CN105842478A - High temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor - Google Patents
High temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor Download PDFInfo
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- CN105842478A CN105842478A CN201610391133.5A CN201610391133A CN105842478A CN 105842478 A CN105842478 A CN 105842478A CN 201610391133 A CN201610391133 A CN 201610391133A CN 105842478 A CN105842478 A CN 105842478A
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- high temperature
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- quartz glass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
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- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention relates to a high temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor and belongs to the optical fiber sensor technical field. The high temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor includes a supporting frame (104), an elastic beam (105), a mass block (106), optical fibers (101) and a quartz glass tube (102); and the two optical fibers (101) are plugged into the quartz glass tube (102) from two ends of the quartz glass tube (102); the two optical fibers (101) are fixed in the quartz glass tube (102) through glue points or solder points (107) in a manner that end surfaces of the two optical fibers (101) are separated from each other by a certain distance; a cavity which is located between the end surfaces of the two optical fibers (101) and is surrounded by the quartz glass tube (102) forms an optical fiber P-F cavity (103); and the quartz glass tube (102) is installed on the supporting frame (104) and the mass block (106) through glue points or solder points (108). Compared with an existing optical fiber acceleration sensor, the high temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor of the invention has the advantages of small size, light weight, high temperature resistance, high frequency response, large measuring range and high sensitivity. The high temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor can resist temperature higher than 600 DEG C, and the frequency response of the high temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor is higher than 2000Hz.
Description
Technical field
The present invention relates to a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration transducer, with optical fiber
F-P cavity, as sensitive core, belongs to fiber optic sensor technology field.
Background technology
Conventional acceleration sensor typically utilizes data-collection principle, such as modes such as piezoelectricity, pressure drag, MEMS,
Its deficiency is that heat-resisting ability is restricted, and is usually no more than 200 DEG C, uses special piezoelectric to make
High temperature acceleration transducer high-temperature resistant scope is the most also less than 600 DEG C.And the optical fiber light commonly used at present
Though grid acceleration transducer has features such as insulation, electromagnetism interference, but the strain resolving power one of fiber grating
As only at 0.1 μ about ε, by its made acceleration transducer sensitivity be difficult to more commonly to meet actual should
Needs；And because the rigidity of its sensitive core fiber grating can not change, physical dimension also can be bigger,
Thus result in structural natural frequencies relatively low, cause sensor frequency response ratio relatively low；The system that fiber grating is current simultaneously
Need to divest the coat of optical fiber surface as technique, be coated with after having scribed grating, owing to being coated
The restriction of layer, the heatproof of fiber grating, typically at 250 DEG C, also cannot meet the application demand under hot conditions.
Therefore, acceleration transducer big in the urgent need to a kind of temperature resistant range, that frequency response is high, highly sensitive is expired at present
The productive life needs that foot people are growing.
Summary of the invention
It is an object of the invention to, frequency response little for temperature resistant range in existing fiber acceleration transducer application process
The problems such as low, sensitivity is low, propose a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration sensing
Device, solves foregoing problems, has important application in the extreme environment field tests such as electromotor, generating set
It is worth.
Idea of the invention is that with fiber F-P cavity as sensitive core, use integrated design processing mode by height
The spring mass system of acceleration transducer made by temperature elastomeric material, high-temperature resistant optical fiber F-P cavity is arranged on and props up
In support frame frame and spring mass system, constitute optical fiber acceleration transducer so that it is have that heatproof is high, frequency response is high,
The feature that range is big, highly sensitive.
It is an object of the invention to be achieved through the following technical solutions:
A kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration transducer, including: support frame,
Two sections of optical fiber are inserted by spring beam, mass, optical fiber and quartz glass tube respectively from quartz glass tube two ends,
It is fixed in quartz glass tube through glue point or solder joint two sections of fiber end face standoff distance λ positions, two sections of optical fiber
The cavity surrounded by quartz glass tube between end face constitutes fiber F-P cavity, and by quartz glass tube by glue point
Or solder joint is installed on support frame and mass.
Its operation principle is: extraneous acceleration causes the change of fiber F-P cavity chamber length, by the inspection to chamber length
Survey, can reverse acceleration.
As preferably, described support frame, spring beam and mass are through integrated design by elastomeric material
It is processed into.
As preferably, described quartz glass tube is perpendicular to spring beam position at its center.
Beneficial effect
Contrast prior art, the invention have the characteristics that:
1, fiber F-P cavity (103) forms support mutually with spring beam (105), support frame (104)
Enclosed construction, has the advantage that structural natural frequencies is high, anti-overload ability is strong, reliability is high；
2, using fiber F-P cavity (103) is sensitive core, has feature highly sensitive, that frequency response is high；
3, the acceleration transducer elastic support structure using integrated design processing mode to be formed, has structure
Succinctly, feature that reliability is high, be more conducive to adapt to hot environment, it is to avoid produced by other connected modes not
Reliable and thermal stress concentration problem；
4, resistant to elevated temperatures elastomeric material, quartz glass tube (102), optical fiber (101), glue point or solder joint are used
(107) (108), make sensor be adapted to hot environment.
In sum, the present invention can make the heatproof of optical fiber acceleration transducer higher than 600 DEG C, frequency response is higher than
2000Hz, is provided simultaneously with the feature that volume is little, light weight, range are big, becomes high temperature, forceful electric power, strong electromagnetic
The effective means of vibration measurement is carried out under the conditions of interference environment.
Accompanying drawing explanation
Fig. 1 is a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration sensing of the embodiment of the present invention
The structural representation of device；
Fig. 2 be a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration transducer at different frequencies
Test waveform schematic diagram；
Fig. 3 is that the frequency response curve of a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration transducer shows
It is intended to；
Fig. 4 is that a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration transducer adds with fiber grating
Velocity sensor test waveform contrast schematic diagram under same 300Hz frequency and 5g accekeration.
Reference: 101-optical fiber, 102-quartz glass tube, 103-fiber F-P cavity, 104-support frame,
105-spring beam, 106-mass, 107-is for preparing glue point or the solder joint of fiber F-P cavity, and 108-is used for pacifying
The glue point of dress fiber F-P cavity or solder joint.
Detailed description of the invention
The present invention is done described in detail below with embodiment below in conjunction with the accompanying drawings.
As it is shown in figure 1, the present invention is a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration sensing
Device, embodiment includes: be processed into carriage by the high temperature resistant elastomeric material of same through integrated design
Frame (104), spring beam (105) and mass (106), by high-temperature resistant optical fiber (101) and high temperature resistant stone
English glass tubing (102) connects through glue point or solder joint (107) makes fiber F-P cavity (103), as acceleration
The sensitive core of degree sensor, by the quartz glass tube (102) of built-in fiber F-P cavity (103) through glue point
Or solder joint (108) is fixedly mounted on support frame (104) and mass (106), constitutes optical fiber and accelerate
Degree sensor.
The sensing principle of described fiber F-P cavity acceleration transducer is fiber F-P cavity principle of interference, it may be assumed that outside
Under boundary's acceleration effect, transmitting through support frame (104) and spring beam (105), mass (106) produces
Raw inertia force, acts on quartz glass tube (102), makes the chamber length of fiber F-P cavity (103) change,
By the detection to fiber F-P cavity (103) chamber length, reverse acceleration can be gone out.
Described intracavity fiber F-P cavity (103) is installed vertically on the spring beam (105) of described two fixed ends,
Form acceleration sensitive structure, and this structure is in center sensor or shaft core position.
Described optical fiber (101) and quartz glass tube (102) use high temperature resistant material to make.
The long λ in chamber of described fiber F-P cavity (103) is in 30 μm～300 μ m.
Result of the test
It is illustrated in figure 2 a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration that the present invention proposes
Sensor test waveform schematic diagram at different frequencies, comprises (a) to (g) totally seven figures, left part of every figure
Being divided into time domain waveform, right part to be divided into spectrum curve, in time domain waveform, abscissa is the time, and vertical coordinate is
Sensor output wavelength, in spectrum curve, abscissa is frequency, and vertical coordinate is sensor output wavelength,
Fig. 2 illustrates fiber F-P cavity acceleration transducer 20,63,120,320,600,1000 and 1200Hz
Under the conditions of time domain waveform and spread spectrum scenarios, it can be seen that waveform quality is relatively good, and explanation can be operated in this
One frequency range.
It is illustrated in figure 3 a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration that the present invention proposes
The frequency response curve schematic diagram of sensor, as can be seen from the figure the resonant frequency of sensor is in 2500Hz, frequency response
Flat segments can reach 1200Hz, can be used for the measurement of 1200Hz frequencies below acceleration, show sensing
Utensil has higher-frequency to ring characteristic.
It is illustrated in figure 4 a kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration that the present invention proposes
Sensor (a) and optical fibre grating acceleration sensor (b) as test under 300Hz frequency and 5g accekeration
Comparison of wave shape schematic diagram, as can be seen from the figure the waveform of waveform ratio (b) of (a) is closer to standard sine wave, i.e.
The distortion factor is less, illustrate (a) under this upper frequency, relatively (b) can more good berth.
Fiber F-P cavity relative to fiber grating as the sensitive core of acceleration transducer, have highly sensitive,
Frequency response feature high, resistant to elevated temperatures, reason is as follows: the measurement of acceleration needs to manage to be changed into optical fiber sensitivity core
The strain variation of the heart, the strain resolving power of fiber grating is typically in 0.1 μ about ε, the strain that fiber F-P is strong
Resolving power can reach 0.001 μ about ε, therefore designs and produces into acceleration transducer and has higher sensitive
Degree；Fiber grating need to utilize optical illumination fabrication techniques at inside of optical fibre, length typically at about 10mm,
Designing and producing acceleration transducer, the rigidity of sensitive core can not change, and physical dimension also can be bigger, because of
This causes structural natural frequencies relatively low, causes sensor frequency response ratio relatively low, and F-P cavity makes and welded by optical fiber
At glass tube, the diameter of glass tubing can design, the rigidity of sensitive core can design comparison big, F-P cavity
Fiber end face distance is at below 1mm, and complete F-P cavity can design at several millimeters, due to remolding sensitivity relatively
Height, can design sensitive structure in greater stiffness, therefore can design and produce out the sensor of high frequency sound；
The current processing technology of fiber grating needs to divest the coat of optical fiber surface, repastes after having scribed grating
Cover, owing to being limited by coat, the heatproof of fiber grating typically at 250 DEG C, the making of fiber F-P cavity
Not limited, depend on that the limiting temperature of glass tubing and optical fiber limits, more than 600 DEG C can be reached, therefore can
To design and produce out more resistant to elevated temperatures acceleration transducer.
In sum, due to fiber F-P cavity acceleration transducer of the present invention and high temperature resistant integrative spring-mass
Support system combines, and has feature high temperature resistant, simple for structure, that frequency response is high, highly sensitive, and being more suitable for should
Vibration measurement under harsh and unforgiving environments, solves the acceleration analysis problem of extreme environment.
The above is presently preferred embodiments of the present invention, and the present invention should not be limited to this embodiment and attached
Figure disclosure of that.Every without departing from the equivalence completed under spirit disclosed in this invention or amendment, all fall
Enter the scope of protection of the invention.
Claims (6)
1. a high temperature resistant integrative elastic construction fiber F-P cavity acceleration transducer, it is characterised in that: bag
Include: support frame (104), spring beam (105), mass (106), optical fiber (101) and quartz glass
Two sections of optical fiber (101) are inserted, at two sections of light by pipe (102) respectively from quartz glass tube (102) two ends
Quartz glass tube (102) is fixed on through glue point or solder joint (107) in fine (101) end face standoff distance λ position
In, the cavity surrounded by quartz glass tube (102) between two sections of optical fiber (101) end faces constitutes fiber F-P
Chamber (103), and quartz glass tube (102) is installed on support frame (104) by glue point or solder joint (108)
With on mass (106).
A kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration the most according to claim 1 passes
Sensor, it is characterised in that described support frame (104), spring beam (105) and mass (106) are
It is processed into through integrated design by elastomeric material.
A kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration the most according to claim 1 passes
Sensor, it is characterised in that described quartz glass tube (102) is perpendicular to spring beam (105) and is located therein
Heart position.
A kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration the most according to claim 1 passes
Sensor, is characterized in that, support frame (104), spring beam (105) and mass (106) are used one
The mode of bodyization design and processing is made.
A kind of high temperature resistant integrative elastic construction fiber F-P cavity acceleration the most according to claim 1 passes
Sensor, is characterized in that, described support frame (104), spring beam (105) and mass (106) use
High temperature resistant elastomeric material is made, and described optical fiber (101) and quartz glass tube (102) are also adopted by high temperature resistant material
Matter is made, to meet the high temperature resistant requirement of sensor.
6. add according to a kind of high temperature resistant integrative elastic construction fiber F-P cavity that claim 1-5 is arbitrarily described
Velocity sensor, is characterized in that, the described optical fiber formed by optical fiber (101) and quartz glass tube (102)
F-P cavity (103), the long λ in its chamber controls in 30 μm～300 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610391133.5A CN105842478A (en) | 2016-06-03 | 2016-06-03 | High temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor |
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| CN201610391133.5A CN105842478A (en) | 2016-06-03 | 2016-06-03 | High temperature-resistant integrated elastically-structured optical fiber P-F cavity acceleration sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110974604A (en) * | 2019-12-06 | 2020-04-10 | 宿州学院 | Acceleration sensing system of exoskeleton device for lower limb rehabilitation training |
| CN113295424A (en) * | 2021-06-23 | 2021-08-24 | 东北农业大学 | Automobile engine knock sensor based on fiber grating array |
| CN115061240A (en) * | 2022-04-21 | 2022-09-16 | 上海拜安传感技术有限公司 | Elastic beam structure, optical fiber filter and assembling method thereof |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61274205A (en) * | 1985-05-30 | 1986-12-04 | Rion Co Ltd | Optical displacement measuring device |
| US20040046111A1 (en) * | 2002-09-10 | 2004-03-11 | The Regents Of The University Of California | Fiber optic micro accelerometer |
| CA2590402A1 (en) * | 2007-05-18 | 2008-11-18 | Tiansheng Zhou | Fiber optic mems seismic sensor with mass supported by hinged beams |
| CN101368979A (en) * | 2008-10-13 | 2009-02-18 | 重庆大学 | Miniature full-optical fiber F-P acceleration sensor and preparation thereof |
| CN101398440A (en) * | 2008-10-22 | 2009-04-01 | 中国科学院半导体研究所 | Optical fiber laser acceleration sensor |
| CN101424696A (en) * | 2008-12-05 | 2009-05-06 | 重庆大学 | All-optical fiber temperature self-compensating miniature F-P acceleration sensor and method for making same |
| CN102889901A (en) * | 2012-09-20 | 2013-01-23 | 电子科技大学 | Fabry-Perot optical fiber sensor and fabrication method of sensor |
| CN105158506A (en) * | 2015-08-31 | 2015-12-16 | 中北大学 | Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof |
| CN105353165A (en) * | 2015-12-08 | 2016-02-24 | 中国航空工业集团公司北京长城计量测试技术研究所 | Fiber accelerometer based on MEMS technology |
-
2016
- 2016-06-03 CN CN201610391133.5A patent/CN105842478A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61274205A (en) * | 1985-05-30 | 1986-12-04 | Rion Co Ltd | Optical displacement measuring device |
| US20040046111A1 (en) * | 2002-09-10 | 2004-03-11 | The Regents Of The University Of California | Fiber optic micro accelerometer |
| CA2590402A1 (en) * | 2007-05-18 | 2008-11-18 | Tiansheng Zhou | Fiber optic mems seismic sensor with mass supported by hinged beams |
| CN101368979A (en) * | 2008-10-13 | 2009-02-18 | 重庆大学 | Miniature full-optical fiber F-P acceleration sensor and preparation thereof |
| CN101398440A (en) * | 2008-10-22 | 2009-04-01 | 中国科学院半导体研究所 | Optical fiber laser acceleration sensor |
| CN101424696A (en) * | 2008-12-05 | 2009-05-06 | 重庆大学 | All-optical fiber temperature self-compensating miniature F-P acceleration sensor and method for making same |
| CN102889901A (en) * | 2012-09-20 | 2013-01-23 | 电子科技大学 | Fabry-Perot optical fiber sensor and fabrication method of sensor |
| CN105158506A (en) * | 2015-08-31 | 2015-12-16 | 中北大学 | Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof |
| CN105353165A (en) * | 2015-12-08 | 2016-02-24 | 中国航空工业集团公司北京长城计量测试技术研究所 | Fiber accelerometer based on MEMS technology |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110974604A (en) * | 2019-12-06 | 2020-04-10 | 宿州学院 | Acceleration sensing system of exoskeleton device for lower limb rehabilitation training |
| CN113295424A (en) * | 2021-06-23 | 2021-08-24 | 东北农业大学 | Automobile engine knock sensor based on fiber grating array |
| CN115061240A (en) * | 2022-04-21 | 2022-09-16 | 上海拜安传感技术有限公司 | Elastic beam structure, optical fiber filter and assembling method thereof |
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Application publication date: 20160810 |