CN110769647A

CN110769647A - Manufacturing method of vapor chamber

Info

Publication number: CN110769647A
Application number: CN201911004124.6A
Authority: CN
Inventors: 于全耀; 梁平平; 李学华
Original assignee: Dongguan Jay Metal Precision Manufacturing Technology Co Ltd
Current assignee: Dongguan Jay Metal Precision Manufacturing Technology Co Ltd; Dongguan Lingjie Metal Precision Manufacturing Technology Co Ltd
Priority date: 2019-10-22
Filing date: 2019-10-22
Publication date: 2020-02-07
Anticipated expiration: 2039-10-22
Also published as: CN110769647B

Abstract

The invention discloses a method for preparing an internal structure of a soaking plate through screen printing. The invention saves the copper mesh and the etched copper column structure, avoids the assembly and welding process of the copper mesh, saves the product cost and is easy to design and process the product.

Description

Manufacturing method of vapor chamber

Technical Field

The invention relates to the technical field of electronic product development, in particular to an ultrathin vapor chamber structure and a production process thereof.

Background

In the 5G era, electronic devices have been developed in the trends of integration, high frequency, high speed, etc., and the development of internal electronic chip technology has led to an increasing reduction in size and an increase in power. As semiconductor dimensions shrink, heat flux increases. The heat dissipation challenge of electronic products is becoming more serious. Heat pipes and vapor chambers, which are devices that dissipate heat by the phase change principle, are being rapidly applied to electronic products, such as high-end smart phones, LEDs, and the like.

Vapor chambers are accelerating for 5G smart phones. At present, during the manufacturing process of the vapor chamber, the wick structure usually adopts a copper net, copper powder or a copper column, and the copper net, the copper powder or the copper column is bonded with the copper net, the copper powder or the copper column by means of sintering. The copper column structure formed by etching increases the material processing cost, and different dies need to be designed for cutting the copper mesh. The above is not an optimal solution from both cost and manufacturing process considerations. Therefore, a manufacturing and processing technology which is convenient to design, simplified in process and reduced in processing difficulty is needed for processing the capillary structure of the liquid absorption core in the vapor chamber.

Disclosure of Invention

The invention provides a manufacturing method of a vapor chamber, which aims at solving the existing problems and directly preparing the inner structures of the upper cover and the lower cover of the vapor chamber in a screen printing mode.

The invention provides the following technical scheme:

a manufacturing method of a soaking plate is characterized by comprising the following steps:

providing a first metal plate and a second metal plate, wherein the first metal plate and the second metal plate can be oppositely buckled and respectively have inner surfaces;

preparing metal powder pastes with different meshes;

designing a screen printing mask pattern;

printing the prepared paste on the inner surface of the first metal plate and/or the second metal plate through meshes on the mask;

and sintering the printed first metal plate and/or second metal plate, removing glue and curing.

Further, the step of printing the prepared paste on the inner surface of the first metal plate and/or the second metal plate through the mesh of the mask comprises: covering a screen printing mask with a pattern on the surface of a first metal plate and/or a second metal plate needing to be printed with a wick structure, pouring prepared metal powder paste on the surface of the screen printing mask, applying pressure on the metal powder paste part on the screen printing mask by using a scraping scraper, and keeping the pressure to move left and right or back and forth in the horizontal direction, so that the metal powder paste is extruded to the surface of the first metal plate and/or the second metal plate from meshes of a screen by the scraper in the moving process, and is attached to the surface of the first metal plate and/or the second metal plate through the viscosity of the metal powder paste to form the shape of the needed wick structure.

Furthermore, the manufacturing method also comprises the steps of buckling the inner surfaces of the first metal plate and the second metal plate oppositely, sealing the peripheries of the inner surfaces to form a cavity, injecting a refrigerant into the cavity, degassing in vacuum and packaging. The periphery is sealed by adopting the modes of welding, diffusion bonding, gluing and ultrasonic waves.

Further, the metal powder paste is prepared by mixing metal powder, an organic solvent and an adhesive, wherein the metal powder paste comprises the following components in parts by weight: organic solvent: 1-4% of adhesive: 1: 1-2; the metal powder is one of copper powder, nickel powder, zinc powder and silver powder, the organic solvent is one or more of terpineol, methyl methacrylate, acetone, methanol, butyl carbitol acetate, ethylene glycol ethyl ether acetate, tributyl citrate, dibutyl phthalate, lecithin and anise oil, and the adhesive is glass powder or suspension of ceramic powder.

Furthermore, the metal powder paste uses a metal powder mixture with the mesh number of 100-300 meshes.

Furthermore, the mesh size of the mask can be designed into meshes with different apertures according to the mesh number of the metal powder, so that the structure formed by the required metal powder can be printed.

Further, the first metal plate and the second metal plate are made of one of copper materials, aluminum materials, stainless steel and titanium materials or alloys thereof.

Further, the thickness of the film layer obtained by the screen printing mask plate is 20-300 mu n.

The invention has the beneficial effects that:

the copper powder columns and/or the copper powder liquid absorbing core structures are directly formed on the inner surfaces of the upper cover and the lower cover of the soaking plate in a printing mode, the metal powder paste is used as printing ink for screen printing, the liquid absorbing core structures are printed on the inner surfaces of the upper cover and the lower cover of the soaking plate in a screen printing mode, the design of copper plate etching can be reduced, or the assembly and welding process of a copper mesh is omitted, the use and the positioning of the copper mesh are avoided, the processing is simple and convenient, and the degree of freedom of product design is higher. Meanwhile, the mask pattern prepared by screen printing is simple in design, low in cost, high in printing ink utilization rate and easy for automatic production.

Drawings

Fig. 1 is a schematic structural view of first and second metal plates and a screen printing mask according to the present invention;

FIG. 2 is a schematic diagram of a masking step of the present invention;

FIG. 3 is a schematic view of the squeegee blade pressing step of the present invention;

figure 4 is a schematic representation of the capillary structure of the wick formed after sintering according to the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the detailed description and specific examples, while indicating some embodiments of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Fig. 1 to 4 schematically show a first embodiment of a method for manufacturing a vapor chamber of the present invention, first preparing a first metal plate 10 and a second metal plate 20 in a desired vapor chamber shape, the first metal plate 10 and the second metal plate 20 being copper plates; preparing a screen printing mask 30 with a design pattern; mixing copper powder and a low-melting glass suspension adhesive to prepare a solid particle mixture, adding an organic solvent methyl methacrylate, and fully mixing to form a copper powder paste, wherein the weight ratio of the copper powder to the methyl methacrylate to the low-melting glass suspension adhesive is 2: 1: 1.

making the inner surface of the first metal plate 10 upward, covering a screen printing mask 30 with a designed pattern on the inner surface of the first metal plate 10, wherein the meshes 40 on the mask 30 form hollow areas; the formulated copper powder paste 50 is poured onto the surface of the screen printing mask 30.

The metal powder paste 50 is printed on the inner surface of the first metal plate 10 through the mesh holes 40 of the mask 30 by applying pressure to the metal powder paste portion on the screen printing mask with the squeegee 60 while keeping the pressure in the horizontal direction right and left or forward and backward.

The printed first metal plate 10 is sintered, and the gel is removed and cured during the sintering process, thereby forming a wick capillary structure of a desired shape on the inner surface. Fig. 4 is a schematic view of the present invention sintered to form wick capillary structures on the inner surface of first metal sheet 10. In this embodiment, the wick capillary structure obtained after sintering has a thickness of 20 μm.

The inner surfaces of the first metal plate 10 and the second metal plate 20 are oppositely buckled and then welded to seal the periphery, a cavity is formed in the middle of the first metal plate and the second metal plate, a refrigerant is injected into the cavity through a water injection port, vacuum degassing is carried out for 2 times, and packaging is carried out.

In the second embodiment of the present invention, different from the first embodiment, the same wick capillary structure is formed on the inner surfaces of the first metal plate 10 and the second metal plate 20 by screen printing, the surfaces of the first metal plate 10 and the second metal plate 20 having the wick capillary structure are relatively buckled after sintering, the periphery is sealed by welding, a cavity is formed in the middle, a refrigerant is injected into the cavity from a water injection port, vacuum degassing is performed for 2 times, and packaging is performed. The wick capillary structure formed in this embodiment has a thickness of 40 μm.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "both ends", "both sides", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the elements referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus, are not to be construed as limiting the present invention.

What has been described above are merely some embodiments of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the inventive concept thereof, and these changes and modifications can be made without departing from the spirit and scope of the invention.

Claims

1. A manufacturing method of a soaking plate is characterized by comprising the following steps:

preparing metal powder pastes with different meshes;

designing a screen printing mask pattern;

2. The manufacturing method of claim 1, further comprising buckling the inner surfaces of the first metal plate and the second metal plate to form a cavity, injecting a cooling medium into the cavity, degassing in vacuum, and packaging.

3. The method of manufacturing of claim 2, wherein the peripheral seal is formed by welding, diffusion bonding, gluing, or ultrasonics.

4. The manufacturing method according to any one of claims 1 to 3, wherein the metal powder paste is prepared by mixing metal powder, an organic solvent and an adhesive, the metal powder is one of copper powder, nickel powder, zinc powder and silver powder, and the organic solvent is one or more of terpineol, methyl methacrylate, acetone, methanol, butyl carbitol acetate, ethylene glycol ethyl ether acetate, tributyl citrate, dibutyl phthalate, lecithin and anise oil; the adhesive is a suspension of glass powder or ceramic powder.

5. The method according to any one of claims 1-3, wherein the metal powder paste is a metal powder mixture with a mesh size of 100-300 mesh.

6. The manufacturing method according to any one of claims 1 to 3, wherein the mesh size of the mask is designed to be a mesh having different pore sizes depending on the mesh size of the metal powder.

7. The manufacturing method according to any one of claims 1 to 3, wherein the first metal plate and the second metal plate are one of a copper material, an aluminum material, a stainless steel material, a titanium material, or an alloy thereof.

8. The manufacturing method according to any one of claims 1 to 3, the resulting film thickness of the screen printing mask plate is 20 to 300 μ n.