CN110645889B - One-dimensional corner measuring device based on eddy current - Google Patents
One-dimensional corner measuring device based on eddy current Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
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Abstract
A one-dimensional corner measuring device based on eddy current comprises a fixed part and a rotating part, wherein the fixed part comprises an eddy current sensor, a sensor fixing frame and a base, and the rotating part comprises a steering mirror and a swinging sheet; the swinging piece is fixedly connected with the steering mirror through a deep groove ball bearing, and swings along with the rotation of the steering mirror; the steering mirror is driven by a voice coil motor or a piezoelectric ceramic motor to form different rotation angles. In the rotating process of the steering mirror, the change of the distance between the eddy current sensor and the swinging sheet can form a pair of differential signals, and the inductance of the eddy current is changed, so that the change of the distance and the change of the angle of the steering mirror can be obtained through the change of the inductance, and the purpose of measuring the rotating angle is achieved. The angle measuring device has the advantages of simple structure, large and adjustable measuring range, high angle measuring precision and easy realization of batch manufacturing.
Description
Technical Field
The invention relates to the technical field of photoelectric scanning and tracking, in particular to a one-dimensional corner measuring device based on an eddy current.
Background
The angle measurement sensor is a commonly used geometric quantity sensor and is widely used in many fields such as aerospace, industrial production, mechanical manufacturing, military science and the like. The mainstream angle measuring sensors in the market at present comprise a photoelectric encoder, a rotary transformer and a disc type induction synchronizer.
The photoelectric encoder is commonly referred to as a circular grating, and outputs angle information in the form of pulse quantity by using moire fringes generated by the circular grating and a photoelectric conversion technology. Compared with other angle measuring sensors, the circular grating has the advantages of small volume, light weight, high measuring precision, high response speed, strong anti-interference capability, convenience in use and the like, and is widely applied to the field of precision measurement. However, due to the fact that the photoetching process is adopted in the circular grating manufacturing process, the more the number of the circumferential scribed lines is, the higher the measurement accuracy is, the greater the manufacturing difficulty is, the higher the cost is, and the price of the circular grating is high. Particularly, in the case of a small-sized precision instrument, it is difficult to improve the measurement accuracy of the circular grating when the radius is small.
A resolver is commonly called a rotary transformer, and is an angle measuring element in which an output voltage changes with a change in a rotation angle of a rotor. It has the advantages of firmness, heat resistance, impact resistance, strong anti-interference capability, convenient use and the like, and is widely applied to various fields of industrial production. There are many types of resolvers, and the most widely used is the sine and cosine resolver. The principle of the transformer is equivalent to a rotatable transformer, and sine and cosine signals related to the rotation angle of the rotor are output between the stator and the rotor along with the change of the angle. The angular accuracy of such resolvers is typically on the order of 5 to 10 arc seconds.
The disc type induction synchronizer is an angle sensor based on the electromagnetic induction principle. The rotor of the disc type induction synchronizer has N guide vanes in total. When the rotor rotates by an angle theta, the stator windings A and B respectively induce and output corresponding induced electromotive forces. The induction synchronizer has two working modes of amplitude discrimination and phase discrimination. The disc type induction synchronizer has the characteristics of high precision and resolution, strong anti-interference capability, long service life, low cost, simple maintenance and the like.
Among the three types of angle sensors, the circular grating has the advantages of good dynamic performance of measurement, strong anti-interference capability and high measurement precision, and has the disadvantages of high requirements on the machining precision and the installation precision of a mechanical axis and relatively high price. The rotary transformer has the advantages of low cost, low machining precision and installation precision and relatively low measurement precision. The disc type induction synchronizer has the advantages of low manufacturing cost, high measurement precision and low machining precision and installation precision.
The current circular grating with the highest angle measurement precision is difficult to improve due to the limitation of a photoetching process, and particularly for small-radius circular gratings, the angle measurement precision of the circular grating becomes a key factor for limiting the precision of instruments in a plurality of precision measuring instruments.
Disclosure of Invention
Objects of the invention
The invention aims to provide a one-dimensional rotation angle measuring device based on eddy current, which adopts eddy current differential signals for measurement, belongs to a non-contact measuring mode and has no invasion, thereby avoiding the influence of external factors such as temperature, friction and the like on the measuring precision of a sensor.
(II) technical scheme
In order to solve the above problems, a first aspect of the present invention provides a one-dimensional rotation angle measuring device 100 based on an eddy current, where the one-dimensional rotation angle measuring device 100 includes a fixed portion and a rotating portion, the fixed portion includes eddy current sensors 4 and 5, a sensor holder 8 and a base 6, and the rotating portion includes a steering mirror 1 and oscillating pieces 2 and 3;
the swinging pieces 2 and 3 are fixedly connected with the steering mirror 1 through a deep groove ball bearing 10, and the swinging pieces 2 and 3 swing along with the rotation of the steering mirror 1; the steering mirror 1 is driven by a voice coil motor or a piezoelectric ceramic motor to form different rotation angles.
Further, the swinging pieces 2 and 3 comprise a left swinging piece 2 and a right swinging piece 3, and the left swinging piece 2 and the right swinging piece 3 form a whole; the plane of the swing pieces 2 and 3 is not parallel to the upper end face of the sensor fixing frame 8, and the swing pieces are arranged at an angle with each other, so that in the rotating process, the distance from the left swing piece and the right swing piece to the eddy current sensor changes, and one swing piece is enlarged while the other swing piece is reduced.
Further, the eddy current sensors 4 and 5 comprise a first eddy current sensor 4 and a second eddy current sensor 5, and the types and performances of the two eddy current sensors 4 and 5 are completely the same; each eddy current sensor 4, 5 is opposed to but not in contact with one end of the oscillating piece.
Further, the sensor fixing frame 8 is connected with the base 6 through the connecting support 7, and two symmetrical holes are formed in the middle of the sensor fixing frame 8 and used for fixing the two eddy current sensors 4 and 5.
Further, the change of the distance between the eddy current sensor and the swinging sheet forms a pair of differential signals, and the inductance of the eddy current is changed, so that the change of the distance and the change of the angle of the steering mirror 1 can be obtained through the change of the inductance so as to measure the rotation angle.
Further, when the range of the rotation angle of the turning mirror 1 is ± 13 °, the distance between the oscillating piece and the eddy current sensor changes to ± 0.3 mm.
Further, the one-dimensional rotation angle measuring device has an angular resolution of
In summary, the present invention provides a one-dimensional rotation angle measuring device based on eddy current, which includes a fixed portion and a rotating portion, wherein the fixed portion includes eddy current sensors 4 and 5, a sensor fixing frame 8 and a base 6, and the rotating portion includes a steering mirror 1 and oscillating pieces 2 and 3. The swinging pieces 2 and 3 are fixedly connected with the steering mirror 1 through a deep groove ball bearing 10, and the swinging pieces 2 and 3 swing along with the rotation of the steering mirror 1; the turning mirror 1 is usually driven by a voice coil motor or a piezo ceramic motor to form different turning angles. The swinging pieces 2 and 3 comprise a left swinging piece 2 and a right swinging piece 3 which are integrated; the plane that the swing piece was located is an inclined plane, and with the up end of sensor mount nonparallel, consequently at the in-process of rotatory, the distance that two swing pieces about will change to eddy current sensor, and one grow and another diminishes. The eddy current sensors 4 and 5 include a first eddy current sensor 4 and a second eddy current sensor 5, which correspond to the left oscillating piece 2 and the end having the oscillating piece 3, respectively, but do not contact each other. The changes of the distances between the first eddy current sensor 4 and the second eddy current sensor 5 and between the left swinging piece 2 and the right swinging piece 3 form a pair of differential signals, and the inductance of the eddy current is changed, so that the changes of the distances and the changes of the angles of the steering mirror 1 can be obtained through the changes of the inductance, and the purpose of measuring the rotation angle is achieved.
Three beneficial effects
The technical scheme of the invention has the following beneficial technical effects:
the invention provides a one-dimensional rotation angle measuring device based on eddy current, which adopts eddy current differential signals for measurement, belongs to a non-contact measuring mode and has no invasion, thereby avoiding the influence of external factors such as temperature, friction and the like on the measuring precision of a sensor. The eddy current-based one-dimensional corner measuring device overcomes the defects that the measuring accuracy of an angle sensor with a small volume in the prior art is difficult to improve and the measuring range is small, improves the measuring accuracy and enlarges the measuring range. The one-dimensional corner measuring device based on the eddy current is simple in structure, high in angle measuring accuracy, high in economy, convenient and fast to implement and easy to realize batch manufacturing.
Drawings
FIG. 1 is a three-dimensional perspective view of a one-dimensional eddy current based rotation angle measuring device according to the present invention;
FIG. 2 is a bottom-up view of the eddy current based one-dimensional rotation angle measuring device of FIG. 1 with the sensor holder removed;
fig. 3 is a schematic diagram of the relative positions of the eddy current sensor, the wobble plate, and the turning mirror.
Reference numerals:
1: a steering mirror; 2: a left swinging sheet; 3: a right swing piece; 4: a first eddy current sensor; 5: a second eddy current sensor; 6: a base; 7: connecting a bracket; 8: a sensor mount; 9: a wobble plate chassis; 10: a deep groove ball bearing; 21: the distance from the left swinging piece to the first eddy current sensor; 22: the distance from the right swinging piece to the second eddy current sensor.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings in conjunction with the following detailed description. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
Fig. 1 is a three-dimensional perspective view of a one-dimensional rotation angle measuring device based on eddy current according to the present invention. The one-dimensional rotation angle measuring device mainly comprises a fixed part and a rotating part, wherein the fixed part comprises a base 6, eddy current sensors 4 and 5 and a sensor fixing frame 8; the rotating part comprises a steering mirror 1 and swinging pieces 2 and 3, wherein the swinging pieces 2 and 3 are fixedly connected with the steering mirror 1 through deep groove ball bearings 10, and the swinging pieces 2 and 3 swing along with the rotation of the steering mirror 1; the turning mirror 1 is typically driven by a voice coil motor or a piezo ceramic motor to form different angles of rotation. The swing pieces 2 and 3 comprise a left swing piece 2 and a right swing piece 3 which are integrated, namely, the left swing piece 2 and the right swing piece 3 jointly form a plane; the plane that left swing piece 2 and right swing piece 3 are located is an inclined plane, with the up end of sensor mount 8 nonparallel, that is to say, the plane that left swing piece 2 and right swing piece 3 constitute and the plane that sensor mount 8 is located each other becomes certain angle, therefore, in rotatory in-process, left swing piece 2 and right swing piece 3 respectively with the vortex sensor 4, 5 top plane's distance can change. The eddy current sensors 4, 5 include a first eddy current sensor 4 and a second eddy current sensor 5, and the types and performances of the two eddy current sensors 4, 5 are generally identical to make the measurement result more accurate. Two eddy current sensors 4, 5 align with left swing piece 2 and right swing piece 3 respectively, and the distribution of symmetry is in sensor mount both sides, and each eddy current sensor 4, 5 corresponds each other with the one end of a swing piece 2, 3 respectively, but not mutual contact. Thus, during the rotation, the distance between the left and right swinging pieces 2 and 3 and the corresponding eddy current sensors 4 and 5 respectively changes. The sensor fixing frame 8 is positioned below the left swinging piece 2 and the right swinging piece 3, and the plane where the sensor fixing frame 8 is positioned is parallel to the plane where the base 6 and the swinging piece chassis 9 are positioned. The sensor holder 8 is fastened to the base 6 by a connecting bracket 7 through screws, and the center of the sensor holder 8 is provided with two symmetrical holes for fixing the two eddy current sensors 4 and 5.
Fig. 2 is a bottom view of the one-dimensional rotation angle measuring device of fig. 1 with the sensor holder removed and the sensor holder removed. The relative positional relationship in the horizontal direction of the base 6, the deep groove ball bearing 10, the oscillating pieces 2, 3, and the eddy current sensors 4, 5 can be seen more clearly from the bottom view. The swinging pieces 2 and 3 are positioned in the swinging piece chassis 9 and have a certain distance with the chassis 9, so that friction caused by contact is prevented. The planes of the swinging pieces 2 and 3 are inclined planes, one side of each inclined plane is low, the other side of each inclined plane is high, the inclined planes are not parallel to the plane of the swinging piece chassis 9, and the planes of the swinging pieces 2 and 3 and the plane of the swinging piece chassis 9 form a certain angle. The upper part and the lower part of the swinging sheet chassis 9 are respectively provided with an installation lug, and the installation lugs and the screws are fixedly connected with the base 6.
Fig. 3 is a schematic diagram of the relative positions of the eddy current sensor, the wobble plate, and the turning mirror. The relative position of the eddy current sensors 4, 5, the oscillating plates 2, 3 and the steering mirror 1 in a direction perpendicular to the horizontal plane can be seen from the figure. It can also be seen from fig. 3 that the plane in which the oscillating plates 2, 3 lie is an inclined plane which is not parallel to the plane in which the base 6 lies. Each eddy current sensor 4, 5 corresponds to one end of one of the oscillating pieces 2, 3, respectively, but does not contact each other, which provides a space for the oscillation of the oscillating pieces 2, 3. For example, as shown in fig. 3, the left oscillating piece 2 corresponds to the first eddy current sensor 4, and the right oscillating piece 3 corresponds to the second eddy current sensor 5, but the left oscillating piece 2 and the right oscillating piece 3 are not in contact with the first and second eddy current sensors 4 and 5, respectively, and are separated by a distance therebetween, wherein the distance between the left oscillating piece 2 and the first eddy current sensor 4 is a distance indicated by a double arrow 21, and the distance between the right oscillating piece 3 and the second eddy current sensor 5 is a distance indicated by a double arrow 22. When the steering mirror 1 deflects, the distance 21 between the left swing piece 2 and the first eddy current sensor 4 and the distance 22 between the right swing piece 3 and the second eddy current sensor 5 both change in the same magnitude and in opposite directions. For example, when the steering mirror 1 is rotated in the direction indicated by the arrow 30 in fig. 3, the distance 21 between the left oscillating piece 2 and the first eddy current sensor 4 decreases, and the distance 22 between the right oscillating piece 3 and the second eddy current sensor 5 increases. According to the Faraday's electromagnetic induction principle, the block-shaped metal conductor is placed in a changing magnetic field or does not have to be in a block shape when cutting magnetic lines of force in the magnetic field, and no eddy current exists when cutting a non-changing magnetic field, and eddy current, namely eddy current, is generated in the conductor. When the distance between the oscillating plates 2 and 3 and the eddy current sensors 4 and 5 changes, the Q value of a coil in a probe of the eddy current sensor also changes, the change of the Q value causes the change of the amplitude of the oscillating voltage, and the oscillating voltage changing along with the distance is converted into the voltage change through the processes of detection, filtering, linear compensation and amplification normalization, and finally the mechanical displacement (the gap between the eddy current sensor and the oscillating plates) is converted into the voltage. The change in the distance 21, 22 of the oscillating plates 2, 3 to the eddy current sensors 4, 5 corresponds to the angle of rotation of the steering mirror. The maximum rotation angle of the steering mirror is 13 °, the maximum displacement corresponding to the distances 21, 22 is 0.3mm, and the angular resolution is therefore approximately 10 μ rad. Compared with the prior art, the measurement precision is greatly improved.
In summary, the present invention provides a one-dimensional rotation angle measuring device based on eddy current, which includes a fixed portion and a rotating portion, wherein the fixed portion includes eddy current sensors 4 and 5, a sensor fixing frame 8 and a base 6, and the rotating portion includes a steering mirror 1 and oscillating pieces 2 and 3. The swinging pieces 2 and 3 are fixedly connected with the steering mirror 1 through a deep groove ball bearing 10, and the swinging pieces 2 and 3 swing along with the rotation of the steering mirror 1; the turning mirror 1 is usually driven by a voice coil motor or a piezo ceramic motor to form different turning angles. The swinging pieces 2 and 3 comprise a left swinging piece 2 and a right swinging piece 3 which are integrated; the plane that the swing piece was located is an inclined plane, and with the up end of sensor mount nonparallel, consequently at the in-process of rotatory, the distance that two swing pieces about will change to eddy current sensor, and one grow and another diminishes. The eddy current sensors 4 and 5 include a first eddy current sensor 4 and a second eddy current sensor 5, which correspond to the left oscillating piece 2 and the end having the oscillating piece 3, respectively, but do not contact each other. The changes of the distances between the first eddy current sensor 4 and the second eddy current sensor 5 and between the left swinging piece 2 and the right swinging piece 3 form a pair of differential signals, and the inductance of the eddy current is changed, so that the changes of the distances and the changes of the angles of the steering mirror 1 can be obtained through the changes of the inductance, and the purpose of measuring the rotation angle is achieved.
Therefore, the eddy current-based one-dimensional rotation angle measuring device provided by the invention adopts eddy current differential signals for measurement, belongs to a non-contact measurement mode, and avoids the influence of external factors such as temperature, friction and the like on the measurement precision of the sensor. The method overcomes the defects that the measurement precision of the small-size angle sensor in the prior art is difficult to improve and the measurement range is small. The one-dimensional corner measuring device based on the eddy current is simple in structure, high in angle measuring accuracy, high in economy, convenient and fast to implement and easy to realize batch manufacturing.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.
Claims (6)
1. A one-dimensional rotation angle measuring device (100) based on electric eddy current is characterized in that the one-dimensional rotation angle measuring device (100) comprises a fixed part and a rotating part, the fixed part comprises electric eddy current sensors (4, 5), a sensor fixing frame (8) and a base (6), and the rotating part comprises a steering mirror (1) and swinging pieces (2, 3);
the swinging pieces (2 and 3) are fixedly connected with the steering mirror (1) through a deep groove ball bearing (10), and the swinging pieces (2 and 3) swing along with the rotation of the steering mirror (1); the steering mirror (1) is driven by a voice coil motor or a piezoelectric ceramic motor to form different rotation angles;
the swinging pieces (2 and 3) comprise a left swinging piece (2) and a right swinging piece (3), and the left swinging piece (2) and the right swinging piece (3) form a whole; the plane of the swinging pieces (2 and 3) is not parallel to the upper end face of the sensor fixing frame (8), and the swinging pieces are arranged at an angle with each other, so that the distance from the left swinging piece and the right swinging piece to the eddy current sensor can be changed in the rotating process, one swinging piece is enlarged, and the other swinging piece is reduced.
2. The one-dimensional rotation angle measuring device according to claim 1, wherein the eddy current sensors (4, 5) comprise a first eddy current sensor (4) and a second eddy current sensor (5), and the two eddy current sensors (4, 5) have the same type performance; each eddy current sensor (4, 5) is opposite to one end of the swinging sheet but not in contact with the swinging sheet.
3. One-dimensional rotation angle measuring device according to claim 1, wherein the sensor holder (8) is connected to the base (6) by a connecting bracket (7), and the sensor holder (8) has two symmetrical holes in the middle for fixing the two eddy current sensors (4, 5).
4. A one-dimensional rotation angle measuring device according to any one of claims 1 to 3, wherein the eddy current sensors (4, 5) and the change of the distance of the oscillating piece constitute a pair of differential signals, and the inductance of the eddy current is changed, so that the change of the distance and the change of the angle of the steering mirror (1) are obtained through the change of the inductance to measure the rotation angle.
5. A one-dimensional rotation angle measuring device according to any one of claims 1 to 3, wherein the distance from the oscillating piece (2, 3) to the eddy current sensor (4, 5) changes to ± 0.3mm when the rotation angle of the steering mirror (1) ranges from ± 13 °.
6. The one-dimensional rotation angle measuring device according to claim 5, wherein the angular resolution is:
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|---|---|---|---|---|
| JP3567443B2 (en) * | 1996-01-31 | 2004-09-22 | 株式会社安川電機 | Resolver |
| CN103968819A (en) * | 2014-05-27 | 2014-08-06 | 上海新跃仪表厂 | Non-contact type measuring sensor for measuring two-dimensional tilt angle of gyro flywheel high-speed rotor |
| CN104583728A (en) * | 2012-08-22 | 2015-04-29 | 罗伯特·博世有限公司 | Sensor arrangement for detecting angles of rotation on a rotated component |
| CN107655401A (en) * | 2017-09-27 | 2018-02-02 | 天津津航技术物理研究所 | A kind of finite angle measuring method based on Hall effect |
| CN108627122A (en) * | 2018-04-26 | 2018-10-09 | 大连理工大学 | A kind of angle displacement measuring device and its application method |
| CN208953764U (en) * | 2018-11-20 | 2019-06-07 | 北京瑞控信科技有限公司 | A kind of one-dimensional swing fast mirror |
-
2019
- 2019-09-30 CN CN201910937508.7A patent/CN110645889B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3567443B2 (en) * | 1996-01-31 | 2004-09-22 | 株式会社安川電機 | Resolver |
| CN104583728A (en) * | 2012-08-22 | 2015-04-29 | 罗伯特·博世有限公司 | Sensor arrangement for detecting angles of rotation on a rotated component |
| CN103968819A (en) * | 2014-05-27 | 2014-08-06 | 上海新跃仪表厂 | Non-contact type measuring sensor for measuring two-dimensional tilt angle of gyro flywheel high-speed rotor |
| CN107655401A (en) * | 2017-09-27 | 2018-02-02 | 天津津航技术物理研究所 | A kind of finite angle measuring method based on Hall effect |
| CN108627122A (en) * | 2018-04-26 | 2018-10-09 | 大连理工大学 | A kind of angle displacement measuring device and its application method |
| CN208953764U (en) * | 2018-11-20 | 2019-06-07 | 北京瑞控信科技有限公司 | A kind of one-dimensional swing fast mirror |
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Address after: Building 1, 3rd Floor, Hefei Luyang Big Data Industrial Park, No. 868 Qinghe Road, Luyang District, Hefei City, Anhui Province, 230041 Patentee after: Anhui Ruikongxin Optoelectronic Technology Co.,Ltd. Country or region after: China Address before: 100085 1006, 1st floor, lin831-nei1, Changping Road, Anning North Road, Haidian District, Beijing Patentee before: Beijing ruikongxin Technology Co.,Ltd. Country or region before: China |