CN202638767U - Crystal particle sorting device - Google Patents
Crystal particle sorting device Download PDFInfo
- Publication number
- CN202638767U CN202638767U CN 201220224546 CN201220224546U CN202638767U CN 202638767 U CN202638767 U CN 202638767U CN 201220224546 CN201220224546 CN 201220224546 CN 201220224546 U CN201220224546 U CN 201220224546U CN 202638767 U CN202638767 U CN 202638767U
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- Prior art keywords
- crystal grain
- minute
- film
- membrane module
- picked
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Abstract
A crystal particle sorting device comprises a crystal particle jacking positioning mechanism, a crystal particle share positioning mechanism which is arranged relatively to the crystal particle jacking positioning mechanism, a crystal particle sorting arm which is arranged between the crystal particle jacking positioning mechanism and the crystal particle share positioning mechanism, jacking membrane separating mechanism which is separated from the crystal particle jacking positioning mechanism and a share membrane attaching mechanism which is separated from the crystal particle share positioning mechanism, wherein the crystal particle sorting device has a sorting state and a share state corresponding to a crystal particle which is attached onto the crystal particle jacking positioning mechanism, and the positioning precision of the crystal particle in the share state can be improved through the separation of the crystal share positioning mechanism and the share membrane attaching mechanism.
Description
Technical field
The utility model relates to a kind of semiconductor/light emitting diode process apparatus, and espespecially a kind of crystal grain is picked device.
Background technology
After wafer (wafer) cut into a plurality of crystal grain (dies or chips), the crystal grain that cuts down must be according to its quality, performance, and its characteristic of product that institute's wish is used classified, the field that is applied to be fit to the crystal grain with the grade inequality.Especially at light emitting diode (Light Emitted Diode, LED) in the industry, the luminosity of diode, wavelength and operating voltage etc. can be because of a little differences of process conditions, even on same wafer, each intergranule what all can exist slightly difference, therefore must use a classification picking machine to carry out picking operation.
Known classification picking machine as shown in Figure 1, mainly comprise the crystal grain storage platform 1 of having classified, one crystal grain storage platform 2 to be sorted, and one be arranged at this pick-and-place mechanism of crystal particles 3 between crystal grain storage platform 1 and this crystal grain storage platform 2 to be sorted of having classified, this crystal grain storage platform 1 of having classified comprises one and is used for the first planar movement mechanism 5 that film 4 is pasted in placement one first, and one be connected with this first planar movement mechanism 5 and support this first the first supporting member 6 of pasting film 4, this crystal grain storage platform 2 to be sorted comprises and is oppositely arranged with this first planar movement mechanism 5 and is used for placing one second the second planar movement mechanism 9 that pastes film 7, and one supports this second the second supporting member 8 of pasting film 7.
Accordingly, support this by this second supporting member 8 and second paste film 7, make and be positioned at this second crystal grain 10 of pasting on the film 7 and contact and be adsorbed on this pick-and-place mechanism of crystal particles 3 with this pick-and-place mechanism of crystal particles 3, then turning to by this pick-and-place mechanism of crystal particles 3 makes absorption this crystal grain 10 thereon first paste film 4 in the face of this, first support 6 and support this and first paste film 4 by this again, this first this crystal grain 10 on pasting film 4 and being adsorbed in this pick-and-place mechanism of crystal particles 3 is contacted, this crystal grain 10 is attached at this first pastes on the film 4, picked to this classification of having classified crystal grain storage platform 1 by this crystal grain storage platform 2 to be sorted and pick operation and finish this crystal grain 10.
This above-mentioned classification picking machine, when these pick-and-place mechanism of crystal particles 3 wishs are deposited in this crystal grain 10 this and have been classified crystal grain storage platform 1, must adjust these first deposit position and 3 contrapositions of this pick-and-place mechanism of crystal particles of pasting on the film 4 by this first planar movement mechanism 5, support this by this first supporting member 6 again and first paste film 4, make this crystal grain 10 first paste film 4 and contact and be attached at this first this deposit position of pasting film 4 with this.
Yet, in this has classified crystal grain storage platform 1, because this first planar movement mechanism 5 is connected setting with this first supporting member 6, crystal grain storage platform 1 structurally designs complicated so that this has been classified easily, load-carrying is heavier, and in the process that contraposition is moved, produce the relatively poor problem of positioning accurate accuracy, so the space that still is improved.
The utility model content
Main purpose of the present utility model, be to solve known classification picking machine, in the crystal grain storage platform of classifying, because the first planar movement mechanism is connected setting with the first supporting member, so that crystal grain in the process that contraposition is moved, produces the relatively poor problem of positioning accurate accuracy.
Via as can be known above, for reaching above-mentioned purpose, the utility model provides a kind of crystal grain to pick device, includes crystal grain top and gets detent mechanism, a crystal grain and divide and deposit that detent mechanism, a crystal grain are picked arm, a top is got the membrane separator structure and deposited film in one minute and attaches mechanism.This crystal grain top gets that detent mechanism comprises that one first planar movement member, is connected with this first planar movement member and membrane module is got on the top of carrying out planar movement, and this top is got membrane module and is attached at a crystal grain; This crystal grain divides to be deposited detent mechanism and this crystal grain top and gets detent mechanism and be oppositely arranged, and comprises one second planar movement member, and be connected with this second planar movement member and carry out dividing of planar movement and deposit membrane module; This crystal grain is picked arm and is arranged at this crystal grain top and gets detent mechanism and divide with this crystal grain and deposit rotation and relative with this crystal grain between the detent mechanism; This top is got the membrane separator structure and is got detent mechanism with this crystal grain top and separate setting, and get on this top, and membrane module is got the membrane separator structure on this top and this crystal grain is picked between the arm; And this minute deposit film and attach mechanism and this crystal grain and divide and deposit detent mechanism and separate setting, and this minute deposits membrane module and deposits film attaching mechanism and this crystal grain is picked between the arm in this minute.
Wherein this crystal grain is picked device and is had the state of picking and deposited state in one minute, this is picked state and gets the membrane separator structure by this top and support this top and get membrane module and make this crystal grain leave this top to get membrane module and be adsorbed in this crystal grain and pick arm, and this minute deposits state and deposit film by this minute and attach mechanism and support this minute and deposit membrane module and make this crystal grain leave this crystal grain to pick arm and be attached at this minute and deposit membrane module.
Further, crystal grain is picked arm and is comprised a rotating member and and be connected with rotating member and rotate and the suction nozzle of taking and putting crystalline grain.
Further, suction nozzle comprises the second suction nozzle of one first suction nozzle and the one and first back-to-back setting of suction nozzle.
Further, the top is got membrane module and is comprised a top that is attached at crystal grain and get film and and be connected in the top of getting between film and the first planar movement member, top and get the film supporting seat.
Further, the top is got the membrane separator structure and is comprised one first single shaft mobile member and and be connected in the first single shaft mobile member and support the top and get the first supporting member of membrane module.
Further, the first planar movement member comprises two and moves linearly and the first single shaft spare that moving direction intersects.
Further, divide and deposit membrane module and comprise the film and of minute depositing of depositing crystal grain in one minute and be connected in and minute deposit dividing between film and the second planar movement member and deposit the film supporting seat.
Further, divide and deposit film and attach mechanism and comprise one second single shaft mobile member and and be connected in the second single shaft mobile member and support the second supporting member of minute depositing membrane module.
Further, the second planar movement member comprises two and moves linearly and the second single shaft spare that moving direction intersects.
By technique scheme, the utility model divides this crystal grain to be deposited detent mechanism and this minute and deposits the setting of film attaching organizational separation, has at least following advantage:
1. the design on the simplified structure.
2. make this crystal grain in the process that contraposition is moved, this crystal grain divides to be deposited detent mechanism and this minute and deposits film and attach mutually load-carrying of mechanism, makes the raising of positioning accurate accuracy, and quickening is to bit rate.
Description of drawings
Fig. 1 is the schematic perspective view of known classification picking machine.
Fig. 2 is the stereoscopic schematic diagram of the utility model one embodiment.
Fig. 3 A is the view of picking of the utility model one embodiment.
Fig. 3 B deposits view dividing of the utility model one embodiment.
The specific embodiment
Relevant detailed description of the present utility model and technology contents now just cooperate graphic being described as follows:
See also shown in Figure 2, stereoscopic schematic diagram for the utility model one embodiment, the utility model is that a kind of crystal grain is picked device, includes crystal grain top and gets detent mechanism 10, a crystal grain and divide and deposit that detent mechanism 20, a crystal grain are picked arm 30, a top is got membrane separator structure 40 and deposited film in one minute and attaches mechanism 50.This crystal grain top gets that detent mechanism 10 comprises one first planar movement member 11 and membrane module 12 is got on a top, this the first planar movement member 11 comprises two and moves linearly and the first single shaft spare 111 that moving direction intersects, in this embodiment, this first single shaft spare 111 is for intersecting vertically, and one of them gets this first single shaft spare 111 membrane module 12 with this top and is connected, make this top get membrane module 12 and carried out planar movement, this top is got membrane module 12 and is comprised that film 121 is got on a top and film supporting seat 122 is got on a top, this top is got and is pasted with a crystal grain 60 on the film 121, and this top is got film 121 and is fixed in this top and gets on the film supporting seat 122, get film supporting seat 122 by this top and be connected with this first planar movement member 11, this for be connected in this first single shaft spare 111 one of them.
This crystal grain divides to be deposited detent mechanism 20 and gets detent mechanism 10 with this crystal grain top and be oppositely arranged, and comprise one second planar movement member 21 and deposited membrane module 22 in one minute, this the second planar movement member 21 comprises two and moves linearly and the second single shaft spare 211 that moving direction intersects, in this embodiment, this second single shaft spare 211 is for intersecting vertically, and one of them deposits this second single shaft spare 211 membrane module 22 with this minute and is connected, make this minute deposit membrane module 22 and carried out planar movement, this minute deposits 22 of membrane modules and comprises one minute and deposit film 221 and deposited film supporting seat 222 in one minute, this minute deposits film 221 and is fixed in this minute and deposits on the film supporting seat 222, in order to store classifiedly this crystal grain 60, deposit film supporting seat 222 by this minute and be connected with this second planar movement member 21, this for be connected in this second single shaft spare 211 one of them.
This crystal grain is picked arm 30 and is arranged at this crystal grain top and gets detent mechanism 10 and this crystal grain and divide and deposit between the detent mechanism 20, and comprise a rotating member 31 and a suction nozzle 32, this suction nozzle 32 is connected with this rotating member 31, divide with this crystal grain and deposit rotation between the detent mechanism 20 and get detent mechanism 10 in this crystal grain top, in this embodiment, this suction nozzle 32 comprises one first suction nozzle 321 and one second suction nozzle 322 of back-to-back setting, when this first suction nozzle 321 is got membrane module 12 in the face of this crystal grain 60 with this top, 322 of this second suction nozzles are faced this minute and are deposited membrane module 22, and along with the start of this rotating member 31, and exchange each other position.
This top is got membrane separator structure 40 and is got detent mechanism 10 with this crystal grain top and separate setting, making this top get membrane module 12 gets membrane separator structure 40 and this crystal grain and picks between the arm 30 on this top, this top is got membrane separator structure 40 and is comprised one first single shaft mobile member 41 and one first supporting member 42, this the first single shaft mobile member 41 is connected with this first supporting member 42, provide this first supporting member 42 to carry out the reciprocal activity of a straight line, make this first supporting member 42 support this top of getting in the membrane module 12 on this top and get film 121.
This minute deposits film and attaches mechanism 50 and this crystal grain and divide and deposit detent mechanism 20 and separate setting, make this minute deposit membrane module 22 and deposit in this minute that film attaches mechanism 50 and this crystal grain is picked between the arm 30, this minute deposits film attaching mechanism 50 and comprises one second single shaft mobile member 51 and one second supporting member 52, this the second single shaft mobile member 51 is connected with this second supporting member 52, provide this second supporting member 52 to carry out the reciprocal activity of a straight line, make this second supporting member 52 support this minute that this minute deposit in the membrane module 22 and deposit film 221.
See also shown in Fig. 3 A and Fig. 3 B, be respectively the state of picking of the utility model one embodiment and minute deposit view, when the utility model carries out a crystal grain when picking operation, have the state of picking and deposited state in one minute, this picks state as shown in Figure 3A, at this moment, this crystal grain 60 is attached at this top and gets on the film 121, and carried out planar movement by this first planar movement member 11 and aimed at this first suction nozzle 321 and this first supporting member 42, and 42 of this first supporting members carry out traveling priority by this first single shaft mobile member 41 and support this top and get film 121, make this crystal grain 60 leave this top and get film 121, and contact with this first suction nozzle 321, adsorb this crystal grain 60 by this first suction nozzle 321 in the mode of vacsorb; This minute deposited state then shown in Fig. 3 B, at this moment, this first suction nozzle 321 sees through this rotating member 31 and has rotated the position of depositing film 221 in the face of this minute, this minute deposits 221 of films and carries out planar movement by this second planar movement member 21, the deposit position that this minute deposits on the film 221 is aimed at this crystal grain 60,52 of this second supporting members carry out traveling priority by this second single shaft mobile member 51 and support this minute and deposit film 221, this deposit position that this minute deposited on the film 221 contacts with this crystal grain 60, make this crystal grain 60 leave this first suction nozzle 321, deposit on this deposit position of film 221 and be attached at this minute.
In addition, what this will remark additionally be, because in this embodiment, this first suction nozzle 321 is back-to-back setting with this second suction nozzle 322, therefore, when this first suction nozzle 321 when getting membrane module 12 and carry out picking of this crystal grain 60 in this top, this second suction nozzle 322 then can be deposited membrane module 22 and carries out depositing of another crystal grain in the face of this minute simultaneously, so picks the activity duration of operation to save this crystal grain.
In sum, deposit detent mechanism and this minute and deposit the setting of film attaching organizational separation because the utility model divides this crystal grain, not only simplify the structure of above-mentioned these mechanisms, avoid this crystal grain to divide depositing detent mechanism to bear this minute and deposit film and attach mechanism and affect locating effect, further promote positioning accurate accuracy and locating speed to crystal grain.
Below the utility model is described in detail, yet the above person only is a preferred embodiment of the present utility model, when the scope that can not limit the utility model enforcement.Be that all equalizations of doing according to the utility model application range change and modify etc., all should still belong in the patent covering scope of the present utility model.
Claims (9)
1. a crystal grain is picked device, it is characterized in that, described crystal grain is picked device and included:
Detent mechanism is got on one crystal grain top, and described crystal grain top gets that detent mechanism comprises that one first planar movement member, is connected with described the first planar movement member and membrane module is got on the top of carrying out planar movement, and described top is got membrane module and is attached at a crystal grain;
One gets crystal grain that detent mechanism is oppositely arranged with described crystal grain top divides and deposits detent mechanism, and described crystal grain divides to be deposited detent mechanism and comprise one second planar movement member, and be connected with described the second planar movement member and carry out dividing of planar movement and deposit membrane module;
One is set to get on described crystal grain top detent mechanism and described crystal grain divides and deposits between the detent mechanism rotation and the crystal grain relative with described crystal grain is picked arm;
One gets the top that detent mechanism separates setting with described crystal grain top gets the membrane separator structure, and get on described top, and membrane module is got the membrane separator structure on described top and described crystal grain is picked between the arm; And
One divides with described crystal grain and to deposit the film of minute depositing that detent mechanism separates setting and attach mechanism, and deposits membrane module in described minute and deposit at described minute that film attaches mechanism and described crystal grain is picked between the arm;
Wherein, described crystal grain is picked device and is had one and get the membrane separator structure by described top and support described top and get membrane module and make described crystal grain leave described top to get membrane module and be adsorbed in the state of picking that described crystal grain is picked arm, and one attaches mechanism and supports and deposited membrane module in described minute and make described crystal grain leave described crystal grain to pick arm and be attached at the state of minute depositing of depositing membrane module in described minute by depositing film in described minute.
2. crystal grain according to claim 1 is picked device, it is characterized in that, described crystal grain is picked arm and comprised a rotating member and and be connected and rotate and pick and place the suction nozzle of described crystal grain with described rotating member.
3. crystal grain according to claim 2 is picked device, it is characterized in that, described suction nozzle comprises one first suction nozzle and one and the second suction nozzle of the back-to-back setting of described the first suction nozzle.
4. crystal grain according to claim 1 is picked device, it is characterized in that, described top is got membrane module and comprised a top that is attached at described crystal grain and get film and and be connected in the top of getting between film and described the first planar movement member on described top and get the film supporting seat.
5. crystal grain according to claim 1 is picked device, it is characterized in that, described top is got the membrane separator structure and comprised one first single shaft mobile member and and be connected in described the first single shaft mobile member and support the first supporting member that membrane module is got on described top.
6. crystal grain according to claim 1 is picked device, it is characterized in that, described the first planar movement member comprises two and moves linearly and the first single shaft spare that moving direction intersects.
7. crystal grain according to claim 1 is picked device, it is characterized in that, deposits membrane module in described minute and comprises a film and of minute depositing that stores classifiedly described crystal grain and be connected in described minute and deposit dividing between film and described the second planar movement member and deposit the film supporting seat.
8. crystal grain according to claim 1 is picked device, it is characterized in that, deposits film in described minute and attaches mechanism and comprise one second single shaft mobile member and and be connected in described the second single shaft mobile member and support the second supporting member of depositing membrane module in described minute.
9. crystal grain according to claim 1 is picked device, it is characterized in that, described the second planar movement member comprises two and moves linearly and the second single shaft spare that moving direction intersects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220224546 CN202638767U (en) | 2012-05-17 | 2012-05-17 | Crystal particle sorting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220224546 CN202638767U (en) | 2012-05-17 | 2012-05-17 | Crystal particle sorting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202638767U true CN202638767U (en) | 2013-01-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220224546 Expired - Lifetime CN202638767U (en) | 2012-05-17 | 2012-05-17 | Crystal particle sorting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202638767U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104550054A (en) * | 2014-12-29 | 2015-04-29 | 苏州凯锝微电子有限公司 | Grain crystal sorting device |
| CN104550055A (en) * | 2014-12-30 | 2015-04-29 | 苏州凯锝微电子有限公司 | Crystal grain sorting machine |
| CN106024679A (en) * | 2016-07-21 | 2016-10-12 | 苏州晶方半导体科技股份有限公司 | Sorting device and sorting method |
| CN106890802A (en) * | 2017-02-08 | 2017-06-27 | 聚灿光电科技股份有限公司 | A kind of LED disks choose bad point method for separating |
| CN110707024A (en) * | 2019-09-20 | 2020-01-17 | 深圳市矽电半导体设备有限公司 | Core particle sorting method |
| CN111715562A (en) * | 2020-06-16 | 2020-09-29 | 矽电半导体设备(深圳)股份有限公司 | Grain sorting device and sorting method |
-
2012
- 2012-05-17 CN CN 201220224546 patent/CN202638767U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104550054A (en) * | 2014-12-29 | 2015-04-29 | 苏州凯锝微电子有限公司 | Grain crystal sorting device |
| CN104550055A (en) * | 2014-12-30 | 2015-04-29 | 苏州凯锝微电子有限公司 | Crystal grain sorting machine |
| CN106024679A (en) * | 2016-07-21 | 2016-10-12 | 苏州晶方半导体科技股份有限公司 | Sorting device and sorting method |
| CN106890802A (en) * | 2017-02-08 | 2017-06-27 | 聚灿光电科技股份有限公司 | A kind of LED disks choose bad point method for separating |
| CN110707024A (en) * | 2019-09-20 | 2020-01-17 | 深圳市矽电半导体设备有限公司 | Core particle sorting method |
| CN111715562A (en) * | 2020-06-16 | 2020-09-29 | 矽电半导体设备(深圳)股份有限公司 | Grain sorting device and sorting method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130102 |
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| CX01 | Expiry of patent term |