CN110763155B - Surface shape measuring device and optical multi-point confocal reflecting method applied to same - Google Patents
Surface shape measuring device and optical multi-point confocal reflecting method applied to same Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention relates to a surface shape measuring device and an optical multi-point confocal reflecting method applied to the device. The measuring device comprises a fixed frame, a reference surface, a sliding rail, a sliding block, a detecting device, a driving device and a displacement sensor; the detection device comprises a movable bracket, an imaging lens group, a semi-transparent semi-reflecting mirror, a first reticle, a second reticle, a surface light source and a planar array image sensor which are respectively and fixedly arranged on the movable bracket; the optical axis of the imaging lens group is perpendicular to the reference plane; the measuring device further comprises a calculation processing device. The invention has larger measuring range, the precision is not affected by the measuring range, and when the three-dimensional surface multipoint measurement of a small area is carried out, only one-dimensional direction (the direction perpendicular to the reference plane) movement is needed, so that the working efficiency is higher.
Description
Technical Field
The invention relates to the field of photoelectric integrated detection, in particular to a surface shape measuring device and an optical multi-point confocal reflection method applied to the same.
Background
The spectrum confocal reflecting surface position measuring method is a mature optical reflecting surface position detecting technology, and the principle is that continuous spectrum light rays penetrate through an imaging lens group with large chromatic aberration, light with different wavelengths is focused on points on different positions on an optical axis, reflected light rays are converged on a small hole through the imaging lens group, the energy of the light with the wavelength focused on a reflecting surface passing through the small hole is maximum, and the energy of the light with the wavelength with larger wavelength difference passing through the small hole is smaller; the spectrum analysis sensor positioned behind the small hole calculates the peak wavelength, and different wavelengths correspond to different reflecting surface positions, so that the digital detection of the positions is realized.
The spectral confocal reflecting surface position measuring method has the advantages that: 1. the single-point position is fast in measurement speed, 2 and high in precision. The disadvantages are: 1. the smaller the range, and the larger the range, the lower the accuracy; 2. the cost of the spectrum analysis sensor is high; 3. only one point is measured at a time, and if the Nx Ny point of a rectangular surface area needs to be measured, the Nx Ny position needs to be moved for measurement, so that the efficiency in measuring the surface shape is low.
Products using spectral confocal technology in the japanese well-known company kenshi: the parameters of the CL-3000 series of the color laser coaxial displacement meter are taken as examples. The measuring range of the high-precision CL-PT010 is +/-0.3 mm, the precision is +/-0.2 um, the measuring range of the large-range CL-P070 is +/-10 mm, and the precision is +/-2 um.
Patent application number 201711226344.4 describes a method technology that only one point height value can be measured by one vertical scanning, and when the 3D shape of the surface is measured, the height is measured after two-dimensional movement parallel to the measuring surface is needed, so that the efficiency is low.
Disclosure of Invention
The invention aims at: the device and the method have larger measuring range and higher working efficiency compared with the prior art, the precision is not affected by the measuring range, and only one-dimensional direction (the direction perpendicular to the reference plane) movement is needed when the three-dimensional surface multipoint measurement is carried out in a small area.
The invention is realized by the following technical scheme:
scheme one:
A surface shape measuring device, characterized in that: the measuring device comprises a fixed frame, a reference surface, a sliding rail, a sliding block, a detection device, a driving device and a displacement sensor, wherein the reference surface is fixed on the fixed frame and used for placing an object to be measured, the sliding rail is fixedly connected with the fixed frame or the reference surface and extends along the direction perpendicular to the reference surface, the sliding block is connected on the sliding rail in a sliding manner, the detection device is fixedly connected with the sliding block and can vertically move along the direction of the sliding block approaching to or separating from the reference surface, the driving device is connected between one part of the detection device or the sliding block and one part of the fixed frame or the sliding rail and used for driving the detection device to move, and the displacement sensor is arranged between the sliding rail or one part of the fixed frame or the reference surface and one part of the sliding block or the detection device and used for acquiring the position information of the detection device relative to the reference surface;
The detection device comprises a movable bracket, an imaging lens group, a semi-transparent semi-reflecting mirror, a first reticle, a second reticle, a surface light source and a planar array image sensor which are respectively and fixedly arranged on the movable bracket; the optical axis of the imaging lens group is perpendicular to the reference plane; the first dividing plate is vertically arranged on the optical axis of the imaging lens group; the half-mirror is arranged on the optical axis of the imaging lens group and is positioned between the first dividing plate and the imaging lens group, and the reflecting surface of the half-mirror and the reference surface are arranged at an angle of 45 degrees; the second reticle is arranged in a mirror mode relative to the position of the first reticle by taking the reflecting surface of the half-mirror as a mirror surface; a plurality of light-passing holes are distributed on the two reticles in a matrix form, and the corresponding hole position of each light-passing hole on the first reticle and the corresponding hole position of each light-passing hole on the second reticle are distributed symmetrically one by taking the reflecting surface of the half mirror as a mirror surface; the planar array image sensor is vertically arranged on the optical axis of the imaging lens group, the first reticle is positioned between the planar array image sensor and the half-mirror, and the detection surface of the planar array image sensor is opposite to the plurality of light transmission holes on the first reticle; the surface light source is parallel to the second dividing plate, and the second dividing plate is positioned between the surface light source and the semi-transparent semi-reflective mirror; the light-emitting surface of the surface light source is opposite to the plurality of light-passing holes on the second division plate, so that light rays of the surface light source can pass through the plurality of light-passing holes of the second division plate, then sequentially pass through the half mirror and the imaging lens group to reach the reflecting surface of the object to be measured, and then part of reflected light rays pass through the imaging lens group and the half mirror to reach all the light-passing holes of the first division plate, so that corresponding light spots are formed on the area array image sensor;
The measuring device further comprises a calculation processing device which is respectively connected with the area array image sensor and the displacement sensor and can calculate three-dimensional coordinate values (Xm, ym, zm) of positions of the central points of the corresponding light passing holes on the first dividing plate when the brightness sum maximum occurs to each light spot according to detection information transmitted by the area array image sensor and the displacement sensor, wherein the three-dimensional coordinate values (Xm, ym, zm) are respectively corresponding to the corresponding points to be measured and imaged on the measured object.
Preferably, the driving device comprises a driving motor fixed on the fixed frame and used for providing power, and a transmission assembly connected between an output shaft of the driving motor and the sliding block.
Preferably, the cross section of the half mirror in the direction vertical to the second reticle of the first reticle is square, and the first reticle and the second reticle are both glued and fixed on the side wall closest to the half mirror respectively.
An optical multi-point confocal reflection method for carrying out surface measurement by adopting the surface shape measuring device is characterized in that: the method comprises the following steps:
① Placing the measured object on a reference surface, opening a surface light source, forming a plurality of groups of light rays through a plurality of light passing holes in a second dividing plate, enabling the light rays to sequentially pass through a half-mirror and an imaging lens group to reach the reflecting surface of the measured object, enabling part of reflected light rays to sequentially pass through the imaging lens group and the half-mirror to respectively reach corresponding light passing holes in a first dividing plate, and forming a plurality of corresponding light spots on a planar array image sensor;
② Setting a Z axis on the optical axis by taking the intersection point of the optical axis and the reference plane as an origin, and establishing a three-dimensional coordinate system; obtaining X-axis and Y-axis coordinate values (xm, ym) of the central points of all the light-passing holes on the first reticle, wherein m=1-n, and n is the number of the light-passing holes on the first reticle;
③ The driving device drives the detection device to move in a travel range larger than the height difference of each point on the surface of the measured object relative to the reference surface; in the moving process, calculating the brightness sum of each light spot area shot by the area array image sensor through the calculation processing device, finding out the maximum value of the brightness sum of each light spot area at different moments and the Z-axis coordinate value zm of the position of the center point of the corresponding light passing hole on the first dividing plate detected by the displacement sensor when the brightness sum of each light spot is maximum in the process that the distance between the detection device and the reference surface is changed, and obtaining the three-dimensional coordinate values (xm, ym, zm) of the position of the center point of the corresponding light passing hole on the first dividing plate when the brightness sum of each light spot is maximum;
Calculating three-dimensional coordinate values (Xm, ym, zm) of positions of center points of corresponding light passing holes on the first reticle when the brightness sum of each light spot is maximum according to the following formula, wherein the three-dimensional coordinate values (Xm, ym, zm) correspond to the corresponding to the to-be-measured points imaged on the measured object respectively:
equation 1: xm= -f Xm/(u-f);
equation 2: ym= -f Ym/(u-f);
equation 3: zm=zm-Zoffset;
Wherein f is the focal length of the imaging lens group, and u is the distance between the main surface of the imaging lens group and the first reticle; zoffset is a fixed value equal to the distance between the first reticle and the first reticle imaged by the imaging lens group;
④ And obtaining the shape of the surface of the measured object according to the three-dimensional coordinate values (Xm, ym, zm) of each corresponding measured point calculated in the step ③.
Scheme II:
A surface shape measuring device, characterized in that: the measuring device comprises a fixed frame, a reference surface, a sliding rail, a sliding block, a detection device, a driving device and a displacement sensor, wherein the reference surface is fixed on the fixed frame and used for placing an object to be measured, the sliding rail is fixedly connected with the fixed frame or the reference surface and extends along the direction perpendicular to the reference surface, the sliding block is connected on the sliding rail in a sliding manner, the detection device is fixedly connected with the sliding block and can vertically move along the direction of the sliding block approaching to or separating from the reference surface, the driving device is connected between one part of the detection device or the sliding block and one part of the fixed frame or the sliding rail and used for driving the detection device to move, and the displacement sensor is arranged between the sliding rail or one part of the fixed frame or the reference surface and one part of the sliding block or the detection device and used for acquiring the position information of the detection device relative to the reference surface;
The detection device comprises a movable bracket, an imaging lens group, a semi-transparent semi-reflecting mirror, a first reticle, a second reticle, a surface light source and a planar array image sensor which are respectively and fixedly arranged on the movable bracket; the optical axis of the imaging lens group is perpendicular to the reference plane; the first dividing plate is vertically arranged on the optical axis of the imaging lens group; the half-mirror is arranged on the optical axis of the imaging lens group and positioned between the first dividing plate and the imaging lens group, and the reflecting surface of the half-mirror and the reference surface are arranged at an angle of 45 degrees; the second reticle is arranged in a mirror mode relative to the position of the first reticle by taking the reflecting surface of the half-mirror as a mirror surface; a plurality of light-passing holes are distributed on the two reticles in a matrix form, and the corresponding hole position of each light-passing hole on the first reticle and the corresponding hole position of each light-passing hole on the second reticle are distributed symmetrically one by taking the reflecting surface of the half mirror as a mirror surface; the planar array image sensor is arranged along a direction parallel to the second dividing plate, the second dividing plate is positioned between the planar array image sensor and the half-mirror, and the detection surface of the planar array image sensor is opposite to the plurality of light transmission holes on the second dividing plate; the surface light source is vertically arranged on the optical axis of the imaging lens group, and the first reticle is positioned between the surface light source and the semi-transparent semi-reflective mirror; the light-emitting surface of the surface light source is opposite to the plurality of light-passing holes on the first reticle, so that light rays of the surface light source can pass through the plurality of light-passing holes of the first reticle, then sequentially pass through the half-mirror and the imaging lens group to reach the reflecting surface of the object to be measured, and then partial reflected light rays pass through the imaging lens group and the half-mirror to reach all the light-passing holes of the second reticle, so that corresponding light spots are formed on the area array image sensor;
The measuring device further comprises a calculation processing device which is respectively connected with the area array image sensor and the displacement sensor and can calculate three-dimensional coordinate values (Xm, ym, zm) of positions of the central points of the corresponding light passing holes on the first dividing plate when the brightness sum maximum occurs to each light spot according to detection information transmitted by the area array image sensor and the displacement sensor, wherein the three-dimensional coordinate values (Xm, ym, zm) are respectively corresponding to the corresponding points to be measured and imaged on the measured object.
Preferably, the driving device comprises a driving motor fixed on the fixed frame and used for providing power, and a transmission assembly connected between an output shaft of the driving motor and the sliding block.
Preferably, the half mirror has a square cross section in a direction perpendicular to the first reticle and the second reticle at the same time, and the first reticle and the second reticle are both glued and fixed on the side walls closest to the half mirror.
An optical multi-point confocal reflection method for carrying out surface measurement by adopting the surface shape measuring device is characterized in that: the method comprises the following steps:
① Placing the measured object on a reference surface, opening a surface light source, forming a plurality of groups of light rays through a plurality of light passing holes in a first reticle, enabling the light rays to sequentially pass through a half-mirror and an imaging lens group to reach the reflecting surface of the measured object, enabling part of reflected light rays to sequentially pass through the imaging lens group and the half-mirror to respectively reach corresponding light passing holes in a second reticle, and forming a plurality of corresponding light spots on a planar array image sensor;
② Setting a Z axis on the optical axis by taking the intersection point of the optical axis and the reference plane as an origin, and establishing a three-dimensional coordinate system; obtaining X-axis and Y-axis coordinate values (xm, ym) of the central points of all the light-passing holes on the first reticle, wherein m=1-n, and n is the number of the light-passing holes on the first reticle;
③ The driving device drives the detection device to move in a travel range larger than the height difference of each point on the surface of the measured object relative to the reference surface; in the moving process, calculating the brightness sum of each light spot area shot by the area array image sensor through the calculation processing device, finding out the maximum value of the brightness sum of each light spot area at different moments and the Z-axis coordinate value zm of the position of the center point of the corresponding light passing hole on the first dividing plate detected by the displacement sensor when the brightness sum of each light spot is maximum in the process that the distance between the detection device and the reference surface is changed, and obtaining the three-dimensional coordinate values (xm, ym, zm) of the position of the center point of the corresponding light passing hole on the first dividing plate when the brightness sum of each light spot is maximum;
Calculating three-dimensional coordinate values (Xm, ym, zm) of positions of center points of corresponding light passing holes on the first reticle when the brightness sum of each light spot is maximum according to the following formula, wherein the three-dimensional coordinate values (Xm, ym, zm) correspond to the corresponding to the to-be-measured points imaged on the measured object respectively:
equation 1: xm= -f Xm/(u-f);
equation 2: ym= -f Ym/(u-f);
equation 3: zm=zm-Zoffset;
Wherein f is the focal length of the imaging lens group, and u is the distance between the main surface of the imaging lens group and the first reticle; zoffset is a fixed value equal to the distance between the first reticle and the first reticle imaged by the imaging lens group;
④ And obtaining the shape of the surface of the measured object according to the three-dimensional coordinate values (Xm, ym, zm) of each corresponding measured point calculated in the step ③.
Compared with the prior art, the invention has the beneficial effects that:
1. The invention provides a surface shape measuring device and an optical multi-point confocal reflecting method applied to the device, the device and the method have larger measuring range, the precision is not affected by the measuring range, the measuring precision is better than +/-0.5 um, and in the process of carrying out three-dimensional surface multi-point measurement in a small area, only one-dimensional direction (the direction perpendicular to a reference plane) is required to be moved, so that the speed is higher.
2. The invention adopts the common area array image sensor to replace the complex spectrum analysis sensor, has low cost and simpler operation.
3. The invention also has the advantages of safety, reliability and convenient popularization and application.
Drawings
FIG. 1 is a schematic diagram of a first embodiment of the present invention;
FIG. 2 is a schematic diagram of a second embodiment of the present invention;
FIG. 3 is a schematic view of the structure of the reticle of the present invention.
Description of the reference numerals: 1-measured object, 2-fixed frame, 3-datum plane, 4-detection device, 41-imaging lens group, 42-half mirror, 43-first division board, 44-area light source, 45-area array image sensor, 46-movable support, 47-second division board, 6-slide rail, 7-slide block.
Detailed Description
The invention is described in detail below with reference to the accompanying drawings:
embodiment one:
As shown in fig. 1 and 3, a surface shape measuring apparatus is characterized in that: the measuring device comprises a fixed frame 2, a reference surface 3 fixed on the fixed frame 2 and used for placing a measured object 1, a sliding rail 6 fixedly connected with the fixed frame 2 or the reference surface 3 and extending along the direction vertical to the reference surface 3, a sliding block 7 slidingly connected with the sliding rail 6, a detecting device 4 fixedly connected with the sliding block 7 and capable of vertically moving along the direction of the sliding block 7 towards or away from the reference surface 3, a driving device connected between one part of the detecting device 4 or the sliding block 7 and one part of the fixed frame 2 or the sliding rail 6 and used for driving the detecting device 4 to move, and a displacement sensor arranged between one part of the sliding rail 6 or the fixed frame 2 or the reference surface 3 and one part of the sliding block 7 or the detecting device 4 and used for acquiring the position information of the detecting device 4 relative to the reference surface 3;
The detection device 4 comprises a movable support 46, an imaging lens group 41, a half mirror 42, a first dividing plate 43, a second dividing plate 47, a surface light source 44 and a planar array image sensor 45 which are respectively and fixedly arranged on the movable support 46; the optical axis of the imaging lens group 41 is arranged perpendicular to the reference plane 3; the first reticle 43 is vertically disposed on the optical axis of the imaging lens group 41; the half mirror 42 is arranged on the optical axis of the imaging lens group 41 and is positioned between the first dividing plate 43 and the imaging lens group 41, and the reflecting surface of the half mirror 42 is arranged at an angle of 45 degrees with the reference surface 3; the second reticle 47 is arranged in a position mirror image with respect to the first reticle 43 with the reflection surface of the half mirror 42 as a mirror surface; a plurality of light-passing holes are distributed on the two reticles in a matrix form, and the corresponding hole position of each light-passing hole on the first reticle 43 and the corresponding hole position of each light-passing hole on the second reticle 47 are distributed symmetrically one by taking the reflecting surface of the half mirror 42 as a mirror surface; the area array image sensor 45 is vertically arranged on the optical axis of the imaging lens group 41, the first reticle 43 is positioned between the area array image sensor 45 and the half mirror 42, and the detection surface of the area array image sensor 45 is opposite to the plurality of light transmission holes on the first reticle 43; the surface light source 44 is disposed parallel to the second reticle 47, and the second reticle 47 is located between the surface light source 44 and the half mirror 42; the light emitting surface of the surface light source 44 is opposite to the plurality of light passing holes on the second division plate 47, so that the light of the surface light source 44 can pass through the plurality of light passing holes of the second division plate 47, then sequentially passes through the half mirror 42 and the imaging lens group 41 to reach the reflecting surface of the object 1 to be measured, and then part of the reflected light passes through the imaging lens group 41 and the half mirror 42 to reach each light passing hole of the first division plate 43, and corresponding light spots are formed on the area array image sensor 45;
the measuring device further comprises a calculation processing device, which is respectively connected with the area array image sensor 45 and the displacement sensor, and can calculate three-dimensional coordinate values (Xm, ym, zm) of positions of the center points of the corresponding light passing holes on the first dividing plate 43 when the brightness sum maximum appears according to detection information transmitted by the area array image sensor 45 and the displacement sensor, wherein the three-dimensional coordinate values (Xm, ym, zm) are respectively corresponding to the corresponding to-be-measured points imaged on the measured object 1.
Preferably, the driving device comprises a driving motor fixed on the fixed frame 2 for providing power and a transmission assembly connected between an output shaft of the driving motor and the sliding block 7.
Preferably, the half mirror 42 has a square cross section in a direction perpendicular to the second reticle 47 of the first reticle 43, and the first reticle 43 and the second reticle 47 are glued and fixed to the side walls closest to the half mirror 42.
In the specific implementation, the diameter of each light-passing hole, the distance between the central points of two adjacent light-passing holes and the number of the light-passing holes on the reticle can be determined according to actual needs, and the diameter of each light-passing hole can be preferably between 1 micron and 100 microns, for example: 10 microns; the spacing between the center points of adjacent two light passing holes may preferably be between 10 microns and 1000 microns by 1, for example: 100 microns.
An optical multi-point confocal reflection method for carrying out surface measurement by adopting the surface shape measuring device is characterized in that: the method comprises the following steps:
① Placing the object 1 to be measured on the reference plane 3, turning on the surface light source 44, forming a plurality of groups of light rays through a plurality of light passing holes on the second dividing plate 47, enabling the light rays to sequentially pass through the half mirror 42 and the imaging lens group 41 to reach the reflecting surface of the object 1 to be measured, enabling part of reflected light rays to sequentially pass through the imaging lens group 41 and the half mirror 42 to respectively reach corresponding light passing holes in the first dividing plate 43, and forming a plurality of corresponding light spots on the area array image sensor 45;
② Taking the intersection point of the optical axis and the reference plane 3 as an origin, setting a Z axis on the optical axis, and establishing a three-dimensional coordinate system; and acquiring X-axis and Y-axis coordinate values (xm, ym) of the center points of the respective light-passing holes on the first reticle 43, wherein m=1 to n, n being the number of the light-passing holes on the first reticle 43;
③ The driving device drives the detection device 4 to move in a travel range larger than the height difference of each point on the surface of the object 1 relative to the reference surface 3; in the moving process, calculating the brightness sum of each light spot area shot by the area array image sensor 45 through a calculation processing device, and finding out the maximum value of the brightness sum of each light spot area at different moments and the Z-axis coordinate value zm of the position of the center point of the corresponding light passing hole on the first reticle 43 detected by the displacement sensor when each light spot appears the maximum value of the brightness sum in the process that the distance between the detection device 4 and the reference surface 3 changes, so as to obtain the three-dimensional coordinate values (xm, ym, zm) of the position of the center point of the corresponding light passing hole on the first reticle 43 when each light spot appears the maximum value of the brightness sum;
Three-dimensional coordinate values (Xm, ym, zm) of positions of the center points of the corresponding light passing holes on the first reticle 43 when the sum of brightness of each light spot is maximum are calculated according to the following formula, wherein the three-dimensional coordinate values (Xm, ym, zm) correspond to the corresponding points to be measured imaged on the object 1 respectively:
equation 1: xm= -f Xm/(u-f);
equation 2: ym= -f Ym/(u-f);
equation 3: zm=zm-Zoffset;
where f is the focal length of the imaging lens group 41, and u is the distance between the main surface of the imaging lens group 41 and the first reticle 43; zoffset is a fixed value equal to the distance of the first reticle 43 from the first reticle 43 imaged by the imaging lens group 41;
④ And obtaining the shape of the surface of the object 1 to be measured according to the three-dimensional coordinate values (Xm, ym, zm) of each corresponding point to be measured calculated in the step ③.
Embodiment two:
As shown in fig. 2 and 3, a surface shape measuring apparatus is characterized in that: the measuring device comprises a fixed frame 2, a reference surface 3 fixed on the fixed frame 2 and used for placing a measured object 1, a sliding rail 6 fixedly connected with the fixed frame 2 or the reference surface 3 and extending along the direction vertical to the reference surface 3, a sliding block 7 slidingly connected with the sliding rail 6, a detecting device 4 fixedly connected with the sliding block 7 and capable of vertically moving along the direction of the sliding block 7 towards or away from the reference surface 3, a driving device connected between one part of the detecting device 4 or the sliding block 7 and one part of the fixed frame 2 or the sliding rail 6 and used for driving the detecting device 4 to move, and a displacement sensor arranged between one part of the sliding rail 6 or the fixed frame 2 or the reference surface 3 and one part of the sliding block 7 or the detecting device 4 and used for acquiring the position information of the detecting device 4 relative to the reference surface 3;
the detection device 4 comprises a movable support 46, an imaging lens group 41, a half mirror 42, a first dividing plate 43, a second dividing plate 47, a surface light source 44 and a planar array image sensor 45 which are respectively and fixedly arranged on the movable support 46; the optical axis of the imaging lens group 41 is arranged perpendicular to the reference plane 3; the first reticle 43 is vertically disposed on the optical axis of the imaging lens group 41; the half mirror 42 is arranged on the optical axis of the imaging lens group 41 and positioned between the first dividing plate 43 and the imaging lens group 41, and the reflecting surface of the half mirror 42 is arranged at an angle of 45 degrees with respect to the reference surface 3; the second reticle 47 is arranged in a position mirror image with respect to the first reticle 43 with the reflection surface of the half mirror 42 as a mirror surface; a plurality of light-passing holes are distributed on the two reticles in a matrix form, and the corresponding hole position of each light-passing hole on the first reticle 43 and the corresponding hole position of each light-passing hole on the second reticle 47 are distributed symmetrically one by taking the reflecting surface of the half mirror 42 as a mirror surface; the area array image sensor 45 is arranged along a direction parallel to the second dividing plate 47, the second dividing plate 47 is positioned between the area array image sensor 45 and the half mirror 42, and the detection surface of the area array image sensor 45 is opposite to the plurality of light transmission holes on the second dividing plate 47; the surface light source 44 is vertically disposed on the optical axis of the imaging lens group 41, and the first reticle 43 is located at a position between the surface light source 44 and the half mirror 42; the light emitting surface of the surface light source 44 is opposite to the plurality of light passing holes on the first reticle 43, so that the light of the surface light source 44 can pass through the plurality of light passing holes of the first reticle 43, then sequentially pass through the half mirror 42 and the imaging lens group 41 to reach the reflecting surface of the object 1 to be measured, and then part of the reflected light passes through the imaging lens group 41 and the half mirror 42 to reach each light passing hole of the second reticle 47, so that corresponding light spots are formed on the area array image sensor 45;
the measuring device further comprises a calculation processing device, which is respectively connected with the area array image sensor 45 and the displacement sensor, and can calculate three-dimensional coordinate values (Xm, ym, zm) of positions of the center points of the corresponding light passing holes on the first dividing plate 43 when the brightness sum maximum appears according to detection information transmitted by the area array image sensor 45 and the displacement sensor, wherein the three-dimensional coordinate values (Xm, ym, zm) are respectively corresponding to the corresponding to-be-measured points imaged on the measured object 1.
Preferably, the driving device comprises a driving motor fixed on the fixed frame 2 for providing power and a transmission assembly connected between an output shaft of the driving motor and the sliding block 7.
Preferably, the half mirror 42 has a square cross section in a direction perpendicular to the second reticle 47 of the first reticle 43, and the first reticle 43 and the second reticle 47 are glued and fixed to the side walls closest to the half mirror 42.
In the specific implementation, the diameter of each light-passing hole, the distance between the central points of two adjacent light-passing holes and the number of the light-passing holes on the reticle can be determined according to actual needs, and the diameter of each light-passing hole can be preferably between 1 micron and 100 microns, for example: 10 microns; the spacing between the center points of adjacent two light passing holes may preferably be between 10 microns and 1000 microns by 1, for example: 100 microns.
An optical multi-point confocal reflection method for carrying out surface measurement by adopting the surface shape measuring device is characterized in that: the method comprises the following steps:
① Placing the object 1 to be measured on the reference plane 3, turning on the surface light source 44, forming a plurality of groups of light rays through a plurality of light passing holes on the first dividing plate 43, enabling the light rays to sequentially pass through the half mirror 42 and the imaging lens group 41 to reach the reflecting surface of the object 1 to be measured, enabling part of reflected light rays to sequentially pass through the imaging lens group 41 and the half mirror 42 to respectively reach corresponding light passing holes in the second dividing plate 47, and forming a plurality of corresponding light spots on the area array image sensor 45;
② Taking the intersection point of the optical axis and the reference plane 3 as an origin, setting a Z axis on the optical axis, and establishing a three-dimensional coordinate system; and acquiring X-axis and Y-axis coordinate values (xm, ym) of the center points of the respective light-passing holes on the first reticle 43, wherein m=1 to n, n being the number of the light-passing holes on the first reticle 43;
③ The driving device drives the detection device 4 to move in a travel range larger than the height difference of each point on the surface of the object 1 relative to the reference surface 3; in the moving process, calculating the brightness sum of each light spot area shot by the area array image sensor 45 through a calculation processing device, and finding out the maximum value of the brightness sum of each light spot area at different moments and the Z-axis coordinate value zm of the position of the center point of the corresponding light passing hole on the first reticle 43 detected by the displacement sensor when each light spot appears the maximum value of the brightness sum in the process that the distance between the detection device 4 and the reference surface 3 changes, so as to obtain the three-dimensional coordinate values (xm, ym, zm) of the position of the center point of the corresponding light passing hole on the first reticle (43) when each light spot appears the maximum value of the brightness sum;
Three-dimensional coordinate values (Xm, ym, zm) of positions of the center points of the corresponding light passing holes on the first reticle 43 when the sum of brightness of each light spot is maximum are calculated according to the following formula, wherein the three-dimensional coordinate values (Xm, ym, zm) correspond to the corresponding points to be measured imaged on the object 1 respectively:
equation 1: xm= -f Xm/(u-f);
equation 2: ym= -f Ym/(u-f);
equation 3: zm=zm-Zoffset;
where f is the focal length of the imaging lens group 41, and u is the distance between the main surface of the imaging lens group 41 and the first reticle 43; zoffset is a fixed value equal to the distance of the first reticle 43 from the first reticle 43 imaged by the imaging lens group 41;
④ And obtaining the shape of the surface of the object 1 to be measured according to the three-dimensional coordinate values (Xm, ym, zm) of each corresponding point to be measured calculated in the step ③.
While the invention has been illustrated and described with respect to specific embodiments and alternatives thereof, it will be appreciated that various changes and modifications can be made therein without departing from the spirit of the invention. It is, therefore, to be understood that the invention is not to be in any way limited except by the appended claims and their equivalents.
Claims (8)
1. A surface shape measuring device, characterized in that: the measuring device comprises a fixed frame (2), a reference surface (3) fixed on the fixed frame (2) and used for placing a measured object (1), a sliding rail (6) fixedly connected with the fixed frame (2) or the reference surface (3) and extending along the direction perpendicular to the reference surface (3), a sliding block (7) slidingly connected on the sliding rail (6), a detecting device (4) fixedly connected with the sliding block (7) and capable of vertically moving along the sliding block (7) towards the direction close to or far from the reference surface (3), a driving device connected between one part of the detecting device (4) or the sliding block (7) and one part of the fixed frame (2) or the sliding rail (6) and a displacement sensor arranged between one part of the sliding rail (6) or the fixed frame (2) or the reference surface (3) and one part of the sliding block (7) or the detecting device (4) and used for acquiring the position information of the detecting device (4) relative to the reference surface (3);
The detection device (4) comprises a movable support (46), an imaging lens group (41), a semi-transparent semi-reflecting mirror (42), a first reticle (43), a second reticle (47), a surface light source (44) and a planar array image sensor (45), wherein the imaging lens group (41), the semi-transparent semi-reflecting mirror (42), the first reticle (43), the second reticle (47) and the planar array image sensor (45) are respectively fixedly arranged on the movable support (46); the optical axis of the imaging lens group (41) is perpendicular to the reference plane (3); the first reticle (43) is vertically arranged on the optical axis of the imaging lens group (41); the half-mirror (42) is arranged on the optical axis of the imaging lens group (41) and is positioned between the first reticle (43) and the imaging lens group (41), and the reflecting surface of the half-mirror (42) and the reference surface (3) are arranged at an angle of 45 degrees; the second dividing plate (47) is arranged in a mirror image mode relative to the position of the first dividing plate (43) by taking the reflecting surface of the half-reflecting mirror (42) as a mirror image surface; a plurality of light-passing holes are distributed on the two reticles in a matrix form, and the corresponding hole position of each light-passing hole on the first reticle (43) and the corresponding hole position of each light-passing hole on the second reticle (47) are distributed in a one-to-one symmetry way by taking the reflecting surface of the half-mirror (42) as a mirror surface; the planar array image sensor (45) is vertically arranged on the optical axis of the imaging lens group (41), the first reticle (43) is positioned between the planar array image sensor (45) and the half-mirror (42), and the detection surface of the planar array image sensor (45) is opposite to the plurality of light transmission holes on the first reticle (43); the surface light source (44) is arranged parallel to the second dividing plate (47), and the second dividing plate (47) is positioned between the surface light source (44) and the half mirror (42); the light emitting surface of the surface light source (44) is opposite to the plurality of light passing holes on the second division plate (47), so that light rays of the surface light source (44) can pass through the plurality of light passing holes of the second division plate (47), then sequentially pass through the half mirror (42) and the imaging lens group (41) to reach the reflecting surface of the object (1) to be detected, and then partial reflected light rays pass through the imaging lens group (41) and the half mirror (42) to reach all the light passing holes of the first division plate (43) to form corresponding light spots on the area array image sensor (45);
The measuring device further comprises a calculation processing device which is respectively connected with the area array image sensor (45) and the displacement sensor, and can calculate three-dimensional coordinate values (Xm, ym, zm) corresponding to positions of the center points of the corresponding light passing holes on the first reticle (43) when the brightness sum of each light spot is maximum according to detection information transmitted by the area array image sensor (45) and the displacement sensor, and the three-dimensional coordinate values (Xm, ym, zm) corresponding to the corresponding points to be measured are imaged on the measured object (1) respectively.
2. The surface shape measuring apparatus according to claim 1, wherein: the driving device comprises a driving motor and a transmission assembly, wherein the driving motor is fixed on the fixed frame (2) and used for providing power, and the transmission assembly is connected between an output shaft of the driving motor and the sliding block (7).
3. The surface shape measuring apparatus according to claim 1, wherein: the cross section of the half-mirror (42) in the direction perpendicular to the second reticle (47) of the first reticle (43) is square, and the first reticle (43) and the second reticle (47) are glued and fixed on the side wall closest to the half-mirror (42) respectively.
4. An optical multi-point confocal reflection method for surface measurement using the surface-shape measuring apparatus according to any one of claims 1 to 3, characterized in that: the method comprises the following steps:
① Placing the measured object (1) on the reference surface (3), opening the surface light source (44), forming a plurality of groups of light rays through a plurality of light passing holes on the second dividing plate (47), enabling the light rays to sequentially pass through the semi-transparent semi-reflecting mirror (42) and the imaging lens group (41) to reach the reflecting surface of the measured object (1), enabling part of reflected light rays to sequentially pass through the imaging lens group (41) and the semi-transparent semi-reflecting mirror (42) to respectively reach corresponding light passing holes in the first dividing plate (43), and forming a plurality of corresponding light spots on the area array image sensor (45);
② Taking the intersection point of the optical axis and the reference plane (3) as an origin, setting a Z axis on the optical axis, and establishing a three-dimensional coordinate system; obtaining X-axis and Y-axis coordinate values (xm, ym) of the central point of each light-transmitting hole on the first reticle (43), wherein m=1-n, n is the number of the light-transmitting holes on the first reticle (43);
③ The driving device drives the detection device (4) to move in a travel range larger than the height difference of each point on the surface of the object (1) to be detected relative to the reference surface (3); in the moving process, calculating the brightness sum of each light spot area shot by the area array image sensor (45) through a calculation processing device, and finding out the maximum value of the brightness sum of each light spot area at different moments and the Z-axis coordinate value zm of the position of the center point of the corresponding light passing hole on the first reticle (43) detected by the displacement sensor when the brightness sum of each light spot is maximum in the process that the distance between the detection device (4) and the reference surface (3) is changed, so as to obtain the three-dimensional coordinate values (xm, ym, zm) of the position of the center point of the corresponding light passing hole on the first reticle (43) when the brightness sum of each light spot is maximum;
Calculating three-dimensional coordinate values (Xm, ym, zm) of corresponding points to be measured imaged on the object (1) corresponding to the three-dimensional coordinate values (Xm, ym, zm) of positions of the center points of the corresponding light passing holes on the first reticle (43) when the brightness sum of each light spot is maximum according to the following formula:
equation 1: xm= -f Xm/(u-f);
equation 2: ym= -f Ym/(u-f);
equation 3: zm=zm-Zoffset;
Wherein f is the focal length of the imaging lens group (41), and u is the distance between the main surface of the imaging lens group (41) and the first reticle (43); zoffset is a fixed value equal to the distance of the first reticle (43) from the first reticle (43) imaged by the imaging lens group (41);
④ And obtaining the shape of the surface of the object (1) to be measured according to the three-dimensional coordinate values (Xm, ym, zm) of each corresponding point to be measured calculated in the step ③.
5. A surface shape measuring device, characterized in that: the measuring device comprises a fixed frame (2), a reference surface (3) fixed on the fixed frame (2) and used for placing a measured object (1), a sliding rail (6) fixedly connected with the fixed frame (2) or the reference surface (3) and extending along the direction perpendicular to the reference surface (3), a sliding block (7) slidingly connected on the sliding rail (6), a detecting device (4) fixedly connected with the sliding block (7) and capable of vertically moving along the sliding block (7) towards the direction close to or far from the reference surface (3), a driving device connected between one part of the detecting device (4) or the sliding block (7) and one part of the fixed frame (2) or the sliding rail (6) and a displacement sensor arranged between one part of the sliding rail (6) or the fixed frame (2) or the reference surface (3) and one part of the sliding block (7) or the detecting device (4) and used for acquiring the position information of the detecting device (4) relative to the reference surface (3);
the detection device (4) comprises a movable support (46), an imaging lens group (41), a semi-transparent semi-reflecting mirror (42), a first reticle (43), a second reticle (47), a surface light source (44) and a planar array image sensor (45), wherein the imaging lens group (41), the semi-transparent semi-reflecting mirror (42), the first reticle (43), the second reticle (47) and the planar array image sensor (45) are respectively fixedly arranged on the movable support (46); the optical axis of the imaging lens group (41) is perpendicular to the reference plane (3); the first reticle (43) is vertically arranged on the optical axis of the imaging lens group (41); the half-mirror (42) is arranged on the optical axis of the imaging lens group (41) and positioned between the first reticle (43) and the imaging lens group (41), and the reflecting surface of the half-mirror (42) is arranged at an angle of 45 degrees with the reference surface (3); the second dividing plate (47) is arranged in a mirror image mode relative to the position of the first dividing plate (43) by taking the reflecting surface of the half-reflecting mirror (42) as a mirror image surface; a plurality of light-passing holes are distributed on the two reticles in a matrix form, and the corresponding hole position of each light-passing hole on the first reticle (43) and the corresponding hole position of each light-passing hole on the second reticle (47) are distributed in a one-to-one symmetry way by taking the reflecting surface of the half-mirror (42) as a mirror surface; the planar array image sensor (45) is arranged along a direction parallel to the second division plate (47), the second division plate (47) is positioned between the planar array image sensor (45) and the half-mirror (42), and the detection surface of the planar array image sensor (45) is opposite to a plurality of light transmission holes on the second division plate (47); the surface light source (44) is vertically arranged on the optical axis of the imaging lens group (41), and the first reticle (43) is positioned between the surface light source (44) and the half mirror (42); the light emitting surface of the surface light source (44) is opposite to the plurality of light passing holes on the first reticle (43), so that light rays of the surface light source (44) can pass through the plurality of light passing holes of the first reticle (43), then sequentially pass through the half mirror (42) and the imaging lens group (41) to reach the reflecting surface of the object (1) to be detected, and then partial reflected light rays pass through the imaging lens group (41) and the half mirror (42) to reach all the light passing holes of the second reticle (47), so that corresponding light spots are formed on the area array image sensor (45);
The measuring device further comprises a calculation processing device which is respectively connected with the area array image sensor (45) and the displacement sensor, and can calculate three-dimensional coordinate values (Xm, ym, zm) corresponding to positions of the center points of the corresponding light passing holes on the first reticle (43) when the brightness sum of each light spot is maximum according to detection information transmitted by the area array image sensor (45) and the displacement sensor, and the three-dimensional coordinate values (Xm, ym, zm) corresponding to the corresponding points to be measured are imaged on the measured object (1) respectively.
6. The surface shape measuring apparatus according to claim 5, wherein: the driving device comprises a driving motor and a transmission assembly, wherein the driving motor is fixed on the fixed frame (2) and used for providing power, and the transmission assembly is connected between an output shaft of the driving motor and the sliding block (7).
7. The surface shape measuring apparatus according to claim 5, wherein: the cross section of the half-mirror (42) in the direction perpendicular to the second reticle (47) of the first reticle (43) is square, and the first reticle (43) and the second reticle (47) are glued and fixed on the side wall closest to the half-mirror (42) respectively.
8. An optical multi-point confocal reflection method for surface measurement using the surface-shape measuring apparatus according to any one of claims 5 to 7, characterized in that: the method comprises the following steps:
① Placing the measured object (1) on the reference surface (3), opening a surface light source (44), forming a plurality of groups of light rays through a plurality of light passing holes on a first reticle (43), enabling the light rays to sequentially pass through a half mirror (42) and an imaging lens group (41) to reach the reflecting surface of the measured object (1), enabling part of reflected light rays to sequentially pass through the imaging lens group (41) and the half mirror (42) to respectively reach corresponding light passing holes in a second reticle (47), and forming a plurality of corresponding light spots on an area array image sensor (45);
② Taking the intersection point of the optical axis and the reference plane (3) as an origin, setting a Z axis on the optical axis, and establishing a three-dimensional coordinate system; obtaining X-axis and Y-axis coordinate values (xm, ym) of the central point of each light-transmitting hole on the first reticle (43), wherein m=1-n, n is the number of the light-transmitting holes on the first reticle (43);
③ The driving device drives the detection device (4) to move in a travel range larger than the height difference of each point on the surface of the object (1) to be detected relative to the reference surface (3); in the moving process, calculating the brightness sum of each light spot area shot by the area array image sensor (45) through a calculation processing device, and finding out the maximum value of the brightness sum of each light spot area at different moments and the Z-axis coordinate value zm of the position of the center point of the corresponding light passing hole on the first reticle (43) detected by the displacement sensor when the brightness sum of each light spot is maximum in the process that the distance between the detection device (4) and the reference surface (3) is changed, so as to obtain the three-dimensional coordinate values (xm, ym, zm) of the position of the center point of the corresponding light passing hole on the first reticle (43) when the brightness sum of each light spot is maximum;
Calculating three-dimensional coordinate values (Xm, ym, zm) of corresponding points to be measured imaged on the object (1) corresponding to the three-dimensional coordinate values (Xm, ym, zm) of positions of the center points of the corresponding light passing holes on the first reticle (43) when the brightness sum of each light spot is maximum according to the following formula:
equation 1: xm= -f Xm/(u-f);
equation 2: ym= -f Ym/(u-f);
equation 3: zm=zm-Zoffset;
Wherein f is the focal length of the imaging lens group (41), and u is the distance between the main surface of the imaging lens group (41) and the first reticle (43); zoffset is a fixed value equal to the distance of the first reticle (43) from the first reticle (43) imaged by the imaging lens group (41);
④ And obtaining the shape of the surface of the object (1) to be measured according to the three-dimensional coordinate values (Xm, ym, zm) of each corresponding point to be measured calculated in the step ③.
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| CN210981180U (en) * | 2019-12-11 | 2020-07-10 | 福州锐景达光电科技有限公司 | Surface shape measuring device |
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| CN206546159U (en) * | 2016-11-29 | 2017-10-10 | 深圳大学 | Microscopic three-dimensional measurement apparatus and system |
| CN107764185A (en) * | 2017-11-29 | 2018-03-06 | 福州锐景达光电科技有限公司 | The device and method of contactless point-sourcre imaging measurement reflection line position |
| CN208171197U (en) * | 2018-03-22 | 2018-11-30 | 深圳技术大学（筹） | A kind of three-dimensional scanner based on digital micro-mirror device coding |
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