CN110651177B - 取向特性测定方法、取向特性测定程序及取向特性测定装置 - Google Patents

取向特性测定方法、取向特性测定程序及取向特性测定装置 Download PDF

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CN110651177B
CN110651177B CN201780091062.XA CN201780091062A CN110651177B CN 110651177 B CN110651177 B CN 110651177B CN 201780091062 A CN201780091062 A CN 201780091062A CN 110651177 B CN110651177 B CN 110651177B
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angle
light intensity
light
orientation
degrees
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CN110651177A (zh
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细川清正
江浦茂
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6445—Measuring fluorescence polarisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N2021/6417—Spectrofluorimetric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6484—Optical fibres

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Stereophonic System (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CN201780091062.XA 2017-05-23 2017-11-22 取向特性测定方法、取向特性测定程序及取向特性测定装置 Active CN110651177B (zh)

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CN202210809067.4A CN115236047A (zh) 2017-05-23 2017-11-22 取向特性测定方法、取向特性测定程序及取向特性测定装置

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JP2017101926 2017-05-23
JP2017-101926 2017-05-23
PCT/JP2017/042073 WO2018216246A1 (ja) 2017-05-23 2017-11-22 配向特性測定方法、配向特性測定プログラム、及び配向特性測定装置

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EP (1) EP3633351B1 (enExample)
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CN (1) CN110651177B (enExample)
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WO (1) WO2018216246A1 (enExample)

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Publication number Priority date Publication date Assignee Title
CN109490271A (zh) * 2018-12-26 2019-03-19 华讯方舟科技有限公司 一种荧光光谱的测试装置及测试方法
CN109632745A (zh) * 2018-12-28 2019-04-16 深圳市太赫兹科技创新研究院 角度荧光测量装置和方法
CN112014077B (zh) * 2020-09-24 2025-03-25 远方谱色科技有限公司 一种亮度分布测量装置及方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4849623A (en) * 1985-12-30 1989-07-18 Kanzaki Paper Manufacturing Co., Ltd. System and method for determining anisotropy of light-transmitting sheet specimen
US5808738A (en) * 1995-06-13 1998-09-15 University Of South Florida Multiangle, multiwavelength particle characterization system and method
US6151116A (en) * 1998-09-07 2000-11-21 Nec Corporation Evaluation method for thin film molecular orientation, evaluation apparatus for the orientation and recording medium
CN1847816A (zh) * 2005-01-24 2006-10-18 株式会社茉莉特斯 光学各向异性参数测定方法及测定装置
JP2006308549A (ja) * 2005-03-29 2006-11-09 Seiko Epson Corp 配向膜の配向状態評価方法、液晶パネルの製造方法及び液晶パネルの検査方法
CN103477206A (zh) * 2011-04-11 2013-12-25 肖特茉丽特株式会社 光学异向性参数测量装置、测量方法及测量用程序
CN106461463A (zh) * 2014-05-23 2017-02-22 浜松光子学株式会社 光测量装置及光测量方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6435418A (en) * 1987-07-30 1989-02-06 Matsushita Electric Industrial Co Ltd Method for evaluating liquid crystal orientational capacity of oriented film
JP2677199B2 (ja) * 1994-07-28 1997-11-17 日本電気株式会社 配向膜検査装置および検査方法
US6697157B2 (en) * 1999-05-24 2004-02-24 Hinds Instruments Birefringence measurement
JP3854056B2 (ja) * 1999-12-13 2006-12-06 株式会社荏原製作所 基板膜厚測定方法、基板膜厚測定装置、基板処理方法及び基板処理装置
JP4895428B2 (ja) * 2001-03-12 2012-03-14 シンテック株式会社 液晶セルの配向パラメータ測定方法および測定装置
JP4135603B2 (ja) * 2003-09-12 2008-08-20 オムロン株式会社 ２次元分光装置及び膜厚測定装置
JP5224835B2 (ja) * 2007-02-09 2013-07-03 国立大学法人東京工業大学 有機ｅｌ素子およびその製造方法、ならびに有機ｅｌ素子の評価方法
CN104395690B (zh) * 2012-06-13 2017-05-31 株式会社新柯隆 膜厚测量装置和成膜装置
JP6290637B2 (ja) * 2014-01-30 2018-03-07 浜松ホトニクス株式会社 膜厚計測方法及び膜厚計測装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4849623A (en) * 1985-12-30 1989-07-18 Kanzaki Paper Manufacturing Co., Ltd. System and method for determining anisotropy of light-transmitting sheet specimen
US5808738A (en) * 1995-06-13 1998-09-15 University Of South Florida Multiangle, multiwavelength particle characterization system and method
US6151116A (en) * 1998-09-07 2000-11-21 Nec Corporation Evaluation method for thin film molecular orientation, evaluation apparatus for the orientation and recording medium
CN1847816A (zh) * 2005-01-24 2006-10-18 株式会社茉莉特斯 光学各向异性参数测定方法及测定装置
JP2006308549A (ja) * 2005-03-29 2006-11-09 Seiko Epson Corp 配向膜の配向状態評価方法、液晶パネルの製造方法及び液晶パネルの検査方法
CN103477206A (zh) * 2011-04-11 2013-12-25 肖特茉丽特株式会社 光学异向性参数测量装置、测量方法及测量用程序
CN106461463A (zh) * 2014-05-23 2017-02-22 浜松光子学株式会社 光测量装置及光测量方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Device efficiency of organic light-emitting diodes: Progress by improved light outcoupling;Brutting W etc.;《PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE》;20130131;第210卷(第1期);第44-65页 *
动态光散射技术的角度依赖性;刘晓艳等;《光学学报》;20120630;第32卷(第6期);0629002 第1-6页 *

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Publication number Publication date
TW202242382A (zh) 2022-11-01
CN110651177A (zh) 2020-01-03
EP3633351B1 (en) 2023-03-29
EP3633351A1 (en) 2020-04-08
JP2018197753A (ja) 2018-12-13
JP6846385B2 (ja) 2021-03-24
TW201901137A (zh) 2019-01-01
TWI813366B (zh) 2023-08-21
WO2018216246A1 (ja) 2018-11-29
EP3633351A4 (en) 2021-02-24
TWI769203B (zh) 2022-07-01

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