CN106425744A - Automatic monocrystalline silicon wafer chamfering device - Google Patents
Automatic monocrystalline silicon wafer chamfering device Download PDFInfo
- Publication number
- CN106425744A CN106425744A CN201610892031.1A CN201610892031A CN106425744A CN 106425744 A CN106425744 A CN 106425744A CN 201610892031 A CN201610892031 A CN 201610892031A CN 106425744 A CN106425744 A CN 106425744A
- Authority
- CN
- China
- Prior art keywords
- workbench
- monocrystalline silicon
- automatization
- silicon piece
- facing attachment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0023—Other grinding machines or devices grinding machines with a plurality of working posts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention relates to an automatic monocrystalline silicon wafer chamfering device comprising a workbench, a rotating base, a rotation driving motor and an abrasive wheel chamfering assembly, the workbench is provided with a plurality of stations; each station is provided with a clamping assembly; the workbench is arranged above the rotating base; the rotation driving motor is connected with the rotating base; each clamping assembly comprises two clamping rods and two springs corresponding to the clamping rods one to one; one end of each spring is connected to the clamping rod corresponding to the spring, the other end of the spring is connected to the workbench at the outer side of the clamping rod corresponding to the spring, and the other end of the spring is provided with a tension sensor connected with the rotation driving motor; and the abrasive wheel chamfering assembly can move back and forth relative to the workbench. By using the device, a plurality of monocrystalline silicon wafers can be arranged by charging pieces at one step due to the arrangement of the rotating base, the workbench and the plurality of stations, so that a plurality of workpieces are processed by charging the pieces at one step, and the step of operating by working staffs is omitted.
Description
Technical field
The present invention relates to single silicon field, more particularly to monocrystal silicon manufacturing technology field, specifically refer to a kind of monocrystalline
Wafer chamfering device.
Background technology
Monocrystalline silicon piece can be widely used in the skills such as quasiconductor, solaode as a kind of good conductive material
Art field.The processing technique later stage of monocrystalline silicon piece generally require carry out chamfering, grinding, burn into polishing and cleaning etc. step, wherein
Chamfering refers to will be in the arc-shaped for the finishing of sharp keen for the chip for cutting into side, prevents Waffer edge rupture and lattice defect from producing, is therefore
A very important processing step.
But monocrystalline silicon piece beveler of the prior art, operate more complicated, once can only typically process one
Workpiece, needs continually clamping workpiece, and working (machining) efficiency is very low；In addition, the sight of a processing effect cannot be realized in the course of processing
Survey, the effect for processing front cutter positioning can not be satisfactory, causes the chamfered of monocrystalline silicon piece to tend not to reach expectation
Precision.
Content of the invention
The purpose of the present invention is the shortcoming for overcoming above-mentioned prior art, there is provided one kind can be realized according to pull sensing
Device detect have monocrystal silicon at station placement, so as to drive automatically rotating base rotation, can be with the multiple products of time processing, tool
There is automatization's monocrystalline silicon piece facing attachment of broader applications scope.
To achieve these goals, the present invention has following composition：Automatization's monocrystalline silicon piece facing attachment, which is mainly special
Point is that described device includes workbench, rotating base, rotary drive motor and grinding wheel chamfering component, on described workbench
Several stations are provided with, each station is provided with a clamp assembly, described workbench is arranged above described rotating base,
Described rotary drive motor is connected with described rotating base, the clamp assembly described in each include two clamping bars and with
One-to-one two springs of clamping bar, described spring one end is connected to corresponding clamping bar, described spring another
End is connected on the workbench in the outside of corresponding clamping bar, and the other end of described spring is provided with pulling force sensor,
Described pulling force sensor is connected with described rotary drive motor, described grinding wheel chamfering component with respect to workbench can before
After move.
It is preferred that the medial surface of described clamping bar is provided with rubber strip.
It is preferred that being provided with four stations on described workbench.
It is preferred that described grinding wheel chamfering component includes emery wheel, emery wheel motor, described emery wheel is by described emery wheel
Motor drives rotation.
More preferably, described grinding wheel chamfering component also includes that support, described emery wheel and emery wheel motor may be contained within
On described support, and described support can be moved forward and backward with respect to described workbench.
Further, described workbench and rotating base are arranged in a frame, and described grinding wheel chamfering component is also
The slide rail in described frame is arranged at including one, described support is arranged on described slide rail by roller, and described props up
Frame is driven by a movement motor and moves on described slide rail.
It is preferred that the bottom of the clamp assembly described in each is provided with a gravity sensor, described gravity sensor is even
It is connected to described rotary drive motor.
More preferably, described workbench and rotating base are arranged in a frame, are provided with alarm in described frame,
Described alarm is while be connected with described gravity sensor and pulling force sensor.
It is preferred that described workbench and rotating base are arranged in a frame, startup in described frame, is additionally provided with
Button, described start button is connected with described rotary drive motor.
The automatization's monocrystalline silicon piece facing attachment in the invention is employed, is had the advantages that：（1）Revolved by arranging
Turn base, workbench and multiple stations above, one time upper part can arrange multiple monocrystalline silicon pieces, so as to realize a piece installing
Multiple workpiece are processed, reduce the operating procedure of staff；（2）During upper part, by pulling force sensor
Monocrystal silicon upper part is detected whether, after detecting, has been driven automatically the motor of rotating base to be rotated, will not go up
The station rotary of part is to staff, more convenient to operate；（3）Increase gravity sensor and the dual inspection of pulling force sensor
Survey, when two sensor detection results of same station are inconsistent, such as pulling force sensor has detected pulling force, and gravity is passed
When sensor is not detected by gravity, warning, alert device fault will be sent；（4）Overall structure is simple, and application is convenient, with more
It is widely applied scope.
Description of the drawings
Fig. 1 is the structural representation of the workbench of automatization's monocrystalline silicon piece facing attachment of the present invention.
Reference：1 clamp assembly, 2 workbench, 3 rotary drive motors.
Specific embodiment
In order to more clearly describe the technology contents of the present invention, carry out with reference to specific embodiment further
Description.
Automatization's monocrystalline silicon piece facing attachment, which is mainly characterized by, described device include workbench 2, rotating base,
Rotary drive motor 3 and grinding wheel chamfering component, are provided with several stations on described workbench 2, and each station is provided with a folder
Tight component 1, described workbench 2 is arranged above described rotating base, described rotary drive motor 3 and described rotation
Base is connected, and the clamp assembly 1 described in each includes two clamping bars and two spring one-to-one with clamping bar, described
Spring one end be connected to corresponding clamping bar, the other end of described spring is connected to the outside of corresponding clamping bar
On workbench 2, and the other end of described spring is provided with pulling force sensor, and described pulling force sensor is driven with described rotation
Galvanic electricity machine 3 is connected, and described grinding wheel chamfering component can be moved forward and backward with respect to workbench 2.
In a kind of preferably embodiment, the medial surface of described clamping bar is provided with rubber strip.
In a kind of preferably embodiment, four stations on described workbench 2, are provided with.Rotary drive motor is each
Rotary setting is fixing 90 °.
In a kind of preferably embodiment, described grinding wheel chamfering component includes emery wheel, emery wheel motor, described
Emery wheel drives rotation by described emery wheel motor.
In a kind of more preferably embodiment, described grinding wheel chamfering component also includes support, described emery wheel and emery wheel
Motor is may be contained within described support, and described support can be moved forward and backward with respect to described workbench 2.
In a kind of further embodiment, described workbench 2 and rotating base are arranged in a frame, described
Grinding wheel chamfering component also include a slide rail being arranged in described frame, described support is arranged at described by roller
On slide rail, described support is driven by a movement motor and moves on described slide rail.
In a kind of preferably embodiment, the bottom of the clamp assembly 1 described in each is provided with a gravity sensor, institute
The gravity sensor that states is connected to described motor 3.
In a kind of more preferably embodiment, described workbench 2 and rotating base are arranged in a frame, described machine
Alarm is provided with frame, and described alarm is while be connected with described gravity sensor and pulling force sensor.
In a kind of preferably embodiment, described workbench 2 and rotating base are arranged in a frame, described machine
Start button is additionally provided with frame, and described start button is connected with described rotary drive motor 3.Accordingly it is also possible to by
The direct manual operation of staff, the manually rotation of control motor, prevent in sensor experiences failure that equipment cannot be just
Often use.
In the technical scheme of automatization's monocrystalline silicon piece facing attachment of the present invention, wherein included each function device and
Modular device all can be corresponding to actual particular hardware circuit structure, and therefore these modules and unit are tied merely with hardware circuit
Structure is it is achieved that need not aid in being automatically obtained corresponding function with specific control software.
The automatization's monocrystalline silicon piece facing attachment in the invention is employed, is had the advantages that：（1）Revolved by arranging
Turn base, workbench and multiple stations above, one time upper part can arrange multiple monocrystalline silicon pieces, so as to realize a piece installing
Multiple workpiece are processed, reduce the operating procedure of staff；（2）During upper part, by pulling force sensor
Monocrystal silicon upper part is detected whether, after detecting, has been driven automatically the motor of rotating base to be rotated, will not go up
The station rotary of part is to staff, more convenient to operate；（3）Increase gravity sensor and the dual inspection of pulling force sensor
Survey, when two sensor detection results of same station are inconsistent, such as pulling force sensor has detected pulling force, and gravity is passed
When sensor is not detected by gravity, warning, alert device fault will be sent；（4）Overall structure is simple, and application is convenient, with more
It is widely applied scope.
In this description, the present invention is described with reference to its specific embodiment.But it is clear that can still make
Various modifications and alterations are without departing from the spirit and scope of the present invention.Therefore, specification and drawings are considered as illustrative
And it is nonrestrictive.
Claims (9)
1. a kind of automatization's monocrystalline silicon piece facing attachment, it is characterised in that described device includes workbench, rotating base, rotation
Turn motor and grinding wheel chamfering component, several stations on described workbench, are provided with, each station is provided with a clamping group
Part, described workbench is arranged above described rotating base, described rotary drive motor and described rotating base phase
Connection, the clamp assembly described in each includes two clamping bars and two spring one-to-one with clamping bar, described spring
One end is connected to corresponding clamping bar, and the other end of described spring is connected to the workbench in the outside of corresponding clamping bar
On, and the other end of described spring is provided with pulling force sensor, described pulling force sensor and described rotary drive motor
It is connected, described grinding wheel chamfering component can be moved forward and backward with respect to workbench.
2. automatization's monocrystalline silicon piece facing attachment according to claim 1, it is characterised in that the inner side of described clamping bar
Face is provided with rubber strip.
3. automatization's monocrystalline silicon piece facing attachment according to claim 1, it is characterised in that arrange on described workbench
There are four stations.
4. automatization's monocrystalline silicon piece facing attachment according to claim 1, it is characterised in that described grinding wheel chamfering component
Including emery wheel, emery wheel motor, described emery wheel drives rotation by described emery wheel motor.
5. automatization's monocrystalline silicon piece facing attachment according to claim 4, it is characterised in that described grinding wheel chamfering component
Also include that support, described emery wheel and emery wheel motor are may be contained within described support, and described support is with respect to institute
The workbench that states can be moved forward and backward.
6. automatization's monocrystalline silicon piece facing attachment according to claim 5, it is characterised in that described workbench and rotation
Base is arranged in a frame, and described grinding wheel chamfering component also includes a slide rail being arranged in described frame, described
Support is arranged on described slide rail by roller, and described support is driven by a movement motor and moves on described slide rail
Dynamic.
7. automatization's monocrystalline silicon piece facing attachment according to claim 1, it is characterised in that the clamp assembly described in each
Bottom be provided with a gravity sensor, described gravity sensor is connected to described rotary drive motor.
8. automatization's monocrystalline silicon piece facing attachment according to claim 7, it is characterised in that described workbench and rotation
Base is arranged in a frame, is provided with alarm in described frame, described alarm and meanwhile with described gravity sensitive
Device is connected with pulling force sensor.
9. automatization's monocrystalline silicon piece facing attachment according to claim 1, it is characterised in that described workbench and rotation
Base is arranged in a frame, is additionally provided with start button in described frame, and described start button is driven with described rotation
Galvanic electricity machine is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610892031.1A CN106425744A (en) | 2016-10-13 | 2016-10-13 | Automatic monocrystalline silicon wafer chamfering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610892031.1A CN106425744A (en) | 2016-10-13 | 2016-10-13 | Automatic monocrystalline silicon wafer chamfering device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106425744A true CN106425744A (en) | 2017-02-22 |
Family
ID=58174307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610892031.1A Pending CN106425744A (en) | 2016-10-13 | 2016-10-13 | Automatic monocrystalline silicon wafer chamfering device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106425744A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109333222A (en) * | 2018-11-01 | 2019-02-15 | 浙江中晶新材料研究有限公司 | A kind of full-automatic silicon wafer chamfer machining equipment and its processing technology |
| CN113500500A (en) * | 2021-07-21 | 2021-10-15 | 嘉兴日雅光电有限公司 | Polishing device capable of improving polishing rate of plastic product |
| CN114347279A (en) * | 2021-12-31 | 2022-04-15 | 苏州北汀羽电子有限公司 | Wafer slotting method and yellow glue film edge cutting equipment |
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|---|---|---|---|---|
| US6629875B2 (en) * | 2000-01-28 | 2003-10-07 | Accretech Usa, Inc. | Machine for grinding-polishing of a water edge |
| CN202878095U (en) * | 2012-09-26 | 2013-04-17 | 天津市职业大学 | Multi-station efficient optical fiber grinding machine |
| CN204430938U (en) * | 2015-01-27 | 2015-07-01 | 商丘金振源电子科技有限公司 | A kind of Fa Nake numerical control machine four axle tool |
| CN105215839A (en) * | 2014-06-27 | 2016-01-06 | 株式会社迪思科 | Processing unit (plant) |
| CN205325283U (en) * | 2016-01-21 | 2016-06-22 | 上海金盾特种车辆装备有限公司 | Linkage clamping frock |
| CN105772832A (en) * | 2016-04-20 | 2016-07-20 | 南通江华热动力机械有限公司 | Novel aluminum pipe automatic grooving machine |
-
2016
- 2016-10-13 CN CN201610892031.1A patent/CN106425744A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6629875B2 (en) * | 2000-01-28 | 2003-10-07 | Accretech Usa, Inc. | Machine for grinding-polishing of a water edge |
| CN202878095U (en) * | 2012-09-26 | 2013-04-17 | 天津市职业大学 | Multi-station efficient optical fiber grinding machine |
| CN105215839A (en) * | 2014-06-27 | 2016-01-06 | 株式会社迪思科 | Processing unit (plant) |
| CN204430938U (en) * | 2015-01-27 | 2015-07-01 | 商丘金振源电子科技有限公司 | A kind of Fa Nake numerical control machine four axle tool |
| CN205325283U (en) * | 2016-01-21 | 2016-06-22 | 上海金盾特种车辆装备有限公司 | Linkage clamping frock |
| CN105772832A (en) * | 2016-04-20 | 2016-07-20 | 南通江华热动力机械有限公司 | Novel aluminum pipe automatic grooving machine |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109333222A (en) * | 2018-11-01 | 2019-02-15 | 浙江中晶新材料研究有限公司 | A kind of full-automatic silicon wafer chamfer machining equipment and its processing technology |
| CN113500500A (en) * | 2021-07-21 | 2021-10-15 | 嘉兴日雅光电有限公司 | Polishing device capable of improving polishing rate of plastic product |
| CN113500500B (en) * | 2021-07-21 | 2022-04-22 | 嘉兴日雅光电有限公司 | Polishing device capable of improving polishing rate of plastic product |
| CN114347279A (en) * | 2021-12-31 | 2022-04-15 | 苏州北汀羽电子有限公司 | Wafer slotting method and yellow glue film edge cutting equipment |
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Application publication date: 20170222 |
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