CN110779653B - Gas pressure detector and system based on optical fiber structure resonant cavity principle - Google Patents

Gas pressure detector and system based on optical fiber structure resonant cavity principle Download PDF

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Publication number
CN110779653B
CN110779653B CN201911049780.8A CN201911049780A CN110779653B CN 110779653 B CN110779653 B CN 110779653B CN 201911049780 A CN201911049780 A CN 201911049780A CN 110779653 B CN110779653 B CN 110779653B
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cavity
optical fiber
gas pressure
pressure detector
clamping part
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CN110779653A (en
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不公告发明人
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Hangzhou Xiangyi Technology Co Ltd
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Hangzhou Xiangyi Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G01L11/025Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre

Abstract

The invention relates to a gas pressure detector and a gas pressure detector system based on a resonant cavity principle of an optical fiber structure, in particular to the field of air pressure measurement. The gas pressure detector includes: the cavity, optic fibre, clamping part and extrusion portion, when needs detect pressure, let in the gas that awaits measuring one side that the clamping part was kept away from to the extrusion portion, this extrusion portion with the clamping part slides to the direction of optic fibre along the inner wall of this cavity under the gaseous effort that awaits measuring, the position of this optic fibre does not change this moment, make the length that makes this optic fibre, the resonant cavity that clamping part and extrusion portion formed shorten, one let in the extrusion portion one side of keeping away from the clamping part when the gas that awaits measuring, but when the position of this extrusion portion does not change, can obtain the volume change condition of this resonant cavity through the wavelength of resonance light in this resonant cavity, through the corresponding relation of this resonant cavity volume change condition and this other pressures that await measuring, can directly obtain the pressure of this gas that awaits measuring.

Description

Gas pressure detector and system based on optical fiber structure resonant cavity principle
Technical Field
The invention relates to the field of air pressure measurement, in particular to a gas pressure detector and a gas pressure detector system based on the resonant cavity principle of an optical fiber structure.
Background
Gas pressure broadly refers to the hydrostatic pressure exerted by a gas on a point, and results from the constant, irregular impingement of a large number of gas molecules on the wall of a vessel.
In the prior art, the pressure of a gas is detected according to an ideal gas law pv ═ nRT, where p is the pressure, v is the volume of the gas, n is the amount of the gas, R is a general gas constant, and T is the temperature of the gas, and the pressure of the gas is generally obtained by measuring the amount of the gas, the volume of the gas, and the temperature of the gas and then performing mathematical calculations.
However, generally three instruments are needed for measuring the amount of gas, the volume of gas and the temperature of gas, the measurement process is inconvenient, and the measurement of the volume of gas is also inaccurate due to the existence of large gaps among gases, so that the finally calculated gas pressure is also inaccurate.
Disclosure of Invention
The invention aims to provide a gas pressure detector and a gas pressure detector system based on an optical fiber structure aiming at the defects in the prior art, so as to solve the problems that the measurement process is inconvenient and the finally calculated gas pressure is inaccurate in the prior art.
In order to achieve the above purpose, the embodiment of the present invention adopts the following technical solutions:
in a first aspect, an embodiment of the present invention provides a gas pressure detector based on a resonant cavity principle of an optical fiber structure, where the gas pressure detector includes: the device comprises a cavity, an optical fiber, a clamping part and an extrusion part;
the cavity is the cavity structure, and one side opening, the extrusion portion is inlayed in cavity open position, and can slide along the inner wall of cavity, and formed an airtight space with the cavity, the extrusion portion is close to the fixed clamping part that is provided with in one side of cavity, the clamping part is the cavity structure, the cavity has been seted up with the through-hole with the position that the clamping part corresponds, the one end of optic fibre stretches into from the through-hole, and inside extending to the cavity structure of clamping part, optic fibre, clamping part and extrusion portion have formed an airtight space.
Optionally, the position of the pressing portion where the clamping portion is arranged is provided with an exhaust hole.
Optionally, the material of the clamping portion is a noble metal material.
Optionally, the noble metal material comprises at least one of gold or silver.
Optionally, the height of the grip is greater than 100 microns.
Optionally, the gas pressure detector further comprises a metal film disposed on a face of the optical fiber near the pressing portion.
Optionally, the material of the metal film includes: gold or silver.
Optionally, the cross-section of the optical fiber is flattened.
Optionally, the thickness of the clamping portion near the pressing portion is greater than the thickness of the clamping portion far from the pressing portion.
In a second aspect, an embodiment of the present invention provides another gas pressure detection system based on a resonant cavity principle of an optical fiber structure, where the gas pressure detection system includes: the optical fiber pressure detector comprises a light source, a wavelength detection device and the gas pressure detector of any one of the first aspect, wherein the light source is connected with the optical fiber of the gas pressure detector and used for providing light for the optical fiber, and the wavelength detection device is used for detecting the wavelength in a closed space formed by the optical fiber, the clamping part and the extrusion part.
The invention has the beneficial effects that:
the cavity is of a cavity structure, one side of the cavity is open, the extrusion part is embedded in the position of the opening of the cavity and can slide along the inner wall of the cavity, an airtight space is formed between the extrusion part and the cavity, the clamping part is fixedly arranged on one side, close to the cavity, of the extrusion part, the clamping part is of a cavity structure, the through hole is formed in the position, corresponding to the clamping part, of the cavity, one end of the optical fiber extends into the through hole and extends into the cavity structure of the clamping part, the optical fiber, the clamping part and the extrusion part form an airtight space, the airtight space is a resonant cavity, when pressure intensity needs to be detected, gas to be detected is introduced into one side, away from the clamping part, of the extrusion part and the clamping part slide along the inner wall of the cavity in the direction of the optical fiber under the acting force of the gas to be detected, the position of the optical fiber does not change at the moment, and the optical fiber is made to slide along the inner wall of the cavity, The length of the resonant cavity formed by the clamping part and the extrusion part is shortened, when a gas to be measured is introduced into one side of the extrusion part far away from the clamping part, but the position of the extrusion part is not changed, the volume change condition of the resonant cavity can be obtained through the wavelength of resonant light in the resonant cavity, and the pressure of the gas to be measured can be directly obtained through the corresponding relation between the volume change condition of the resonant cavity and other pressure to be measured.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a gas pressure detector based on a resonant cavity principle of an optical fiber structure according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another gas pressure detector based on the resonant cavity principle of the optical fiber structure according to an embodiment of the present invention
Fig. 3 is a schematic structural diagram of another gas pressure detector based on the resonant cavity principle of the optical fiber structure according to an embodiment of the present invention.
Icon: 10-a cavity; 20-an extrusion part; 30-a clamping portion; 40-an optical fiber; 50-metal film.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiment is a metal plate embodiment of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Fig. 1 is a schematic structural diagram of a gas pressure detector based on a resonant cavity principle of an optical fiber structure according to an embodiment of the present invention, and as shown in fig. 1, the embodiment of the present invention provides a gas pressure detector based on a resonant cavity principle of an optical fiber 40 structure, where the gas pressure detector includes: a cavity 10, an optical fiber 40, a clamping portion 30 and an extrusion portion 20; the cavity 10 is the cavity structure, and one side opening, extrusion portion 20 is inlayed in cavity 10 open position, and can slide along the inner wall of cavity 10, and formed an airtight space with cavity 10, extrusion portion 20 is close to the fixed clamping part 30 that is provided with in one side of cavity, clamping part 30 is the cavity structure, cavity 10 has been seted up with the through-hole with the position that clamping part 30 corresponds, optical fiber 40's one end stretches into from the through-hole, and inside extending to clamping part 30's cavity structure, optical fiber 40, clamping part 30 and extrusion portion 20 have formed an airtight space.
The shape of the cavity 10 may be a cube, or other regular shapes, for clarity, the cavity 10 is illustrated as a cube, the cube 10 is a cavity structure, the cube 10 lacks one surface, and the cavity 10 is an open cavity structure, the surface area of the pressing portion 20 is slightly smaller than the surface area of one surface of the cube cavity 10, so that the pressing portion 20 can be embedded in the opening of the cavity 10 and can slide up and down, the cavity 10 and the pressing portion 20 form a closed space, a clamping portion 30 is disposed on one surface of the pressing portion 20 close to the cavity, the clamping portion 30 is also a cavity structure, and the clamping portion 30 may be a cuboid or a cylinder, for clarity, the clamping portion 30 is illustrated as a cylinder, the pressing portion 20 with the clamping portion 30 is mounted at the opening of the cavity 10, a through hole is formed in the cavity 10 corresponding to the clamping portion 30, the through hole is used for allowing light to pass through, the optical fiber 40 passes through the through hole and extends into the cavity structure of the clamping portion 30, and the optical fiber 40, the clamping portion 30 and the extrusion portion 20 form a closed space, namely a resonant cavity; when the gas pressure detector needs to detect the pressure, gas to be detected is introduced into one side of the extrusion part 20, which is far away from the clamping part 30, the extrusion part 20 and the clamping part 30 slide along the inner wall of the cavity 10 in the direction of the optical fiber 40 under the acting force of the gas to be detected, at this time, the position of the optical fiber 40 is not changed, so that the length of a resonant cavity formed by the optical fiber 40, the clamping part 30 and the extrusion part 20 is shortened, when the gas to be detected is introduced into one side of the extrusion part 20, which is far away from the clamping part 30, but the position of the extrusion part 20 is not changed, the volume change condition of the resonant cavity can be obtained through the wavelength of resonant light in the resonant cavity, and the pressure of the gas to be detected can be directly obtained through the corresponding relation between the volume change condition of the cavity 10 and other pressures to be detected; it should be noted that, the corresponding relationship between the volume change condition of the chamber 10 and the other pressures to be measured is obtained according to experimental measurement, and will not be specifically described herein, the size of the cavity structure inside the clamping portion 30 is set according to the thickness of the optical fiber 40, so long as the optical fiber 40 can penetrate into the cavity structure of the clamping portion 30 and is clamped by the clamping portion 30.
Fig. 2 is a schematic structural diagram of another gas pressure detector based on the principle of a fiber structure resonant cavity according to an embodiment of the present invention, as shown in fig. 2, alternatively, the clamping portion 30 may also be shaped as a drawing, only the head of the clamping portion 30 contacts the optical fiber 40, a structural singular point is formed at the head of the clamping portion 30, and a resonant cavity is directly formed with the optical fiber 40, so that only the head of the clamping portion 30 contacts the optical fiber 40, friction is reduced, and difficulty in manufacturing is reduced
Optionally, the pressing portion 20 is provided with a vent hole (not shown) at the position where the clamping portion 30 is disposed.
This application embodiment obtains the volume change condition of this resonant cavity through the wavelength of this optic fibre 40, the resonant cavity's that clamping part 30 and extrusion part 20 formed resonance light, because all there is certain clearance between the gas, in order to avoid excessively extruding other at the gaseous in-process of extrusion, make and measure the accuracy and descend, then can set up the exhaust hole in the position that clamping part 30 was set up to this extrusion part 20, when other this extrusion part 20 of extrusion that awaits measuring, the inside air of this resonant cavity can discharge without hindrance, can further improve the accuracy that this gas pressure detector measures the pressure of the gas that awaits measuring.
Optionally, the material of the clamping portion 30 is a noble metal material.
Since the noble metal has a strong optical effect, the material of the clamping portion 30 can be set to be a noble metal material, when light is coupled at one end of the supporting portion close to the pressing portion 20, the coupling condition can continue to propagate along the clamping portion 30 of the noble metal, the total loss of the light in the optical fiber 40 is reduced, the light reflected to the clamping portion 30 far away from the pressing portion 20 is reduced, the influence of reflection noise is reduced, and the measurement is more accurate.
Optionally, the noble metal material comprises at least one of gold or silver.
The clamping portion 30 may be gold, silver, or a mixed metal of gold and silver, and is not limited herein, and if the clamping portion 30 is a mixed metal of gold and silver, the ratio of gold and silver in the mixed metal is set according to actual needs, and is not limited herein.
Optionally, the height of the grip 30 is greater than 100 microns.
The position of the clamping portion 30 close to the pressing portion 20 needs to consume the total light in the optical fiber 40, so that the light reflected to the position of the clamping portion 30 close to the pressing portion 20 and far from the pressing portion 20 is reduced, when the height of the position of the clamping portion 30 close to the pressing portion 20 is greater than 100 nanometers, the light in the optical fiber 40 can be consumed by the total light, and then the overall height of the clamping portion 30 is greater than 100 micrometers.
Fig. 3 is a schematic structural diagram of another gas pressure detector based on the resonant cavity principle of the optical fiber structure according to an embodiment of the present invention, as shown in fig. 3, the gas pressure detector further includes a metal film 50, and the metal film 50 is disposed on a surface of the optical fiber 40 close to the pressing portion 20.
The metal film 50 is disposed on the surface of the optical fiber 40 close to the extrusion portion 20, which is more favorable for forming a resonant cavity, and is more favorable for absorbing energy in the resonant cavity, thereby improving the signal-to-noise ratio of the signal.
Alternatively, the material of the metal film 50 includes: gold or silver.
Since the noble metal has a good optical effect, the metal film 50 may be gold, the metal film 50 may also be silver, and the metal film 50 may also be an alloy of gold and silver, where the ratio of gold and silver in the alloy is set according to actual needs, and is not limited herein.
Optionally, the cross-section of the optical fiber 40 is flattened.
The cross section of the optical fiber 40 is ground into a flat shape, namely an oval shape, the oval optical fiber 40 is beneficial to coupling of energy in the optical fiber 40 and the clamping part 30 to form surface plasmon polariton, absorption of light is improved, an absorption peak is easier to detect, and therefore the detection difficulty is reduced.
Alternatively, the thickness of the clamping portion 30 near the pressing portion 20 is greater than the thickness far from the pressing portion 20.
Since the optical fiber 40 needs to move up and down in the clamping part 30, the thickness of the clamping part 30 near the pressing part 20 is set to be greater than the thickness far from the pressing part 20, thereby ensuring structural stability and flexibility of the optical fiber 40 therein.
In the application, the cavity 10 is a cavity structure, one side of the cavity is open, the extrusion part 20 is embedded at the open position of the cavity 10 and can slide along the inner wall of the cavity 10, and forms a closed space with the cavity 10, one side of the extrusion part 20 close to the cavity is fixedly provided with the clamping part 30, the clamping part 30 is a cavity structure, the cavity 10 and the clamping part 30 are provided with through holes at positions corresponding to the through holes, one end of the optical fiber 40 extends into the cavity structure of the clamping part 30 from the through holes and extends into the cavity structure, the optical fiber 40, the clamping part 30 and the extrusion part 20 form a closed space, the closed space is a resonant cavity, when pressure intensity needs to be detected, gas to be detected is introduced into one side of the extrusion part 20 far away from the clamping part 30, the extrusion part 20 and the clamping part 30 slide along the inner wall of the cavity 10 towards the optical fiber 40 under the acting force of the gas to be detected, at this time, the position of the optical fiber 40 is not changed, so that the length of the resonant cavity formed by the optical fiber 40, the clamping portion 30 and the extruding portion 20 is shortened, when the gas to be measured is always introduced into one side of the extruding portion 20 away from the clamping portion 30, but the position of the extruding portion 20 is not changed, the volume change condition of the resonant cavity can be obtained through the wavelength of the resonant light in the resonant cavity, and the pressure of the gas to be measured can be directly obtained through the corresponding relation between the volume change condition of the resonant cavity 10 and the other pressure to be measured.
The embodiment of the present application further provides another gas pressure detection system based on the resonant cavity principle of the optical fiber 40 structure, and the gas pressure detection system includes: the gas pressure detector comprises a light source, a wavelength detection device and any one of the gas pressure detectors, wherein the light source is connected with an optical fiber 40 of the gas pressure detector and used for providing light for the optical fiber 40, and the wavelength detection device is used for detecting the wavelength in a closed space formed by the optical fiber 40, the clamping part 30 and the pressing part 20.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. A gas pressure detector based on the principle of a resonant cavity of an optical fiber structure is characterized by comprising: the device comprises a cavity, an optical fiber, a clamping part and an extrusion part;
the cavity is of a cavity structure, one surface of the cavity is open, the extrusion part is embedded in the position of the opening of the cavity and can slide along the inner wall of the cavity, and a closed space is formed between the extrusion part and the cavity, the clamping part is fixedly arranged on one side of the extrusion part close to the cavity, the clamping part is of a cavity structure, a through hole is formed in the position of the cavity corresponding to the clamping part, one end of the optical fiber extends into the through hole and extends into the cavity structure of the clamping part, and the optical fiber, the clamping part and the extrusion part form a closed space; the cross section of the optical fiber is in a flat shape; the thickness of the clamping part close to the squeezing part is larger than that of the clamping part far away from the squeezing part;
the gas pressure detector further comprises a metal film, and the metal film is arranged on the surface, close to the extrusion part, of the optical fiber.
2. The optical fiber structure resonator cavity principle-based gas pressure detector according to claim 1, wherein a vent hole is formed at a position of the pressing portion where the clamping portion is disposed.
3. The fiber structure resonator-based gas pressure detector according to claim 1, wherein the material of the clamping portion is a noble metal material.
4. The fiber structure resonator-based gas pressure detector according to claim 3, wherein the noble metal material comprises at least one of gold or silver.
5. The fiber structure resonator-based gas pressure detector according to claim 1, wherein the height of the clamping portion is greater than 100 μm.
6. A gas pressure detector based on the resonant cavity principle of the optical fiber structure as claimed in claim 1, wherein the material of the metal film comprises: gold or silver.
7. A gas pressure detection system based on the principle of a resonant cavity of an optical fiber structure, the gas pressure detection system comprising: a light source, a wavelength detecting device and the gas pressure detector of any one of claims 1 to 6, wherein the light source is connected with the optical fiber of the gas pressure detector and is used for providing light for the optical fiber, and the wavelength detecting device is used for detecting the wavelength in a closed space formed by the optical fiber, the clamping part and the pressing part.
CN201911049780.8A 2019-10-31 2019-10-31 Gas pressure detector and system based on optical fiber structure resonant cavity principle Active CN110779653B (en)

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CN115683444B (en) * 2022-11-10 2023-09-26 常州厚德再生资源科技有限公司 Optical fiber gas pressure sensor and detection method for waste gas generated by disassembling waste power batteries of optical fiber gas pressure sensor

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CN101424697A (en) * 2008-10-31 2009-05-06 冉曾令 Optical fiber F-P acceleration and pressure sensor and its manufacturing method
CN101858809A (en) * 2010-05-28 2010-10-13 天津大学 Optical fiber Fabry-Perot pressure sensor and fabrication method thereof
US9046427B2 (en) * 2011-04-11 2015-06-02 Massachusetts Institute Of Technology System for dual pressure sensing
CN105004471A (en) * 2015-07-10 2015-10-28 贵州大学 Pressure sensing method and sensor probe utilizing method
CN204788775U (en) * 2015-07-10 2015-11-18 贵州大学 Differential pressure sensor
CN107706494A (en) * 2017-09-29 2018-02-16 电子科技大学 A kind of adjustable microwave resonator

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Publication number Priority date Publication date Assignee Title
CN1589089A (en) * 2004-09-23 2005-03-02 烽火通信科技股份有限公司 Dynamic design method and device for plasma resonant chamber
CN101424697A (en) * 2008-10-31 2009-05-06 冉曾令 Optical fiber F-P acceleration and pressure sensor and its manufacturing method
CN101858809A (en) * 2010-05-28 2010-10-13 天津大学 Optical fiber Fabry-Perot pressure sensor and fabrication method thereof
US9046427B2 (en) * 2011-04-11 2015-06-02 Massachusetts Institute Of Technology System for dual pressure sensing
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