CN106441654A - Micro broadband fiber micro pressure sensing device - Google Patents
Micro broadband fiber micro pressure sensing device Download PDFInfo
- Publication number
- CN106441654A CN106441654A CN201610817436.9A CN201610817436A CN106441654A CN 106441654 A CN106441654 A CN 106441654A CN 201610817436 A CN201610817436 A CN 201610817436A CN 106441654 A CN106441654 A CN 106441654A
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- 239000000835 fiber Substances 0.000 title abstract description 12
- 238000001228 spectrum Methods 0.000 claims abstract description 29
- 238000005259 measurement Methods 0.000 claims abstract description 11
- 230000035945 sensitivity Effects 0.000 claims abstract description 11
- 238000000227 grinding Methods 0.000 claims abstract description 5
- 238000000985 reflectance spectrum Methods 0.000 claims abstract description 5
- 239000013307 optical fiber Substances 0.000 claims description 55
- 230000003287 optical effect Effects 0.000 claims description 14
- 230000003595 spectral effect Effects 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000009530 blood pressure measurement Methods 0.000 abstract description 6
- 238000005516 engineering process Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000007405 data analysis Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003129 oil well Substances 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measuring Fluid Pressure (AREA)
- Optical Transform (AREA)
Abstract
The invention provides a micro broadband fiber micro pressure sensing device. The micro broadband fiber micro pressure sensing device is characterized in that a long cavity fiber micro F-P cavity is utilized to implement external micro pressure sensing; the effect of the external micro pressure changes the length of the micro F-P cavity so that the spectrum characteristic of an interference signal of the micro F-P cavity is changed; and the magnitude of the micro pressure can be accurately measured through data analysis of the interference spectrum characteristic for micro F-P cavity reflection. For the micro broadband fiber micro pressure sensing device, the grinding technology is used to control the thickness and quality of a pressure sensitive terminal of the micro F-P cavity, so that the pressure response frequency can be improved and micro pressure measurement of broadband can be realized; and furthermore, a temperature compensating fiber grating can be manufactured on a reflectance spectrum signal output fiber, and with combination of signal processing, the cross sensitivity between temperature and pressure can be eliminated and highly accurate measurement of the micro pressure can be realized. The micro broadband fiber micro pressure sensing device has the advantages of micromation of the pressure sensing head, pressure response broadband, high sensitivity, anti-electromagnetic interference, no temperature crosstalk, and the like.
Description
Technical field
Invention is related to technical field of optical fiber sensing, more particularly to a kind of miniature broadband optical fiber micro-pressure sensing device.
Background technology
In biomedical sector, the micro pressure sensing measurement technology in human body that can invade plays in medical diagnosis on disease focuses on
The effect wanted；It is also desirable to microsensor enters to pressure under high temperature, high pressure, strong electromagnetic and corrosive industrial environment
Row test.Optical fibre Fabry-perot instrument sensor is so that it is sensitive, accurate, strong adaptability, the advantage such as compact and intelligent in recent years
Enjoy favor.According to the difference in Fabry-perot optical fiber chamber, optical fiber Fabry-Perot sensor can be divided into following three kinds：Intrinsical Fabry-perot optical fiber is done
Interferometer, extrinsic type Fabry-perot optical fiber interferometer and linear optical fiber Fabry Parot interferometer.Conventional Fabry-perot optical fiber cavity sensor structure and system
There are all optical fibre structure method amber pressure sensor, Laser Processing mini optical fibre pressure sensor, silica diaphragm pressure as technique
Sensor, above mostly adopt laser ablation processing method directly on optical fiber formed all optical fibre structure optical fiber cloth in-amber
Luo Yi sensor, but but there is certain defect in actual applications, for example adopt all -fiber to tie in oil well monitor field
The optical fiber Fabry-Perot-type instrument sensor of structure often occur adhesion phenomenon so that lead to sensor cannot normal work etc., simultaneously
Due to the cost of laser ablation is too high cannot scale of mass production.Since entering 21 century, by optical fiber sensing technology and MEMS technology
Combine making novel optical fiber MEMS sensor by its high reliability and size are little, the degree of accuracy is high, dynamic range is easy to greatly
The many advantages such as large scale integration production have become as the new focus that Fibre Optical Sensor makes field, slow yet with material
Stagnant, sealing problem, reflecting layer layering etc. make this sensor stability poor.Carry for traditional F-P cavity sensor present invention
Go out a kind of brand-new miniature broadband optical fiber micro-pressure sensing method and device technical field, be capable of broadband micro-pressure
High-acruracy survey.
Content of the invention
The invention mainly solves the technical problem of providing a kind of miniature broadband optical fiber micro-pressure sensing device, using length
Extraneous micro-pressure perception is realized in the optical fiber Minitype F-P chamber of chamber length.Form one using two optical fiber collimator end surfaces certain distances
Plant the Minitype F-P chamber of long chamber length, micro-pressure effect makes its change of cavity length, and leads to its interference signal spectral characteristic to change,
By the spectral characteristic data analysis in Minitype F-P chamber, precisely measure out the size of micro-pressure.
For solving above-mentioned technical problem, one aspect of the present invention is：A kind of miniature broadband optical fiber is provided
Micro-pressure sensing device is it is characterised in that include：Light source module, optical fiber circulator, micropressure sensor module, spectra collection
Module and signal processing module, the first port of described optical fiber circulator is connected with described light source module, second port with described
Micropressure sensor module connects, the 3rd port is connected with described spectra collection module, and described spectra collection module connects described
Signal processing module, the fiber optic collimator that described micropressure sensor module includes glass capillary and is fixed in glass capillary
Device A and optical fiber collimator B；
Described light source module is used for exporting the optical signal of stable spectra and power to described first port, and described second port is used for
By described optical signal inject described micropressure sensor module so that the Minitype F-P chamber in described micropressure sensor module to
Described second port reflects the interference signal of described optical signal, and described 3rd port is used for exporting institute to described spectra collection module
State interference signal, described spectra collection module is used for gathering the spectral characteristic data of described interference signal, described processing module is used
According to described spectral characteristic data accurate measurement micro-pressure size；Described second port passes through optical patchcord and described micro-pressure
Sensor assembly connects, and described 3rd port is connected with described spectra collection module by optical patchcord.
Preferably, described light source module adopts the semiconductor light source of wide spectrum, and described spectra collection module adopts miniature light
Analysis of spectrum module.
Preferably, described optical fiber collimator end face is coated with low anti-film, and two collimater end faces are spaced in millimeter magnitude, is formed
A kind of long chamber of weak reflection long F-P cavity pressure high sensitivity sensitive structure is it is ensured that realize the high-acruracy survey of micro-pressure.
Preferably, the presser sensor end in described Minitype F-P chamber controls its thickness and quality using grinding manufacture craft, changes
The intrinsic vibration frequency characteristic of kind sensing head, improves its pressure-responsive frequency, realizes the measurement of broadband micro-pressure.
Preferably, described Minitype F-P chamber makes temperature compensation optical fiber grating on reflectance spectrum signal output optical fiber, disappears
Except the cross sensitivity of its temperature and pressure, further increase micro-pressure certainty of measurement.
It is different from the situation of prior art, the invention has the beneficial effects as follows：
1st, compared with traditional all optical fibre structure, the present invention forms one by using two optical fiber collimator end surfaces certain distances
Plant Minitype F-P chamber, greatly reduce light wave loss, improve the signal to noise ratio of transducing signal, improve pressure measurement accuracy.
2nd, using be coated with the optical fiber collimator end face of low anti-film as Minitype F-P cavity reflection face so as to chamber length reach several
Millimeter it is achieved that weak reflection long chamber long F-P cavity presser sensor structure, significantly improves micro-pressure measurement sensitivity it is ensured that reality
The high-acruracy survey of existing micro-pressure；
3rd, its pressure-responsive frequency, using the thickness grinding manufacture craft control pressure sensitivity end and quality, is improved in Minitype F-P chamber,
Realize wide band micro-pressure measurement.
4th, Minitype F-P chamber makes temperature compensation optical fiber grating on reflectance spectrum signal output optical fiber, eliminate its temperature with
The cross sensitivity of pressure, improves the certainty of measurement of micro-pressure further.
Brief description
Fig. 1 is miniature broadband optical fiber minute-pressure force measuring device schematic diagram.
Fig. 2 is the structural representation in a kind of application scenarios of micropressure sensor module.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of not making creative work
Embodiment, broadly falls into the scope of protection of the invention.
Referring to Fig. 1, it is embodiment of the present invention miniature broadband optical fiber minute-pressure force measuring device schematic diagram.The present embodiment micro-
Molded breadth frequency band fibre-optical minute-pressure force measuring device includes light source module 1, optical fiber circulator 2, micropressure sensor module 3, spectrum are adopted
Collection module 4 and signal processing module 5.
First port D1 that optical fiber circulator 2 includes being connected with light source module 1 is connected with micro-pressure sensing module 3
Second port D2 and the 3rd port D3 being connected with spectra collection module 4, spectra collection module 4 connects processing module 5.In this reality
Apply in example, light source module 1 employs the semiconductor light source of wide spectrum, and spectra collection module 4 employs micro spectrometer, at signal
Reason module 5 employs embedded type CPU, and embedded type CPU, to data process＆analysis, realizes the accurate measurement of micro-pressure.Alternatively,
Data-interface can also be provided for embedded type CPU.It is accurate that micropressure sensor module 3 employs the optical fiber being fixed in glass tube 32
Straight device A30 and collimater B31 keep at a certain distance away the long F-P cavity in the long chamber of weak reflection of formation.
Light source module 1 is used for exporting the optical signal of stable spectra and power to first port D1, and second port D2 is used for will
Optical signal injects micropressure sensor module 3, so that Minitype F-P chamber is to the interference signal of second port D2 reflected light signal, the
Three port D3 are used for exporting interference signal to spectra collection module 4, and spectra collection module 4 is used for gathering the Spectral Properties of interference signal
Property data, signal processing module 5 be used for according to spectral characteristic data accurate measurement micro-pressure size.
Micropressure sensor module 3 enters the miniature F- of micropressure sensor module 3 as presser sensor structure, optical signal
After in P chamber, if ambient pressure size changes, the chamber length in Minitype F-P chamber also can change therewith, and then causes miniature
The spectral characteristic of interference signal of F-P cavity reflection changes, can after the spectral characteristic data of interference signal is analyzed
To precisely measure out micro-pressure size.
Specifically, as shown in Fig. 2 being the structural representation in a kind of application scenarios of micropressure sensor module in Fig. 1.
In this application scenarios, several millimeters are spaced using the optical fiber collimator A and optical fiber collimator B being coated with low anti-film and define one kind
The long F-P cavity in the long chamber of weak reflection, adopts, to the Minitype F-P chamber of above-mentioned formation, the thickness grinding manufacture craft control pressure sensitivity end simultaneously
Degree and quality, improve its pressure-responsive frequency, realize wide band micro-pressure measurement, further in reflectance spectrum signal output light
Make temperature compensation optical fiber grating on fibre, eliminate the cross sensitivity of its temperature and pressure, realize the high-acruracy survey of micro-pressure.
By the way, the miniature broadband optical fiber pressure measurement apparatus of the embodiment of the present invention are in micropressure sensor mould
Form Minitype F-P chamber, if there are micro-pressure effect, micro-pressure can make the chamber length in Minitype F-P chamber change, and leads to micro- in block
The spectral characteristic of the anti-interference signal relating to of type F-P cavity changes, can essence by the spectral characteristic data analysis of interference signal
Really calculate the size of micro-pressure, thus realizing the high-acruracy survey of micro-pressure in broad frequency range.
The foregoing is only embodiments of the invention, not thereby limit the present invention the scope of the claims, every using this
Equivalent structure or equivalent flow conversion that bright specification and accompanying drawing content are made, or directly or indirectly it is used in other related skills
Art field, is included within the scope of the present invention.
Claims (5)
1. a kind of miniature broadband optical fiber micro-pressure sensing device is it is characterised in that include：Light source module, optical fiber circulator, micro-
Pressure sensor module, spectra collection module and signal processing module, the first port of described optical fiber circulator and described light source
Module connects, second port is connected with described micropressure sensor module, the 3rd port is connected with described spectra collection module；Institute
State spectra collection module and connect described signal processing module, described micropressure sensor module includes glass capillary and is fixed on
Optical fiber collimator A in glass capillary and optical fiber collimator B；
Described light source module is used for exporting the optical signal of stable spectra and power to described first port, and described second port is used for
By described optical signal inject described micropressure sensor module so that the Minitype F-P chamber in described micropressure sensor module to
Described second port reflects the interference signal of described optical signal, and described 3rd port is used for exporting institute to described spectra collection module
State interference signal, described spectra collection module is used for gathering the spectral characteristic data of described interference signal, described processing module is used
According to described spectral characteristic data accurate measurement micro-pressure size；Described second port passes through optical patchcord and described micro-pressure
Sensor assembly connects, and described 3rd port is connected with described spectra collection module by optical patchcord.
2. miniature broadband optical fiber micro-pressure sensing device according to claim 1 it is characterised in that：Described optical fiber is accurate
Straight device end face is coated with low anti-film, and two collimater end faces are spaced in millimeter magnitude, forms a kind of long chamber of weak reflection long F-P cavity pressure high
Sensitivity sensitive structure is it is ensured that realize the high-acruracy survey of micro-pressure.
3. miniature broadband optical fiber micro-pressure sensing device according to claim 1 it is characterised in that：Described miniature F-
The presser sensor end in P chamber controls its thickness and quality using grinding manufacture craft, improves the intrinsic vibration frequency characteristic of sensing head,
Improve its pressure-responsive frequency, realize the measurement of broadband micro-pressure.
4. miniature broadband optical fiber micro-pressure sensing device according to claim 1 it is characterised in that：Described miniature F-
P chamber makes temperature compensation optical fiber grating on reflectance spectrum signal output optical fiber, eliminates the cross sensitivity of its temperature and pressure, enters
One step improves micro-pressure certainty of measurement.
5. miniature broadband optical fiber micro-pressure sensing device according to claim 1 it is characterised in that：Described light source module
Using the semiconductor light source of wide spectrum, described spectra collection module adopts micro spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610817436.9A CN106441654A (en) | 2016-09-12 | 2016-09-12 | Micro broadband fiber micro pressure sensing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610817436.9A CN106441654A (en) | 2016-09-12 | 2016-09-12 | Micro broadband fiber micro pressure sensing device |
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| CN106441654A true CN106441654A (en) | 2017-02-22 |
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| CN201610817436.9A Pending CN106441654A (en) | 2016-09-12 | 2016-09-12 | Micro broadband fiber micro pressure sensing device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109633829A (en) * | 2019-01-18 | 2019-04-16 | 云南电网有限责任公司昭通供电局 | A kind of optical series recognition methods, system and cable splice closure based on jumping fiber |
| CN111537009A (en) * | 2020-05-28 | 2020-08-14 | 山东省科学院激光研究所 | Disposable optical fiber temperature and pressure sensor based on spectrum partition and sensing system thereof |
| CN112050976A (en) * | 2020-08-03 | 2020-12-08 | 西安工业大学 | Frequency modulation continuous wave laser interference pressure sensor and detection method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000121460A (en) * | 1998-10-20 | 2000-04-28 | Mitsubishi Cable Ind Ltd | Tactile sensor |
| CN101858809A (en) * | 2010-05-28 | 2010-10-13 | 天津大学 | Optical fiber Fabry-Perot pressure sensor and fabrication method thereof |
| CN103197380A (en) * | 2013-03-27 | 2013-07-10 | 合肥工业大学 | Preparation method of contact-type optical fiber micro probe based on optical fiber tapering technology |
| CN103308146A (en) * | 2013-05-17 | 2013-09-18 | 武汉理工大学 | Signal demodulation system for optical fiber F-P (Fabry-Perot) acoustic emission sensor |
| CN104197844A (en) * | 2014-09-18 | 2014-12-10 | 中国工程物理研究院流体物理研究所 | All optical fiber frequency domain interference absolute distance measurement method and device |
-
2016
- 2016-09-12 CN CN201610817436.9A patent/CN106441654A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000121460A (en) * | 1998-10-20 | 2000-04-28 | Mitsubishi Cable Ind Ltd | Tactile sensor |
| CN101858809A (en) * | 2010-05-28 | 2010-10-13 | 天津大学 | Optical fiber Fabry-Perot pressure sensor and fabrication method thereof |
| CN103197380A (en) * | 2013-03-27 | 2013-07-10 | 合肥工业大学 | Preparation method of contact-type optical fiber micro probe based on optical fiber tapering technology |
| CN103308146A (en) * | 2013-05-17 | 2013-09-18 | 武汉理工大学 | Signal demodulation system for optical fiber F-P (Fabry-Perot) acoustic emission sensor |
| CN104197844A (en) * | 2014-09-18 | 2014-12-10 | 中国工程物理研究院流体物理研究所 | All optical fiber frequency domain interference absolute distance measurement method and device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109633829A (en) * | 2019-01-18 | 2019-04-16 | 云南电网有限责任公司昭通供电局 | A kind of optical series recognition methods, system and cable splice closure based on jumping fiber |
| CN111537009A (en) * | 2020-05-28 | 2020-08-14 | 山东省科学院激光研究所 | Disposable optical fiber temperature and pressure sensor based on spectrum partition and sensing system thereof |
| CN112050976A (en) * | 2020-08-03 | 2020-12-08 | 西安工业大学 | Frequency modulation continuous wave laser interference pressure sensor and detection method thereof |
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| CB03 | Change of inventor or designer information |
Inventor after: Dai Zhiyong Inventor after: Zhang Yang Inventor after: Pang Wei Inventor after: Wang Yanyan Inventor before: Dai Zhiyong Inventor before: Zhang Yang Inventor before: Wang Yanyan |
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Application publication date: 20170222 |
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