CN110828605A - 基于双控制栅的复合介质栅可控自增益光敏探测器件 - Google Patents
基于双控制栅的复合介质栅可控自增益光敏探测器件 Download PDFInfo
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- CN110828605A CN110828605A CN201910966070.5A CN201910966070A CN110828605A CN 110828605 A CN110828605 A CN 110828605A CN 201910966070 A CN201910966070 A CN 201910966070A CN 110828605 A CN110828605 A CN 110828605A
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- Prior art keywords
- gate
- photosensitive
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- control
- mos capacitor
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- 238000001514 detection method Methods 0.000 title claims abstract description 44
- 239000002131 composite material Substances 0.000 title claims abstract description 33
- 239000003990 capacitor Substances 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000004065 semiconductor Substances 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 claims description 5
- 230000009977 dual effect Effects 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000011532 electronic conductor Substances 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000000523 sample Substances 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 11
- 238000005286 illumination Methods 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005641 tunneling Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000011896 sensitive detection Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
- H01L31/113—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
- H01L31/1136—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor the device being a metal-insulator-semiconductor field-effect transistor
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910966070.5A CN110828605A (zh) | 2019-10-12 | 2019-10-12 | 基于双控制栅的复合介质栅可控自增益光敏探测器件 |
Applications Claiming Priority (1)
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CN201910966070.5A CN110828605A (zh) | 2019-10-12 | 2019-10-12 | 基于双控制栅的复合介质栅可控自增益光敏探测器件 |
Publications (1)
Publication Number | Publication Date |
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CN110828605A true CN110828605A (zh) | 2020-02-21 |
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CN201910966070.5A Pending CN110828605A (zh) | 2019-10-12 | 2019-10-12 | 基于双控制栅的复合介质栅可控自增益光敏探测器件 |
Country Status (1)
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CN (1) | CN110828605A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111541444A (zh) * | 2020-05-09 | 2020-08-14 | 南京大学 | 基于复合介质栅双晶体管光敏探测器的多电平移位电路 |
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2019
- 2019-10-12 CN CN201910966070.5A patent/CN110828605A/zh active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111541444A (zh) * | 2020-05-09 | 2020-08-14 | 南京大学 | 基于复合介质栅双晶体管光敏探测器的多电平移位电路 |
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TA01 | Transfer of patent application right |
Effective date of registration: 20220624 Address after: 211135 room 801, building 9, No. 100, Tianjiao Road, Qilin high tech Industrial Development Zone, Jiangning District, Nanjing, Jiangsu Province Applicant after: Nanjing Weipaishi Semiconductor Technology Co.,Ltd. Applicant after: Nanjing University Address before: 211135 room 801, building 9, No. 100, Tianjiao Road, Qilin high tech Industrial Development Zone, Jiangning District, Nanjing, Jiangsu Province Applicant before: Nanjing Weipaishi Semiconductor Technology Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20240409 Address after: 210046 Xianlin Avenue 163, Qixia District, Nanjing City, Jiangsu Province Applicant after: NANJING University Country or region after: China Address before: 211135 room 801, building 9, No. 100, Tianjiao Road, Qilin high tech Industrial Development Zone, Jiangning District, Nanjing, Jiangsu Province Applicant before: Nanjing Weipaishi Semiconductor Technology Co.,Ltd. Country or region before: China Applicant before: NANJING University |