CN100585408C - Minitype all-optical fiber acceleration sensor and its manufacture method - Google Patents
Minitype all-optical fiber acceleration sensor and its manufacture method Download PDFInfo
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- CN100585408C CN100585408C CN200810232853A CN200810232853A CN100585408C CN 100585408 C CN100585408 C CN 100585408C CN 200810232853 A CN200810232853 A CN 200810232853A CN 200810232853 A CN200810232853 A CN 200810232853A CN 100585408 C CN100585408 C CN 100585408C
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Abstract
The invention discloses a miniature full optical fiber F-P acceleration transducer, which comprises: a common single mode optical fiber, a hollow-core optical fiber and a solid-core photon crystal fiber; and the common single mode optical fiber, the hollow-core optical fiber and the solid-core photon crystal fiber are sequentially connected in fusing way. The acceleration transducer is characterized in that: a plurality of sector via holes which are concentric with the cross section of the solid-core photon crystal fiber are formed at the axis direction of the solid-core photon crystal fiber, the separation parts of each sector via hole form a shaking arm, a ring shape is formed by all sector via holes and the shaking arm together, and a shaking block is formed by the part which is surrounded by the ring shape. The invention also discloses a producing method of the miniature full optical fiber F-P acceleration transducer. The acceleration transducer has the beneficial effects that: the transducer is miniaturized through full optical fiber and can bear high temperature, the operation is simple, the sensitivity is high, the response speed is swift and the hard environment endurance is strong.
Description
Technical field
The present invention relates to a kind of optical fiber sensing technology, relate in particular to a kind of miniature full-optical fiber F-P acceleration sensor and preparation method thereof.
Background technology
Acceleration is one of very important parameter of physics and engineering field.The measurement of acceleration all is widely used in a lot of fields, as the guidance that can be used for guided missile at aerospace field, the navigation of aircraft, the attitude control of artificial satellite and the measurement of international space station low frequency acceleration etc.; In auto industry, in order to determine the shock-absorbing capacity of automobile itself, be mainly used in suspension system, pre-brake/trailer system, control loop and security system; In power plant, can realize remote measurement, as measurement of inner units such as engine, transformer etc. to large electric appliances equipment.Therefore the measurement of acceleration has important application value, and the acceleration transducer of research and development novel practical is particularly important.
There are shortcomings such as sensitivity is low, bulky in traditional mechanical type accelerometer based on simple harmonic oscillation, is subjected to certain restriction in application.Fibre Optical Sensor is the outstanding senser element of a class, its appearance provides outlet for solving sensor in the use under the rugged surroundings, and Fibre Optical Sensor more and more is subject to people's attention with its explosion-proof, anti-electromagnetic interference (EMI), anticorrosive, high temperature resistant, advantage such as structure is small and exquisite.Because present many fields all require in real time, on the spot, many reference amounts measure, and mostly require accelerometer to have characteristics such as volume is little, light weight, precision height, good stability, these all are that optical fibre device is more easily realized.
Because its precision height, applied range is the project that people endeavour to study always, but is being solved preferably aspect sensor microminiaturization, the high precision always based on the fibre optic accelerometer of interference technique.Optical fibre Fabry-perot (F-P) interference sensor be at present historical the longest, technology is the most ripe, one of a kind of Fibre Optical Sensor of being most widely used, successfully be used to measure parameters such as temperature, strain, pressure, displacement, ultrasound wave, refractive index, the commercialization degree is very high.Particularly, because fibre-optical F-P sensor has unique advantages such as precision height, measurement range is big, multiplexing capacity is strong, response speed is fast, carry out the extensive concern that acceleration analysis has caused people with it.
Summary of the invention
The present invention just is based on the F-P principle of interference and has designed and produced a kind of microminiaturized interfere type acceleration transducer, it is microminiaturized, integrated that accelerometer has been realized, and this accelerometer making is simple, highly sensitive, response speed fast, the adverse environment resistant ability is strong, temperature influence is less, and particularly this sensor can be used in people, the living animal or the measurement of associated arguments such as the acceleration of others, vibration.
The invention discloses a kind of miniature full-optical fiber F-P acceleration sensor, comprise: general single mode fiber, hollow-core fiber, real core photonic crystal fiber, described general single mode fiber, hollow-core fiber, the welding in turn of real core photonic crystal fiber, wherein, on real core photonic crystal fiber is axial, be processed with plurality of sector through hole with real core photonic crystal fiber square section concentric, the partitioned portion of each fan-shaped pylone forms shaker arm, all fan-shaped pylones and shaker arm are formed toroidal together, and the part that annulus enclosed forms vibrating mass.
Described fan-shaped pylone promptly is vertically a scallop hole on real core photonic crystal fiber, also is that the fan-shaped pylone degree of depth is identical with real core photonic crystal fiber length.
Described shaker arm end face is between real core photonic crystal fiber exposed end end face and the real core photonic crystal fiber welding end end face, and the difference in height of shaker arm end face and vibrating mass end face is 0～80 micron; Shaker arm thickness is 3～20 microns; The pairing central angle of the arc of shaker arm is 5 °～15 °; Vibrating mass thickness is 0～100 micron.
The internal diameter of described fan-shaped pylone is 8～20 microns, and external diameter is 20～40 microns.
The quantity of described shaker arm is 2,3 or 4, and under the shaker arm situation of varying number, all presses the central angle symmetry between each shaker arm.
The length of real core photonic crystal fiber is 500 microns～2 millimeters.
Described hollow-core fiber can adopt hollow-core photonic crystal fiber, also can adopt the hollow glass optical fiber.
Adopt hollow-core photonic crystal fiber, then hollow-core fiber length is 10 microns～10 centimetres; Adopt the hollow glass optical fiber, then hollow-core fiber length is 10 microns～800 microns.
The invention also discloses a kind of method for making of miniature full-optical fiber F-P acceleration sensor, this method step is as follows:
1) adopts of the end welding of the method for manual weld with general single mode fiber one end and hollow-core fiber;
2) F-P interference cavity length as required, the cutting hollow-core fiber;
3) adopt of cut end and the real core photonic crystal fiber one end welding of the method for manual weld with the hollow-core fiber of well cutting;
4) length is as required cut real core photonic crystal fiber;
5) adopt abrasive disk that real core photonic crystal fiber accurately is ground to design length;
6) adopt femtosecond laser or 157nm Laser Micro-Machining method,, process plurality of sector through hole with real core photonic crystal fiber square section concentric at the abrasive tip of real core photonic crystal fiber; At the partitioned portion of each fan-shaped pylone, process shaker arm by the central angle symmetry.
In the above-mentioned procedure of processing, the parameter of each device is as follows:
Described hollow-core fiber length is 10 microns～10 centimetres or 10 microns～800 microns;
The length of described real core photonic crystal fiber is 500 microns～2 millimeters;
Described fan-shaped pylone axially runs through real core photonic crystal fiber; The quantity of shaker arm is 2,3 or 4, and under the shaker arm situation of varying number, all presses the central angle symmetry between each shaker arm; The shaker arm end face is between real core photonic crystal fiber exposed end end face and the real core photonic crystal fiber welding end end face, the difference in height of shaker arm end face and vibrating mass end face is 0～80 micron, shaker arm thickness is 3～20 microns, the pairing central angle of the arc of shaker arm is 5 °～15 °, and vibrating mass thickness is 0～100 micron; The internal diameter of fan-shaped pylone is 8～20 microns, and external diameter is 20～40 microns;
Useful technique effect of the present invention is: make the full optical fiber microminiaturization of sensor, high temperature resistant, make simple, highly sensitive, response speed fast, the adverse environment resistant ability is strong.
Description of drawings
Fig. 1, miniature full-optical fiber F-P acceleration sensor structural drawing;
Fig. 2, shaker arm quantity are the end face structure figure of 2 o'clock miniature full-optical fiber F-P acceleration sensor;
Fig. 3, shaker arm quantity are the end face structure figure of 3 o'clock miniature full-optical fiber F-P acceleration sensor;
Fig. 4, shaker arm quantity are the end face structure figure of 4 o'clock miniature full-optical fiber F-P acceleration sensor;
Fig. 5, miniature full-optical fiber F-P acceleration sensor photo in kind;
In the accompanying drawing: general single mode fiber 1, hollow-core fiber 2, real core photonic crystal fiber 3, shaker arm 3-1, vibrating mass 3-2, fan-shaped pylone 3-3, reflecting surface 4, welding point 2-1.
Embodiment
Miniature full-optical fiber F-P acceleration sensor disclosed by the invention comprises: general single mode fiber 1, hollow-core fiber 2, real core photonic crystal fiber 3, the two ends of hollow-core fiber 2 respectively with general single mode fiber 1 and 3 weldings of real core photonic crystal fiber, the cavity of hollow-core fiber 2 partly constitutes the F-P interference cavity, wherein: real core photonic crystal fiber 3 axially on, be processed with plurality of sector through hole 3-3 with real core photonic crystal fiber 3 square section concentrics, the partitioned portion of each fan-shaped pylone 3-3 forms shaker arm 3-1, all fan-shaped pylone 3-3 and shaker arm 3-1 form toroidal together, and the part that annulus enclosed forms vibrating mass 3-2.
The F-P interference cavity with two welding ends of general single mode fiber 1 and real core photonic crystal fiber 3 on can form two reflectings surface 4, the reflectivity of the reflecting surface 4 that the theoretical analysis different materials forms is to the influence of miniature full-optical fiber F-P interfere type sensor interferometer output signal, thereby thereby decision how to carry out which kind of coating film treatment and obtain different reflectivity at two reflectings surface.
Constitute the material of the hollow-core fiber 2 of F-P interference cavity, can select hollow-core photonic crystal fiber, as shown in Figure 1; Also can select the hollow glass optical fiber.
On the problem of F-P interference cavity selected materials, mainly contain following consideration:
1) when measurement environment to the temperature effect of sensor hour, adopt the hollow glass optical fiber as the F-P interference cavity, this moment, F-P interference cavity length range was between 10 microns～800 microns;
2) when measurement environment is big to the temperature effect of sensor, adopt hollow-core photonic crystal fiber as the F-P interference cavity, this moment F-P interference cavity length range between 10 microns～10 centimetres, and can be unlimited single mould photon crystal optical fiber, i.e. EPCF.
According to the acceleration range and the desired level of sensitivity of measuring object, design the parameter of real core photonic crystal fiber 3, shaker arm 3-1 and vibrating mass 3-2.According to the size of design, utilize micro-processing methods such as femtosecond laser or 157nm laser that the end face of real core photonic crystal fiber 3 is carried out little processing, make the each several part size of end face satisfy designing requirement:
The length range of real core photonic crystal fiber 3 is 500 microns～2 millimeters;
The difference in height of shaker arm 3-1 end face and vibrating mass 3-2 is 0～80 micron; That is, shaker arm 3-1 end face can with the end face of vibrating mass 3-2 on same plane, also can be between real core photonic crystal fiber 3 outer faces and the fan-shaped pylone 3-3 bottom.Shaker arm thickness is 3～20 microns.
The pairing central angle scope of the arc of shaker arm 3-1 is 5 °～15 ° (a central angle number of degrees scopes);
The internal diameter of fan-shaped pylone 3-3 is 8～20 microns, and external diameter is 20～40 microns; The degree of depth of fan-shaped pylone 3-3 (length) is identical with real core photonic crystal fiber 3 length, and the thickness range of vibrating mass 3-2 is 0～100 micron;
According to different environments for use, sensitivity requirement, measurement range, the quantity of shaker arm 3-1 can be 2,3,4 or more, shown in Fig. 2,3,4, and under the shaker arm 3-1 of varying number situation, all presses the central angle symmetry between each shaker arm 3-1.
The application of miniature full-optical fiber F-P acceleration sensor of the present invention is the same with the signal processing method of the most traditional F-P interferometer:
Miniature full-optical fiber F-P acceleration sensor is placed on the parts that need the measurement acceleration, follow the motion of parts, the vibrating mass 3-2 of sensor can move, thereby make the length of F-P interference cavity change, to make the phase place of the interference signal that the F-P interference cavity is exported change at last, thereby realize highly sensitive acceleration detection.Utilize the device of routines such as 1 * 2 coupling mechanism, spectrometer, data acquisition unit and computing machine and the measurement (obviously, sensor of the present invention also can be finished the measurement of vibratory output) that signal processing method can be realized acceleration.Wherein: sensor of the present invention is connected with input end with the light source output terminal of spectrometer respectively by 2 * 1 coupling mechanism, and the spectrometer data output end is connected with computing machine.
The outward appearance of sensor of the present invention as shown in Figure 5.
The method for making of miniature full-optical fiber F-P acceleration sensor of the present invention is as follows:
1) adopts of the end welding (welding point 2-1) of the method for manual weld with general single mode fiber 1 one ends and hollow-core fiber;
2) F-P interference cavity length as required, cutting hollow-core fiber 2;
3) adopt of cut end and the real core photonic crystal fiber 3 one end weldings (welding point 2-1) of the method for manual weld with the hollow-core fiber 2 of well cutting;
4) length is as required cut real core photonic crystal fiber 3;
5) adopt abrasive disk that real core photonic crystal fiber 3 accurately is ground to design length;
6) adopt femtosecond laser or 157nm Laser Micro-Machining method,, process plurality of sector through hole 3-3 with real core photonic crystal fiber 3 square section concentrics at the abrasive tip of real core photonic crystal fiber 3; At the partitioned portion of each fan-shaped pylone 3-3, process shaker arm 3-1 by the central angle symmetry.
In the above-mentioned steps, the machined parameters of each device requires as follows:
Described hollow-core fiber 2 length are 10 microns～10 centimetres (hollow-core photonic crystal fiber) or 10 microns～800 microns (hollow glass optical fiber);
The length of described real core photonic crystal fiber 3 is 500 microns～2 millimeters;
Described fan-shaped pylone 3-3 axially runs through real core photonic crystal fiber 3; The quantity of shaker arm 3-1 is 2,3 or 4, and under the shaker arm 3-1 of varying number situation, all presses the central angle symmetry between each shaker arm 3-1; Shaker arm 3-1 end face is between real core photonic crystal fiber 3 exposed end end faces and the real core photonic crystal fiber 3 welding end end faces, the difference in height of shaker arm 3-1 end face and vibrating mass 3-2 end face is 0～80 micron, shaker arm thickness is 3～20 microns, the pairing central angle of the arc of shaker arm 3-1 is 5 °～15 °, and vibrating mass 3-2 thickness is 0～100 micron; The internal diameter of fan-shaped pylone 3-3 is 8～20 microns, and external diameter is 20～40 microns.
Claims (10)
1, a kind of miniature full-optical fiber F-P acceleration sensor, comprise: general single mode fiber (1), hollow-core fiber (2), real core photonic crystal fiber (3), described general single mode fiber (1), hollow-core fiber (2), the welding in turn of real core photonic crystal fiber (3), it is characterized in that: on real core photonic crystal fiber (3) is axial, be processed with plurality of sector through hole (3-3) with real core photonic crystal fiber (3) xsect concentric, the partitioned portion of each fan-shaped pylone (3-3) forms shaker arm (3-1), all fan-shaped pylones (3-3) and shaker arm (3-1) are formed toroidal together, and the part that annulus enclosed forms vibrating mass (3-2).
2, a kind of miniature full-optical fiber F-P acceleration sensor according to claim 1, it is characterized in that: the difference in height of shaker arm (3-1) end face and vibrating mass (3-2) end face is 0～80 micron, shaker arm thickness is 3～20 microns, and the pairing central angle of arc of shaker arm (3-1) is 5 °～15 °; Vibrating mass (3-2) thickness is less than or equal to 100 microns.
3, a kind of miniature full-optical fiber F-P acceleration sensor according to claim 1 is characterized in that: the internal diameter of fan-shaped pylone (3-3) is 8～20 microns, and external diameter is 20～40 microns.
4, a kind of miniature full-optical fiber F-P acceleration sensor according to claim 1, it is characterized in that: the quantity of shaker arm (3-1) is 2,3,4 or more, and under shaker arm (3-1) situation of varying number, all press the central angle symmetry between each shaker arm (3-1).
5, a kind of miniature full-optical fiber F-P acceleration sensor according to claim 1 is characterized in that: the length of real core photonic crystal fiber (3) is 500 microns～2 millimeters.
6, a kind of miniature full-optical fiber F-P acceleration sensor according to claim 1 is characterized in that: described hollow-core fiber (2), can adopt hollow-core photonic crystal fiber, and also can adopt the hollow glass optical fiber.
7, a kind of miniature full-optical fiber F-P acceleration sensor according to claim 6 is characterized in that: when adopting hollow-core photonic crystal fiber, hollow-core fiber (2) length is 10 microns～10 centimetres; When adopting the hollow glass optical fiber, hollow-core fiber (2) length is 10 microns～800 microns.
8, a kind of method for making of miniature full-optical fiber F-P acceleration sensor is characterized in that: this method step is as follows:
1) adopts of the end welding of the method for manual weld with general single mode fiber (1) one end and hollow-core fiber (2);
2) F-P interference cavity length as required, cutting hollow-core fiber (2);
3) adopt of cut end and real core photonic crystal fiber (3) the one end weldings of the method for manual weld with the hollow-core fiber (2) of well cutting;
4) length is as required cut real core photonic crystal fiber (3);
5) adopt abrasive disk that real core photonic crystal fiber (3) accurately is ground to design length;
6) adopt femtosecond laser or 157nm Laser Micro-Machining method, the abrasive tip in real core photonic crystal fiber (3) processes the plurality of sector through hole (3-3) with real core photonic crystal fiber (3) square section concentric; At the partitioned portion of each fan-shaped pylone (3-3), process shaker arm (3-1) by the central angle symmetry, all fan-shaped pylones (3-3) and shaker arm (3-1) are formed toroidal together, and the part that annulus enclosed forms vibrating mass (3-2).
9, the method for making of a kind of miniature full-optical fiber F-P acceleration sensor according to claim 8 is characterized in that:
Described hollow-core fiber (2) length is 10 microns～800 microns;
The length of described real core photonic crystal fiber (3) is 500 microns～2 millimeters;
Described fan-shaped pylone (3-3) axially runs through real core photonic crystal fiber (3); The quantity of shaker arm (3-1) is 2,3 or 4, and under shaker arm (3-1) situation of varying number, all presses the central angle symmetry between each shaker arm (3-1); Shaker arm (3-1) end face is between real core photonic crystal fiber (3) exposed end end face and real core photonic crystal fiber (3) the welding end end face, the difference in height of shaker arm (3-1) end face and vibrating mass (3-2) end face is 0～80 micron, shaker arm thickness is 3～20 microns, the pairing central angle of arc of shaker arm (3-1) is 5 °～15 °, and vibrating mass (3-2) thickness is less than or equal to 100 microns; The internal diameter of fan-shaped pylone (3-3) is 8～20 microns, and external diameter is 20～40 microns.
10, the method for making of a kind of miniature full-optical fiber F-P acceleration sensor according to claim 8 is characterized in that:
Described hollow-core fiber (2) length is 10 microns～10 centimetres;
The length of described real core photonic crystal fiber (3) is 500 microns～2 millimeters;
Described fan-shaped pylone (3-3) axially runs through real core photonic crystal fiber (3); The quantity of shaker arm (3-1) is 2,3 or 4, and under shaker arm (3-1) situation of varying number, all presses the central angle symmetry between each shaker arm (3-1); Shaker arm (3-1) end face is between real core photonic crystal fiber (3) exposed end end face and real core photonic crystal fiber (3) the welding end end face, the difference in height of shaker arm (3-1) end face and vibrating mass (3-2) end face is 0～80 micron, shaker arm thickness is 3～20 microns, the pairing central angle of arc of shaker arm (3-1) is 5 °～15 °, and vibrating mass (3-2) thickness is less than or equal to 100 microns; The internal diameter of fan-shaped pylone (3-3) is 8～20 microns, and external diameter is 20～40 microns.
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| CN101614662B (en) * | 2009-07-24 | 2011-04-20 | 重庆大学 | Minitype F-P reflective index sensor of full optical fiber ring-type reflecting surface structure |
| CN101865935B (en) * | 2010-06-04 | 2012-07-11 | 哈尔滨工程大学 | Two-dimension high-precision combined interference type fiber integrated accelerometer |
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| CN105548611A (en) * | 2015-12-08 | 2016-05-04 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optical fiber F-P cavity acceleration sensor with temperature self-compensation function |
| CN105842478A (en) * | 2016-06-03 | 2016-08-10 | 中国航空工业集团公司北京长城计量测试技术研究所 | High temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor |
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