CN110296789B - Fluid pressure measuring device in container - Google Patents
Fluid pressure measuring device in container Download PDFInfo
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- CN110296789B CN110296789B CN201910602568.3A CN201910602568A CN110296789B CN 110296789 B CN110296789 B CN 110296789B CN 201910602568 A CN201910602568 A CN 201910602568A CN 110296789 B CN110296789 B CN 110296789B
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- optical fiber
- laser
- metal cover
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- 239000012530 fluid Substances 0.000 title claims abstract description 23
- 239000013307 optical fiber Substances 0.000 claims abstract description 65
- 230000003287 optical effect Effects 0.000 claims abstract description 54
- 229910052751 metal Inorganic materials 0.000 claims description 85
- 239000002184 metal Substances 0.000 claims description 85
- 239000004816 latex Substances 0.000 claims description 36
- 229920000126 latex Polymers 0.000 claims description 36
- 239000003822 epoxy resin Substances 0.000 claims description 10
- 229920000647 polyepoxide Polymers 0.000 claims description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 239000002077 nanosphere Substances 0.000 claims description 9
- 239000004793 Polystyrene Substances 0.000 claims description 8
- 229920002223 polystyrene Polymers 0.000 claims description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000000835 fiber Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000008188 pellet Substances 0.000 claims description 3
- 238000009530 blood pressure measurement Methods 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 36
- 239000011805 ball Substances 0.000 description 29
- 238000000411 transmission spectrum Methods 0.000 description 18
- 238000005259 measurement Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 239000004005 microsphere Substances 0.000 description 3
- 239000011807 nanoball Substances 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011806 microball Substances 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention relates to the technical field of pressure measurement, in particular to a fluid pressure measurement device in a container, which comprises a laser, a beam splitter, an optical fiber I, an optical fiber II, a pressure sensor, an optical detector I, an optical detector II, an analog-to-digital converter, a computer, a signal source and a cable.
Description
Technical Field
The invention relates to the technical field of pressure measurement, in particular to a device for measuring fluid pressure in a container based on an optical mode measuring method of a dielectric resonator.
Background
In the measurement of fluid pressure in a container, a pressure sensor based on a microelectromechanical system is generally adopted due to the limitation of measurement environment and space, and mainly comprises a piezoelectric sensor, a piezoresistive sensor and a capacitive sensor, but all have different disadvantages: the measurement bandwidth of piezoelectric sensors is limited, typically below a few kilohertz; the impedance of the capacitive sensor is too high, and impedance buffer is generally required to be additionally arranged near the sensor, so that the structure is complex; the piezoresistive sensor has low sensitivity and requires temperature compensation to perform more accurate measurement, and the fluid pressure measuring device in the container can solve the problem.
Disclosure of Invention
In order to solve the above problems, the pressure measuring device of the present invention adopts an optical mode measuring method of a dielectric resonator based on dielectric micro-spheres and thin film structures, has high measuring sensitivity and dynamic range, is less affected by external electromagnetic interference, and the characteristics of the sensor can be improved by using different materials.
The technical scheme adopted by the invention is as follows:
the pressure measuring device for the fluid in the container comprises a laser, a beam splitter, an optical fiber I, an optical fiber II, a pressure sensor, an optical detector I, an optical detector II, an analog-to-digital converter, a computer, a signal source and a cable, wherein xyz is a three-dimensional coordinate system, a through hole with the diameter of 26 millimeters is formed in the cavity wall of the container to be measured, the beam splitter is provided with an inlet and two outlets, the beam splitter can divide light into two equal parts and output the equal parts from the two outlets respectively, the analog-to-digital converter is provided with two input ends and two output ends, the laser emits laser with the center wavelength of 1.5 micrometers through an emitting end, the emitting end of the laser is connected with the inlet of the beam splitter, one outlet of the beam splitter is connected with the optical fiber I after passing through the pressure sensor, and the other outlet of the beam splitter is connected with the optical detector II through the optical fiber II; the optical detector I and the optical detector II are respectively connected with two input ends of the analog-to-digital converter through cables, two output ends of the analog-to-digital converter are respectively connected with the input ends of the computer and the signal source through cables, and the output end of the signal source is connected with the laser through cables and is used for controlling the waveform and the frequency of laser emitted by the laser; the pressure sensor is arranged at the through hole of the cavity wall of the container to be measured, the pressure sensor comprises a metal sheet I, a latex film, micro-nano small balls, a metal sheet II and a metal cover, the metal cover is in an open cup shape, the center of the bottom surface in the metal cover is provided with a boss with the height of 11 millimeters, the bottom surface of the metal cover is provided with four small holes with the diameter of 1 millimeter, the air pressure at two sides of the bottom surface of the metal cover can be balanced, the metal sheet I and the metal sheet II are both circular ring sheets, the latex film is clamped between the metal sheet I and the metal sheet II and fixed by epoxy resin, the latex film fills the inner ring of the circular ring sheets, the metal sheet II is fixed on the upper edge of the opening of the metal cover by epoxy resin, the micro-nano small balls are fixed on the boss of the metal cover by epoxy resin and are positioned below the latex film, when the latex film is not deformed, the distance between the latex film and the micro-nano small balls is smaller than 0.8 millimeter, the micro-nano small balls are made of a mixture of polystyrene and curing agent with the proportion of 10:1 to 50:1, the characteristics of the micro-nano balls can be changed when the micro-nano balls are used for curing agents with different proportions of polystyrene and the curing agents, and the micro-nano balls are the optical quality factors of the micro-balls are 10 6 The method comprises the steps of carrying out a first treatment on the surface of the In optical fibre IA section is heated and stretched to form a thin section with the diameter of 10 micrometers and the length of 30 millimeters, and the optical fiber I penetrates through one small hole on the bottom surface of the metal cover and penetrates out of the other small hole, so that the thin section in the optical fiber I is positioned in the metal cover and is contacted with the side surface of the micro-nano small ball, and the optical path in the optical fiber I is mutually coupled with the optical path in the tangential direction of the micro-nano small ball; the optical fiber I and the optical fiber II are single-mode optical fibers; the metal sheet I and the metal sheet II are both 26 mm in outer diameter, 2 mm in inner diameter and 0.5 mm in thickness and made of copper; the latex film has a diameter of 8 mm and a thickness in the range of 40 micrometers to 90 micrometers; the diameter of the micro-nano small sphere ranges from 0.8 millimeter to 1.1 millimeter; the outer diameter of the bottom surface of the metal cover is 26 mm, the height is 12 mm, and the metal cover is made of aluminum or titanium.
The method for measuring by using the fluid pressure measuring device in the container comprises the following steps:
step one, calibrating a fluid pressure measuring device in a container by using a calibrated piezoelectric sensor: installing the calibrated piezoelectric sensor and the fluid pressure measuring device in the container in the same test cavity, starting a laser, a light detector I, a light detector II, an analog-to-digital converter, a computer and a signal source, filling deionized water into the test cavity, and recording the pressure measured by the calibrated piezoelectric sensor to obtain the positions of peaks in the transmission spectrum of the laser in the optical fiber I when the pressure is 0, 10, 20, 30 and 50 Pa;
step two, closing the laser, the optical detector I, the optical detector II, the analog-to-digital converter, the computer and the signal source, and taking out the fluid pressure measuring device in the container from the test cavity;
installing the pressure sensor at the through hole on the cavity wall of the container to be tested, keeping sealing, and enabling the metal sheet I to be coplanar with the inner wall of the cavity wall of the container to be tested;
step four, starting a laser, a light detector I, a light detector II, an analog-to-digital converter, a computer and a signal source;
step five, introducing fluid into the container to be tested;
step six, the optical detector I inputs the collected optical signals into a computer through an analog-to-digital converter, a transmission spectrum of the laser in the optical fiber I is obtained in the computer, and the optical detector II inputs the collected optical signals into the computer through the analog-to-digital converter, so that a transmission spectrum of the laser in the optical fiber II is obtained;
step seven, the computer obtains the transmission spectrum of the laser in the optical fiber I and carries out normalization processing relative to the transmission spectrum of the laser in the optical fiber II;
and step eight, analyzing a signal peak in the transmission spectrum obtained after the treatment in the step seven, and fitting the signal peak relative to the calibration data obtained in the step one to finally obtain the pressure of the fluid in the container to be measured.
The beneficial effects of the invention are as follows:
the device is slightly influenced by external electromagnetic interference, has higher measurement sensitivity and dynamic range, and can improve the characteristics of the sensor by using different materials.
Drawings
The following is further described in connection with the figures of the present invention:
FIG. 1 is a schematic illustration of the present invention;
FIG. 2 is an enlarged schematic view of a pressure sensor;
fig. 3 is a top view of fig. 2.
In the figure, 1, a laser, 2, a beam splitter, 3, an optical fiber I,4, an optical fiber II,5, a pressure sensor, 5-1, a metal sheet I,5-2, a latex film, 5-3, a micro-nano-sphere, 5-4, a metal sheet II,5-5, a metal cover, 6, a light detector I,7, a light detector II,8, an analog-to-digital converter, 9, a computer, 10, a signal source, 11, and a cavity wall of a container to be measured.
Detailed Description
As shown in fig. 1, the invention is a schematic diagram, which comprises a laser (1), a beam splitter (2), an optical fiber I (3), an optical fiber II (4), a pressure sensor (5), an optical detector I (6), an optical detector II (7), an analog-to-digital converter (8), a computer (9), a signal source (10) and a cable, xyz is a three-dimensional coordinate system, a cavity wall (11) of a container to be tested is provided with a through hole with a diameter of 26 mm, the beam splitter (2) is provided with an inlet and two outlets, the beam splitter (2) can divide light into two equal parts and respectively output from the two outlets, the analog-to-digital converter (8) is provided with two input ends and two output ends, the laser (1) emits laser with a center wavelength of 1.5 micrometers through the emitting end, the emitting end of the laser (1) is connected with the inlet of the beam splitter (2), one outlet of the beam splitter (2) is connected with the optical fiber I (3), the optical fiber I (3) passes through the pressure sensor (5) and then is connected with the optical detector I (6), the other outlet of the beam splitter (2) is connected with the optical detector II (7) through the optical fiber II (4), the optical fiber I (3) and the optical fiber II (3) has a length of 30 micrometers, and the optical fiber I is a length of a single mode fiber (10) is stretched, and is a length of a single mode fiber is formed; the optical detector I (6) and the optical detector II (7) are respectively connected with two input ends of the analog-to-digital converter (8) through cables, two output ends of the analog-to-digital converter (8) are respectively connected with input ends of the computer (9) and the signal source (10) through cables, and the output end of the signal source (10) is connected with the laser (1) through cables and is used for controlling the waveform and the frequency of laser emitted by the laser (1).
As shown in fig. 2, which is an enlarged schematic view of the pressure sensor, as shown in fig. 3, which is a top view of fig. 2, the pressure sensor (5) is installed at a through hole of a cavity wall (11) of the container to be measured, the pressure sensor (5) comprises a metal plate I (5-1), a latex film (5-2), micro-nano pellets (5-3), a metal plate II (5-4) and a metal cover (5-5), xyz is a three-dimensional coordinate system, the pressure sensor (5) is installed at the through hole of the cavity wall (11) of the container to be measured, the metal cover (5-5) is in an open cup shape, the outer diameter of the bottom surface of the metal cover (5-5) is 26 mm, the height of the metal cover is 12 mm, the metal cover (5-5) is made of aluminum or titanium, the bottom surface center of the metal cover (5-5) is provided with a boss with the height of 11 mm, the bottom surface of the metal cover (5-5) is provided with four small holes with the diameter of 1 mm, the air pressures at both sides of the bottom surface of the metal cover (5-5) can be balanced, the metal plate I (5-1) and the metal plate II (5-4) are in a ring shape, the inner diameter of the ring is 26 mm, the inner diameter of the metal cover (5-5) is 2 mm, the latex film (5-2) is filled with the latex film (5-2 mm) and the inner diameter of the latex film (2 mm) is filled between the metal film (5-5) and the metal film (5) is filled with the latex film, the diameter of the latex film (5-2) is 8 mm, the thickness range is 40-90 micrometers, the metal sheet II (5-4) is fixed on the upper edge of the opening of the metal cover (5-5) through epoxy resin, the micro-nano small ball (5-3) is fixed on the boss of the metal cover (5-5) through epoxy resin and is positioned below the latex film (5-2), and when the latex film (5-2) is not deformed, the latex film is thinThe distance between the film (5-2) and the micro-nano small ball (5-3) is smaller than 0.8 mm, the diameter of the micro-nano small ball (5-3) ranges from 0.8 mm to 1.1 mm, the micro-nano small ball (5-3) is made of a mixture of polystyrene and curing agent in the ratio range from 10:1 to 50:1, the characteristics of the micro-nano small ball (5-3) can be changed when the polystyrene and the curing agent in different ratios are adopted, and the optical quality factor Q of the micro-nano small ball (5-3) is typically 10 6 The method comprises the steps of carrying out a first treatment on the surface of the One section of the optical fiber I (3) is heated and stretched to form a thin section with the diameter of 10 micrometers and the length of 30 millimeters, the optical fiber I (3) penetrates through one small hole on the bottom surface of the metal cover (5-5) and penetrates out of the other small hole, so that the thin section of the optical fiber I (3) is positioned in the metal cover (5-5) and is contacted with the side surface of the micro-nano small ball (5-3), the optical path in the optical fiber I (3) is mutually coupled with the optical path in the tangential direction of the micro-nano small ball (5-3), the metal sheet I (5-1) is coplanar with the inner wall of the cavity wall (11) of the container to be tested, as the upper surface of fig. 2 is the inner wall of the cavity wall (11) of the container to be tested, and two ends of the optical fiber I (3) are positioned outside the cavity wall (11) of the container to be tested. The light detector I (6) and the light detector II (7) are FPD510 type InGaAs photoelectric detectors manufactured by Thorlabs, the Analog-to-digital converter (8) is an AD7705 type 16-bit Analog-to-digital converter manufactured by Analog Devices, and the signal source (10) is an AWG5000 arbitrary waveform generator manufactured by Tektronix.
The working principle of the device is as follows: the laser with the center wavelength of 1.5 microns emitted by the laser (1) is coupled into the micro-nano small ball (5-3) sequentially through the beam splitter (2) and the optical fiber I (3), the optical wave can be continuously reflected on the curved smooth high-refractive-index surface to form an optical echo wall mode, the laser can propagate along the inner surface of the micro-nano small ball (5-3) after being coupled into the micro-nano small ball (5-3) in a tangential direction, the laser is emitted out of the micro-nano small ball (5-3) after being subjected to multiple total reflection and is coupled into a thin section of the optical fiber I (3) and finally enters the optical detector I (6), the optical detector I (6) inputs the collected optical signal into the computer (9) through the analog-to-digital converter (8), and the transmission spectrum of the laser in the optical fiber I (3) is obtained in the computer (9), and the abscissa and the ordinate in the transmission spectrum are the wavelength and the intensity of the optical signal collected by the optical detector I (6); when the total length of the laser light propagating in the micro-nano-spheres (5-3) is an integer multiple of the laser light wavelength, one of the micro-nano-spheres (5-3) is activatedThe echo wall resonance film can observe a corresponding signal peak in the transmission spectrum of the laser in the optical fiber I (3). In the case that the radius a of the micro-nano-sphere (5-3) is far larger than the wavelength lambda of the laser in vacuum, the formula 2 pi n is given 0 a.apprxeq.lλ, where n 0 Is the refractive index of the micro-nano-sphere (5-3), l is a positive integer, and the change of the refractive index of the micro-nano-sphere (5-3) can lead to the movement of an optical mode, expressed by a formulaWherein dλ, dn 0 Da is respectively lambda, n 0 And a, analyzing the transmission spectrum of the laser in the optical fiber I (3) and detecting the position of a peak so as to determine the optical mode of the micro-nano microsphere (5-3). External effects (such as pressure, temperature and the like) can cause the shape of the small sphere to change, so that a blue shift or a red shift occurs in a peak in the transmission spectrum, and therefore, the influence of the external effects on the shape of the micro-nano small sphere (5-3) can be judged through the transmission spectrum of the laser in the optical fiber I (3). When the fluid in the container to be detected applies pressure to the latex film (5-2), the latex film is bent and the micro-nano small ball (5-3) is deformed, so that a peak corresponding to the echo wall resonance film type of the micro-nano small ball (5-3) in the transmission spectrum of the laser in the optical fiber I (3) is moved, the influence of the pressure on the shape of the micro-nano small ball (5-3) can be detected, and the calibrated data are combined, and the pressure value of the fluid in the container to be detected is determined. The laser emitted by the laser (1) sequentially passes through the beam splitter (2) and the optical fiber II (4) and then enters the optical detector II (7), the optical detector II (7) inputs the collected optical signals into the computer (9) through the analog-to-digital converter (8) to obtain the transmission spectrum of the laser in the optical fiber II (4), and the transmission spectrum can be used as a reference spectrum to be compared with the transmission spectrum of the laser in the optical fiber I (3) so as to reduce stray signal peaks in the transmission spectrum of the laser in the optical fiber I (3).
A method of calibrating a fluid pressure measurement device in a container of the present invention: the pressure sensor (5) and a piezoelectric pressure sensor which has been calibrated are simultaneously installed in a standard test container, deionized water is filled in the standard test container, and the positions of peaks in the transmission spectrum of the laser in the optical fiber I (3) are recorded when the readings of the piezoelectric pressure sensor are 0, 10, 20, 30 and 50 pascals respectively.
The device for measuring the fluid pressure in the container comprises a laser (1), a beam splitter (2), an optical fiber I (3), an optical fiber II (4), a pressure sensor (5), an optical detector I (6), an optical detector II (7), an analog-to-digital converter (8), a computer (9), a signal source (10) and a cable, xyz is a three-dimensional coordinate system, a through hole with the diameter of 26 millimeters is formed in a cavity wall (11) of the container to be measured, the beam splitter (2) is provided with an inlet and two outlets, the beam splitter (2) can divide light into two equal parts and output from the two outlets respectively, the analog-to-digital converter (8) is provided with two input ends and two output ends, the laser (1) emits laser with the center wavelength of 1.5 microns through the emitting end, the emitting end of the laser (1) is connected with the inlet of the beam splitter (2), one outlet of the beam splitter (2) is connected with the optical fiber I (3), the other outlet of the beam splitter (2) is connected with the optical detector I (6) after passing through the pressure sensor (5), and the other outlet of the beam splitter (2) is connected with the optical detector II (7) through the optical fiber II (4); the optical detector I (6) and the optical detector II (7) are respectively connected with two input ends of the analog-to-digital converter (8) through cables, two output ends of the analog-to-digital converter (8) are respectively connected with input ends of the computer (9) and the signal source (10) through cables, and the output end of the signal source (10) is connected with the laser (1) through cables and is used for controlling the waveform and the frequency of laser emitted by the laser (1); the pressure sensor (5) is arranged at a through hole of a cavity wall (11) of a container to be measured, the pressure sensor (5) comprises a metal sheet I (5-1), a latex film (5-2), a micro-nano small ball (5-3), a metal sheet II (5-4) and a metal cover (5-5), the metal cover (5-5) is in an open cup shape, a boss with the height of 11 mm is arranged at the center of the bottom surface in the metal cover (5-5), four small holes with the diameter of 1 mm are arranged at the bottom surface of the metal cover (5-5), the air pressure at two sides of the bottom surface of the metal cover (5-5) can be balanced, the metal sheet I (5-1) and the metal sheet II (5-4) are circular ring sheets, the latex film (5-2) is clamped between the metal sheet I (5-1) and the metal sheet II (5-4) and fixed by epoxy resin, the latex film (5-2) is filled in the inner ring of the circular ring sheet, the metal sheet II (5-4) is fixed on the metal cover (5-5) through epoxy resin, the latex film (5-4) is fixed on the opening of the metal cover (5-5) along the upper surface of the opening of the metal cover (5-5), the latex film (5-2) is fixed on the latex film (5-3) and is located below the latex film (5-2) on the latex film (5-2) and is not fixed on the latex film (5-2)When in deformation, the distance between the latex film (5-2) and the micro-nano small ball (5-3) is smaller than 0.8 mm, the micro-nano small ball (5-3) is made of a mixture of polystyrene and curing agent in the proportion range of 10:1 to 50:1, the characteristics of the micro-nano small ball (5-3) can be changed when the polystyrene and the curing agent in different proportions are adopted, and the typical value of the optical quality factor Q of the micro-nano small ball (5-3) is 10 6 The method comprises the steps of carrying out a first treatment on the surface of the A section of the optical fiber I (3) is heated and stretched to form a thin section with the diameter of 10 micrometers and the length of 30 millimeters, the optical fiber I (3) penetrates through one small hole on the bottom surface of the metal cover (5-5) and penetrates out of the other small hole, so that the thin section of the optical fiber I (3) is positioned in the metal cover (5-5) and is contacted with the side surface of the micro-nano small ball (5-3), and the optical path in the optical fiber I (3) is mutually coupled with the optical path in the tangential direction of the micro-nano small ball (5-3); the optical fiber I (3) and the optical fiber II (4) are single-mode optical fibers; the metal sheet I (5-1) and the metal sheet II (5-4) are both 26 mm in outer diameter, 2 mm in inner diameter and 0.5 mm in thickness and made of copper; the latex film (5-2) has a diameter of 8 mm and a thickness in the range of 40 to 90 μm; the diameter of the micro-nano small ball (5-3) ranges from 0.8 mm to 1.1 mm; the outer diameter of the bottom surface of the metal cover (5-5) is 26 mm, the height is 12 mm, and the metal cover (5-5) is made of aluminum or titanium.
The device of the invention is based on dielectric micro-sphere and film structure, and performs pressure measurement by measuring the optical mode of the dielectric resonator, thereby having higher sensitivity and dynamic range.
Claims (6)
1. The utility model provides a fluid pressure measuring device in container, including laser instrument (1), beam splitter (2), optic fibre I (3), optic fibre II (4), pressure sensor (5), light detector I (6), light detector II (7), analog-to-digital converter (8), computer (9), signal source (10) and cable, xyz is three-dimensional coordinate system, have the through-hole that diameter is 26 millimeters on the chamber wall (11) of container that awaits measuring, beam splitter (2) have an entry and two exports, beam splitter (2) can divide into two equal portions with light, and export from two exports respectively, analog-to-digital converter (8) have two inputs and two exports, laser instrument (1) is through emitting the laser of center wavelength 1.5 micron,
the method is characterized in that: the emitting end of the laser (1) is connected with the entrance of the beam splitter (2)One outlet of the beam splitter (2) is connected with an optical fiber I (3), the optical fiber I (3) is connected to a light detector I (6) after passing through a pressure sensor (5), and the other outlet of the beam splitter (2) is connected with a light detector II (7) through an optical fiber II (4); the optical detector I (6) and the optical detector II (7) are respectively connected with two input ends of the analog-to-digital converter (8) through cables, two output ends of the analog-to-digital converter (8) are respectively connected with input ends of the computer (9) and the signal source (10) through cables, and the output end of the signal source (10) is connected with the laser (1) through cables and is used for controlling the waveform and the frequency of laser emitted by the laser (1); the pressure sensor (5) is arranged at a through hole of a cavity wall (11) of the container to be measured, the pressure sensor (5) comprises a metal sheet I (5-1), a latex film (5-2), micro-nano pellets (5-3), a metal sheet II (5-4) and a metal cover (5-5), the metal cover (5-5) is in an open cup shape, the center of the bottom surface in the metal cover (5-5) is provided with a boss with the height of 11 mm, the bottom surface of the metal cover (5-5) is provided with four small holes with the diameter of 1 mm, the metal sheet I (5-1) and the metal sheet II (5-4) are both circular ring sheets, the latex film (5-2) is clamped between the metal sheet I (5-1) and the metal sheet II (5-4) and is fixed by epoxy resin, the latex film (5-2) is filled in the inner ring of the circular ring sheets, the metal sheet II (5-4) is fixed on the upper edge of the opening of the metal cover (5-5) through epoxy resin, the micro-pellets (5-3) are fixed on the upper side of the metal cover (5-5) through the epoxy resin and are not deformed with the latex film (5-2) at the distance of 0.2 mm below the latex film (5-2), the micro-nano-spheres (5-3) are made of a mixture of polystyrene and curing agent in a ratio ranging from 10:1 to 50:1, and the characteristics of the micro-nano-spheres (5-3) can be changed when the polystyrene and the curing agent in different ratios are adopted, and the typical value of the optical quality factor Q of the micro-nano-spheres (5-3) is 10 6 The method comprises the steps of carrying out a first treatment on the surface of the One section of the optical fiber I (3) is heated and stretched to form a thin section with the diameter of 10 micrometers and the length of 30 millimeters, the optical fiber I (3) penetrates through one small hole on the bottom surface of the metal cover (5-5) and penetrates out of the other small hole, so that the thin section of the optical fiber I (3) is positioned in the metal cover (5-5) and is in contact with the side surface of the micro-nano small ball (5-3), and the optical path in the optical fiber I (3) and the optical path in the tangential direction of the micro-nano small ball (5-3) are coupled with each other.
2. A fluid pressure measuring device in a container as defined in claim 1, wherein: the optical fibers I (3) and II (4) are single-mode optical fibers.
3. A fluid pressure measuring device in a container as defined in claim 1, wherein: sheet metal I (5-1) and sheet metal II (5-4) are each 26 mm in outside diameter, 2 mm in inside diameter, 0.5 mm in thickness and made of copper.
4. A fluid pressure measuring device in a container as defined in claim 1, wherein: the latex film (5-2) had a diameter of 8 mm and a thickness in the range of 40 μm to 90. Mu.m.
5. A fluid pressure measuring device in a container as defined in claim 1, wherein: the diameter of the micro-nano small ball (5-3) ranges from 0.8 mm to 1.1 mm.
6. A fluid pressure measuring device in a container as defined in claim 1, wherein: the outer diameter of the bottom surface of the metal cover (5-5) is 26 mm, the height is 12 mm, and the metal cover (5-5) is made of aluminum or titanium.
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