CN110871298A - Maintenance method for machining device and machining device - Google Patents

Maintenance method for machining device and machining device Download PDF

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Publication number
CN110871298A
CN110871298A CN201910763142.6A CN201910763142A CN110871298A CN 110871298 A CN110871298 A CN 110871298A CN 201910763142 A CN201910763142 A CN 201910763142A CN 110871298 A CN110871298 A CN 110871298A
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China
Prior art keywords
flatness
holding
imaging
unit
holding surface
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Granted
Application number
CN201910763142.6A
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Chinese (zh)
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CN110871298B (en
Inventor
平沼千纮
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Disco Corp
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Disco Corp
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D79/00—Methods, machines, or devices not covered elsewhere, for working metal by removal of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
    • B23Q16/02—Indexing equipment
    • B23Q16/12—Indexing equipment using optics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/08—Protective coverings for parts of machine tools; Splash guards
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2409—Arrangements for indirect observation of the working space using image recording means, e.g. a camera
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/249—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using image analysis, e.g. for radar, infrared or array camera images
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Abstract

Provided are a maintenance method of a processing device and the processing device, which can easily detect the flatness of a holding surface of a holding table. A plurality of shot images are obtained while changing the height position of the shooting camera (65) according to a plurality of shot positions on the holding surface (311). Based on these images, the focal position of the imaging camera (65) associated with each imaging part is detected. Then, the difference between the plurality of focal positions is obtained, and the flatness of the holding surface (311) is detected based on the difference. Since a measuring instrument such as a dial gauge is not required to detect the flatness of the holding surface (311), the flatness of the holding surface (311) can be easily detected.

Description

Maintenance method for machining device and machining device
Technical Field
The present invention relates to a maintenance method of a machining apparatus and a machining apparatus.
Background
When the cutting depth of the cutting device is unstable, it is suspected that the flatness of the holding surface of the holding table is deteriorated.
In the cutting apparatus, a holding table (chuck table) is mounted on a table base. The holding table is replaced according to the size of the workpiece. Therefore, the holding table may come into contact with the table base at the time of replacement, and the holding table or the table base may be scratched.
Further, when the holding table is not frequently replaced, the holding table and the table base may rust due to the cutting water entering between them, and the flatness of the holding surface of the holding table may deteriorate due to the damage and rust.
In order to confirm the flatness of the holding surface of the holding table, a dial gauge is generally fixed to the spindle using a fixture for fixing described in patent document 1, for example. Then, the height position of the holding surface of the holding table placed on the table base is measured using a dial gauge.
Patent document 1: japanese patent laid-open publication No. 2013-108823
However, the dial gauge may not be present. It is desirable that the flatness of the holding surface of the holding table can be detected even at such timing.
Disclosure of Invention
The invention aims to provide a maintenance method of a processing device and the processing device, which can detect the flatness of a holding surface of a holding workbench even without a measuring device such as a dial indicator.
A maintenance method of the present invention (this maintenance method) is a maintenance method of a machining apparatus including: a holding table including a holding surface for holding a workpiece; a processing unit which processes the workpiece held by the holding table; and an imaging unit having an imaging camera for imaging the workpiece held by the holding table, wherein the maintenance method comprises the steps of: a 1 st focal position detecting step of forming a plurality of captured images by capturing the 1 st part of the holding surface of the holding table while relatively moving the capturing camera in a direction to approach the 1 st part, and detecting the 1 st focal position of the capturing camera based on the plurality of captured images; a 2 nd focal position detecting step of forming a plurality of captured images by capturing the 2 nd part of the holding surface of the holding table while relatively moving the capturing camera in a direction in which the 2 nd part different from the 1 st part approaches the holding surface, and detecting the 2 nd focal position of the capturing camera based on the plurality of captured images formed; and a flatness detection step of detecting the flatness of the holding surface based on the difference between the 1 st focal position and the 2 nd focal position.
In the maintenance method, when the flatness detected in the flatness detection step is out of a predetermined allowable flatness value, the machining device including the holding table may be repaired or the holding table may be replaced.
The processing apparatus (the present processing apparatus) of the present invention includes: a holding table including a holding surface for holding a workpiece; a processing unit which processes the workpiece held by the holding table; and an imaging unit having an imaging camera for imaging the workpiece held by the holding table, wherein the imaging unit has a moving unit for moving the imaging camera relative to the holding table, the processing apparatus has a controller for controlling at least the imaging unit, and the controller has: an imaging unit control unit that controls the imaging unit as follows: performing imaging a plurality of times while relatively moving the imaging camera in a direction of approaching each part with respect to a plurality of parts of the holding surface of the holding table at a predetermined timing, thereby forming a plurality of captured images in accordance with the plurality of parts of the holding surface; a captured image storage unit that stores a plurality of captured images; a focal position detecting unit that detects a focal position of the imaging camera for each of the plurality of portions based on the plurality of captured images stored in the captured image storing unit; a flatness detection unit that detects the flatness of the holding surface based on a plurality of focal positions detected for the plurality of portions; a flatness allowable value storage unit that stores a preset flatness allowable value; and a pass/fail determination unit that performs pass/fail determination by comparing the flatness of the holding surface detected by the flatness detection unit with the allowable flatness value, wherein the machining apparatus further includes a warning transmission unit that transmits a warning when the pass/fail determination unit determines that the holding surface is not flat.
In the maintenance method, the flatness of the holding surface is detected based on a difference between a focal position of the imaging camera when the imaging camera images the 1 st portion of the holding surface and a focal position of the imaging camera when the imaging camera images the 2 nd portion of the holding surface.
When the flatness detected by the maintenance method is out of the allowable value of the flatness set in advance, the machining device including the holding table is repaired or the holding table is replaced, whereby the machining process using the machining device can be appropriately performed.
In the present processing apparatus, the controller captures a plurality of portions of the holding surface, stores a captured image, detects focal positions of the plurality of portions, determines whether or not the flatness is acceptable, and transmits a warning when the result of the determination of the acceptability is negative.
Drawings
Fig. 1 is a perspective view showing the structure of a cutting device.
Fig. 2 is an exploded perspective view showing the structure of the holding table.
Fig. 3 is a sectional view showing the structure of the holding table.
Fig. 4 is a block diagram showing the configuration of a controller of the processing apparatus.
Fig. 5 (a) and (b) are explanatory views showing imaging regions set on the holding surface.
Fig. 6 is an explanatory diagram showing a case where the imaging part of the holding surface is imaged while changing the height of the imaging camera.
Fig. 7 is a block diagram showing the structure of other controllers in the processing apparatus.
Description of the reference symbols
1: a processing device; 3: a housing; 10: a base station; 14: a gate post; 5: a waterproof cover; 13: a cutting section moving mechanism; 30: a holding table section; 31: a holding table; 32: a table base; 311: a holding surface; 12: a transposition feeding mechanism; 120: a ball screw; 121: a guide rail; 122: an electric motor; 123: a Y-axis table; 16: a cutting-in feeding mechanism; 160: a ball screw; 161: a guide rail; 162: an electric motor; 163: a support member; 6: a cutting portion; 61: a housing; 65: a shooting camera; 7: a controller; 70: a general control section; 73: a memory; 17: a controller; 71: a cutting process control unit; 75: a maintenance control unit; 171: a shooting unit control section; 173: a captured image storage unit; 175: a focus position detection unit; 177: a flatness detection unit; 179: a flatness allowable value storage unit; 181: a qualification judging section; 183: a warning transmitting unit; 9: an input/output section; 91: a display lamp; 93: a touch panel; 95: a loudspeaker.
Detailed Description
The maintenance method of the present embodiment (the present maintenance method) performs maintenance on the machining apparatus 1 shown in fig. 1. First, the structure of the processing apparatus 1 will be explained.
As shown in fig. 1, the machining apparatus 1 is an apparatus that performs cutting by rotating a cutting tool included in the cutting unit 6 and cutting into a workpiece held by the holding table unit 30.
The processing apparatus 1 includes a housing 3, and a base 10 and a gate post 14 provided upright on the base 10 are provided in the housing 3. The processing apparatus 1 further includes input/output means 9 as a user interface on the side surface and the upper surface of the housing. The machining apparatus 1 further includes a controller 7 that controls each component of the machining apparatus 1.
The center of the upper surface of the base 10 is opened in a rectangular shape so as to extend in the X-axis direction. A corrugated waterproof cover 5 is provided so as to cover the opening. A cleaning table 40 for cleaning the cut workpiece is provided on the + Y axis side of the waterproof cover 5. The waterproof cover 5 is provided with a holding table portion 30 that is rotatable about the Z axis. The holding table section 30 sucks and holds the workpiece.
A case 53 for storing the work before cutting is disposed on the-Y axis side of the waterproof cover 5. In fig. 1, the cartridge 53 is shown only by a frame in order to clearly show other components. The workpiece in the magazine 53 is placed on the waterproof cover 5 by a workpiece conveyance member not shown when the workpiece is cut.
Further, the waterproof cover 5 is provided with a pair of L-shaped positioning members 51. The positioning member 51 clamps the work placed on the waterproof cover 5 from the + X axis direction and the-X axis direction and disposes the work at a predetermined initial position.
A cutting feed mechanism (not shown) for moving the holding table section 30 in the X-axis direction is disposed below the waterproof cover 5. For example, the cutting feed mechanism moves the holding table section 30 to a position below the workpiece disposed at the initial position. The cutting feed mechanism moves the holding table unit 30, which holds the workpiece by suction, to a predetermined cutting position. In addition, when cutting the workpiece, the cutting feed mechanism moves the workpiece in the cutting feed direction (X-axis direction) via the holding table portion 30.
A gate post 14 is provided upright on the base 10 on the rear side (the side in the X-axis direction) so as to straddle the waterproof cover 5. A cutting portion moving mechanism 13 for moving the cutting portion 6 is provided on the front surface (+ X axis direction side surface) of the gate post 14. The cutting portion moving mechanism 13 performs index feed of the cutting portion 6 in the Y-axis direction and cut-in feed in the Z-axis direction. The cutting section moving mechanism 13 includes an index feed mechanism 12 that moves the cutting section 6 in an index feed direction, and a cutting feed mechanism 16 that moves the cutting section 6 in a cutting feed direction.
The index feed mechanism 12 is disposed on the front surface of the gate post 14. The indexing-feed mechanism 12 reciprocates the cutting-feed mechanism 16 and the cutting unit 6 in the Y-axis direction.
The index feed mechanism 12 includes: a pair of guide rails 121 extending in the Y-axis direction; a Y-axis table 123 mounted on the guide rail 121; a ball screw 120 extending parallel to the guide rail 121; and a motor 122 that rotates the ball screw 120.
The pair of guide rails 121 are disposed on the front surface of the gate post 14 in parallel with the Y-axis direction. The Y-axis table 123 is provided on the pair of guide rails 121 so as to be slidable along the guide rails 121. The cutting feed mechanism 16 and the cutting unit 6 are mounted on the Y-axis table 123.
The ball screw 120 is screwed to a nut portion (not shown) provided on the back surface side of the Y-axis table 123. The motor 122 is coupled to one end of the ball screw 120, and rotationally drives the ball screw 120. By rotationally driving the ball screw 120, the Y-axis table 123, the incision feed mechanism 16, and the cutting unit 6 move along the guide rail 121 in the Y-axis direction, which is an index feed direction.
The cutting feed mechanism 16 reciprocates the cutting portion 6 in the Z-axis direction (vertical direction). The incision feeding mechanism 16 includes: a pair of guide rails 161 extending in the Z-axis direction; a support member 163 mounted on the guide rail 161; a ball screw 160 extending parallel to the guide rail 161; and a motor 162 that rotates the ball screw 160.
The pair of guide rails 161 is disposed on the Y-axis table 123 in parallel with the Z-axis direction. The support member 163 is provided on the pair of guide rails 161 so as to be slidable along the guide rails 161. A cutting portion 6 is attached to a lower end portion of the support member 163.
The ball screw 120 is screwed to a nut portion (not shown) provided on the back surface side of the support member 163. The motor 162 is coupled to one end of the ball screw 160, and rotationally drives the ball screw 160. By rotationally driving the ball screw 160, the support member 163 and the cutting portion 6 move along the guide rail 161 in the Z-axis direction which is the cutting feed direction.
The cutting unit 6 is configured to perform cutting processing on the workpiece held by the holding table unit 30. The cutting portion 6 has a housing 61 provided at the lower end of the support member 163. Further, the cutting portion 6 includes: a rotating shaft extending in the Y-axis direction; a cutting tool attached to the rotating shaft; and a motor (both not shown) for driving the rotary shaft. The cutting portion 6 corresponds to an example of a machining means. In addition, a photographing camera 65 is provided on a side surface of the housing 61 in the cutting portion 6.
The imaging camera 65 is attached to the side surface of the housing 61 on the + X axis direction side so as to move together with the cutting unit 6, and includes, for example, a microscope. The photographing camera 65 is configured to photograph a portion located below the photographing camera 65. The imaging camera 65 can image, for example, the holding surface 311 (see fig. 2) of the holding table section 30 or the workpiece placed on the holding surface 311. The imaging camera 65 is generally used to observe the workpiece during the processing.
Next, a structure of the holding table unit 30 will be described. As shown in fig. 2, the holding table section 30 includes a holding table 31 for holding the workpiece and a table base 32 disposed below the holding table 31.
The holding table 31 has a disk-shaped holding portion 310 and a frame 312 for housing the holding portion 310. The holding portion 310 is formed of, for example, porous ceramic. The upper surface of the holding portion 310 is a holding surface 311 for sucking and holding the workpiece from below.
As shown in fig. 3, the lower surface of the frame 312 is placed on the bottom portion 313 of the table base 32. A recess 314 that engages with the alignment ring 33 is formed in the center of the bottom portion 313. A suction passage 315 is formed in the concave portion 314, and the suction passage 315 penetrates the bottom portion 313 in the vertical direction and communicates with the holding portion 310. In addition, an engagement recess 316 that engages with the male member is formed in the bottom portion 313. In the housing 312 configured as described above, the holding portion 310 is housed so that the holding surface 311 is exposed upward. This forms the holding table 31 in which the holding portion 310 and the frame 312 are integrated.
The table base 32 includes: a front surface 32a opposed to the holding table 31; a positioning portion 320 for positioning the holding table 31; and a workpiece suction hole 325 and a holding table suction hole 326 penetrating the table base 32.
The front surface 32a of the table base 32 supports the bottom 313 of the frame 312 from below. The work sucking suction holes 325 are suction holes for sucking the work to the holding surface 311 of the holding table 31. The holding table suction holes 326 are suction holes for sucking the holding table 31 to the front surface 32a of the table base 32.
The positioning portion 320 engages with the engagement recess 316 of the bottom portion 313 of the frame 312 to position the holding table 31 at a predetermined position of the table base 32. As shown in the enlarged view of fig. 3, the positioning portion 320 has: a positioning pin 321 as a male member; a compression coil spring 323 disposed inside the positioning pin 321; and a housing recess 324 opened in the front surface 32a of the table base 32. The housing recess 324 houses the positioning pin 321 and the compression coil spring 323.
The positioning pin 321 is formed in a substantially cylindrical shape having a lower opening, and has a hollow portion 321a therein. A compression coil spring 323 is housed in the hollow portion 321 a. A hooking hole 322 having a smaller diameter than the hollow 321a is formed on the top surface of the hollow 321 a.
The lower end of the compression coil spring 323 is fixed to the bottom surface of the housing recess 324. The upper end of the compression coil spring 323 abuts on the periphery of the hooking hole 322 on the top surface of the hollow portion 321 a. Thereby, the positioning pin 321 is biased upward by the compression coil spring 323. Therefore, the positioning pin 321 can protrude from the front surface 32a of the table base 32 and engage with the engagement recess 316 of the frame 312. The holding table 31 is positioned and fixed to the table base 32 by the positioning pins 321 engaging with the engaging recesses 316.
When the holding table 31 is positioned and fixed to the table base 32, the suction passage 315 of the housing 312 and the workpiece suction hole 325 communicate with each other. The suction source 34 is connected to the workpiece suction hole 325 and the holding table suction hole 326 via a solenoid valve 327.
The suction source 34 sucks the bottom portion 313 of the holding table 31 through the holding table suction holes 326. Thereby, the front surface 32a of the table base 32 sucks and holds the holding table 31. Thus, the holding table 31 is attached to the table base 32. The suction source 34 sucks the workpiece placed on the holding surface 311 of the holding table 31 through the workpiece suction holes 325. Thereby, the holding surface 311 sucks and holds the workpiece.
The holding table unit 30 has a θ table, not shown, on the table base 32 side. The θ table supports the holding table 31 via a table base 32. The θ table is configured to be rotatable in the XY plane. Therefore, the θ stage can rotationally drive the holding table 31 in the XY plane.
The controller 7 shown in fig. 1 is a control unit of the processing apparatus 1. As shown in fig. 4, the controller 7 includes: a general-purpose control unit 70 that controls the operation of the machining apparatus 1; and a memory 73 that stores various data and programs.
The general-purpose control unit 70 performs various processes to integrally control the respective components of the machining apparatus 1. For example, the general-purpose control unit 70 controls the cutting feed mechanism, the cutting unit moving mechanism 13 (the motor 122 and the motor 162), and the θ table of the holding table unit 30 in accordance with an instruction from the user to determine the position of the workpiece to be cut by the cutting unit 6. The general-purpose control unit 70 controls the motor of the cutting unit 6 to perform cutting on the workpiece. The general-purpose control unit 70 controls the image pickup camera 65 to pick up an image of the holding surface 311 of the holding table unit 30 or the workpiece held by the holding surface 311.
As shown in fig. 1, the input/output section 9 as a user interface includes: a display lamp 91 provided on the upper surface of the housing 3, and a touch panel 93 and a speaker 95 provided on the side surface of the housing 3. The display lamp 91 gives a warning to the user by light. The touch panel 93 displays an image to a user and accepts input from the user. The speaker 95 implements sound display to the user.
In the present embodiment, the processing apparatus 1 is configured to execute each step of the maintenance method in accordance with an instruction of the user received via the touch panel 93.
The procedure of the maintenance method will be described below. In the maintenance method, the flatness of the holding surface 311 of the holding table 31 in the holding table unit 30 is detected, and a predetermined operation is performed based on the detection result. In the present embodiment, the flatness on the holding surface 311 is detected from the image captured by the capturing camera 65.
(1) Focal position detecting step
In this step, the user controls the imaging unit to image the holding surface 311 of the holding table 31. For example, a plurality of positions on the holding surface 311 are imaged a plurality of times while changing the imaging position in the Z-axis direction. Thereby, a plurality of captured images are formed for a plurality of portions of the holding surface 311.
In the present embodiment, the imaging means includes the imaging camera 65 and a configuration in which a part (imaging part) of the holding surface 311 imaged by the imaging camera 65 is changed. The imaging part is determined based on the relative positional relationship between the imaging camera 65 and the holding surface 311 and the rotation angle of the holding surface 311. The imaging unit further includes a configuration for changing the position of the imaging camera 65 along the Z-axis direction on the imaging portion.
Hereinafter, a configuration of changing the relative positional relationship between the imaging camera 65 and the holding surface 311, a configuration of changing the rotation angle of the holding surface 311, and a configuration of changing the position of the imaging camera 65 along the Z-axis direction on the imaging portion are also referred to as a moving means.
Here, in the present embodiment, the position of the holding table 31 in the X-axis direction is determined by a cutting feed mechanism (not shown) located below the waterproof cover 5. Further, the rotational position in the XY plane on the holding surface 311 is determined by a θ table (not shown) holding the table 31.
On the other hand, the position of the imaging camera 65 in the Y-axis direction is determined by the index feed mechanism 12 of the cutting unit moving mechanism 13. In addition, the position of the photographing camera 65 in the Z-axis direction is determined by the incision feeding mechanism 16.
As described above, in the present embodiment, the cutting feed mechanism, the θ table, the index feed mechanism 12, and the cutting feed mechanism 16 correspond to an example of the moving means. The configuration in which the imaging camera 65 is added to the moving means corresponds to an example of the imaging means.
Therefore, more specifically, in the present embodiment, the user controls the cutting feed mechanism, the θ table, and the index feed mechanism 12 to set any one of the portions of the holding surface 311 as the imaging portion of the imaging camera 65. The user controls the incision feed mechanism 16 to take a plurality of images while changing the position of the imaging camera 65 along the Z-axis direction.
Here, the Z-axis direction (approaching or separating direction) is a direction in which the imaging camera 65 approaches or separates from the imaging portion of the holding surface 311. Hereinafter, the distance from the reference surface of the machining device 1 to the photographing camera 65 in the approaching or separating direction is expressed as the height position of the photographing camera 65. The reference surface of the processing apparatus 1 is, for example, a virtual plane including an ideal holding surface (for example, an extremely flat holding surface) 311 of the holding table 31. Then, the user takes a plurality of images corresponding to different height positions of the photographing camera 65 in accordance with the photographing part while changing the photographing part on the holding surface 311.
For example, the user sets the point a on the holding surface 311 shown in fig. 5 (a) as the imaging region. Then, as shown in fig. 6, a plurality of images are captured while changing the height position H of the capturing camera 65. Then, the user takes a plurality of images while changing the height position H of the camera 65 similarly with points b, c, d, and e shown in fig. 5 (a) as the imaging area. The captured image is stored in the memory 73, for example.
Next, the user detects the focal position of the imaging camera 65 for each imaging region from the captured image. That is, the user detects a plurality of focal positions of the photographing camera 65 corresponding to a plurality of photographing parts.
At this time, the user obtains sharpness values from a plurality of captured images of the imaging region a shown in fig. 5 (a) by, for example, the general-purpose control unit 70. Then, the user specifies the captured image having the highest sharpness value, and detects a height position H (see fig. 6) associated with the captured image as the focal position of the imaging camera 65 at the imaging portion a. The user similarly detects the focal positions of the photographing cameras 65 at the photographing parts b, c, d, and e.
(2) Flatness detection step
In this step, the user detects the flatness of the holding surface 311 from a plurality of focus positions detected for a plurality of imaging portions. For example, the user calculates differences between a plurality of focal positions, and detects the maximum value of the differences as the flatness.
For example, the difference between the focal position of the imaging region a and the focal positions of the other imaging regions b to e shown in fig. 5 (a) is b: -2(μm), c: +2(μm), d: +1(μm), e: in the case of 0(μm), the maximum value of the difference is 4 μm. In this case, the user detects the flatness of the imaging portions a to e of the holding surface 311 as ± 4 μm.
(3) Step of determining whether flatness is acceptable or not
Next, the user determines whether or not the detected flatness of the holding surface 311 is within a preset allowable value of flatness. For example, in the example shown in fig. 5 (a), the flatness of the holding surface 311 is ± 4 μm. In this regard, when the flatness tolerance is ± 3 μm, the user determines that the flatness of the holding surface 311 deviates from the flatness tolerance.
When the flatness of the holding surface 311 deviates from the allowable flatness value, the user repairs the machining device 1 including the holding table 31 or replaces the holding table 31, for example.
Further, after the step of determining whether or not the holding surface 311 is flat, the user may perform the flatness detection of the holding surface 311 again. The user takes a different part from the first image capture on the holding surface 311 as an image capture part. For example, when points a to e shown in fig. 5 (a) are taken as imaging regions in the first detection, the user controls the θ stage of the holding stage unit 30 to rotate the holding stage 31 clockwise by 90 degrees. Then, points f to j shown in fig. 5 (b) are set as imaging regions, and a plurality of images are captured while changing the height position H of the imaging camera 65.
Then, as described above, the focal positions of the imaging cameras 65 at the imaging parts f to j are detected, and the maximum value of the differences in the focal positions at the imaging parts f to j is detected as the flatness.
Here, the difference between the focal position of the imaging region f and the focal positions of the other imaging regions g to j shown in fig. 5 (b) is g: +1(μm), h: 0(μm), i: +2(μm), j: in the case of-2 (μm), the maximum value of the difference is 4 μm. In this case, the user detects the flatness of the imaging portions f to j of the holding surface 311 as ± 4 μm.
In this case, since the flatness tolerance is also ± 3 μm, it is determined that the flatness of the holding surface 311 deviates from the flatness tolerance.
In this example, even if the holding table 31 is rotated clockwise by 90 degrees, the flatness of the holding surface 311 is substantially the same value. Therefore, the inclination of the rotation axis of the holding table 31 is considered to be small. Therefore, one of the causes of the deviation of the flatness from the allowable value is to cause minute damage (burrs) or rust on the holding table 31 or the table base 32.
When a slight damage or rust occurs between the holding table 31 and the table base 32, that is, on the surfaces of the holding table 31 and the table base 32 facing each other, it is effective to flatten these surfaces with an oil stone or the like in order to improve the flatness of the holding surface 311. When the flattening by the oilstone or the like is insufficient, it is also effective to replace the holding table 31 and/or the table base 32.
In addition, when the rotation axis of the table 31 is kept inclined, it is effective to repair the rotation axis, that is, to reassemble the rotation axis or to appropriately replace a component of the rotation axis.
In the example shown in fig. 5 (a), the user detects the focal positions of the 5 imaging regions a to e in the focal position detecting step. Then, the flatness of the holding surface 311 is detected from the 5 focal positions associated with the imaging regions a to e. However, the imaging region for detecting the focal position may be 2 or more. Therefore, the maintenance method can be implemented as follows.
(1a) 1 st focal position detecting step
The user performs imaging a plurality of times while relatively moving the imaging camera 65 in the Z-axis direction (approaching or separating direction) toward the 1 st portion on the 1 st portion of the holding surface 311. Thereby, a plurality of captured images are formed for the 1 st region. The user detects the 1 st focal position, which is the focal position of the photographing camera 65 at the 1 st part, from these plural photographed images.
(2a) 2 nd focal position detecting step
Next, the user performs imaging a 2 nd portion different from the 1 st portion on the holding surface 311 a plurality of times while relatively moving the imaging camera 65 in the Z-axis direction in a direction approaching the 2 nd portion. Thereby, a plurality of captured images are formed for the 2 nd site. The user detects the 2 nd focal position, which is the focal position of the photographing camera 65 at the 2 nd part, from these plural photographed images.
(3a) Flatness detection step and quality determination step
Then, the user detects the flatness of the holding surface 311 from the difference between the 1 st focal position and the 2 nd focal position. Then, the user determines whether or not the detected flatness of the holding surface 311 is within a preset allowable value of flatness.
When the flatness of the holding surface 311 deviates from the allowable flatness value, the user repairs the machining device 1 including the holding table 31 or replaces the holding table 31, for example.
As described above, in the present maintenance method, the flatness of the holding surface 311 holding the workpiece is detected using the imaging camera 65 provided in the machining device 1 for imaging the workpiece. Therefore, a plurality of imaging regions including, for example, the 1 st region and the 2 nd region are set on the holding surface 311. Then, the imaging camera 65 is relatively moved in a direction approaching each imaging region to image each imaging region. Thereby, a plurality of captured images are formed for each captured region.
Further, the focal positions of the imaging camera 65, for example, the 1 st focal position and the 2 nd focal position, associated with the respective imaging parts are detected from a plurality of captured images formed for each imaging part. Then, the difference between the plurality of focal positions is obtained, and the flatness of the holding surface 311 is detected based on the difference.
In this regard, for example, if the flatness of the holding surface 311 is extremely good, distances in the approaching or separating direction between the plurality of imaging positions on the holding surface 311 and the imaging camera 65 at the same height position are extremely similar to each other. Therefore, the focal positions of the photographing cameras 65 at a plurality of photographing parts are also extremely similar.
On the other hand, if the flatness of the holding surface 311 is low, the distance in the approaching or separating direction between the imaging camera 65 at the same height position and each imaging part on the holding surface 311 varies depending on the imaging part. Therefore, the focal position of the imaging camera 65 at each imaging region also varies depending on the imaging region. Therefore, by using the focal positions of the photographing camera 65 with respect to a plurality of photographing parts, the flatness of the holding surface 311 can be appropriately detected.
In this way, in the maintenance method, the flatness of the holding surface 311 of the holding table 31 can be detected by using the imaging camera 65 for observing the workpiece provided in the machining device 1. Therefore, according to the maintenance method, a measuring instrument such as a dial gauge is not necessary to detect the flatness of the holding surface 311. Therefore, the flatness of the holding surface 311 can be easily detected.
In addition, in the above-described embodiment, the user detects the focal position at each imaging part from a plurality of captured images, and detects the flatness of the holding surface 311 from a plurality of focal positions. Instead, the focus position and the flatness of the holding surface 311 at each imaging region may be detected by the general control unit 70 in accordance with the instruction of the user.
In the above embodiment, the user detects the flatness of the holding surface 311 at an arbitrary timing by his/her own judgment. Instead, the machining device 1 may be configured to detect the flatness of the holding surface 311 at a predetermined timing, for example, when the machining device 1 is powered on. In this case, the processing device 1 is preferably configured to perform the process of detecting the flatness of the holding surface 311 without a user's instruction.
In this case, the machining device 1 includes a controller 17 shown in fig. 7 instead of the controller 7 shown in fig. 4, for example.
The controller 17 includes, for example, a cutting control unit 71 that performs control related to cutting, the memory 73, and a maintenance control unit 75.
The cutting control unit 71 controls the cutting feed mechanism, the cutting unit moving mechanism 13, the holding table unit 30, and the cutting unit 6 in accordance with the instruction of the user to perform cutting on the workpiece, as in the general control unit 70 described above.
The maintenance control unit 75 detects the flatness of the holding surface 311 of the holding table 31, and performs a predetermined operation based on the detection result. In the present embodiment, the maintenance control unit 75 detects the flatness on the holding surface 311 from the image captured by the imaging camera 65.
As shown in fig. 7, the maintenance control unit 75 includes: an imaging unit control unit 171 that controls imaging; a captured image storage unit 173 that stores a captured image; a focus position detection unit 175 that detects the focus position of the imaging camera 65; a flatness detection unit 177 for detecting the flatness of the holding surface 311; a flatness allowable value storage unit 179 for storing a flatness allowable value; a pass/fail determination unit 181 for determining whether the detected flatness is pass or fail; and a warning transmitting unit 183 for giving a warning to the user.
The imaging unit control unit 171 controls the imaging unit to image the holding surface 311 of the holding table 31. For example, in the present embodiment, the imaging unit control unit 171 controls the imaging unit to image a plurality of locations on the holding surface 311 a plurality of times while relatively moving the imaging camera 65 in the Z-axis direction (approaching or separating direction) with respect to each location at a predetermined timing. Thus, the imaging unit control unit 171 forms a plurality of captured images for each of the plurality of captured portions of the holding surface 311.
As described above, in the present embodiment, the cutting feed mechanism, the θ table, the index feed mechanism 12, and the cutting feed mechanism 16 correspond to an example of the moving means, and a configuration in which the imaging camera 65 is added to the moving means corresponds to an example of the imaging means.
Therefore, more specifically, in the present embodiment, the imaging unit control unit 171 controls the cutting feed mechanism, the θ table, the index feed mechanism 12, and the cutting feed mechanism 16 to set any one of the portions of the holding surface 311 as the imaging portion of the imaging camera 65. The imaging part captures a plurality of images while changing the height position of the imaging camera 65. The imaging unit control unit 171 also images a plurality of images corresponding to different height positions for each imaging region while changing the imaging region on the holding surface 311.
The captured image storage 173 stores the image captured by the imaging unit control unit 171. The focal position detecting unit 175 detects the focal position of the imaging camera 65 for each imaging region based on the captured image stored in the captured image storage unit 173. That is, the focal position detecting unit 175 detects a plurality of focal positions of the imaging camera 65 corresponding to a plurality of imaging portions.
At this time, the focal position detecting unit 175 obtains sharpness values of a plurality of captured images associated with each captured region. The focal position detecting unit 175 specifies the captured image having the highest sharpness value, and detects the height position H (see fig. 6) of the captured image as the focal position of the imaging camera 65 at each imaging region.
The flatness detection unit 177 detects the flatness of the holding surface 311 from a plurality of focus positions detected for each of a plurality of imaging regions. For example, the flatness detection unit 177 obtains differences between a plurality of focus positions, and detects the maximum value of the differences as the flatness. The flatness detecting section 177 may display the detected flatness of the holding surface 311 on the touch panel 93 of the input-output member 9 shown in fig. 1.
The flatness allowable value storage unit 179 stores allowable values of the flatness of the holding surface 311. The allowable flatness value is preset and stored in the allowable flatness value storage unit 179. The acceptance/rejection determination unit 181 compares the flatness of the holding surface 311 detected by the flatness detection unit 177 with the allowable flatness value stored in the allowable flatness value storage unit 179 to determine acceptance/rejection of the holding surface 311. For example, when the comparison result is equal to or less than a predetermined value, the non-defective determination unit 181 determines that the flatness of the holding surface 311 is sufficiently good and is defective. On the other hand, when the comparison result is larger than the predetermined value, the non-defective determination unit 181 determines that the flatness of the holding surface 311 is defective, and thus it is defective (no). The acceptance determination unit 181 may display the determination result on the touch panel 93.
The warning transmitting unit 183 issues a warning to the user when the eligibility determination unit 181 determines that the user is not present. In this case, the warning transmitter 183 may drive the display lamp 91 shown in fig. 1 to give a warning to the user by light, for example. The warning transmitter 183 may issue a warning to the user by sound through the speaker 95. The warning transmitter 183 may display negative information indicating that the holding surface 311 is not flat on the touch panel 93.
In this configuration, the user can arbitrarily set the detection timing of the flatness of the holding surface 311. Therefore, the user can easily and regularly perform the detection (inspection) of the flatness of the holding surface 311. Further, the user can easily recognize the deterioration of the flatness of the holding surface 311 by the warning generated by the warning transmitting unit 183.
In the present embodiment, a cutting device that cuts a workpiece is used as the machining device 1. However, the processing apparatus 1 is not limited thereto, and may be a laser processing apparatus. The laser processing apparatus may be configured to: the object to be processed placed on the holding surface 311 of the holding table 31 is irradiated with a laser beam to form a modified layer, and then the object is divided along the modified layer.

Claims (3)

1. A maintenance method for a machining apparatus, the machining apparatus including:
a holding table including a holding surface for holding a workpiece;
a processing unit which processes the workpiece held by the holding table; and
an imaging unit having an imaging camera for imaging the workpiece held by the holding table,
wherein the content of the first and second substances,
the maintenance method comprises the following steps:
a 1 st focal position detecting step of forming a plurality of captured images by capturing the 1 st part of the holding surface of the holding table while relatively moving the capturing camera in a direction to approach the 1 st part, and detecting the 1 st focal position of the capturing camera based on the plurality of captured images;
a 2 nd focal position detecting step of forming a plurality of captured images by capturing the 2 nd part of the holding surface of the holding table while relatively moving the capturing camera in a direction in which the 2 nd part different from the 1 st part approaches the holding surface, and detecting the 2 nd focal position of the capturing camera based on the plurality of captured images formed; and
a flatness detection step of detecting the flatness of the holding surface based on the difference between the 1 st focal position and the 2 nd focal position.
2. The maintenance method according to claim 1,
when the flatness detected in the flatness detection step deviates from a preset allowable value of flatness, the machining device including the holding table is repaired or the holding table is replaced.
3. A processing apparatus, comprising:
a holding table including a holding surface for holding a workpiece;
a processing unit which processes the workpiece held by the holding table; and
an imaging unit having an imaging camera for imaging the workpiece held by the holding table,
wherein the content of the first and second substances,
the photographing unit has a moving unit that moves the photographing camera with respect to the holding table,
the processing device is provided with a controller for controlling at least the shooting unit,
the controller has:
an imaging unit control unit that controls the imaging unit as follows: performing imaging a plurality of times while relatively moving the imaging camera in a direction of approaching each part with respect to a plurality of parts of the holding surface of the holding table at a predetermined timing, thereby forming a plurality of captured images in accordance with the plurality of parts of the holding surface;
a captured image storage unit that stores a plurality of captured images;
a focal position detecting unit that detects a focal position of the imaging camera for each of the plurality of portions based on the plurality of captured images stored in the captured image storing unit;
a flatness detection unit that detects the flatness of the holding surface based on a plurality of focal positions detected for the plurality of portions;
a flatness allowable value storage unit that stores a preset flatness allowable value; and
a pass/fail determination unit for performing pass/fail determination by comparing the flatness of the holding surface detected by the flatness detection unit with the allowable flatness value,
the machining device further includes a warning transmitter that generates a warning when the non-defective determination unit determines that the machining device is defective.
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