group, an attenuation sheet, a reflecting mirror, a diaphragm, an electric shutter, a spatial light modulator, a first convex lens, a second convex lens, a dichroic mirror, an objective lens, a six-dimensional translation table, a focusing lens, an industrial camera and a computer; wherein,
the correction lens group corrects the femtosecond laser emitted by the femtosecond laser device to ensure that the direction of the femtosecond laser is superposed with the optical axis of the correction lens group;
the attenuation sheet adjusts the femtosecond laser energy;
the reflector changes the transmission direction of the femtosecond laser by 90 degrees;
the diaphragm adjusts the beam diameter of the femtosecond laser;
the electric shutter controls the on-off of the femtosecond laser beam;
the objective lens focuses the femtosecond laser on a sealing surface of a machine to be processed;
the spatial light modulator, the first convex lens, the second convex lens and the objective lens form a 4F system, namely the focal lengths of the first convex lens and the second convex lens are the same and are both F, the distance between the first convex lens and the second convex lens is 2F, the optical axes of the first convex lens and the second convex lens are overlapped, the spatial light modulator is arranged on a focusing plane of the first convex lens, the objective lens is arranged on the focus of the second convex lens, and the 4F system loads a phase on femtosecond laser passing through the spatial light modulator, so that the light field distribution corresponding to a micropore texture pattern to be processed is obtained on the focusing plane of the objective lens;
the dichroic mirror, the focusing lens and the industrial camera are installed with the optical axis to form an imaging system, and the processing process is monitored in real time;
the six-dimensional translation table drives the sealing surface of the processing machine to move, and the six-dimensional translation table is matched with the spatial light modulator to process the micropore texture of the sealing surface of the processing machine;
the femtosecond laser, the electric control shutter, the spatial light modulator and the six-dimensional translation stage are connected with a computer through signal lines and are controlled by the computer.
The system for processing the microporous texture of the sealing surface of the machine by femtosecond laser in parallel has the following advantages:
1. the system for processing the microporous texture on the sealing surface of the machine by femtosecond laser in parallel can perform beam space shaping through the spatial light modulator, and can obtain beams with any shapes, including circular, triangular and the like, and the shape of the micropore has any adjustability.
2. The system can process a plurality of micropores at one time through spatial light shaping, and realizes parallel processing of micropore textures, so that the efficiency can be greatly improved, and the uniformity of the processed micropores is good.
3. The system can accurately control the distribution of the microporous texture by matching the space light shaping with the six-dimensional translation table, and the microporous texture distributed according to the specified rule is obtained.
4. Compared with the prior art, the system provided by the invention utilizes femtosecond laser to process, does not need high-temperature and high-pressure conditions, does not generate noise, has good working conditions, and is suitable for sealing devices made of most materials, such as silicon carbide, tungsten carbide, Si3N4 and the like.
Drawings
Fig. 1 is a schematic structural diagram of a system for processing a microporous texture on a sealing surface of a machine by femtosecond laser in parallel.
Fig. 2 is a schematic diagram of the texture to be processed on the mechanical sealing surface in example 1 of the present invention.
Fig. 3 is a diagram of the corresponding phase loaded on the spatial light modulator according to the texture to be processed on the mechanical sealing surface in example 1 of the present invention.
FIG. 4 is a schematic view showing the processing results in example 1 of the present invention.
Fig. 5 is a schematic diagram of the texture to be processed on the mechanical sealing surface in example 2 of the present invention.
Fig. 6 is a diagram of the corresponding phase loaded on the spatial light modulator according to the texture to be processed on the mechanical sealing surface in example 2 of the present invention.
FIG. 7 is a schematic view showing the processing results in example 2 of the present invention.
Fig. 8 is a schematic view of the texture to be processed on the mechanical sealing surface in example 3 of the present invention.
Fig. 9 is a diagram of the corresponding phase loaded on the spatial light modulator according to the texture to be processed on the mechanical sealing surface in example 3 of the present invention.
FIG. 10 is a schematic view showing the processing results in example 3 of the present invention.
In fig. 1, 1 is a femtosecond laser, 2 is a correction lens group, 3 is an attenuation sheet, 4 is a mirror, 5 is a diaphragm, 6 is an electrically controlled shutter, 7 is a spatial light modulator, 8 is a first convex lens, 9 is a second convex lens, 10 is a dichroic mirror, 11 is an objective lens 11, 12 is a seal surface to be processed, 13 is a six-dimensional translation stage, 14 is a focusing lens, 15 is an industrial camera, and 16 is a computer 16.
Detailed Description
The system for processing the micro-pore texture on the sealing surface of the machinery in parallel by the femtosecond laser utilizes a spatial light modulation system to perform spatial modulation on the femtosecond laser, realizes the rapid parallel processing of the micro-pore texture, and has the structure shown in figure 1, and comprises a femtosecond laser 1, a correction lens group 2, an attenuation sheet 3, a reflector 4, a diaphragm 5, an electric shutter 6, a spatial light modulator 7, a first convex lens 8, a second convex lens 9, a dichroic mirror 10, an objective lens 11, a six-dimensional translation stage 13, a focusing lens 14, an industrial camera 15 and a computer 16; wherein,
the correction lens group 2 corrects the femtosecond laser emitted by the femtosecond laser 1, so that the direction of the femtosecond laser is overlapped with the optical axis of the correction lens group 2;
the attenuation sheet 3 regulates the femtosecond laser energy;
the reflector 4 changes the transmission direction of the femtosecond laser by 90 degrees;
the diaphragm 5 adjusts the beam diameter of the femtosecond laser;
the electric shutter 6 controls the on-off of the femtosecond laser beam;
the objective lens 11 focuses the femtosecond laser on a sealing surface 12 of the machine to be processed;
the spatial light modulator 7, the first convex lens 8, the second convex lens 9 and the objective lens 11 form a 4F system, namely the focal lengths of the first convex lens 8 and the second convex lens 9 are the same and are all F, the distance between the first convex lens 8 and the second convex lens 9 is 2F, the optical axes of the first convex lens 8 and the second convex lens 9 are overlapped, the spatial light modulator 7 is arranged on the focusing plane of the first convex lens 8, the objective lens 11 is arranged on the focus of the second convex lens 9, and the 4F system loads the phase of the femtosecond laser passing through the spatial light modulator, so that the light field distribution corresponding to the micropore texture pattern to be processed is obtained on the focusing plane of the objective lens 11;
the dichroic mirror 10, the focusing lens 14 and the industrial camera 15 are installed with the optical axis to form an imaging system, and the processing process is monitored in real time;
the six-dimensional translation table 13 drives the processing machine sealing surface 12 to move, and the processing machine sealing surface is matched with the spatial light modulator 7 to process the micropore texture of the processing machine sealing surface;
the femtosecond laser 1, the electric control shutter 6, the spatial light modulator 7 and the six-dimensional translation stage 13 are connected with a computer 16 through signal lines and are controlled by the computer.
The invention is further described with reference to the following figures and examples.
The femtosecond laser emitted by the femtosecond laser device 1 is corrected by the correction lens group 2, the laser direction is coincided with the optical axis of the correction lens group, then the laser power is adjusted by the attenuation sheet 3, the femtosecond laser passes through the diaphragm 5 after passing through the reflector 4, the beam diameter is adjusted by the diaphragm 5, the femtosecond laser passes through the electronic control shutter 6 and is incident on the spatial light modulator 7, the spatial light modulator 7 loads different phases to the laser irradiated on different positions on the surface of the spatial light modulator, the laser is reflected, the reflected laser is incident on the dichroic mirror 10 after passing through the first convex lens 8 and the second convex lens 9 and is focused by the objective lens 11 and then is irradiated on the sealing surface 12 to be processed, and a micropore texture is processed on the sealing device 12 to.
Further, the dichroic mirror 10, the focusing lens 14 and the industrial camera 15 are mounted with the optical axis to form an imaging system, and the processing process can be monitored on the computer 16 in real time.
Further, the spatial light modulator 7, the first convex lens 8, the first convex lens 9 and the objective lens 11 form a 4F system, that is, the focal lengths of the first convex lens 8 and the second convex lens 9 are the same and are all F, the distance between the first convex lens 8 and the second convex lens 9 is 2F, the optical axes of the first convex lens 8 and the second convex lens 9 are coincident, the spatial light modulator 7 is on the focal plane of the first convex lens 8, and the objective lens 11 is on the focal plane of the second convex lens 9.
In the examples of the present invention, the femtosecond laser used was a titanium sapphire laser of cohenent corporation, with a center wavelength of 800nm, a pulse width of 35fs, and a repetition frequency of 1000 Hz. The spatial light modulator used was PLUTO-NIR-015 from HOLOEYE.
The invention is further described below with reference to the figures and examples.
Example 1: a spiral-line distributed circular micropore texture is processed on a silicon carbide sealing device, and a schematic diagram of the texture to be processed is shown in fig. 2.
The specific processing steps of this example 1 are: the femtosecond laser 1 was turned on and the optical components were mounted as shown in fig. 1. When the correction lens group 2 is adjusted, the direction of the femtosecond laser coincides with the optical axis of the lens, that is, the light beam can irradiate the sealing device 12 to be processed. The attenuator 3 was adjusted to a laser power of 2 mW. The diaphragm 5 was adjusted to make the laser beam diameter 7 mm. The position of the six-dimensional translation stage 13 is adjusted by the computer 16 so that the seal 12 to be machined is in the focal plane of the objective lens 11. The phase map of fig. 3 is then loaded by the computer 16 onto the spatial light modulator 7, and the modulated beam is focused by the 4F system onto the seal 12 to be processed. The dichroic mirror 10, the focusing lens 11 and the industrial camera 15 form an imaging system, images are transmitted to a computer 16, and the processing process is monitored in real time. The computer 16 controls the electric control shutter 6 to open for 1000ms, 1000 pulses are processed on the surface of the sample, the micropore texture shown in figure 4 is obtained, and micropore processing on a spiral line is completed. And then, rotating the six-dimensional translation table by 20 degrees, positioning to a next spiral line, opening the electric control shutter again for 1000ms, finishing the processing, repeating for 18 times, and finishing the processing on the whole circumference.
Example 2: a triangular micropore texture which is distributed in a spiral line is processed on a tungsten carbide sealing device, and the schematic diagram of the texture to be processed is shown in fig. 5.
The specific processing steps of this example 2 are: the femtosecond laser 1 was turned on and the optical components were mounted as shown in fig. 1. When the correction lens group 2 is adjusted, the direction of the femtosecond laser coincides with the optical axis of the lens, that is, the light beam can irradiate the sealing device 12 to be processed. The attenuator 3 was adjusted to a laser power of 4 mW. The diaphragm 5 was adjusted to give a laser beam diameter of 8 mm. The position of the six-dimensional translation stage 13 is adjusted by the computer 16 so that the seal 12 to be machined is in the focal plane of the objective lens 11. The phase map of fig. 6 is then loaded by the computer 16 onto the spatial light modulator 7, and the modulated beam is focused by the 4F system onto the sealing device 12 to be processed. The dichroic mirror 10, the focusing lens 11 and the industrial camera 15 form an imaging system, images are transmitted to a computer 16, and the processing process is monitored in real time. The computer 16 controls the electrically controlled shutter 6 to open for 2000ms, and 2000 pulses are processed on the surface of the sample to obtain the micropore texture shown in fig. 7, so that micropore processing on one spiral line is completed. And then, rotating the six-dimensional translation table by 20 degrees, positioning to a next spiral line, opening the electric control shutter again for 2000ms, finishing the processing, repeating for 18 times, and finishing the processing on the whole circumference.
Example 3: and (3) processing a micro-pore groove texture on the silicon carbide sealing device, wherein a schematic diagram of the texture to be processed is shown in FIG. 8.
The specific processing steps of this example 2 are: the femtosecond laser 1 was turned on and the optical components were mounted as shown in fig. 1. When the correction lens group 2 is adjusted, the direction of the femtosecond laser coincides with the optical axis of the lens, that is, the light beam can irradiate the sealing device 12 to be processed. The attenuator 3 was adjusted to a laser power of 2 mW. The diaphragm 5 was adjusted to make the laser beam diameter 7 mm. The position of the six-dimensional translation stage 13 is adjusted by the computer 16 so that the seal 12 to be machined is in the focal plane of the objective lens 11. The phase diagram of fig. 9 is then loaded onto the spatial light modulator 7 by the control software of the computer 16, and the modulated beam is focused onto the sealing device 12 to be processed through the 4F system. The dichroic mirror 10, the focusing lens 11 and the industrial camera 15 form an imaging system, images are transmitted to a computer 16, and the processing process is monitored in real time. The computer 16 controls the electrically controlled shutter 6 to open for 1000ms, and 1000 pulses are processed on the surface of the sample to obtain the micropore texture shown in fig. 10, so as to complete micropore processing on one spiral line. And then, rotating the six-dimensional translation table by 18 degrees, positioning to a next spiral line, opening the electric control shutter again for 1000ms, finishing the processing, repeating for 20 times, and finishing the processing on the whole circumference.
The above examples are illustrative of the preferred embodiments of the present invention, but the present invention is not limited to the above examples, and any other changes, modifications, substitutions, combinations, and simplifications which are made to depart from the spirit and scope of the present invention are intended to be equivalent substitutions within the scope of the present invention.

Claims (1)

1. A femtosecond laser parallel processing system for a machine sealing surface micropore texture is characterized by comprising a femtosecond laser, a correction lens group, an attenuation sheet, a reflector, a diaphragm, an electric shutter, a spatial light modulator, a first convex lens, a second convex lens, a dichroic mirror, an objective lens, a six-dimensional translation stage, a focusing lens, an industrial camera and a computer; wherein,
the correction lens group corrects the femtosecond laser emitted by the femtosecond laser device to ensure that the direction of the femtosecond laser is superposed with the optical axis of the correction lens group;
the attenuation sheet adjusts the femtosecond laser energy;
the reflector changes the transmission direction of the femtosecond laser by 90 degrees;
the diaphragm adjusts the beam diameter of the femtosecond laser;
the electric shutter controls the on-off of the femtosecond laser beam;
the objective lens focuses the femtosecond laser on a sealing surface of a machine to be processed;
the spatial light modulator, the first convex lens, the second convex lens and the objective lens form a 4F system, namely the focal lengths of the first convex lens and the second convex lens are the same and are both F, the distance between the first convex lens and the second convex lens is 2F, the optical axes of the first convex lens and the second convex lens are overlapped, the spatial light modulator is arranged on a focusing plane of the first convex lens, the objective lens is arranged on the focus of the second convex lens, and the 4F system loads a phase on femtosecond laser passing through the spatial light modulator, so that the light field distribution corresponding to a micropore texture pattern to be processed is obtained on the focusing plane of the objective lens;
the dichroic mirror, the focusing lens and the industrial camera are installed with the optical axis to form an imaging system, and the processing process is monitored in real time;
the six-dimensional translation table drives the sealing surface of the processing machine to move, and the six-dimensional translation table is matched with the spatial light modulator to process the micropore texture of the sealing surface of the processing machine;
the femtosecond laser, the electric control shutter, the spatial light modulator and the six-dimensional translation stage are connected with a computer through signal lines and are controlled by the computer.
CN201911038678.8A 2019-10-29 2019-10-29 System for femtosecond laser parallel processing machine sealing surface micropore texture Pending CN110877155A (en)

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CN111571004A (en) * 2020-05-26 2020-08-25 山东理工大学 Method and system for laser processing of composite micro-texture on surface of nodular cast iron material
CN111716023A (en) * 2020-06-24 2020-09-29 中国科学院西安光学精密机械研究所 Machining device and machining method for high depth-diameter ratio micropores
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CN112605526A (en) * 2020-12-21 2021-04-06 鲁东大学 Parallel marking machine of multifocal
CN113084363A (en) * 2021-03-24 2021-07-09 西湖大学 Device and method for femtosecond laser processing photoresponse liquid crystal elastomer comb teeth
CN113042884A (en) * 2021-05-06 2021-06-29 北京理工大学 Femtosecond laser rotary type double-light-spot light beam micropore machining method
CN114951971A (en) * 2022-04-26 2022-08-30 中国科学院西安光学精密机械研究所 Light path system for femtosecond laser anti-reflection micro-nano structure machining head and debugging method
CN114951971B (en) * 2022-04-26 2023-09-01 中国科学院西安光学精密机械研究所 Optical path system and debugging method for processing head for femtosecond laser processing anti-reflection micro-nano structure

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