CN110733138B - Protection device for preventing workpiece from falling, workpiece cutting system and cutting method - Google Patents
Protection device for preventing workpiece from falling, workpiece cutting system and cutting method Download PDFInfo
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- CN110733138B CN110733138B CN201911121040.0A CN201911121040A CN110733138B CN 110733138 B CN110733138 B CN 110733138B CN 201911121040 A CN201911121040 A CN 201911121040A CN 110733138 B CN110733138 B CN 110733138B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
Abstract
The invention discloses a protection device for preventing a workpiece from falling, which comprises a falling prevention mechanism, wherein the falling prevention mechanism comprises a deployable and collapsible supporting structure, a rotatable first supporting rod and a movable second supporting rod, one end of the supporting structure is fixedly connected to the first supporting rod and wound on the first supporting rod, the other end of the supporting structure is fixedly connected to the second supporting rod, and the second supporting rod moves along a preset track to guide the supporting structure to unfold or fold. The protection device provided by the invention can control the supporting structure in the anti-falling mechanism to be in an unfolded state in the workpiece feeding process, the supporting structure can be used as a bearing device, even if the workpiece falls, the supporting structure can fall on the supporting structure in the unfolded state, the damage caused by the fact that the workpiece falls onto a workpiece cutting system is avoided, and when the workpiece is about to be cut after feeding is finished, the supporting structure is controlled to be in a folded state, so that the workpiece can be conveniently fed to the direction of the cutting device for cutting.
Description
Technical Field
The invention belongs to the technical field of semiconductor processing, and particularly relates to a protection device for preventing a workpiece from falling, a workpiece cutting system and a cutting method.
Background
Monocrystalline silicon, also known as silicon single crystal, is the most basic material in electronic information materials and belongs to the class of semiconductor materials. Single crystal silicon is mainly used for semiconductor integrated circuits, diodes, epitaxial wafer substrates, and solar cells.
As is well known, a multi-line cutting method is mostly adopted for monocrystalline silicon wafers. A workpiece to be cut is adhered on a feeding mechanism, the workpiece is pushed to feed a group of steel wires which are wound on a main roller of the device in a reciprocating mode to form a parallel wire array, an ingot is axially vertical to the steel wire array and slowly moves towards the steel wire array at a certain speed, and the cutting process of the monocrystalline silicon wafer is finished, and the cutting process is divided into a Free Abrasive cutting mode (Free Abrasive Method) and a Fixed Abrasive cutting mode (Fixed Abrasive Method) according to whether mortar is used or not in the cutting process and different types of the steel wires.
Before the crystal bar enters the wire cutting machine for cutting, resin glue is needed to be used for bonding the crystal bar with the resin strips and the workpiece plate, the crystal bar is loaded to the upper part of a machining table of the wire cutting machine through manual operation, and due to the influence of the performance of the glue and the quality of a bonding surface, the risk that the crystal bar falls cannot be avoided in the process, once the crystal bar falls, the cutting steel wire is broken, the mortar spraying device can be damaged, even irreversible damage can be caused, and the crystal bar can be damaged, so that great damage can be caused.
Disclosure of Invention
In order to solve the above problems in the prior art, the present invention provides a protection device, a workpiece cutting system and a cutting method for preventing a workpiece from falling. The technical problem to be solved by the invention is realized by the following technical scheme:
a protection device for preventing a workpiece from falling is applied to a workpiece cutting system and comprises:
the anti-dropping mechanism is arranged above a cutting device in the workpiece cutting system and comprises a foldable supporting structure, a rotatable first supporting rod and a movable second supporting rod, one end of the supporting structure is fixedly connected to the first supporting rod and wound on the first supporting rod, the other end of the supporting structure is fixedly connected to the second supporting rod, and the second supporting rod moves along a preset track to guide the supporting structure to be unfolded or folded.
In an embodiment of the present invention, the anti-falling mechanism further includes sliding grooves located at two sides of the first supporting rod and the second supporting rod, two ends of the second supporting rod are respectively disposed in the corresponding sliding grooves, and the second supporting rod slides along the sliding grooves.
In one embodiment of the invention, the chute comprises a horizontal linear chute or an inclined linear chute.
In one embodiment of the present invention, the first support rod and the second support rod have a diameter of 20mm to 40 mm.
In one embodiment of the invention, the support structure comprises a wire mesh of resin wires and a wire mesh of rubber wires.
In one embodiment of the invention, the wire diameter of the wire mesh is above 2 mm.
In an embodiment of the present invention, the protection device further includes a driving mechanism, connected to the first support rod and the second support rod, for driving the first support rod to rotate and the second support rod to slide along the sliding groove according to a feeding signal.
In one embodiment of the invention, the drive mechanism comprises a servo motor.
An embodiment of the present invention also provides a workpiece cutting system, including:
a cutting device for cutting a workpiece;
the workpiece moving device is used for bearing the workpiece and controlling the workpiece to feed towards the cutting device; and
a protective device for preventing a workpiece from falling as in any one of the above embodiments.
An embodiment of the present invention further provides a cutting method, which is applied to the workpiece cutting system described in the above embodiment, and includes:
when the workpiece is in the feeding process, the anti-falling mechanism of the protection device is in an unfolded state;
(ii) bringing said support structure into a collapsed condition when said workpiece is to be cut;
and controlling the workpiece to feed towards the cutting device to cut the workpiece.
The invention has the beneficial effects that:
according to the protection device provided by the invention, the supporting structure in the anti-falling mechanism can be controlled to be in the unfolding state in the workpiece feeding process, so that the supporting structure can be used as a bearing device, even if the workpiece falls, the workpiece can fall on the supporting structure in the unfolding state, the damage caused by the fact that the workpiece falls on a workpiece cutting system is avoided, and when the workpiece needs to be cut after feeding is finished, the supporting structure is controlled to be in the folding state, so that the workpiece can be conveniently fed to the direction of the cutting device for cutting.
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Drawings
FIG. 1 is a schematic diagram of a workpiece cutting system provided by an embodiment of the present invention;
FIG. 2 is a schematic illustration of a support structure provided by an embodiment of the present invention in an expanded state;
FIG. 3 is a schematic view of a support structure according to an embodiment of the present invention in a collapsed state;
FIG. 4 is a schematic view of another workpiece cutting system provided by an embodiment of the present invention;
FIG. 5 is a schematic view of yet another workpiece cutting system provided in accordance with an embodiment of the present invention;
fig. 6 is a schematic diagram of another workpiece cutting system according to an embodiment of the invention.
Description of reference numerals:
an anti-drop mechanism-10; a cutting device-20; -30 a workpiece; a workpiece moving device-40; a wire feeding/taking-up structure-50; a support structure-101; a first support bar-102; a second support bar-103; a chute-104; cutting line-201; a line roller-202.
Detailed Description
The present invention will be described in further detail with reference to specific examples, but the embodiments of the present invention are not limited thereto.
Example one
Referring to fig. 1, fig. 1 is a schematic structural diagram of a protection device for preventing a workpiece from falling according to an embodiment of the present invention. The embodiment provides a protection device for preventing a workpiece from falling, which is applied to a workpiece cutting system for performing linear cutting on the workpiece, and the protection device provided by the embodiment comprises a falling prevention mechanism 10.
Specifically, the anti-drop mechanism 10 is disposed above the cutting device 20 of the workpiece cutting system, and the anti-drop mechanism 10 includes a deployable and collapsible supporting structure 101, a rotatable first supporting rod 102 and a movable second supporting rod 103, one end of the supporting structure 101 is fixedly connected to the first supporting rod 102 and wound on the first supporting rod 102, the other end of the supporting structure 101 is fixedly connected to the second supporting rod 103, the second supporting rod 103 moves along a predetermined trajectory to guide the supporting structure 101 to deploy or collapse, and the anti-drop mechanism 10 is configured to place the supporting structure 101 in a deployed state when the workpiece 30 is loaded, and place the supporting structure 101 in a collapsed state when the workpiece 30 is to be cut.
That is, the anti-dropping mechanism 10 may be disposed at a position above the cutting device 20 in the workpiece cutting system, so as to prevent the workpiece to be processed from directly dropping onto the cutting device 20, and in actual use, during the feeding process of the workpiece 30, the supporting structure 101 may be controlled to change from the folded state to the unfolded state, so that the supporting structure 101 in the unfolded state is located right above the cutting device 20, so that even if the workpiece 30 drops during the feeding process, the dropped workpiece 30 may directly drop onto the supporting structure 101, thereby avoiding damage to the cutting device 20 or other devices due to the dropping of the workpiece 30, and when the workpiece 30 is fed and the workpiece 30 is to be cut right above the cutting line 201 in the cutting device 20, the supporting structure 101 may be controlled to change from the unfolded state to the folded state, and the position of the supporting structure 101 after being folded should be avoided to hinder the cutting of the workpiece 30 into the cutting device 20 The position of the feeding direction of the wire 201, when the supporting structure 101 is in the folded state, can control the workpiece 30 to be fed towards the cutting wire 201 in the cutting device 20 to cut the workpiece 30.
That is, referring to fig. 2 and 3, the supporting structure 101 capable of being unfolded along the extending direction of the predetermined track is wound on the first supporting rod 102, the second supporting rod 103 can move along the predetermined track, so when the supporting structure 101 needs to be unfolded, the second supporting rod 103 moves along the predetermined track towards the direction that the supporting structure 101 is unfolded, and simultaneously the first supporting rod 102 automatically rotates, so that the second supporting rod 103 pulls the supporting structure 101 wound on the first supporting rod 102 to be unfolded, when the supporting structure 101 needs to be folded, the supporting structure 101 is driven to be folded along the predetermined track by rotating the first supporting rod 102, so that the supporting structure 101 is wound on the first supporting rod 102 again, wherein the predetermined track is the moving track of the second supporting rod 103, and the supporting structure 101 unfolded along the predetermined track can fall on the unfolded supporting structure 101 when the workpiece 30 falls, the supporting structure 101, which is drawn in by a predetermined trajectory, should be disposed so as not to interfere with the feeding direction of the workpiece 30 to the cutting device 20, so that no interference is caused during the ingot cutting process.
In a specific embodiment, the anti-falling mechanism 10 may further include sliding grooves 104 disposed on both sides of the first supporting bar 102 and the second supporting bar 103, both ends of the second supporting bar 103 are respectively disposed in the corresponding sliding grooves 104, and the second supporting bar 103 slides along the sliding grooves 104.
That is, two parallel sliding grooves 104 are distributed on both sides of the first supporting rod 102 and the second supporting rod 103, and both ends of the second supporting rod 103 are respectively installed in the grooves of the sliding grooves 104 on both sides, so that the second supporting rod 103 can slide along the sliding grooves 104, when the second supporting rod 103 slides along the sliding grooves 104 toward the first supporting rod 102, the supporting structure 101 is unfolded, and when the second supporting rod 103 slides along the sliding grooves 104 toward the first supporting rod 102, the supporting structure 101 is folded.
Further, the sliding groove 104 includes a horizontal straight sliding groove or an inclined straight sliding groove, wherein the horizontal straight sliding groove is horizontally disposed, that is, the sliding groove, and is located on the same horizontal plane with the first supporting rod 102 and the second supporting rod 103, as shown in fig. 4; referring to fig. 5, the inclined straight sliding groove is a sliding groove whose direction forms a certain angle with the horizontal plane, one end of the inclined straight sliding groove is located on one side of the first supporting rod 102, which can be located on the upper side of the first supporting rod 102, or located on the lower side of the first supporting rod 102, and the other end of the inclined straight sliding groove is located on one side away from the first supporting rod 102, which is located on the same horizontal plane as the first supporting rod 102, so that the inclined straight sliding groove forms a certain angle with the horizontal plane.
Preferably, the first support bar 102 and the second support bar 103 may be made of common SUS and have a diameter of 20mm to 40 mm.
Preferably, the support structure includes a wire mesh of resin wires or rubber wires, the wire mesh may be parallel resin wires or rubber wires, or a mesh structure formed by interweaving the resin wires or the rubber wires, the diameter of the resin wires or the rubber wires may be, for example, 2mm or more, and of course, the support structure may be made of other materials having certain toughness, which is not particularly limited in the embodiment of the present invention.
In a specific embodiment, the protection device for preventing a workpiece from falling of the embodiment of the present invention may further include a driving mechanism, which is connected to the first supporting rod and the second supporting rod, and is configured to drive the first supporting rod to rotate and drive the second supporting rod to slide along the sliding groove according to the feeding signal.
That is, the driving mechanism can drive the first supporting rod and the second supporting rod according to the feeding signal of the workpiece cutting system, when the workpiece cutting system starts the feeding state, the second supporting rod 103 is required to pull the supporting structure 101 wound on the first supporting rod 102 to unfold, the driving mechanism receives the feeding signal of the workpiece cutting system, the second supporting rod 103 can be controlled to slide along the chute, and the first supporting rod 102 synchronously and automatically rotates, so that the supporting structure 101 unfolds to form a protection wire net, the workpiece is protected from falling onto the cutting device 20, after the feeding process is finished and when the workpiece 30 is to be cut, the first supporting rod 102 is required to be rotated to rewind the supporting structure 101 onto the first supporting rod 102, the driving mechanism receives the feeding end signal of the workpiece cutting system, and the driving mechanism can control the first supporting rod 102 to rotate, meanwhile, the second support rod 103 automatically slides along the sliding groove to the direction of the first support rod 102 synchronously, so that the second support rod 103 returns to the folded position, and interference is avoided in the workpiece cutting process.
Further, the driving mechanism may be a servo motor, and the driving mechanism may also be another device capable of driving the first support rod 102 to rotate and driving the second support rod 103 to slide, which is not particularly limited in this embodiment of the present invention.
According to the embodiment of the invention, the extensible and foldable anti-falling mechanism is arranged in the workpiece cutting system, so that when the workpiece cutting system is started to be in a feeding state, the anti-falling mechanism is automatically driven by the driving mechanism to be in an extensible state to protect a workpiece to be cut from falling, and after the feeding state is finished, the anti-falling mechanism is automatically driven by the driving mechanism to be in a foldable state, so that interference is not caused in the workpiece cutting process.
In addition, it should be noted that the protection device for preventing the workpiece from falling provided by the embodiment of the present invention is not only suitable for the free abrasive cutting mode, but also suitable for the fixed abrasive cutting mode, and is also suitable for other environments for preventing the equipment from being easily damaged due to the falling of the workpiece.
Example two
Referring to fig. 1 again, the embodiment of the present invention further provides a workpiece cutting system based on the above embodiment, the workpiece cutting system includes:
a cutting device 20 for cutting the workpiece 30;
the workpiece moving device 40 is used for bearing the workpiece and controlling the workpiece to feed towards the cutting device; and
the protection device for preventing a workpiece from falling as described in the first embodiment.
Specifically, the cutting device 20 is used for cutting a workpiece by using a cutting line 201 wound on two line rollers 202, the cutting line 201 controls the wire feeding/taking-up thereof through the wire feeding/taking-up structure 50, the workpiece moving device 40 is used for carrying the workpiece 30, the feeding process is a process of mounting the workpiece on the workpiece moving device 40 and controlling the workpiece to move above the cutting device 20, the workpiece moving device 40 is further used for controlling the workpiece 30 to be fed towards the cutting device 20 so as to cut the workpiece 30, when the signal provided by the workpiece cutting system to the protection device is a feeding signal, the anti-falling mechanism is controlled to be in a spreading state to protect the workpiece to be cut from falling, when the signal provided by the workpiece cutting system to the protection device is a signal that the feeding is finished and the cutting process is about to be carried out, the anti-drop mechanism is controlled to be in a furled state so as not to cause interference in the workpiece cutting process.
The protection device provided by the embodiment of the invention has the similar implementation principle and technical effect as the protection device of the embodiment, and is not described again here.
EXAMPLE III
On the basis of the above embodiment, the embodiment of the present invention further provides a cutting method, including:
step 1, enabling an anti-falling mechanism of a protection device to be in an unfolded state when a workpiece is in a feeding process;
step 2, enabling the anti-falling mechanism to be in a folded state when the workpiece is to be cut;
and 3, controlling the workpiece to feed towards the cutting device to cut the workpiece.
That is to say, when the work piece was in the material loading process, can control anti-falling mechanism and be in the expanded state, the protection was waited to cut the work piece and can not drop, when the work piece material loading was accomplished and is about to carry out the work piece cutting, then control anti-falling mechanism and be in the folded state to do not cause the interference at work piece cutting process.
The cutting method provided by the embodiment of the invention has the similar realization principle and technical effect as the protection device of the embodiment, and is not repeated herein.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by those skilled in the art.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (8)
1. A protection device for preventing a workpiece from falling is applied to a workpiece cutting system and is characterized by comprising:
the anti-falling mechanism is arranged above a cutting device in the workpiece cutting system and comprises a foldable support structure, a rotatable first support rod and a movable second support rod, one end of the support structure is fixedly connected to the first support rod and wound on the first support rod, the other end of the support structure is fixedly connected to the second support rod, and the second support rod moves along a preset track to guide the support structure to be unfolded or folded;
the anti-falling mechanism further comprises sliding grooves which are formed in two sides of the first supporting rod and the second supporting rod, two ends of the second supporting rod are respectively arranged in the corresponding sliding grooves, and the second supporting rod slides along the sliding grooves;
the protection device further comprises a driving mechanism which is connected with the first supporting rod and the second supporting rod and used for driving the first supporting rod to rotate and drive according to the feeding signal, and the second supporting rod slides along the sliding groove.
2. A workpiece drop prevention protection device as claimed in claim 1 wherein the chute comprises a horizontal straight chute or an inclined straight chute.
3. A workpiece drop protection device as claimed in claim 1, wherein the first and second support bars have a diameter of 20mm to 40 mm.
4. A workpiece drop prevention protection device according to claim 1, characterised in that the support structure comprises a wire mesh of resin material or a wire mesh of rubber material.
5. A protector against falling of work pieces according to claim 4 wherein the wire mesh has a wire diameter of 2mm or more.
6. A workpiece drop prevention protection device as claimed in claim 1, wherein the drive mechanism comprises a servo motor.
7. A workpiece cutting system, comprising:
a cutting device for cutting a workpiece;
the workpiece moving device is used for bearing the workpiece and controlling the workpiece to feed towards the cutting device; and
a workpiece drop prevention protection as claimed in any one of claims 1 to 6.
8. A cutting method applied to the workpiece cutting system according to claim 7, comprising:
when the workpiece is in the feeding process, the anti-falling mechanism of the protection device is in an unfolded state;
when the workpiece is to be cut, the anti-falling mechanism is in a folded state;
and controlling the workpiece to feed towards the cutting device to cut the workpiece.
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| KR101195210B1 (en) * | 2010-05-24 | 2012-10-29 | 한남수 | Trees Growing Slope Area Greening Structure and Greening Method |
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| CN206144440U (en) * | 2016-10-15 | 2017-05-03 | 杭州众冉门窗有限公司 | Winding up roller formula invisible screens |
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