CN110707024A - Core particle sorting method - Google Patents
Core particle sorting method Download PDFInfo
- Publication number
- CN110707024A CN110707024A CN201910893253.9A CN201910893253A CN110707024A CN 110707024 A CN110707024 A CN 110707024A CN 201910893253 A CN201910893253 A CN 201910893253A CN 110707024 A CN110707024 A CN 110707024A
- Authority
- CN
- China
- Prior art keywords
- blue film
- core particles
- film
- suction nozzle
- core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007771 core particle Substances 0.000 title claims abstract description 73
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000001179 sorption measurement Methods 0.000 claims description 8
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
- H01L2221/68322—Auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The invention discloses a core particle sorting method. The core particle sorting method is used for transferring the core particles adsorbed on the suction nozzle to a blue film, and the blue film abuts against the core particles adsorbed on the suction nozzle; after the core particles are adhered to the blue film, the suction nozzle is separated from the core particles; reduce the local deformation of the blue film and enhance the stability and position accuracy of the blue film for adsorbing the core particles.
Description
Technical Field
The invention relates to a core particle sorting method.
Background
Core particle sorting means that a plurality of core particles are arranged on different blue films according to grades, however, how to realize core particle transportation and adhere to the blue films and ensure the stability of adhesion is related to the efficiency of core particle sorting; the core particles are generally conveyed by a suction nozzle, and the key point of sorting is to ensure that the core particles adsorbed on the suction nozzle are transferred and stably adhered to the blue film; the existing scheme that the blue film is abutted to the core particles at the core particle adhesion positions by utilizing the ejector rods so that the core particles and the blue film are adsorbed, but the ejector rods cause the local stress of the blue film to be overlarge, so that the blue film is easy to deform irrecoverably, and the adhesion of other core particles around the stress deformation is influenced.
Disclosure of Invention
The invention provides a core particle sorting method, aiming at solving the technical problem that core particles adsorbed on a suction nozzle are adhered to a blue film.
The technical scheme of the invention is as follows: a core particle sorting method is used for transferring core particles adsorbed on a suction nozzle to a blue film, and is characterized in that: the blue film abuts against the core particles adsorbed on the suction nozzle; after the core particles are adhered to the blue film, the suction nozzle is separated from the core particles.
Further, the blue film is connected to a first driving part, and the first driving part drives the blue film to abut against/be away from the core particles.
Further, the first driving part is connected to the blue film fixing part and drives the blue film fixing part to move; the blue film fixing part is provided with a top film part which is stopped against the area of the blue film adhered with the core particles.
Furthermore, the top film part is provided with a plurality of vacuum adsorption holes, and the vacuum adsorption holes adsorb the blue film to ensure that the blue film adhesion core particle area is attached to the top film part.
Further, the top film part is provided with a vacuum ring groove, and the vacuum ring groove adsorbs the blue film to enable the blue film to adhere to the core particle region and be attached to the top film part.
Furthermore, the suction nozzle is elastically connected to the mounting portion, the blue film abuts against the core particles and acts on the suction nozzle, and the suction nozzle moves relative to the mounting portion.
The invention has the beneficial effects that: reduce the local deformation of the blue film and enhance the stability and position accuracy of the blue film for adsorbing the core particles.
Drawings
None.
Detailed Description
In order to facilitate the understanding of the technical solutions of the present invention by those skilled in the art, the technical solutions of the present invention will be described in further detail with reference to specific examples.
A core particle sorting method is used for transferring core particles adsorbed on a suction nozzle to a blue film, and the blue film abuts against the core particles adsorbed on the suction nozzle; after the core particles are adhered to the blue film, the suction nozzle is separated from the core particles; the scheme that the whole blue film is abutted against the core particles is different from the scheme that the mandrel is adopted to attach the blue film to the core particles and abut against the core particles in the background technology; the technical scheme of the invention can reduce local deformation of the blue film on the basis of fully adhering the blue film to the core particles, and reduce core particle adhesion position deviation and adhesion instability caused by blue film deformation.
The blue film is connected with a first driving part, and the first driving part drives the blue film to abut against/be away from the core particles; that is, the blue film generates relative movement with respect to the core particle adhered to the suction nozzle, the relative movement being driven by the first driving part.
The first driving part is connected with the blue film fixing part and drives the blue film fixing part to move; the blue film fixing part is provided with a top film part which is stopped against the area of the blue film adhered with the core particles; the deformation of the blue film is reduced by adopting the top film part, so that the position deviation of the blue film caused by adsorbing the core particles is reduced, and the core particles adsorbed on the blue film after sorting are accurate and reliable in position.
The top film part is provided with a plurality of vacuum adsorption holes, and the vacuum adsorption holes adsorb the blue film to ensure that the blue film core particle adhering region is attached to the top film part; and the blue film is attached to the top film part by adopting the vacuum adsorption holes, so that residual gas between the blue film and the top film part is prevented from influencing the adsorption of the core particles.
The top film part is provided with a vacuum ring groove, and the vacuum ring groove adsorbs the blue film to ensure that the blue film core particle adhering region is attached to the top film part; and a vacuum ring groove is adopted to ensure that the area for adhering the core particles on the blue film is tightly attached to the top film part.
The suction nozzle is elastically connected to the mounting part, the blue film abuts against the core particles and acts on the suction nozzle, and the suction nozzle moves relative to the mounting part; when the blue film adhered with the sorted core particles has no top film part, the suction nozzle can be prevented from adsorbing the core particles to burst the blue film; for the blue film attached to the top film part, the suction nozzle is prevented from being extruded to damage the core particles due to the fact that the interaction force between the core particles adsorbed by the suction nozzle and the blue film is too large, and even the suction nozzle is extruded to damage the suction nozzle; the safety and reliability of the method for sorting the core particles are enhanced.
The above are preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. It should be recognized that non-inventive variations and modifications to the disclosed embodiments of the invention that may occur to those skilled in the art upon a reading of the foregoing teachings are also within the scope of the invention as claimed and disclosed.
Claims (6)
1. A core particle sorting method is used for transferring core particles adsorbed on a suction nozzle to a blue film, and is characterized in that: the blue film abuts against the core particles adsorbed on the suction nozzle; after the core particles are adhered to the blue film, the suction nozzle is separated from the core particles.
2. The core particle sorting method according to claim 1, characterized in that: the blue film is connected to a first driving part, and the first driving part drives the blue film to abut against/be away from the core particles.
3. The core particle sorting method according to claim 2, characterized in that: the first driving part is connected with the blue film fixing part and drives the blue film fixing part to move; the blue film fixing part is provided with a top film part which is stopped against the area of the blue film adhered with the core particles.
4. The core particle sorting method according to claim 3, characterized in that: the top film part is provided with a plurality of vacuum adsorption holes, and the vacuum adsorption holes adsorb the blue film to ensure that the blue film adhesion core particle region is attached to the top film part.
5. The core particle sorting method according to claim 3, characterized in that: the top film part is provided with a vacuum ring groove, and the vacuum ring groove adsorbs the blue film to enable the blue film to adhere to the core particle region and be attached to the top film part.
6. The core particle sorting method according to claim 1, characterized in that: the suction nozzle is elastically connected to the mounting portion, the blue film abuts against the core particles and acts on the suction nozzle, and the suction nozzle moves relative to the mounting portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910893253.9A CN110707024A (en) | 2019-09-20 | 2019-09-20 | Core particle sorting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910893253.9A CN110707024A (en) | 2019-09-20 | 2019-09-20 | Core particle sorting method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110707024A true CN110707024A (en) | 2020-01-17 |
Family
ID=69195509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910893253.9A Pending CN110707024A (en) | 2019-09-20 | 2019-09-20 | Core particle sorting method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110707024A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1325539A (en) * | 1998-10-27 | 2001-12-05 | 松下电器产业株式会社 | Component affixing method and apparatus |
| CN202638767U (en) * | 2012-05-17 | 2013-01-02 | 梭特科技股份有限公司 | Crystal particle sorting device |
| CN105324022A (en) * | 2015-09-21 | 2016-02-10 | 厦门三安光电有限公司 | Core particle grabbing apparatus and grabbing method therefor |
| CN205845911U (en) * | 2016-07-18 | 2016-12-28 | 厦门市三安光电科技有限公司 | A kind of thimble seat |
| CN207086364U (en) * | 2017-07-19 | 2018-03-13 | 深圳市赛弥康电子科技有限公司 | A kind of die selector |
| CN207430720U (en) * | 2017-09-22 | 2018-06-01 | 安徽三安光电有限公司 | A kind of sorting machine |
| CN108122814A (en) * | 2017-10-27 | 2018-06-05 | 江西乾照光电有限公司 | The sorting transfer method of LED core particle in a kind of LED chip |
-
2019
- 2019-09-20 CN CN201910893253.9A patent/CN110707024A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1325539A (en) * | 1998-10-27 | 2001-12-05 | 松下电器产业株式会社 | Component affixing method and apparatus |
| CN202638767U (en) * | 2012-05-17 | 2013-01-02 | 梭特科技股份有限公司 | Crystal particle sorting device |
| CN105324022A (en) * | 2015-09-21 | 2016-02-10 | 厦门三安光电有限公司 | Core particle grabbing apparatus and grabbing method therefor |
| CN205845911U (en) * | 2016-07-18 | 2016-12-28 | 厦门市三安光电科技有限公司 | A kind of thimble seat |
| CN207086364U (en) * | 2017-07-19 | 2018-03-13 | 深圳市赛弥康电子科技有限公司 | A kind of die selector |
| CN207430720U (en) * | 2017-09-22 | 2018-06-01 | 安徽三安光电有限公司 | A kind of sorting machine |
| CN108122814A (en) * | 2017-10-27 | 2018-06-05 | 江西乾照光电有限公司 | The sorting transfer method of LED core particle in a kind of LED chip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| CB02 | Change of applicant information |
Address after: 518172 Longgang District, Shenzhen City, Guangdong Province Applicant after: Silicon electric semiconductor equipment (Shenzhen) Co.,Ltd. Address before: 518172 Longgang District, Shenzhen City, Guangdong Province Applicant before: SHENZHEN SIDEA SEMICONDUCTOR EQUIPMENT Co.,Ltd. |
|
| CB02 | Change of applicant information | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20200117 |
|
| WD01 | Invention patent application deemed withdrawn after publication |