CN110767520A - Coaxial TNC output energy transmission structure of space traveling wave tube and software optimization method thereof - Google Patents
Coaxial TNC output energy transmission structure of space traveling wave tube and software optimization method thereof Download PDFInfo
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- CN110767520A CN110767520A CN201910959829.7A CN201910959829A CN110767520A CN 110767520 A CN110767520 A CN 110767520A CN 201910959829 A CN201910959829 A CN 201910959829A CN 110767520 A CN110767520 A CN 110767520A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/36—Coupling devices having distributed capacitance and inductance, structurally associated with the tube, for introducing or removing wave energy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/36—Coupling devices having distributed capacitance and inductance, structurally associated with the tube, for introducing or removing wave energy
- H01J23/40—Coupling devices having distributed capacitance and inductance, structurally associated with the tube, for introducing or removing wave energy to or from the interaction circuit
- H01J23/42—Coupling devices having distributed capacitance and inductance, structurally associated with the tube, for introducing or removing wave energy to or from the interaction circuit the interaction circuit being a helix or a helix-derived slow-wave structure
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Abstract
The invention discloses a coaxial TNC output energy transmission structure of a space traveling wave tube and a software optimization method thereof, which are applied to a 200W L-waveband space traveling wave tube and comprise the following steps: the energy transmission inner conductor penetrates through the energy transmission window, the inner cavity of the output sleeve comprises a first cavity positioned at the upper part of the inner cavity of the output sleeve and a second cavity positioned at the lower part of the inner cavity of the output sleeve, a first energy transmission medium is filled in the first cavity, a second energy transmission medium is filled in the second cavity, and a cylindrical ceramic seal is arranged in the energy transmission window; the wall of the output sleeve is symmetrically provided with vent holes which are used for enabling the vacuum degree between the inner conductor and the outer conductor to be the same as the vacuum degree of the external environment. The coaxial TNC output energy transmission structure of the space traveling wave tube can transmit high-power microwaves, can effectively inhibit micro-discharge and has low-reflection high performance.
Description
Technical Field
The invention relates to a novel high-power TNC output energy transmission structure for inhibiting microwave discharge and a software optimization method thereof.
Background
The space traveling wave tube is a commonly used microwave amplifier selected by the current satellite due to the advantages of strong radiation resistance, high efficiency and the like, and the space traveling wave tube is generally adopted as a core device of various application satellites at home and abroad.
With the rapid development of various satellites with different functions, the requirements of various secondary characteristic indexes on the space traveling wave tube are removed, and higher requirements on the working frequency band and the power level are provided. The energy transmission device is one of important components of a traveling wave tube, and a coaxial structure is often adopted as a microwave energy transmission device for a space traveling wave tube. However, under certain conditions, micro-discharge occurs, which affects the working stability of the space traveling wave tube.
Microdischarge is a resonant vacuum discharge phenomenon that occurs between two metal electrode surfaces or on the surface of a single dielectric. When the radio frequency field is transmitted, electrons entering between the two electrodes are accelerated towards one polar plate under the action of the radio frequency electric field in the positive half period of the radio frequency field, if the electric field passes through a zero point, the electrons just hit the surface of the electrodes to generate secondary electrons, and the source electrons and the secondary electrons are accelerated back to the other polar plate by the radio frequency electric field in the negative half period. This continues, releasing more electrons per impact due to secondary electron emission until a steady state equilibrium occurs, and thus a microdischarge effect occurs.
The space travelling wave tube design, on the one hand need reduce TNC output energy transmission structure's standing wave, be favorable to reducing output's reflection, improve the stability of whole pipe, reduce clutter and electron beam interaction to improve the interaction efficiency and the total efficiency of fundamental wave. On the other hand, the micro-discharge effect which may occur when the TNC output energy transmission structure is used for high-power transmission is also noticed, requirements of frequency bands, voltage standing wave ratios, power capacity, reliability and the like are comprehensively considered, and through reasonable structural design and production process treatment and control, the micro-discharge threshold level is improved, and the micro-discharge inhibition allowance is improved.
Disclosure of Invention
In order to solve the technical problems, the invention provides a high-performance coaxial output structure which can transmit high-power microwaves, can effectively inhibit micro-discharge and has low reflection.
In order to achieve the technical purpose, the invention adopts the following technical scheme:
the utility model provides a coaxial TNC of space travelling wave tube output energy transmission structure, is applied to 200W's L wave band space travelling wave tube, includes: the energy transmission inner conductor penetrates through the energy transmission window, the inner cavity of the output sleeve comprises a first cavity positioned at the upper part of the inner cavity of the output sleeve and a second cavity positioned at the lower part of the inner cavity of the output sleeve, wherein a first energy transmission medium is filled in the first cavity and is used for radio frequency port impedance matching;
a second energy transmission medium is filled in the second cavity and used for inhibiting high-power micro-discharge, and the requirement that the micro-discharge threshold value is larger than 8dB under the condition of 220W power output power is met;
a cylindrical ceramic seal is arranged in the energy transmission window;
the wall of the output sleeve is symmetrically provided with vent holes which are used for enabling the vacuum degree between the inner conductor and the outer conductor to be the same as the vacuum degree of the external environment.
The surface of the energy transmission inner conductor is provided with a metal coating used for reducing the secondary electron emission coefficient, inhibiting the secondary electron emission on the surface of the material and reducing the high-frequency loss.
The metal coating is a gold plating layer.
A software optimization method based on the coaxial TNC output energy transmission structure of the space traveling wave tube comprises the following steps:
s1, designing, optimizing and adjusting the whole TNC output energy transmission structure by using CST software, so that the calculated voltage standing wave ratio is smaller, and the high-power transmission requirement and the mechanical design requirement are met; the method comprises the following steps:
s1.1, determining the basic size, the sizes of an inner conductor and an outer conductor, the dielectric constant of an energy transmission window ceramic and related sizes of a TNC output energy transmission structure by utilizing a TNC output energy transmission structure design drawing, and establishing an entity model of the TNC output energy transmission structure by utilizing CST software;
s1.2, subsequently, grid division is carried out on the self-contained tetrahedral self-adaptive grid according to the self-contained tetrahedral self-adaptive grid, port and boundary conditions are set, S parameter analysis is carried out by using a time domain solver, a standing wave curve of the TNC output energy transmission structure is obtained, and a more visual graph result is output;
s1.3, setting variables according to the calculation result of the standing wave curve, changing model parameters, and repeating the calculation steps until an optimal parameter condition combination is obtained;
s2, micro-discharge threshold calculation is carried out on the TNC output energy transmission structure optimized in the step S1 by utilizing micro-discharge calculation software, and the method specifically comprises the following steps:
s2.1, in the design optimization step, firstly, the rated output power and the working frequency point of the traveling wave tube are confirmed, and the basic size, the sizes of an inner conductor and an outer conductor, the ceramic dielectric constant of an energy transmission window and related sizes of the TNC output energy transmission structure are determined according to a TNC output energy transmission structure design drawing;
s2.2, opening micro-discharge calculation software, inputting the confirmed sizes, setting and selecting relevant calculation parameters, starting simulation calculation, and outputting an intuitive calculation result;
and S2.3, changing the size parameters and the dielectric constant of the inner conductor and the outer conductor according to the calculation result, and repeating the calculation steps until the optimal parameter condition combination is obtained.
The basic sizes of the TNC output energy transmission structure in the step S1.1 comprise the size of the inner diameter and the outer diameter of the energy transmission sleeve, the height of the energy transmission sleeve, and the diameter and the length of an inner conductor and an outer conductor;
the relevant calculation parameters of step S2.2 include: whether the surface is coated with a material, material properties;
step S2.3 is specifically: if the calculation result does not meet the requirement, the diameter size and the dielectric constant of the inner conductor and the outer conductor are adjusted.
The TNC output energy transmission structure has the following installation environment requirements: the relative humidity is less than or equal to 60 percent; the cleanliness is in a clean room of hundred thousand grades.
Has the advantages that:
in conclusion, the invention achieves the following technical progress according to multi-round structure adjustment and process optimization:
1. the TNC output and energy transmission structure is optimized by using simulation software, so that the TNC output and energy transmission structure meets the transmission performance requirement, the loss is small, the standing wave is small, the full-frequency-band standing wave can reach below 1.2, the power transmission and the reliability of a space traveling wave tube are facilitated, and the straight-barrel-shaped ceramic sealing is adopted, so that the yield is high, and the consistency is good.
2. And micro-discharge calculation software (ECMultiPactorCalculator) is adopted to simulate and optimize the TNC output energy transmission structure, so that the TNC output energy transmission structure is ensured to have enough design margin, and the requirement that the micro-discharge threshold is greater than 8dB and greater than the identification level 6dB threshold under the condition of rated power of 200W is met.
3. Through process improvement, the quality of a coating on the surface of a metal conductor is improved, the generation probability of secondary electrons is reduced, and the micro-discharge effect under the high-power condition is restrained from the source.
4. Through assembly environment control, the purity of the filling medium is improved, impurities and surface pollutants are reduced, free charges in a radio frequency field are reduced, and the micro-discharge effect is inhibited.
5. The good ventilation structure is designed, so that the vacuum degree between the inner conductor and the outer conductor is the same as the vacuum degree of the external environment, the accumulation of internal gas and the fluctuation of air pressure are avoided, and the air pressure is prevented from covering a micro-discharge dangerous area.
6. The TNC output energy transmission structure is applied to a 200W L-waveband space traveling wave tube, and through a micro-discharge inhibition verification test of 20.5 cycles, the TNC output energy transmission structure effectively inhibits the micro-discharge effect under the high-power condition.
Drawings
Fig. 1 is a schematic structural diagram of a coaxial TNC output energy transmission structure of a space traveling wave tube according to the present invention;
wherein 1 is a transition piece; 2 is an energy transmission sleeve; 3 is a first energy transmission inner conductor; 4 is a second energy transmission inner conductor; 5 is a first energy transmission medium; 6 is a second energy transmission medium; 7 is cylindrical ceramic; 8 is a vent hole;
FIG. 2 is a TNC output energy transfer architecture using CST design and optimization;
FIG. 3 is a graph of a standing wave of the TNC output energy-transfer structure calculated by CST software;
FIG. 4 is a measured standing wave ratio curve of a coaxial output TNC output energy transmission structure;
FIG. 5 is a simulation diagram of the micro-discharge of the ECMultiPactorCalculator software energy transfer device;
FIG. 6 is a macroscopic comparison of sulfite gold (left) and cyanide gold (right) plating;
FIG. 7 is a microscopic comparison (400X) of sulfite gold plating (left) and cyanide gold plating (right);
FIG. 8 is a cross-sectional view of a thermal vacuum test.
Detailed Description
The technical scheme of the invention is further described in detail by combining the drawings and the specific embodiments in the specification.
After analysis: the main factors influencing the micro-discharge threshold include radio frequency power, vacuum condition, free electrons, working frequency and internal gap size of the energy transmission device. The higher the rf power, the more susceptible to the microdischarge effect. Under different vacuum conditions, the free path of electrons is different, the transit time of electrons is also different, and the micro-discharge effect is most easily generated only in a range capable of forming a resonance condition. The surface condition of the material determines the free electron condition of the surface of the medium, and the surface condition of the metal determines the emissivity of secondary electrons. The frequency and component spacing determine whether a resonance condition can be established under certain conditions. In general, the lower the frequency and the lower the threshold for microdischarge, the more susceptible the microdischarge effect will be.
The TNC output energy-output structure needs to meet the requirement of impedance matching and the requirement of micro-discharge allowance at the same time.
As shown in fig. 2 and 3, the TNC output structure is designed and optimized by using the CST simulation software, so that the standing wave is minimized, the power reflection is reduced, the transmission efficiency, the pipe arrangement efficiency and the working stability are improved, and the design value of the standing-wave ratio simulation is less than 1.2.
The optimization steps are as follows: determining the basic size, the sizes of an inner conductor and an outer conductor, the dielectric constant of the energy transmission window ceramic and the related size of the TNC output energy transmission structure according to a TNC output energy transmission structure design drawing, and establishing a solid model by utilizing CST; then, grid division is carried out on the self-contained tetrahedral self-adaptive grid according to the self-contained tetrahedral self-adaptive grid, ports and boundary conditions are set, S parameter analysis is carried out by using a time domain Solver (Transient Solver), a standing wave curve of the structure is obtained, and a more intuitive graph result is output; setting variables according to the calculation result, changing model parameters, and repeating the calculation steps until the optimal parameter condition combination is obtained
The measured standing-wave ratio curve is shown in fig. 3, in addition, ceramics are adopted as the metal inner and outer vacuum isolation materials, the size, the dielectric constant, the shape and the like of the materials have great influence on the reflection coefficient of the TNC output energy transmission structure, the invention adopts straight cylindrical ceramics, so that the reflection coefficient is as small as possible, the power reflection is reduced, and the transmission efficiency, the pipe arrangement efficiency and the working stability are improved; the straight cylindrical ceramic has the advantages of relatively low processing difficulty, simple structure, easy assembly electrode sealing, small air leakage probability, high yield and easy improvement on the consistency of products.
Calculating the micro-discharge threshold value of the optimized structure through micro-discharge calculation software (ECMultiPactorCalculator), wherein the final optimization result is as follows: the vacuum microdischarge margin requirement of 8dB is met under the conditions of working frequency and rated output power of 200W, as shown in figure 4.
The design optimization step comprises the steps of firstly confirming rated output power and working frequency points of a traveling wave tube, determining the basic size, the sizes of an inner conductor and an outer conductor, the ceramic dielectric constant of an energy transmission window and relevant sizes of a TNC output energy transmission structure according to a TNC output energy transmission structure design drawing, opening ECMultiPactorCalculator software, inputting the confirmed sizes, then setting relevant calculation parameters, starting simulation calculation, and outputting an intuitive calculation result; changing the size parameters of the inner and outer conductors, dielectric constant and the like according to the calculation result, and repeating the calculation steps until the optimal parameter condition combination is obtained
To increase the threshold level of the microdischarge, the energy delivery device is designed by increasing the gap between the inner and outer conductors of the coaxial transmission line and filling the gap with a dielectric.
As shown in fig. 1, a good ventilation structure is designed to make the vacuum degree between the inner conductor and the outer conductor the same as the vacuum degree of the external environment, so as to avoid the accumulation of internal gas and the fluctuation of air pressure and avoid the air pressure covering the micro-discharge danger area. The energy transmission sleeve can be provided with a vent hole when the output TNC output energy transmission structure is designed.
Through the reasonable selection of metal conductor materials, electroplating treatment modes such as TNC output energy transmission structural parts, particularly inner conductor surface gold plating, secondary electron emission coefficient is reduced, secondary electron emission on the material surface is inhibited, and high-frequency loss is reduced.
Through a process test, a process formula and process parameters are optimized, pretreatment is carried out firstly, 1:1HCL is activated for 30 to 40 seconds, tap water is used for cleaning, then electrogilding is carried out, the solution consists of ammonium sulfite, gold and potassium citrate, the pH value is controlled to be 8 to 9, the temperature is controlled to be 40 to 45 ℃, and the current density is controlled to be 0.5A/cm2～0.6A/cm2A smooth, bright, compact and fine-crystallized gold-plated layer is obtained;
as shown in fig. 6 and 7, the surface condition of the inner conductor gold plating layer after the improvement process is compared with that before the improvement, it can be seen that the gold plating layer after the improvement is more compact, flat and bright, which is beneficial to reducing the secondary electron emission coefficient, inhibiting the secondary electron emission on the material surface, and reducing the high-frequency loss.
Through process improvement and experimental comparison, when pollutants exist on the surfaces of the electrode and the medium, free charges in a radio frequency field are increased to a certain extent, a free electron source for inducing micro-discharge is formed, and therefore the micro-discharge threshold is reduced. The cleanliness of the surfaces of the electrode and the medium can be improved by controlling the assembly and assembling of TNC output and energy transmission structural parts and medium assembly environments under the conditions of certain humidity and cleanliness (the relative humidity is less than or equal to 60 percent, and the cleanliness is assembled in the environment of a hundred thousand clean room (more than or equal to 0.5um dust particles, less than or equal to 9960 dust particles per 2.83 liters of air (per minute), more than or equal to 5um dust particles, less than or equal to 70 dust particles per 2.83 liters of air (per minute)).
Vacuum environment protocol validation
A200W L-waveband space traveling wave tube is developed according to a design scheme, and an identification-level vacuum test (20 cycles, 18 days) is carried out on a coaxial output structure to verify the micro-discharge inhibition performance. The test conditions are shown in table 1.
TABLE 1 identification grade vacuum test temperature requirements
FIG. 8 is a cross-sectional view of an identification-grade thermal vacuum test, the standard of which is the test reference. The figure shows that the thermal vacuum test period is relatively long, and if the product passes the test, the product is proved to have no micro discharge and can stably and reliably work for a long time.
The requirements of specific vacuum degree, temperature change rate and the like in the hot vacuum test are as follows:
a. vacuum degree: less than 6.65X 10-3 Pa;
b. cycle number: at least 20 cycles (18 days) of the assay grade test;
c. extreme high and low temperature end residence time: for at least 4 hours. (when the temperature change is less than or equal to 1 ℃/h);
d. the test requirements are as follows: the first and last cycles should test all performance indicators and cold-hot starts at the high and low temperature ends; testing main performance indexes at the high-temperature end and the low-temperature end in other cycles;
e. the temperature change rate is more than 0.5 ℃/min.
Through a plurality of circulating high-low temperature cycle experiments in a vacuum environment, the working conditions of the traveling wave tube in the space are simulated, the traveling wave tube works stably, and the TNC output energy transmission structure is proved to be capable of effectively inhibiting the micro-discharge effect under the high-power condition.
Disclosure of the invention
In conclusion, the invention achieves the following technical progress according to multi-round structure adjustment and process optimization:
1. the TNC output and energy transmission structure is optimized by using simulation software, so that the TNC output and energy transmission structure meets the transmission performance requirement, the loss is small, the standing wave is small, the full-frequency-band standing wave can reach below 1.2, the power transmission and the reliability of a space traveling wave tube are facilitated, and the straight-barrel-shaped ceramic sealing is adopted, so that the yield is high, and the consistency is good.
2. And (3) simulating and optimizing the TNC output and energy transmission structure by adopting micro-discharge calculation software (ECMultiPactorCalculator), and ensuring that the TNC output and energy transmission structure has enough design margin. The requirement that the micro-discharge threshold is more than 8dB and is more than the threshold requirement of the identification level 6dB under the condition of meeting the rated power of 200W.
3. Through process improvement, the quality of a coating on the surface of a metal conductor is improved, the generation probability of secondary electrons is reduced, and the micro-discharge effect under the high-power condition is restrained from the source.
4. Through assembly environment control, the purity of the filling medium is improved, impurities and surface pollutants are reduced, free charges in a radio frequency field are reduced, and the micro-discharge effect is inhibited.
5. The good ventilation structure is designed, so that the vacuum degree between the inner conductor and the outer conductor is the same as the vacuum degree of the external environment, the accumulation of internal gas and the fluctuation of air pressure are avoided, and the air pressure is prevented from covering a micro-discharge dangerous area.
6. The designed TNC output energy transmission structure is applied to a 200W L-waveband space traveling wave tube, and through a micro-discharge inhibition verification test of 20.5 cycles, the TNC output energy transmission structure effectively inhibits a micro-discharge effect under a high-power condition.
The structure design is carried out by using professional simulation software, the micro-discharge threshold value of the energy transmission device is improved, and the requirement of the vacuum micro-discharge allowance of 8dB under the condition of 200W rated output power can be met; the surface characteristics of the metal parts are improved, secondary electron emission is reduced, and micro-discharge is inhibited.
CST simulation software is used for designing and optimizing the TNC output structure, so that standing waves are minimized, power reflection is reduced, transmission efficiency, whole pipe efficiency and working stability are improved, the standing-wave ratio simulation design value is less than 1.2,
the invention has large power and small reflection coefficient of actual transmission, and standing wave in a frequency band is less than 1.2; the invention adopts a structural design with larger size to improve the micro-discharge threshold, and the designed micro-discharge threshold is more than 8 dB; the surface treatment process of the metal inner conductor is improved, and secondary electron emission is reduced to avoid micro-discharge; and the cylindrical ceramic is adopted for sealing, so that the assembly and welding process is simpler, and the yield and the consistency of parts are higher.
Claims (6)
1. The utility model provides a coaxial TNC of space travelling wave tube output energy transmission structure, is applied to 200W's L wave band space travelling wave tube, includes: the energy transmission device comprises an output sleeve, an energy transmission window arranged on the output sleeve, and an energy transmission inner conductor penetrating through the energy transmission window, and is characterized in that an inner cavity of the output sleeve comprises a first cavity positioned at the upper part of the inner cavity of the output sleeve and a second cavity positioned at the lower part of the inner cavity of the output sleeve, wherein a first energy transmission medium is filled in the first cavity and is used for impedance matching of a radio frequency port;
a second energy transmission medium is filled in the second cavity and used for inhibiting high-power micro-discharge, and the requirement that the micro-discharge threshold value is larger than 8dB under the condition of 220W power output power is met;
a cylindrical ceramic seal is arranged in the energy transmission window;
the wall of the output sleeve is symmetrically provided with vent holes which are used for enabling the vacuum degree between the inner conductor and the outer conductor to be the same as the vacuum degree of the external environment.
2. The coaxial TNC output power transmission structure for a space traveling wave tube according to claim 1, wherein the power transmission inner conductor surface is provided with a metal plating layer for reducing a secondary electron emission coefficient, suppressing a material surface secondary electron emission, and reducing a high frequency loss.
3. The coaxial TNC output energy transfer structure of a spatial traveling wave tube according to claim 1, wherein the metal plating is gold plating.
4. A software optimization method based on the coaxial TNC output energy transmission structure of the space traveling wave tube according to any one of claims 1 to 3 is characterized by comprising the following steps:
s1, designing, optimizing and adjusting the whole TNC output energy transmission structure by using CST software, so that the calculated voltage standing wave ratio is smaller, and the high-power transmission requirement and the mechanical design requirement are met; the method comprises the following steps:
s1.1, determining the basic size, the sizes of an inner conductor and an outer conductor, the dielectric constant of an energy transmission window ceramic and related sizes of a TNC output energy transmission structure by utilizing a TNC output energy transmission structure design drawing, and establishing an entity model of the TNC output energy transmission structure by utilizing CST software;
s1.2, subsequently, grid division is carried out on the self-contained tetrahedral self-adaptive grid according to the self-contained tetrahedral self-adaptive grid, port and boundary conditions are set, S parameter analysis is carried out by using a time domain solver, a standing wave curve of the TNC output energy transmission structure is obtained, and a more visual graph result is output;
s1.3, setting variables according to the calculation result of the standing wave curve, changing model parameters, and repeating the calculation steps until an optimal parameter condition combination is obtained;
s2, micro-discharge threshold calculation is carried out on the TNC output energy transmission structure optimized in the step S1 by utilizing micro-discharge calculation software, and the method specifically comprises the following steps:
s2.1, in the design optimization step, firstly, the rated output power and the working frequency point of the traveling wave tube are confirmed, and the basic size, the sizes of an inner conductor and an outer conductor, the ceramic dielectric constant of an energy transmission window and related sizes of the TNC output energy transmission structure are determined according to a TNC output energy transmission structure design drawing;
s2.2, opening micro-discharge calculation software, inputting the confirmed sizes, setting and selecting relevant calculation parameters, starting simulation calculation, and outputting an intuitive calculation result;
and S2.3, changing the size parameters and the dielectric constant of the inner conductor and the outer conductor according to the calculation result, and repeating the calculation steps until the optimal parameter condition combination is obtained.
5. The software optimization method for the coaxial TNC output energy transmission structure of the space traveling wave tube according to claim 4, wherein the basic dimensions of the TNC output energy transmission structure in step S1.1 include the inner and outer diameter dimensions and the height dimension of the energy transmission sleeve, and the diameter and the length of the inner and outer conductors;
the relevant calculation parameters of step S2.2 include: whether the surface is coated with a material, material properties;
step S2.3 is specifically: if the calculation result does not meet the requirement, the diameter size and the dielectric constant of the inner conductor and the outer conductor are adjusted.
6. The software optimization method for the coaxial TNC output energy transmission structure of the space traveling wave tube according to claim 4, wherein the installation environment of the TNC output energy transmission structure requires: the relative humidity is less than or equal to 60 percent; the cleanliness is in a clean room of hundred thousand grades.
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Application publication date: 20200207 |