Corner measuring device based on electric eddy current
Technical Field
The invention relates to the technical field of photoelectric scanning and tracking, in particular to a rotation angle measuring device.
Background
The angle measurement sensor is a commonly used geometric quantity sensor and is widely used in many fields such as aerospace, industrial production, mechanical manufacturing, military science and the like. The mainstream angle measuring sensors in the market at present comprise a photoelectric encoder, a rotary transformer and a disc type induction synchronizer.
The photoelectric encoder is commonly referred to as a circular grating, and outputs angle information in the form of pulse quantity by using moire fringes generated by the circular grating and a photoelectric conversion technology. Compared with other angle measuring sensors, the circular grating has the advantages of small volume, light weight, high measuring precision, high response speed, strong anti-interference capability, convenience in use and the like, and is widely applied to the field of precision measurement. However, due to the fact that the photoetching process is adopted in the circular grating manufacturing process, the more the number of the circumferential scribed lines is, the higher the measurement accuracy is, the greater the manufacturing difficulty is, the higher the cost is, and the price of the circular grating is high. Particularly, in the case of a small-sized precision instrument, it is difficult to improve the measurement accuracy of the circular grating when the radius is small.
A resolver is commonly called a rotary transformer, and is an angle measuring element in which an output voltage changes with a change in a rotation angle of a rotor. It has the advantages of firmness, heat resistance, impact resistance, strong anti-interference capability, convenient use and the like, and is widely applied to various fields of industrial production. There are many types of resolvers, and the most widely used is the sine and cosine resolver. The principle of the transformer is equivalent to a rotatable transformer, and sine and cosine signals related to the rotation angle of the rotor are output between the stator and the rotor along with the change of the angle. The angular accuracy of such resolvers is typically on the order of 5 to 10 arc seconds.
The disc type induction synchronizer is an angle sensor based on the electromagnetic induction principle. The rotor of the disc type induction synchronizer has N guide vanes in total. When the rotor rotates by an angle theta, the stator windings A and B respectively induce and output corresponding induced electromotive forces. The induction synchronizer has two working modes of amplitude discrimination and phase discrimination. The disc type induction synchronizer has the characteristics of high precision and resolution, strong anti-interference capability, long service life, low cost, simple maintenance and the like.
Among the three types of angle sensors, the circular grating has the advantages of good dynamic performance of measurement, strong anti-interference capability and high measurement precision, and has the disadvantages of high requirements on the machining precision and the installation precision of a mechanical axis and relatively high price. The rotary transformer has the advantages of low cost, low machining precision and installation precision and relatively low measurement precision. The disc type induction synchronizer has the advantages of low manufacturing cost, high measurement precision and low machining precision and installation precision.
The current circular grating with the highest angle measurement precision is difficult to improve due to the limitation of a photoetching process, and particularly for small-radius circular gratings, the angle measurement precision of the circular grating becomes a key factor for limiting the precision of instruments in a plurality of precision measuring instruments.
Disclosure of Invention
Objects of the invention
The invention aims to provide a rotation angle measuring device based on eddy current, which adopts eddy current differential signals for measurement, belongs to a non-contact measuring mode and has no invasion, thereby avoiding the influence of external factors such as temperature, friction and the like on the measuring precision of a sensor.
(II) technical scheme
In order to solve the above problems, the present invention provides an eddy current based rotation angle measuring device 200, the rotation angle measuring device 200 includes a fixed portion and a rotating portion, the fixed portion includes an eddy current sensor 30, a sensor holder 40 and a base 50, the rotating portion includes a steering mirror 100 and a swing piece 20;
the swinging piece 20 is fixedly connected with the steering mirror 100 through a deep groove ball bearing 60 and a pin 70, and the swinging piece 20 swings along with the rotation of the steering mirror 100; the turning mirror 100 is driven by a voice coil motor or a piezo ceramic motor to form different rotation angles.
Further, the shape of the swinging piece 20 is a cuboid, and two opposite sides are parallel; the connection point between the oscillating piece 20 and the pin 70 and the deep groove ball bearing 60 is located at a position slightly deviated from the rotation center, and the rotation radii of both sides are different.
Further, in the rotation angle measuring device 200, the eddy current sensor 30 includes a first eddy current sensor 30A and a second eddy current sensor 30B, and the two eddy current sensors have the same model performance; each eddy current sensor corresponds to one end of the swinging sheet but is not contacted with the swinging sheet; in the process of rotation, when the distances from the two sides of the swinging piece 20 to the first eddy current sensor 30A and the second eddy current sensor 30B are changed, one of the distances is increased, the other one of the distances is decreased, and the changed distances are different
Further, the sensor holder 40 is connected to the base 50 by fastening screws, and two symmetrical holes are formed on both sides of the sensor holder 40 for fixing the two eddy current sensors 30A and 30B.
Further, the change of the distance between the first eddy current sensor 30A and the second eddy current sensor 30B and the oscillating piece 20 forms a pair of differential signals, and the inductance of the eddy current is changed, so that the change of the distance and the change of the angle of the steering mirror 100 can be obtained through the change of the inductance, and the purpose of measuring the rotation angle is achieved.
Further, when the range of the rotation angle of the turning mirror 100 is ± 13 °, the difference of the distance variation between the oscillating plate and the eddy current sensor is ± 0.3 mm.
Further, the angular resolution of the rotation angle measuring device is
In summary, the present invention provides an eddy current based rotation angle measuring apparatus 200, which includes a fixed portion including eddy current sensors 30A and 30B, a sensor holder 40, and a base 50, and a rotating portion including a steering mirror 100 and a swinging plate 20. The swinging piece 20 is fixedly connected with the steering mirror 100 through a deep groove ball bearing 60 and a connecting pin 70, and the swinging piece 20 swings along with the rotation of the steering mirror 100; the turning mirror 100 is typically driven by a voice coil motor or a piezo ceramic motor to form different angles of rotation. The swing piece 20 is shaped like a rectangular parallelepiped, and two opposite side surfaces thereof in a direction perpendicular to the base 50 are parallel; the connection point between the oscillating piece 20 and the pin 70 and the deep groove ball bearing 60 is not the rotation center of the oscillating piece 20 rotating along with the steering mirror 100, but is a position slightly deviating from the rotation center, and the rotation radiuses on both sides are different, so that in the rotating process, the distances from the two sides of the oscillating piece 20 to the two eddy current sensors 30A and 30B are changed, one is larger, and the other is smaller and different in size. The eddy current sensors 30A and 30B include a first eddy current sensor 30A and a second eddy current sensor 30B, and the change of the distance between the first and second eddy current sensors 30A and 30B and the oscillating piece 20 forms a pair of differential signals to change the inductance of the eddy current, so that the change of the distance and the change of the angle of the steering mirror 100 can be obtained through the change of the inductance, and the purpose of measuring the rotation angle is achieved.
(III) advantageous effects
The technical scheme of the invention has the following beneficial technical effects:
the eddy current differential signal is adopted for measuring, the eddy current differential signal belongs to a non-contact measuring mode, and the non-invasive eddy current differential signal measuring device is free from invasion, so that the influence of external factors such as temperature, friction and the like on the measuring precision of the sensor is avoided. The eddy current-based one-dimensional corner measuring device overcomes the defects that the measuring accuracy of an angle sensor with a small volume in the prior art is difficult to improve and the measuring range is small, improves the measuring accuracy and enlarges the measuring range. The one-dimensional corner measuring device based on the eddy current is simple in structure, high in angle measuring accuracy, high in economy, convenient and fast to implement and easy to realize batch manufacturing.
Drawings
FIG. 1 is a three-dimensional perspective view of an eddy current based rotation angle measuring device of the present invention;
fig. 2 is a perspective view of the rotation angle measuring device shown in fig. 1 with a sensor fixing bracket removed;
FIG. 3 is a perspective view of the rotation angle measuring device of FIG. 2 rotated 90 clockwise;
FIG. 4 is a perspective view of the rotation angle measuring device shown in FIG. 1 with the sensor holder and the base removed;
fig. 5 is a bottom view of the rotation angle measuring device shown in fig. 1 with the sensor holder removed.
Reference numerals:
100: a steering mirror; 20: a swinging sheet; 30A: a first eddy current sensor; 30B: a second eddy current sensor; 40: a sensor mount; 50: a base; 60: a deep groove ball bearing; 70: a connecting pin; 21: the distance from the left swinging piece to the first eddy current sensor; 22: the distance from the right swinging piece to the second eddy current sensor.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings in conjunction with the following detailed description. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
Fig. 1 is a three-dimensional perspective view of a one-dimensional rotation angle measuring device based on an eddy current according to the present invention, and fig. 2 is a perspective view of the rotation angle measuring device shown in fig. 1 with a sensor holder removed. As can be seen from fig. 1 and 2, the rotation angle measuring device 200 mainly includes a fixed portion and a rotating portion, wherein the fixed portion mainly includes the eddy current sensors 30A, 30B, the sensor holder 40, and the base 50; the rotating part mainly comprises a steering mirror 100 and a swinging piece 20, the swinging piece 20 is fixedly connected with the steering mirror 100 through a deep groove ball bearing 60 and a pin 70, and the deep groove ball bearing 60 is positioned at the center of the base 50 and is used for connecting the steering mirror 100 with the swinging piece 20, so that the swinging piece 20 can swing along with the rotation of the steering mirror 100. The connection point of the oscillating piece 20 with the pin 70 and the deep groove ball bearing 60 is not the rotation center of the oscillating piece 20 that rotates following the turning of the steering mirror, but is a position slightly deviated from the rotation center of the oscillating piece 20 to realize the measurement of the rotation angle measuring device. The oscillating piece 20 oscillates along with the rotation of the steering mirror 100, and since the connection point of the oscillating piece 20 with the pin 70 and the deep groove ball bearing 60 is a position slightly deviated from the rotation center of the oscillating piece 20, the distance between the left and right surfaces of the oscillating piece 20 and the eddy current sensor changes during the process that the oscillating piece 20 rotates along with the steering mirror 100, which will be described in further detail below; in general, the steering mirror 100 can be driven by a voice coil motor or a piezo ceramic motor to form different rotation angles. The oscillating piece 20 has a rectangular parallelepiped shape, and two opposite side surfaces thereof in a direction perpendicular to the plane of the base 50 are parallel to each other. The eddy current sensor 30 includes a first eddy current sensor 30A and a second eddy current sensor 30B, and the first eddy current sensor 30A and the second eddy current sensor 30B are aligned with the left side plane and the right side plane of the oscillating piece 20, respectively, but do not contact with the left and right side planes of the oscillating piece 20. The first and second eddy current sensors 30A and 30B are symmetrically disposed on both sides of the sensor holder 40. In one embodiment of the present invention, as shown in fig. 2, the left plane of the oscillating plate 20 is aligned with the first eddy current sensor 30A, and the right plane of the oscillating plate 20 is aligned with the second eddy current sensor 30B, but the first and second eddy current sensors 30A and 30B are not in contact with the left and right planes of the oscillating plate 20, respectively, and are kept at a certain distance, and the distances between the two sides and the first and second eddy current sensors 30A and 30B are changed during the oscillating plate 20 rotates along with the steering mirror 100. The change of the distance between the first eddy current sensor 30A and the second eddy current sensor 30B and the two sides of the oscillating piece 20 forms a pair of differential signals, and the inductance of the eddy current is changed, so that the change of the distance and the change of the angle of the steering mirror 100 can be obtained through the change of the inductance, and the purpose of measuring the rotation angle is achieved. Generally, the two eddy current sensors 30A, 30B are identical in type performance, so that the measurement results are more accurate; the sensor holder 40 is fastened to the base 50 by screws, and two symmetrical holes are respectively formed on two sides of the sensor holder 40 for fixing the first and second eddy current sensors 30A and 30B
Fig. 5 is a bottom view of the rotation angle measuring device shown in fig. 1 with the sensor holder removed. The relative positional relationship in the horizontal direction of the base 50, the deep groove ball bearing 70, the oscillating piece 20, and the eddy current sensors 30A, 30B can be seen more clearly from the bottom view. The swinging piece 20 is located in the chassis of the base 50 and has a certain distance with the chassis, so as to prevent friction caused by contact. The connection point between the oscillating piece 20 and the pin 70 and the deep groove ball bearing 60 is not the rotation center of the oscillating piece 20, but is a position slightly deviated from the rotation center of the oscillating piece 20 so that the rotation radii of both sides of the oscillating piece 20 are different in size. Therefore, in the process that the swing piece 20 rotates along with the steering mirror 100, the distances from the left and right side surfaces of the swing piece 20 to the two eddy current sensors 30A and 30B change, and one becomes larger while the other becomes smaller and the changed distances are different.
Fig. 3 is a perspective view of the rotation angle measuring device shown in fig. 2 rotated by 90 ° clockwise, and fig. 4 is a perspective view of the rotation angle measuring device shown in fig. 1 with the sensor holder and the base removed. The relative positional relationship between the eddy current sensors 30A and 30B, the oscillating piece 20, and the turning mirror can be more clearly seen from fig. 3 and 4. As can be seen from fig. 3 and 4, the oscillating piece 20 is a rectangular parallelepiped whose opposite side surfaces in a direction perpendicular to the base 50 are parallel to each other and correspond to the first and second eddy current sensors 30A, 30B, respectively. As can be seen from fig. 4, the distance between the left plane of the oscillating piece 20 and the first eddy current sensor 30A is indicated by a double arrow 21, and the distance between the right plane of the oscillating piece 20 and the second eddy current sensor 30B is indicated by a double arrow 22. When the turning mirror 100 is deflected, the oscillating plate 20 rotates, and at this time, the distance 21 between the left plane of the oscillating plate 20 and the first eddy current sensor 30A and the distance 22 between the right plane of the oscillating plate 20 and the second eddy current sensor 30B are different in magnitude and opposite in direction. In one embodiment, when the turning mirror 100 is rotated in the direction shown by the arrow 25 in fig. 4, the distance 21 between the left plane of the swing piece 20 and the first eddy current sensor 30A is decreased, the distance 22 between the right plane of the swing piece 20 and the second eddy current sensor 30B is increased, and the increase and decrease distances are not equal to each other, according to the faraday electromagnetic induction principle, the block-shaped metal conductor is placed in a changing magnetic field or does a motion of cutting magnetic lines in the magnetic field, regardless of whether the metal is block-shaped, and no eddy current is generated when the unchangeable magnetic field is cut, and a vortex-shaped induced current, i.e., an eddy current, is generated in the conductor. When the distance between the oscillating piece 20 and the eddy current sensors 30A and 30B changes, the Q value of the coil in the probe of the eddy current sensor also changes, the change of the Q value causes the change of the amplitude of the oscillating voltage, and the oscillating voltage changing along with the distance is converted into the voltage change through the processes of detection, filtering, linear compensation and amplification normalization, and finally the mechanical displacement (the gap between the eddy current sensor and the oscillating piece) is converted into the voltage. The change in the distances 21, 22 from the two parallel sides of the oscillating piece 20 to the first and second eddy current sensors 30A, 30B corresponds to the angle of rotation of the steering mirror 100. The maximum rotation angle of the turning mirror 100 is ± 13 °, and the maximum displacement of the distance 21 between the left plane of the oscillating piece 20 and the first eddy current sensor 30A and the distance 22 between the right plane of the oscillating piece 20 and the second eddy current sensor 30B is ± 0.3mm, so the angle measurement resolution is about 10 μ rad.
In summary, the present invention provides a one-dimensional rotation angle measuring device based on eddy current, the rotation angle measuring device 200 includes a fixed portion and a rotating portion, the fixed portion includes eddy current sensors 30A and 30B, a sensor holder 40 and a base 50, and the rotating portion includes a steering mirror 100 and a swinging piece 20. The swinging piece 20 is fixedly connected with the steering mirror 100 through a deep groove ball bearing 60 and a connecting pin 70, and the swinging piece 20 swings along with the rotation of the steering mirror 100; the turning mirror 100 is typically driven by a voice coil motor or a piezo ceramic motor to form different angles of rotation. The swing piece 20 is shaped like a rectangular parallelepiped, and two opposite side surfaces thereof in a direction perpendicular to the base 50 are parallel; the connection point between the oscillating piece 20 and the pin 70 and the deep groove ball bearing 60 is not the rotation center of the oscillating piece 20 rotating along with the steering mirror 100, but is a position slightly deviating from the rotation center, and the rotation radiuses on both sides are different, so that in the rotating process, the distances from the two sides of the oscillating piece 20 to the two eddy current sensors 30A and 30B are changed, one is larger, and the other is smaller and different in size. The eddy current sensors 30A and 30B include a first eddy current sensor 30A and a second eddy current sensor 30B, and the change of the distance between the first and second eddy current sensors 30A and 30B and the oscillating piece 20 forms a pair of differential signals to change the inductance of the eddy current, so that the change of the distance and the change of the angle of the steering mirror 100 can be obtained through the change of the inductance, and the purpose of measuring the rotation angle is achieved.
Therefore, the eddy current-based rotation angle measuring device provided by the invention adopts eddy current differential signals for measurement, belongs to a non-contact measuring mode, and has no invasion, so that the influence of external factors such as temperature, friction and the like on the measuring precision of the sensor is avoided. The eddy current-based one-dimensional corner measuring device overcomes the defects that the measuring accuracy of an angle sensor with a small volume in the prior art is difficult to improve and the measuring range is small, improves the measuring accuracy and enlarges the measuring range. The one-dimensional corner measuring device based on the eddy current is simple in structure, high in angle measuring accuracy, high in economy, convenient and fast to implement and easy to realize batch manufacturing.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.