CN101424697A

CN101424697A - Optical fiber F-P acceleration and pressure sensor and its manufacturing method

Info

Publication number: CN101424697A
Application number: CNA2008103053170A
Authority: CN
Inventors: 冉曾令; 饶云江
Original assignee: Individual
Current assignee: Individual
Priority date: 2008-10-31
Filing date: 2008-10-31
Publication date: 2009-05-06

Abstract

The invention provides a fiber optic acceleration and pressure sensor dispensing with other structures, in particular relates to a fiber optic Fabry-perot acceleration and pressure sensor which comprises optic fibers and connected optic fibers, wherein microflutes are formed on the end faces of the optic fibers, projections are formed on the connected optic fibers, and the optic fibers and the connected optic fibers are connected through butted joint to form a fabry-perot chamber and membranes; and besides, the optical reflecting surface of the fabry-perot chamber is a plane. The sensor does not need to be matched with other structures; when the sensor senses the external accelerated speed and pressure, the length of the fabry-perot chamber can be changed, and the corresponding measurement amount can be obtained by measuring the change of the length of the chamber; and besides, as the optical reflecting surface of the sensor is a plane, the sensor has favorable optical performance. The invention can be used as the acceleration and pressure sensor, and the measurement range thereof can be changed by changing the thickness or the shape of each membrane and the length or the weight of the hard mass centre.

Description

Optical fiber F-P acceleration and pressure transducer and manufacture method thereof

Technical field

The invention belongs to technical field of optical fiber sensing, particularly relate to a kind of optical fiber acceleration and pressure transducer and manufacture method thereof.

Technical background

In recent years, fast development along with fields such as biology, medical science, the energy, environment, space flight and aviation, military affairs, the microminiaturization of sensor, lightweight, low energy consumption, adverse environment resistant ability etc. have been proposed very urgent requirement, and the micro-nano sensor has become one of international great scientific and technological forward position focus.The fast development of laser micro-machining technology provides new technological means for studying micro-nano fiber senser element of new generation, therefore how using modern micro-nano process technology such as laser and realizes that on optical fiber the functional senser element of various micro-nanos is the important trend of following Fibre Optical Sensor development, also is a ten minutes forward position in the big field of sensor, great science problem.

All be based on the principle of electric parameter measurement based on the micro-nano sensor of MEMS, also there are problems aspect the adverse environment resistant ability, particularly be difficult to work under mal-conditions such as high temperature (more than 600 ℃), low temperature (below 60 ℃), strong electromagnetic, inflammable and explosive environment, thereby greatly limited the special applications of MEMS sensor, as space flight and aviation, the energy, chemical industry, biomedicine etc. at many key areas.In the extended familys of sensor, Fibre Optical Sensor has essential safety, be not subjected to electromagnetic interference (EMI), be convenient to networking and remote remote measurement, be suitable for series of advantages such as rugged surroundings, becomes one of mainstream development direction of new generation sensor technology gradually.

Optical fiber acceleration transducer has received great concern in recent years, and multiple optical fiber acceleration transducer has been arranged at present, such as: ring cavity interferometer accelerometer, bragg grating accelerometer, modular fiber optic F-P acceleration meter etc.The common shortcoming of these acceleration transducers needs other respective outer side edges exactly and could constitute acceleration transducer, and as mass, crossbeam or spring etc., size is bigger, be difficult to be used in the hot environment, and the making repeatability of sensor has much room for improvement.US6921894 discloses the fine F-P acceleration meter of a kind of low-light, by spring optical fiber and mass is coupled together, and has shortcomings such as repeatability is bad, temperature sensitivity is high, be unfavorable for the scale manufacturing, optical property is relatively poor.

Summary of the invention

Technical matters to be solved by this invention provides a kind of optical fiber acceleration and pressure transducer that does not need other respective outer side edges.

The present invention also will provide the manufacture method of a kind of above-mentioned Fabry-perot optical fiber acceleration and pressure transducer, can scale makes the method P acceleration and the pressure transducer of various ranges.

The technical scheme that technical solution problem of the present invention is adopted is: optical fiber F-P acceleration and pressure transducer, comprise optical fiber and connect optical fiber, end face at described optical fiber has microflute, described being connect projection is arranged on the optical fiber, described optical fiber and quilt are connect optical fiber and are linked together by butt joint, form enamel amber chamber and diaphragm, the optical reflection face in described enamel amber chamber is the plane.

Further, described projection is arranged in the microflute.

Further, described projection is arranged on outside the microflute.

Further, described projection has 2, is separately positioned on the two ends that connect optical fiber.

The manufacture method of optical fiber F-P acceleration and pressure transducer, this method may further comprise the steps:

1) processes microflute at the end face of optical fiber;

2) connect projection of end face processing of optical fiber;

3) the formed fiber alignment of step 1 and step 2 is in the same place, forms enamel amber chamber, make optical fiber F-P acceleration and pressure transducer.

Further, described step 3 is the end welding that microflute arranged with being connect on bossed end of optical fiber and the optical fiber, and the outer face cutting that will be connect optical fiber again forms diaphragm.

Further, described step 3 is the end welding that microflute arranged with being connect on bossed end of optical fiber and the optical fiber, will be connect projection of other end processing of optical fiber again, and form diaphragm.

Further, described processing is to adopt Ultra-Violet Laser processing, femtosecond laser processing, infrared laser processing or electron beam lithography.

Further, described microflute is cylindrical, cuboid or cube shaped.

Further, described butt joint is to adopt laser welding, arc welding, plated film butt joint or bonding.

The invention has the beneficial effects as follows: the present invention does not need other respective outer side edges, and when sensor was experienced extraneous acceleration, pressure, the chamber length of Fa-Po cavity can change, and the change long by test chamber just can obtain corresponding test volume; In addition, because optical reflection face of the present invention is the plane, so good in optical property.The present invention can be used as acceleration and pressure transducer, and the length or the weight at thickness by changing diaphragm or shape, hard amount center change the range of sensor.

Description of drawings

Fig. 1 is the cut-open view of optical fiber of the step 1 of the embodiment of the invention 1;

Fig. 2 is the cut-open view of optical fiber of the step 2 of the embodiment of the invention 1;

Fig. 3 is the cut-open view of optical fiber of the step 3 of the embodiment of the invention 1;

Fig. 4 is the optical fiber F-P acceleration of the embodiment of the invention 1 and the cut-open view of pressure transducer;

Fig. 5 is the optical fiber F-P acceleration of the embodiment of the invention 2 and the cut-open view of pressure transducer;

Fig. 6 is the optical fiber F-P acceleration of the embodiment of the invention 3 and the cut-open view of pressure transducer;

Fig. 7 is the optical fiber F-P acceleration of the embodiment of the invention 1 and the spectrogram of pressure transducer.

Embodiment

Embodiment 1

Step 1, on silica fibre 1, be 100 microns microflutes 4 deeply, as shown in Figure 1 with 157nm Ultra-Violet Laser processing one;

Step 2, will be connect optical fiber 2 end face with long projection of 60 microns 3 of 157nm Ultra-Violet Laser processing, as shown in Figure 2;

Step 3, step 1 and the formed optical fiber of step 2 are welded together, form enamel amber chamber 5, wherein being connect on a end that optical fiber 2 has a projection 3 and the optical fiber 1 has an end of microflute 4 to weld, as shown in Figure 3;

Step 4, the outer face cutting that will be connect optical fiber 2 form diaphragm 6, promptly make optical fiber F-P acceleration and the pressure transducer that has hard amount center (being projection 3) of the present invention, and as shown in Figure 4, the spectrogram of sensor as shown in Figure 7.

During use, when sensor was experienced pressure and acceleration, the chamber length in enamel amber chamber 5 will change, and tested extraneous pressure and acceleration by measuring the long variation in chamber.

Embodiment 2

Step 1, on jewel optical fiber 1, be 40 microns microflutes 4 deeply with femtosecond laser processing one;

Step 2, with welded together by being connect optical fiber 2, form enamel amber chamber 5, the other end that will be connect optical fiber 2 utilizes projection 3 of Laser Processing, and forms diaphragm 6, so just formed hard amount center the is arranged acceleration and the pressure transducer of (being projection 3), as shown in Figure 5.

Embodiment 3

Step 1, processing one is 100 microns microflutes 4 deeply on optical fiber 1;

Step 2, will be connect optical fiber 2 end face with long projection of 60 microns 3 of 157nm Ultra-Violet Laser processing;

Step 3, step 1 and the formed optical fiber of step 2 are welded together, form enamel amber chamber 5, wherein being connect on a end that optical fiber 2 has a projection 3 and the optical fiber 1 has an end of microflute 4 to weld;

Step 4, will be connect projection 3 of other end processing of optical fiber 2, and form diaphragm 6, and so just form acceleration and pressure transducer that hard amount center is arranged, as shown in Figure 6, the sensitivity of such sensor is higher.

The present invention can plate one deck heavy metal film 7 on the outer face of projection 3, as shown in Figure 6, can increase the quality at hard amount center like this, improves the sensitivity of sensor, and heavy metal film 7 comprises gold, silver, copper or platinum film; Diaphragm 6 of the present invention can become different shape by laser ablation, as circular, apart from shape etc., but preferably apart from shape (longitudinal section that is diaphragm 6 is apart from shape); Can plate reflectance coating on two optical reflection faces in enamel amber of the present invention chamber 5 and improve optical signal intensity, to improve the precision of sensor; The non-optical reflecting surface in enamel amber of the present invention chamber 5 can be processed into and fiber axis off plumb inclined-plane, reducing the interference of its reflected light to enamel amber chamber 5, thereby improves measuring accuracy; The chamber in enamel amber of the present invention chamber 5 is long best less than 200 microns; Projection 3 of the present invention can be shapes such as right cylinder, rectangular parallelepiped; Optical fiber 1 of the present invention and quilt are connect single mode or the multimode optical fiber that optical fiber 2 adopts quartz, polymkeric substance, jewel or photon crystal material to make, and these all belong to protection scope of the present invention.

Claims

[claim 1] optical fiber F-P acceleration and pressure transducer, comprise optical fiber (1) and connect optical fiber (2), it is characterized in that: the end face at described optical fiber (1) has microflute (4), described being connect projection (3) is arranged on the optical fiber (2), described optical fiber (1) and quilt are connect optical fiber (2) and are linked together by butt joint, form enamel amber chamber (5) and diaphragm (6), the optical reflection face in described enamel amber chamber (5) is the plane.
[claim 2] optical fiber F-P acceleration as claimed in claim 1 and pressure transducer is characterized in that: described projection (3) is arranged in the microflute (4).
[claim 3] optical fiber F-P acceleration as claimed in claim 1 and pressure transducer is characterized in that: described projection (3) is arranged on outside the microflute (4).
[claim 4] optical fiber F-P acceleration as claimed in claim 1 and pressure transducer is characterized in that: described projection (3) has 2, is separately positioned on the two ends that connect optical fiber (2).
The manufacture method of [claim 5] optical fiber F-P acceleration and pressure transducer is characterized in that: this method may further comprise the steps:

1) processes microflute (4) at the end face of optical fiber (1);

2) connect an end face processing projection (3) of optical fiber (2);

3) the formed fiber alignment of step 1 and step 2 is in the same place, forms enamel amber chamber (5), make optical fiber F-P acceleration and pressure transducer.
The manufacture method of [claim 6] optical fiber F-P acceleration as claimed in claim 5 and pressure transducer, it is characterized in that: described step 3 is the end welding that microflute (4) arranged with being connect on a end that optical fiber (2) has a projection (3) and the optical fiber (1), will be connect the outer face cutting formation diaphragm (6) of optical fiber (2) again.
The manufacture method of [claim 7] optical fiber F-P acceleration as claimed in claim 5 and pressure transducer, it is characterized in that: described step 3 is to be had an end of microflute (4) to weld with connecing on a end that optical fiber (2) has a projection (3) and the optical fiber (1), to be connect an other end processing projection (3) of optical fiber (2) again, and be formed diaphragm (6).
The manufacture method of [claim 8] optical fiber F-P acceleration as claimed in claim 5 and pressure transducer is characterized in that: described processing is to adopt Ultra-Violet Laser processing, femtosecond laser processing, infrared laser processing or electron beam lithography.
The manufacture method of [claim 9] optical fiber F-P acceleration as claimed in claim 5 and pressure transducer is characterized in that: described microflute (4) is cylindrical, cuboid or cube shaped.
The manufacture method of [claim 10] optical fiber F-P acceleration as claimed in claim 5 and pressure transducer is characterized in that: described butt joint is to adopt laser welding, arc welding, plated film butt joint or bonding.