CN110630757B - 真空阀 - Google Patents

真空阀 Download PDF

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Publication number
CN110630757B
CN110630757B CN201910540200.9A CN201910540200A CN110630757B CN 110630757 B CN110630757 B CN 110630757B CN 201910540200 A CN201910540200 A CN 201910540200A CN 110630757 B CN110630757 B CN 110630757B
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China
Prior art keywords
rod
main
aforementioned
sub
flow path
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CN201910540200.9A
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English (en)
Chinese (zh)
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CN110630757A (zh
Inventor
圆崎明
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SMC Corp
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SMC Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F16K31/508—Mechanical actuating means with screw-spindle or internally threaded actuating means the actuating element being rotatable, non-rising, and driving a non-rotatable axially-sliding element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/44—Details of seats or valve members of double-seat valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/52—Means for additional adjustment of the rate of flow
    • F16K1/523—Means for additional adjustment of the rate of flow for limiting the maximum flow rate, using a stop
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/52—Means for additional adjustment of the rate of flow
    • F16K1/526—Means for additional adjustment of the rate of flow for limiting the maximum flow rate, using a second valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K39/00—Devices for relieving the pressure on the sealing faces
    • F16K39/02—Devices for relieving the pressure on the sealing faces for lift valves
    • F16K39/024—Devices for relieving the pressure on the sealing faces for lift valves using an auxiliary valve on the main valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86928—Sequentially progressive opening or closing of plural valves
    • Y10T137/86936—Pressure equalizing or auxiliary shunt flow
    • Y10T137/86944—One valve seats against other valve [e.g., concentric valves]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86928—Sequentially progressive opening or closing of plural valves
    • Y10T137/86936—Pressure equalizing or auxiliary shunt flow
    • Y10T137/86944—One valve seats against other valve [e.g., concentric valves]
    • Y10T137/86976—First valve moves second valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86928—Sequentially progressive opening or closing of plural valves
    • Y10T137/86936—Pressure equalizing or auxiliary shunt flow
    • Y10T137/86944—One valve seats against other valve [e.g., concentric valves]
    • Y10T137/86984—Actuator moves both valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87096—Valves with separate, correlated, actuators
    • Y10T137/87121—Coaxial stems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87378—Second valve assembly carried by first valve head

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Details Of Valves (AREA)
  • Lift Valve (AREA)
CN201910540200.9A 2018-06-22 2019-06-21 真空阀 Active CN110630757B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018119238A JP7106062B2 (ja) 2018-06-22 2018-06-22 真空バルブ
JP2018-119238 2018-06-22

Publications (2)

Publication Number Publication Date
CN110630757A CN110630757A (zh) 2019-12-31
CN110630757B true CN110630757B (zh) 2023-02-28

Family

ID=66676324

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910540200.9A Active CN110630757B (zh) 2018-06-22 2019-06-21 真空阀

Country Status (6)

Country Link
US (1) US10895331B2 (enExample)
EP (1) EP3587881B1 (enExample)
JP (1) JP7106062B2 (enExample)
KR (1) KR102677491B1 (enExample)
CN (1) CN110630757B (enExample)
TW (1) TWI799590B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7025735B2 (ja) * 2020-03-30 2022-02-25 株式会社不二工機 弁装置
KR102316461B1 (ko) * 2020-05-14 2021-10-22 그린산업 주식회사 전자식 팽창밸브용 포핏 밸브의 기밀 고정 구조 및 이를 포함하는 전자식 팽창밸브
KR102625445B1 (ko) * 2020-10-23 2024-01-16 주식회사 에스알티 앵글밸브
CN114811153B (zh) * 2021-01-21 2025-09-19 米洛创新(深圳)有限公司 集成盒及气动高真空挡板阀
DE102021102283A1 (de) * 2021-02-01 2022-08-04 Vat Holding Ag Verschlussvorrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
DE102021102284A1 (de) * 2021-02-01 2022-08-04 Vat Holding Ag Ventilplatte für eine Verschlusseinrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
CN114183539B (zh) * 2021-11-29 2024-05-10 上海齐耀动力技术有限公司 一种磁力驱动式真空抽拉阀
KR102718793B1 (ko) * 2022-10-14 2024-10-17 (주)다다코리아 버큠 씰오프 밸브 오퍼레이팅장치
KR102792640B1 (ko) 2023-04-21 2025-04-22 (주)엔투텍 냉각식 앵글밸브

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58130350A (ja) * 1982-12-27 1983-08-03 Canon Inc 複写機等の制御方法
WO1992008918A1 (en) * 1990-11-19 1992-05-29 Tour & Andersson Ab A valve for a two-way or multiple-way flow regulation
US5263679A (en) * 1993-03-10 1993-11-23 Bushnell Engineering, Inc. Valve with actuator
US6289932B1 (en) * 1999-06-28 2001-09-18 Nor-Cal Products, Inc. Dual port soft start valve
JP2001263532A (ja) * 2000-03-21 2001-09-26 Smc Corp パイロット式２ポート真空バルブ
TW487152U (en) * 2000-09-18 2002-05-11 Smc Corp Guiding two-port vacuum valve
JP2006029387A (ja) * 2004-07-13 2006-02-02 Japan Steel Works Ltd:The 流体圧開閉弁
CN105736308A (zh) * 2014-12-26 2016-07-06 株式会社Tgk 可变容量压缩机用控制阀

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH594156A5 (enExample) 1975-07-25 1977-12-30 Sulzer Ag
JPS601491Y2 (ja) * 1982-12-28 1985-01-16 日本電子株式会社 真空弁装置
JP3745427B2 (ja) 1995-11-14 2006-02-15 Ｓｍｃ株式会社 真空圧制御用スロー排気バルブ
DE10006326A1 (de) * 2000-02-12 2001-08-16 Gemue Gebr Mueller Appbau Gmbh Handantrieb für Absperrorgane
JP3618286B2 (ja) * 2000-09-07 2005-02-09 Ｓｍｃ株式会社 スムース排気弁
DE10249161B3 (de) * 2002-10-22 2004-01-29 Robert Bosch Gmbh Vorrichtung zur Einstellung eines Ankerhubs eines Magnetventils
AU2003211853A1 (en) * 2003-03-07 2004-09-28 Ckd Corporation Flow control valve
US20070007475A1 (en) * 2005-07-07 2007-01-11 Peter Zvokelj Vacuum valve
KR101013137B1 (ko) * 2010-11-19 2011-02-10 이동민 진공 공정용 밸브
US8671987B2 (en) * 2010-12-15 2014-03-18 Mks Instruments, Inc. Two-stage, slow-start valve apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58130350A (ja) * 1982-12-27 1983-08-03 Canon Inc 複写機等の制御方法
WO1992008918A1 (en) * 1990-11-19 1992-05-29 Tour & Andersson Ab A valve for a two-way or multiple-way flow regulation
US5263679A (en) * 1993-03-10 1993-11-23 Bushnell Engineering, Inc. Valve with actuator
US6289932B1 (en) * 1999-06-28 2001-09-18 Nor-Cal Products, Inc. Dual port soft start valve
JP2001263532A (ja) * 2000-03-21 2001-09-26 Smc Corp パイロット式２ポート真空バルブ
TW487152U (en) * 2000-09-18 2002-05-11 Smc Corp Guiding two-port vacuum valve
JP2006029387A (ja) * 2004-07-13 2006-02-02 Japan Steel Works Ltd:The 流体圧開閉弁
CN105736308A (zh) * 2014-12-26 2016-07-06 株式会社Tgk 可变容量压缩机用控制阀

Also Published As

Publication number Publication date
TWI799590B (zh) 2023-04-21
CN110630757A (zh) 2019-12-31
US10895331B2 (en) 2021-01-19
KR102677491B1 (ko) 2024-06-21
JP2019219052A (ja) 2019-12-26
JP7106062B2 (ja) 2022-07-26
EP3587881A1 (en) 2020-01-01
KR20200000345A (ko) 2020-01-02
US20190390792A1 (en) 2019-12-26
TW202001135A (zh) 2020-01-01
EP3587881B1 (en) 2021-03-10

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