CN110828581A - 一种柔性太阳电池及其制作方法 - Google Patents

一种柔性太阳电池及其制作方法 Download PDF

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CN110828581A
CN110828581A CN201810904936.5A CN201810904936A CN110828581A CN 110828581 A CN110828581 A CN 110828581A CN 201810904936 A CN201810904936 A CN 201810904936A CN 110828581 A CN110828581 A CN 110828581A
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solar cell
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龙军华
肖梦
黄欣萍
李雪飞
陆书龙
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Suzhou Institute of Nano Tech and Nano Bionics of CAS
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Priority to PCT/CN2019/078134 priority patent/WO2020029581A1/zh
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Abstract

本发明公开了一种柔性太阳电池及其制作方法，该方法包括：在衬底上制作分离层；在分离层上倒装生长太阳电池；在太阳电池背面沉积背面电极；在背面电极上制作金属薄膜；将金属薄膜键合到临时衬底上；将分离层和太阳电池分离；在太阳电池正面沉积正面电极；将临时衬底与金属薄膜解键合；本发明通过在制作电池的过程中只进行一次键合与解键合，相比于现有技术的两次键合与解键合更为简单，提高了生产效率；解键合过程快速且不损伤电池和临时衬底；利用电镀金属薄膜的延展性作为柔性衬底，不仅柔韧性好，还降低了生产成本，具有产业化的应用价值。

Description

一种柔性太阳电池及其制作方法
技术领域
本发明属于太阳电池技术领域，具体涉及一种柔性太阳电池及其制作方法。
背景技术
柔性太阳电池因其质量轻、质量功率比高、可弯曲、适应环境多样等特点，在航天领域、军事领域、甚至是民用市场备受关注。同时随着太阳电池对于高效率、低成本的需求日益强烈，其结构都朝着多结方向发展。
目前较常用的方法是采用二次临时键合。在柔性太阳电池背面形成键合金属层，进行第一次临时键合，然后去除第一衬底，露出所述键合金属层表面，接着在所述键合金属层上再次键合形成一层比所述键合金属层热膨胀系数低的金属材料薄膜以实现柔性支撑功能。但是该发明共有两次键合操作，工艺较复杂，需要反复键合和解键合，生产成本较高，生产效率比较低。第一次键合操作对电池表面粗糙度要求较高，解键合较复杂，第二次键合由于材料的热膨胀系数不一样，高温条件下会导致金属材料薄膜翘曲，良品率下降。
发明内容
本发明专利所要解决的技术问题在于克服现有技术的不足，提供一种仅用一次键合和解键合制作，生产成本低，生产过程快速且高效的柔性太阳电池及其制作方法。
为了实现上述的目的，本发明采用了如下的技术方案：
在一个总体方面，提供一种柔性太阳电池的制作方法，包括：
在衬底上制作分离层；
在所述分离层上倒装生长太阳电池；
在所述太阳电池的背面制作背面电极；
在所述背面电极上制作金属薄膜；
将所述金属薄膜键合到临时衬底上；
将所述分离层和所述太阳电池进行分离；
在所述太阳电池的正面制作正面电极；
将所述临时衬底与所述金属薄膜解键合。
优选的，所述分离层为腐蚀阻挡层；其中，所述将所述分离层和所述太阳电池进行分离的方法包括：
采用湿法剥离的方式将所述衬底腐蚀去除；
采用湿法剥离的方式将所述腐蚀阻挡层剥离去除。
优选的，所述分离层为牺牲层；其中，所述将所述分离层和所述太阳电池进行分离的方法包括：采用湿法剥离的方式去除所述牺牲层。
优选的，在所述太阳电池的正面制作正面电极之后，所述制作方法还包括：在所述正面电极上沉积抗反射膜。
优选的，所述太阳电池为多结太阳电池。
优选的，所述将所述金属薄膜键合到临时衬底上的方法包括：在低温状态下利用低温键合胶键合所述金属薄膜和所述临时衬底。
优选的，所述低温键合胶为低温固化硅胶。
优选的，所述将所述临时衬底与所述金属薄膜解键合的方法包括：利用低温胶清洗剂将所述低温键合胶清洗去除。
优选的，所述在所述背面电极上制作金属薄膜的方法包括：
利用电镀工艺在所述背面电极上电镀形成金属薄膜；
对所述金属薄膜的表面进行机械化学抛光处理。
在另一个总体方面，提供一种由上述的柔性太阳电池的制作方法制成的柔性太阳电池。
本发明提供了一种柔性太阳电池及其制作方法，通过在制作电池的过程中只进行一次键合与解键合，相比于现有技术的两次键合与解键合更为简单，提高了生产效率；解键合过程快速且不损伤电池和临时衬底；利用电镀金属薄膜的延展性作为柔性衬底，不仅柔韧性好，还降低了生产成本，具有产业化的应用价值。
附图说明
图1是本发明的柔性太阳电池的制作方法流程图；
图2是本发明在背面电极上制作金属薄膜的流程图；
图3是本发明的柔性太阳电池的工艺流程图；
图4时本发明的太阳电池的电池单元的结构示意图。
图中：
10 衬底；
20 分离层；
30 太阳电池；
40 背面电极；
50 金属薄膜；
60 低温键合硅胶；
70 临时衬底；
80 正面电极；
90 抗反射膜；
100 窗口层；
110 发射区；
120 基区；
130 背场层。
具体实施方式
本发明所要解决的问题在于提供一种在制作过程中只进行一次键合与解键合工艺快速且高效地制作柔性太阳电池的制作方法。下面将结合附图对本发明的实施例做详细说明。
作为本发明的一种实施例，如图1和图3所示，本实施例的一种柔性太阳电池的制作方法，包括：
S01、在衬底上制作分离层。其中，所述衬底采用的是半导体材料GaAs，GaAs材料带隙与太阳光谱较匹配，有利于生长高效的多结太阳电池。所述分离层为牺牲层，所述牺牲层材料为AlAs，所述牺牲层为分离所述衬底和所述太阳电池时要去除的结构。
S02、在所述分离层上倒装生长太阳电池。为了获得较高光电转换效率的太阳电池，所述太阳电池可以布置为三结、四结或者更多结，使电池能吸收不同波段的光。在本实施例中，所述太阳电池的每一结均为一个电池单元。
如图4所示，每一个电池单元均具有窗口层、发射区、基区和背场层，所述窗口层所在的面为所述太阳电池的正面，所述背场层所在的面为所述太阳电池的背面。在制作所述太阳电池时，所述太阳电池倒装生长，即在制备太阳电池的每一个电池单元时，依次在衬底上制作窗口层、发射区、基区以及背场层。
S03、在所述太阳电池背面沉积背面电极。其中，背面电极材料为Ti/Pt/Au。沉积工艺的具体方法为：利用电子束蒸发Ti/Pt/Au，将其沉积在太阳电池背面，形成背面电极，然后对背面电极进行快速退火，使其与太阳电池形成欧姆接触。
S04、在所述背面电极上制作金属薄膜，作为柔性基底。结合图2，本实施例在所述背面电极上制作金属薄膜的方法，具体包括：
S041、通过电镀工艺将所述金属薄膜沉积在所述背面电极上。所述金属薄膜材质为Cu，金属Cu具有良好的延展性，可以作为柔性衬底。
S042、对所述金属薄膜表面进行机械化学抛光处理。由于键合操作对操作表面的粗糙度要求较高，所以需要对所述金属薄膜机械化学抛光处理，处理完成后，所述金属薄膜厚度为10～20μm。
S05、将所述金属薄膜键合到临时衬底上。所述键合工艺在真空环境下进行，高真空有助于键合界面气体分子的排出，增加了接触面积；采用低温键合胶使所述金属薄膜粘结在临时衬底上，所述临时衬底是与太阳电池热膨胀系数相近的材料，可以是GaAs或者玻璃。所述低温键合胶为热固化温度为90℃、热稳定性温度为300℃的低温固化硅胶
S06、将所述分离层和所述太阳电池分离；在本实施例中，所述分离层为牺牲层，使所述牺牲层和所述太阳电池分离的方法为湿法剥离工艺，通过湿法剥离工艺将牺牲层腐蚀掉，可以实现所述衬底和所述太阳电池的分离，且分离后的所述衬底不会被破坏，还能重复使用。
S07、在所述太阳电池正面沉积正面电极。与衬底分离后，所述太阳电池的正面会露出，在正面上沉积正面电极，正面电极的材料为AuGe/Ni/Au，沉积后无需退火即可与太阳电池形成欧姆接触；AuGe/Ni/Au为条纹状，方便光透过照射到太阳电池上。如果一次制作的电池较大，可以在太阳电池上刻蚀隔离槽，将太阳电池分割成所需要的大小。
S08、在所述正面电极上沉积抗反射膜。抗反射膜覆盖住正面电极，大大降低电池表面对光的反射，使更多光能够被电池吸收，提高太阳电池的能量转换率。
S09、将所述临时衬底与所述金属薄膜解键合。由于金属薄膜与临时衬底之间存在着应力，在低温胶清洗剂中，随着低温键合胶的逐渐溶解，金属薄膜与临时衬底之间由于晶格常数和热膨胀系数的差异而存在的应力，会使金属薄膜与临时衬底分离，即可得到所述柔性太阳电池，且分离后的所述临时衬底不会被破坏，还能重复使用。
作为一种优选的实施方式，本实施例所述的太阳电池具有三个电池单元，依次分别为GaInP层、GaAs层和InGaAs层。所述太阳电池在所述衬底上的制作顺序依次为所述GaInP层、所述GaAs层和所述InGaAs层。所述GaInP层的电池带隙为1.88eV，所述GaAs层的电池带隙为1.42eV和所述InGaAs层的电池带隙为1.05eV。其中，所述InGaAs层的电池失配生长。
作为本发明的又一实施例，与上一个实施例不同的是，所述分离层为腐蚀阻挡层，所述腐蚀阻挡层用于阻止分离所述衬底和所述太阳电池时对所述太阳电池造成损伤，所以所述腐蚀阻挡层材料为GaInP。所述使所述分离层和所述太阳电池分离的方法为：采用湿法剥离的方法剥离所述衬底，剥离衬底的溶液可以为双氧水、氨水和水配置成的混合溶液，此时腐蚀阻挡层对太阳电池起到了保护作用，待所述衬底剥离干净，再次采用湿法剥离的方法剥离所述腐蚀阻挡层，剥离腐蚀阻挡层的溶液可以为盐酸和磷酸配制成的混合溶液，剥离完成后，露出太阳电池正面。但是这种方法会破坏所述衬底，所述衬底不能重复使用。
本发明提供了一种柔性太阳电池及其制作方法，通过在制作电池的过程中只进行一次键合与解键合，相比于现有技术的两次键合与解键合更为简单，提高了生产效率；解键合过程快速且不损伤电池和临时衬底；利用电镀金属薄膜的延展性作为柔性衬底，不仅柔韧性好，还降低了生产成本，具有产业化的应用价值。
以上所述仅是本申请的具体实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本申请原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本申请的保护范围。

Claims (10)

1.一种柔性太阳电池的制作方法，其特征在于，包括：
在衬底上制作分离层；
在所述分离层上倒装生长太阳电池；
在所述太阳电池的背面制作背面电极；
在所述背面电极上制作金属薄膜；
将所述金属薄膜键合到临时衬底上；
将所述分离层和所述太阳电池进行分离；
在所述太阳电池的正面制作正面电极；
将所述临时衬底与所述金属薄膜解键合。
2.根据权利要求1所述的柔性太阳电池的制作方法，其特征在于，所述分离层为腐蚀阻挡层；其中，所述将所述分离层和所述太阳电池进行分离的方法包括：
采用湿法剥离的方式将所述衬底腐蚀去除；
采用湿法剥离的方式将所述腐蚀阻挡层剥离去除。
3.根据权利要求1所述的柔性太阳电池的制作方法，其特征在于，所述分离层为牺牲层；其中，所述将所述分离层和所述太阳电池进行分离的方法包括：采用湿法剥离的方式去除所述牺牲层。
4.根据权利要求1所述的柔性太阳电池的制作方法，其特征在于，在所述太阳电池的正面制作正面电极之后，所述制作方法还包括：在所述正面电极上制作抗反射膜。
5.根据权利要求1所述的柔性太阳电池的制作方法，其特征在于，所述太阳电池为多结太阳电池。
6.根据权利要求1所述的柔性太阳电池的制作方法，其特征在于，所述将所述金属薄膜键合到临时衬底上的方法包括：在低温状态下利用低温键合胶键合所述金属薄膜和所述临时衬底。
7.根据权利要求6所述的柔性太阳电池的制作方法，其特征在于，所述低温键合胶为低温固化硅胶。
8.根据权利要求6或7所述的柔性太阳电池的制作方法，其特征在于，所述将所述临时衬底与所述金属薄膜解键合的方法包括：利用低温胶清洗剂将所述低温键合胶溶解去除。
9.根据权利要求1所述的柔性太阳电池的制作方法，其特征在于，所述在所述背面电极上制作金属薄膜的方法包括：
利用电镀工艺在所述背面电极上电镀形成金属薄膜；
对所述金属薄膜的表面进行机械化学抛光处理。
10.一种由权利要求1-9任一项所述的柔性太阳电池的制作方法制成的柔性太阳电池。
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