CN110739808A - miniature electromagnetic actuator convenient for integration and driving method thereof - Google Patents

miniature electromagnetic actuator convenient for integration and driving method thereof Download PDF

Info

Publication number
CN110739808A
CN110739808A CN201911038558.8A CN201911038558A CN110739808A CN 110739808 A CN110739808 A CN 110739808A CN 201911038558 A CN201911038558 A CN 201911038558A CN 110739808 A CN110739808 A CN 110739808A
Authority
CN
China
Prior art keywords
permanent magnet
circuit board
actuator
driven permanent
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201911038558.8A
Other languages
Chinese (zh)
Other versions
CN110739808B (en
Inventor
呼延鹏飞
代海风
胥光申
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xian Polytechnic University
Original Assignee
Xian Polytechnic University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xian Polytechnic University filed Critical Xian Polytechnic University
Priority to CN201911038558.8A priority Critical patent/CN110739808B/en
Publication of CN110739808A publication Critical patent/CN110739808A/en
Application granted granted Critical
Publication of CN110739808B publication Critical patent/CN110739808B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/30—Structural association with control circuits or drive circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/0094—Structural association with other electrical or electronic devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P31/00—Arrangements for regulating or controlling electric motors not provided for in groups H02P1/00 - H02P5/00, H02P7/00 or H02P21/00 - H02P29/00
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P7/00—Arrangements for regulating or controlling the speed or torque of electric DC motors
    • H02P7/02—Arrangements for regulating or controlling the speed or torque of electric DC motors the DC motors being of the linear type

Abstract

kinds of conveniently integrated micro electromagnetic actuator and its driving method, the invention discloses kinds of three degrees of freedom micro electromagnetic digital actuator and its driving method, including the control board card, the control board card connects with the power amplifier through the wire, the power amplifier connects the coil circuit board and the linear circuit board through the wire, the upper of the coil circuit board is fixed with the glass plate , the upper of the glass plate is fixed with the linear circuit board, the upper of the linear circuit board is fixed with the second glass plate, the upper of the second glass plate is fixed with the actuator, the actuator includes the support frame, the fixed permanent magnet fixed in the four corners of the support frame, the external PMMA shell of the driven permanent magnet movably embedded in the support frame groove, the internal activity of the external PMMA shell of the driven permanent magnet is placed with the driven permanent magnet, the control board card is the single chip or the digital signal output card, the power amplifier is the voltage current converter or the controllable silicon.

Description

miniature electromagnetic actuator convenient for integration and driving method thereof
Technical Field
The invention belongs to the technical field of micro mechanical actuators, and relates to micro electromagnetic actuators convenient to integrate and a driving method of the micro electromagnetic actuator.
Background
The most common actuators are based on analog control, and their moving units can reach any position within the working stroke, this type of actuator has the following advantages, such as continuous control within the working range, high performance, high reliability, etc. to achieve these advantages, closed loop control and corresponding feedback sensors are applied to this type of actuator.
In order to address these deficiencies due to design principles, another type of actuator based on digital control has been developed, wherein the motion unit of the actuator based on digital control can be driven between certain, limited separation positions (called steady-state positions). additionally, the separation positions are determined during the process.A position intermediate the separation positions is a transient position, which typically cannot be maintained.
1. to two degrees of freedom of motion, resulting in application scenario limitations;
2. the structure is complex and not compact enough, and the integration and expansion are not convenient.
The two problems restrict the research development and the industrial application of the micro-mechanical actuator, and the design of the micro-mechanical actuator with multiple degrees of freedom by adopting a digital control mode has profound significance.
Disclosure of Invention
The invention aims to provide miniature electromagnetic actuators convenient to integrate, and solves the problems that only or two degrees of freedom of movement exist in the prior art, the structure is complex, and integration and expansion are inconvenient.
Another objective of the present invention is to provide a driving method for the above-mentioned micro electromagnetic actuator, which solves the problems of only to two degrees of freedom of movement, complex structure and inconvenient integration and expansion in the prior art.
The invention adopts the technical scheme that the three-degree-of-freedom micro electromagnetic digital actuator comprises a control board card, wherein the control board card is connected with a power amplifier through a lead, the power amplifier is connected with a coil circuit board and a linear circuit board through leads, the coil circuit board is fixedly connected with a glass plate , the glass plate is fixedly connected with the linear circuit board, the upper end of the linear circuit board is fixedly connected with a second glass plate, the upper end of the second glass plate is fixedly connected with an actuator, the actuator comprises a supporting frame, fixed permanent magnets fixedly embedded at four corners of the supporting frame, a PMMA shell outside a driven permanent magnet movably embedded in a groove of the supporting frame, the interior of the PMMA shell outside the driven permanent magnet is movably provided with a driven permanent magnet with the magnetization direction opposite to that of the fixed permanent magnet, the control board card is a single chip.
The invention is also characterized in that:
the coil circuit board is a printed electromagnetic coil circuit board, and the central position of a copper coil on the coil circuit board is arranged corresponding to the position of the driven permanent magnet.
The linear circuit board is a double-sided printed linear circuit board, copper wires on the linear circuit board are perpendicularly arranged in a positive and negative orthogonal mode, and the central position of the copper wires in the positive and negative orthogonal mode corresponds to the position of the driven permanent magnet.
The thickness of the glass sheet and the glass sheet two was 0.5 mm.
The driven permanent magnet and the fixed permanent magnet are both cylindrical magnets or cubic magnets.
When the driven permanent magnet or the fixed permanent magnet is a cylindrical magnet, the diameter of the cylindrical magnet is 4-20mm, and the height of the cylindrical magnet is 4-8 mm; when the driven permanent magnet or the fixed permanent magnet is a cubic magnet, the side length of the cubic magnet is 4-20 mm.
The groove on the support frame of the actuator is a convex groove, and the outer PMMA shell of the driven permanent magnet is spaced from the side surface, the upper surface and the lower surface of the convex groove.
Another technical scheme adopted by the invention is that driving methods of the miniature electromagnetic actuator convenient for integration comprise the following steps:
step 1, applying current to the corresponding moving direction of an electromagnetic coil in a coil circuit board and keeping the current, wherein the generated magnetic levitation force lifts the driven permanent magnet and the PMMA shell outside the driven permanent magnet, and the PMMA shell outside the driven permanent magnet is contacted with the lower surface of a convex groove on a support frame of an actuator, so that the static fixation in the z direction is ensured, and the ascending motion of the actuator along the z direction is completed;
step 2, applying current pulses to the conducting wires in the corresponding moving directions of the linear circuit board to enable the driven permanent magnet and the PMMA shell outside the driven permanent magnet to generate displacement, and moving from stable positions to stable positions to realize that the actuator moves along the x or y direction;
step 3, applying reverse current to the corresponding moving direction of the electromagnetic coil in the coil circuit board or cutting off the original current, so that the PMMA shell outside the driven permanent magnet and the driven permanent magnet falls back to the position above the second glass plate and is supported by the second glass plate;
and 4, applying reverse current pulses to the conducting wires in the corresponding moving directions of the linear circuit board to enable the driven permanent magnet and the PMMA shell outside the driven permanent magnet to generate displacement and return to the initial position, so that the actuator can reversely move along the x or y direction.
The invention has the beneficial effects that:
(1) the invention has simple structure and open-loop control, only needs current pulse to drive the actuator based on digital control, and does not need to install a feedback sensor, thereby having lower cost and compact installation structure compared with a device based on an analog actuator;
(2) because the current pulse is adopted for driving, the heating is less, and the Joule effect can be effectively avoided;
(3) due to the adoption of an electromagnetic driving mode, the actuator has high driving speed, high response speed and no hysteresis;
(4) in the actuator unit, the driven permanent magnet and the fixed permanent magnet are arranged in opposite magnetization, so that the driven permanent magnet is always kept in four corner positions in the frame due to the action of the attraction force of the static magnetic field between the permanent magnets, the state is not allowed to maintain energy and is also changed into a stable position, namely each actuator unit has four stable positions, thereby four stable states of the actuator are determined, and no energy is needed for keeping the stable states;
(5) the driven permanent magnet has the freedom of movement in the x, y and z directions.
Drawings
FIG. 1 is a schematic diagram of an exploded view of miniature electromagnetic actuators for facilitating integration;
FIG. 2 is an assembly view of miniature electromagnetic actuators for ease of integration;
fig. 3 is a state diagram of the driving process of conveniently integrated micro-electromagnetic actuator.
In the figure, 1 is a control board card, 2 is a power amplifier, 3 is a coil circuit board, 4 is a glass plate , 5 is a linear circuit board, 6 is a glass plate II, 7 is an actuator, 8 is a fixed permanent magnet, 9 is a driven permanent magnet outer PMMA shell, 10 is a driven permanent magnet, 11 is a PMMA shell bottom boundary, and 12 is a lead.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The invention relates to conveniently-integrated miniature electromagnetic actuators, which are shown in figures 1 and 2 and comprise a control board 1, wherein the control board 1 is connected with a power amplifier 2 through a lead 12, the power amplifier 2 is connected with a coil circuit board 3 and a linear circuit board 5 through the lead 12, a glass plate 4 is fixedly connected to the upper surface of the coil circuit board 3, the linear circuit board 5 is fixedly connected to the upper surface of a glass plate 4, a second glass plate 6 is fixedly connected to the upper end of the linear circuit board 5, an actuator 7 is fixedly connected to the upper end of the second glass plate 6, the actuator 7 comprises a supporting frame, fixed permanent magnets 8 fixedly embedded at four corners of the supporting frame, a driven permanent magnet external PMMA shell 9 movably embedded in a groove of the supporting frame, and a driven permanent magnet 10 with the magnetization direction opposite to that of the fixed permanent magnets.
The control board card 1 is a single chip microcomputer or a digital signal output card, and the control board card 1 is used for providing pulse driving current signals for the actuator array.
The power amplifier 2 is a voltage to current converter or thyristor that amplifies the system drive current signal to provide large current pulses to the device, thereby producing a large lorentz drive force on the driven actuator.
The coil circuit board 3 is a printed electromagnetic coil circuit board, and the center position of a copper coil on the coil circuit board 3 is arranged corresponding to the position of the driven permanent magnet 10.
The linear circuit board 5 is a double-sided printed linear circuit board, copper wires on the linear circuit board 5 are perpendicularly arranged in a positive and negative orthogonal mode, and the center position of the copper wires in the positive and negative orthogonal mode corresponds to the position of the driven permanent magnet 10.
The thicknesses of the glass plate 4 and the second glass plate 6 are 0.5mm, the shapes of the glass plate 4 and the second glass plate 6 are square, the area size can be correspondingly adjusted according to the size of the required actuator and the size of the circuit board, the glass plate 4 and the second glass plate 6 are mainly used for electromagnetic isolation, and the glass plates are placed between the linear circuit board and the magnet of the actuator and between the coil circuit board and the linear circuit board and are supported by the actuator structure body.
As shown in fig. 1 and 2, the driven permanent magnet 10 and the fixed permanent magnet 8 are both cylindrical magnets or cubic magnets, and the support frame is rectangular; when the driven permanent magnet 10 or the fixed permanent magnet 8 is a cylindrical magnet, the diameter of the cylindrical magnet is 4-20mm, and the height of the cylindrical magnet is 4-8 mm; when the driven permanent magnet 10 or the fixed permanent magnet 8 is a cubic magnet, the side length of the cubic magnet is 4 to 20mm, and the magnets of the same shape may be the same or different in size.
The groove on the support frame of the actuator 7 is a convex groove, the distance is reserved between the PMMA shell 9 outside the driven permanent magnet and the side surface, the upper surface and the lower surface of the convex groove, and the distance is reserved between the bottom boundary 11 of the PMMA shell and the side surface of the convex groove. The actuator 7 may be fixed to the work platform by a screw connection.
The invention discloses a driving method of conveniently integrated miniature electromagnetic actuators, which comprises the following steps:
step 1, applying current to the corresponding moving direction of an electromagnetic coil in a coil circuit board 3 and keeping the current, wherein the generated magnetic levitation force lifts a driven permanent magnet 10 and a PMMA shell 9 outside the driven permanent magnet, and the PMMA shell 9 outside the driven permanent magnet is contacted with the lower surface of a convex groove on a support frame of an actuator 7, so that the static determination of the z direction is ensured, and the ascending motion of the actuator 7 along the z direction is completed;
step 2, applying current pulses to the conducting wires in the corresponding moving directions of the linear circuit board 5 to enable the driven permanent magnet 10 and the PMMA shell 9 outside the driven permanent magnet to generate displacement and move from stable positions to stable positions, so that the actuator 7 moves along the x or y direction;
step 3, applying reverse current to the corresponding moving direction of the electromagnetic coil in the coil circuit board 3 or cutting off the original current, so that the driven permanent magnet 10 and the PMMA shell 9 outside the driven permanent magnet fall back to the position above the second glass plate 6 and are supported by the glass plate;
and 4, applying reverse current pulses to the lead of the linear circuit board 5 in the corresponding moving direction to enable the driven permanent magnet 10 and the PMMA shell 9 outside the driven permanent magnet to generate displacement and return to the initial position, so that the actuator 7 can reversely move in the x or y direction.
The invention A miniature electromagnetic actuator convenient for integration, which has the following working principle:
the actuator 7 adopts an electromagnetic driving principle, Lorentz force is generated on the driven permanent magnet 10 of the actuator 7 in a mode of controlling current pulse, and the driven permanent magnet 10 in the actuator 7 is driven to generate displacement under the action of the Lorentz force;
in order to realize stable in-plane displacement output, 4 stable positions are designed on the actuator unit, namely 4 fixed permanent magnets which are arranged at four angular positions in the supporting frame are used, the magnetization direction of the fixed permanent magnets is opposite to that of the driven permanent magnets, so that in a static state, the driven permanent magnets are subjected to static magnetic attraction force from the fixed permanent magnets, so that the driven permanent magnets can only be positioned at the four angular positions closest to the 4 fixed permanent magnets when in the supporting frame, and in the case of external interference, the driven permanent magnets 10 keep at of the four positions, namely, the driven permanent magnets are called as four stable states;
the movement mode is that the driven permanent magnet 10 in the actuator 7 moves, the four stable states are also positioned at four vertexes of the rectangular structure in the supporting frame, so that the driven permanent magnet 10 can be driven only by electrifying corresponding conducting wires and coils at the bottom of the actuator 7, namely from stable positions to stable positions, and in the process, the electromagnetic driving force needs to be larger than the static magnetic attraction force;
the logic control mode is that the electrifying logic control sequence of the actuator 7 adopts a parallel dual-path control mode, namely, a mode of ascending, driving, descending and returning, the step is that current in corresponding directions is applied to coils on an electromagnetic coil circuit board 3 at the bottom of the actuator 7, and the magnetic suspension force is kept on the driven permanent magnet 10 and the permanent magnet outer PMMA shell 9, so that the driven permanent magnet 10 is in a magnetic suspension state, as shown in (1) in figure 3, the driven permanent magnet outer PMMA shell 9 is in contact with a bottom frame of the actuator 7, so that the driven permanent magnet 10 is kept static in the z direction, as shown in (1) in figure 3, the driven permanent magnet 10 is also kept static in the x direction and the y direction, the second step is that pulse current is sent to a corresponding lead wire on the linear permanent magnet circuit board 5, as shown in (2) in figure 3, the driving force is generated to drive the driven permanent magnet 10 and the driven permanent magnet outer PMMA shell 9, the permanent magnet 10 is moved to other stable positions from stable positions, the movement of the actuator is realized, as shown in figure 3, the third step is that the permanent magnet outer PMMA shell is also sent to the linear circuit board 3, so that the linear circuit board 10 is driven permanent magnet outer shell 9, so that the linear motor 10 is driven permanent magnet 10, so that the linear motor is also can be in the linear motor, and the linear motor, so that the linear motor can be driven linear motor, and the linear motor can be driven by the linear motor, and the linear motor can be driven linear motor, and the linear motor can be in the linear motor, and the linear motor can be driven linear motor, and the linear motor can.
The conveniently integrated micro electromagnetic actuators and the driving method thereof have the advantages of simple structure, open-loop control, only current pulse and no need of installing a feedback sensor on the basis of digital control driving actuators, so compared with a device based on an analog actuator, the device has the advantages of lower cost, compact installation structure, convenient control, huge industrial application potential, capability of replacing the traditional analog actuator on the occasion of compact space, and the driven permanent magnet has the freedom of movement in the directions of x, y and z.
In the driving method for the conveniently integrated micro electromagnetic actuator, the steps 2 and 3 can also be selected automatically according to the specific motion operation requirement in specific situations.
Example 1
A miniature electromagnetic actuator convenient for integration, the structure of which is shown in figures 1 and 2, comprises a control board 1, the control board 1 is connected with a power amplifier 2 through a wire 12, the power amplifier 2 is respectively connected with a coil circuit board 3 and a linear circuit board 5 through wires, as shown in figure 2, the coil circuit board 3 and the linear circuit board 5 are separated by layers of glass plates 4, a second glass plate 6 is arranged above the linear circuit board 5, an actuator 7 is arranged above the second glass plate 6, the actuator 7 is composed of 4 fixed permanent magnets 8, driven permanent magnets 10 and a PMMA shell 9 outside the driven permanent magnets, the motion precision of the actuator is 0.2mm along x and y directions, and the motion precision of the actuator is 0.5mm along z direction.
The driven permanent magnet 10 is a cubic magnet with dimensions of 4mm x 4mm x 2 mm; the fixed permanent magnet 8 is a cubic magnet with dimensions of 4mm x 4mm x 2 mm.
The control board card 1 has at least 3 digital signal output ports, and transmits the current pulse signal to the coil circuit board 3 and the linear circuit board 5 through the power amplifier 2 to form a conductive loop.
The power amplifier 2 is a voltage-current converter, which converts the voltage signal of the control board 1 into a pulse current signal, and the driving current can be 1-10A.
Both glass panel 4 and glass panel two 6 were 0.5mm thick.
The distance between the outer side surface of the exterior PMMA housing 9 of the driven permanent magnet and the inner side surface of the convex groove of the actuator 7 is 200 μm.
The designed distance between the upper surface of the lower part of the exterior PMMA housing 9 of the driven permanent magnet and the lower surface of the convex groove of the actuator 7 is 500 μm.
As shown in fig. 3, the driving step is , current in the corresponding direction is applied to the electromagnetic coil of the coil circuit board 3 at the bottom of the actuator 7 and is maintained, the driven permanent magnet 10 and the PMMA housing 9 outside the driven permanent magnet are subjected to magnetic levitation force and are changed into a magnetic levitation state, as shown in (1) in fig. 3, the PMMA housing 9 outside the driven permanent magnet is in contact with the bottom frame of the actuator 7 as the driven permanent magnet 10 and the PMMA housing 9 outside the driven permanent magnet are lifted, the driven permanent magnet 10 is kept statically in the z direction, moreover, of the driven permanent magnets 10 are also in four stable states and are also kept statically in the x and y directions, as shown in (2) in fig. 3, pulse current is sent to the corresponding lead wires on the linear circuit board 5, the generated driving force drives the driven permanent magnet 10 and the driven permanent magnet housing 9 outside the permanent magnet to move from stable positions to another stable positions to realize the movement of the actuator, as shown in (3), the third step, the current is stopped or reversely applied to the coil circuit board 3 at the bottom of the actuator 7, the bottom coil circuit board 3, the permanent magnet is driven by the glass, the glass housing 10 is also moved back to the three stable positions, and the three stable positions of the glass housing 9 are also are repeatedly, so that the three stable linear movement of the linear circuit board is realized, the linear circuit board is moved, and the linear circuit board is moved back to the three-degree-three-degree.
By adopting the above driving mode, displacement output of 200 μm in x and y directions can be obtained by driving the driven permanent magnet 10, and displacement output of 500 μm can be obtained by driving in z direction.
Example 2
A miniature electromagnetic actuator convenient for integration, the structure of which is shown in figures 1 and 2, comprises a control board 1, the control board 1 is connected with a power amplifier 2 through a wire 12, the power amplifier 2 is respectively connected with a coil circuit board 3 and a linear circuit board 5 through wires, as shown in figure 2, the coil circuit board 3 and the linear circuit board 5 are separated by layers of glass plates 4, a second glass plate 6 is arranged above the linear circuit board 5, an actuator 7 is arranged above the second glass plate 6, the actuator 7 is composed of 4 fixed permanent magnets 8, driven permanent magnets 10 and a PMMA shell 9 outside the driven permanent magnets, the motion precision is 0.5mm along x and y directions, and the z direction is 0.8 mm.
The driven permanent magnet 10 is a cubic magnet having a size of 5mm x 5mm x 2 mm; the fixed permanent magnet 8 is a cubic magnet having a size of 5mm x 5mm x 2 mm.
The control board card 1 has at least 3 digital signal output ports, and transmits the current pulse signal to the coil circuit board 3 and the linear circuit board 5 through the power amplifier 2 to form a conductive loop.
The power amplifier 2 is a voltage-current converter, which converts the voltage signal of the control board 1 into a pulse current signal, and the driving current can be 1-10A.
Both glass panel 4 and glass panel two 6 were 0.5mm thick.
The distance between the outer side surface of the exterior PMMA housing 9 of the driven permanent magnet and the inner side surface of the convex groove of the actuator 7 is 500 μm.
The designed distance between the upper surface of the lower part of the exterior PMMA shell 9 of the driven permanent magnet and the lower surface of the convex groove of the actuator 7 is 800 μm.
The logic control programs of driving methods for the integrated miniature electromagnetic actuator are all stored in the control board card 1.
As shown in FIG. 3, the driving steps of conveniently integrated micro electromagnetic actuator according to the present invention are that in the step, the electromagnetic coil of the coil circuit board 3 at the bottom of the actuator 7 is applied with current in the corresponding direction and kept, so that the driven permanent magnet 10 and the PMMA housing 9 outside the driven permanent magnet are subjected to magnetic levitation force and become in a magnetic levitation state, as shown in (1) of FIG. 3, the driven permanent magnet 10 and the PMMA housing 9 outside the driven permanent magnet are in contact with the bottom frame of the actuator 7, so that the driven permanent magnet 10 is kept statically in the z direction, as shown in (1) of FIG. 3, the driven permanent magnet 10 is also in four stable states, so that it is also kept statically in the x and y directions, in the second step, as shown in (2) of FIG. 3, pulse current is sent to the corresponding permanent magnet wire on the linear circuit board 5, the generated driving force drives the driven permanent magnet 10 and the driven permanent magnet housing 9 to move from stable positions to stable positions, as shown in (3), so that the actuator is moved back to the linear coil circuit board 3, so that the linear permanent magnet 10 is also driven by the linear permanent magnet 10, so that the linear permanent magnet 10 is moved back to the linear circuit board 6, so that the linear actuator is also driven by the linear motor is driven by the three-degree-direction, so that the linear motor is also driven permanent magnet linear motor is driven by the linear motor and the linear motor can be moved back to the linear motor, and the linear motor as shown in the linear motor, and the linear motor can be moved back to the linear motor.
By adopting the driving mode, the displacement output of 500 μm in the x and y directions can be obtained by driving the driven permanent magnet 10, and the displacement output of 800 μm can be obtained by driving in the z direction.

Claims (8)

  1. The miniature electromagnetic actuator convenient to integrate is characterized by comprising a control board card (1), wherein the control board card (1) is connected with a power amplifier (2) through a lead (12), the power amplifier (2) is connected with a coil circuit board (3) and a linear circuit board (5) through the lead (12), a glass plate (4) is fixedly connected to the upper surface of the coil circuit board (3), the linear circuit board (5) is fixedly connected to the upper surface of the glass plate (4), a glass plate II (6) is fixedly connected to the upper end of the linear circuit board (5), an actuator (7) is fixedly connected to the upper end of the glass plate II (6), the actuator (7) comprises a supporting frame, a fixed permanent magnet (8) fixedly embedded at four corners of the supporting frame, a driven permanent magnet external PMMA shell (9) movably embedded in a groove of the supporting frame, a driven permanent magnet (10) with the magnetization direction opposite to that of the fixed permanent magnet (8) is movably arranged in the driven permanent magnet external PMMA shell (9), the control board card (1) is a voltage-current converter or a controllable silicon power amplifier (2.
  2. 2. kinds of miniature electromagnetic actuator convenient for integration according to claim 1, wherein the coil circuit board (3) is a printed electromagnetic coil circuit board, the center position of copper coil on the coil circuit board (3) is set corresponding to the position of the driven permanent magnet (10).
  3. 3. kinds of miniature electromagnetic actuator convenient for integration according to claim 1, wherein the linear circuit board (5) is a double-sided printed linear circuit board, the copper wires on the linear circuit board (5) are orthogonally arranged, and the center position of the orthogonal copper wires is arranged corresponding to the position of the driven permanent magnet (10).
  4. 4. The conveniently integrated micro electro-magnetic actuator of claim 1, wherein the glass plate (4) and the glass plate two (6) are each 0.5mm thick.
  5. 5. type miniature electromagnetic actuator for facilitating integration according to claim 1, wherein the driven permanent magnet (10) and the fixed permanent magnet (8) are both cylindrical magnets or cubic magnets.
  6. 6. kinds of miniature electromagnetic actuator convenient for integration according to claim 5, wherein when the driven permanent magnet (10) or the fixed permanent magnet (8) is a cylindrical magnet, the diameter of the cylindrical magnet is 4-20mm, the height is 4-8mm, when the driven permanent magnet (10) or the fixed permanent magnet (8) is a cubic magnet, the side length of the cubic magnet is 4-20 mm.
  7. 7. kinds of miniature electromagnetic actuator convenient for integration according to claim 1, wherein the recess on the support frame of the actuator (7) is a convex recess, and the driven permanent magnet exterior PMMA housing (9) is spaced from the side, upper and lower surfaces of the convex recess.
  8. 8. The method for driving a miniature electromagnetic actuator for facilitating integration according to any of claims 1 to 7 and , wherein the method comprises the following steps:
    step 1, applying current to the corresponding moving direction of an electromagnetic coil in a coil circuit board (3) and keeping the current, lifting a driven permanent magnet (10) and a PMMA shell (9) outside the driven permanent magnet by the magnetic levitation force generated by the current, and enabling the PMMA shell (9) outside the driven permanent magnet to be in contact with the lower surface of a convex groove on a support frame of an actuator (7), so that the static determination of the z direction is ensured, and the ascending motion of the actuator (7) along the z direction is completed;
    step 2, applying current pulses to the lead in the corresponding moving direction of the linear circuit board (5) to enable the driven permanent magnet (10) and the PMMA shell (9) outside the driven permanent magnet to generate displacement and move from stable positions to stable positions, so that the actuator (7) moves along the x or y direction;
    step 3, applying reverse current to the corresponding moving direction of an electromagnetic coil in the coil circuit board (3) or cutting off the original current, so that the driven permanent magnet (10) and the PMMA shell (9) outside the driven permanent magnet fall back to the position above the second glass plate (6) and are supported by the second glass plate;
    and 4, applying reverse current pulses to the lead of the linear circuit board (5) in the corresponding moving direction to enable the driven permanent magnet (10) and the PMMA shell (9) outside the driven permanent magnet to generate displacement and return to the initial position, so that the actuator (7) can reversely move in the x or y direction.
CN201911038558.8A 2019-10-23 2019-10-23 Conveniently-integrated micro electromagnetic actuator and driving method thereof Active CN110739808B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911038558.8A CN110739808B (en) 2019-10-23 2019-10-23 Conveniently-integrated micro electromagnetic actuator and driving method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911038558.8A CN110739808B (en) 2019-10-23 2019-10-23 Conveniently-integrated micro electromagnetic actuator and driving method thereof

Publications (2)

Publication Number Publication Date
CN110739808A true CN110739808A (en) 2020-01-31
CN110739808B CN110739808B (en) 2021-07-20

Family

ID=69270297

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911038558.8A Active CN110739808B (en) 2019-10-23 2019-10-23 Conveniently-integrated micro electromagnetic actuator and driving method thereof

Country Status (1)

Country Link
CN (1) CN110739808B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101138060A (en) * 2005-01-10 2008-03-05 施耐德电器工业公司 Microsystem with integrated reluctant magnetic circuit
EP2466175B1 (en) * 2010-12-17 2013-06-12 Samson Aktiengesellschaft Electro-pneumatic field device
CN204643829U (en) * 2015-04-28 2015-09-16 苏州希美微纳系统有限公司 A kind of MEMS actuator
CN108153345A (en) * 2017-12-25 2018-06-12 北京航空航天大学 Photoelectric nacelle based on reaction force is surely as control device and control method
CN109417589A (en) * 2017-01-12 2019-03-01 核心光电有限公司 Compact type folding formula video camera

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101138060A (en) * 2005-01-10 2008-03-05 施耐德电器工业公司 Microsystem with integrated reluctant magnetic circuit
EP2466175B1 (en) * 2010-12-17 2013-06-12 Samson Aktiengesellschaft Electro-pneumatic field device
CN204643829U (en) * 2015-04-28 2015-09-16 苏州希美微纳系统有限公司 A kind of MEMS actuator
CN109417589A (en) * 2017-01-12 2019-03-01 核心光电有限公司 Compact type folding formula video camera
CN108153345A (en) * 2017-12-25 2018-06-12 北京航空航天大学 Photoelectric nacelle based on reaction force is surely as control device and control method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
胡送桥, 胥光申等: "《面曝光快速成形系统升降工作台运动精度研究》", 《西安工程大学学报》 *

Also Published As

Publication number Publication date
CN110739808B (en) 2021-07-20

Similar Documents

Publication Publication Date Title
US5322258A (en) Micromechanical actuator
JP2528552B2 (en) In-plane precision positioning device
EP3382678B1 (en) An electromagnetic actuator
CN1838330B (en) Electromagnetic force parallel-connection driving type plane 3-DOF micropositioner
CN104009674A (en) Six-degree-of-freedom short stroke magnetic levitation workbench
CN110739808B (en) Conveniently-integrated micro electromagnetic actuator and driving method thereof
CN210629376U (en) Three-freedom-degree miniature electromagnetic digital actuator
CN107907992B (en) The fast steering mirror actuation mechanism and actuation method of direct stress electromagnetic drive
CN102280987A (en) Bistable permanent magnetic actuator
CN103913839A (en) Electromagnetic actuating two-dimensional rapid deflecting mirror system
CN203747691U (en) Precise controllable micro power component
CN1544991A (en) Magnetic suspension precise work bench of integrated circuit photolithography equipment
CN116846182A (en) A z axle braking voice coil motor for wafer detects
CN207354001U (en) A kind of miniature planar motor apparatus based on electromagnetic digital array of actuators
CN110635711A (en) Nano displacement linear stepping motor
CN220664156U (en) Planar double-degree-of-freedom micro-collision driving transportation device based on electromagnetic type
CN103872944A (en) Precise-controlled micropower member and method
CN109150003B (en) Cantilever type piezoelectric linear driver for adjusting friction through magneto-rheological electromagnetic coupling
CN204130459U (en) The electromagnetism bistable state MEMS relay that a kind of height is integrated
TWI796779B (en) Magnetic bearing device and positioning system
CN113484970B (en) Optical lens focusing device based on piezoelectric driving and working method thereof
CN107612232B (en) A kind of the miniature planar motor apparatus and its driving method of electromagnetic digital array of actuators
Lahdo et al. A novel high-precision magnetic levitation system
CN115714560A (en) Three-dimensional micro positioning device based on electromagnetic digital actuator array and driving method
CN215452759U (en) Closed-loop motor

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant