CN110614248A - High-precision constant-temperature liquid storage device and OLED (organic light emitting diode) panel cleaning machine with same - Google Patents
High-precision constant-temperature liquid storage device and OLED (organic light emitting diode) panel cleaning machine with same Download PDFInfo
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- CN110614248A CN110614248A CN201910874588.6A CN201910874588A CN110614248A CN 110614248 A CN110614248 A CN 110614248A CN 201910874588 A CN201910874588 A CN 201910874588A CN 110614248 A CN110614248 A CN 110614248A
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- tank body
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to a high-precision constant-temperature liquid storage device and an OLED (organic light emitting diode) panel cleaning machine with the same, wherein the high-precision constant-temperature liquid storage device comprises a tank body, a cooling disc, a heater and a circulating pipeline are arranged in the tank body, a temperature control rod and a liquid level ball arm are arranged in the tank body, the temperature control rod is used for detecting the temperature of liquid medicine in a liquid storage tank and feeding back a temperature detection signal to an external controller, the liquid level ball arm is used for detecting the height of the liquid medicine in the liquid storage tank and feeding back a liquid level detection signal to the external controller, and the controller controls the work of a liquid inlet pipe, a liquid outlet pipe, the cooling disc and the heater according to the returned temperature detection signal and. The invention can cool and heat the liquid medicine, realize the constant temperature heat preservation of the liquid medicine, thereby improving the flat plate cleaning quality of the subsequent station, simultaneously monitor and control the amount of the liquid medicine, and ensure the normal operation of the production work of the OLED flat plate cleaning machine with the liquid medicine.
Description
Technical Field
The invention relates to the technical field of flat plate cleaning equipment, in particular to a high-precision constant-temperature liquid storage device.
Background
In the production and processing process of the OLED substrate, a constant-temperature liquid medicine workpiece is often required to be cleaned, but most of the existing operation procedures are water with a required temperature formed by mixing cold water and hot water with liquid medicine, and a means for adjusting the temperature of the liquid medicine by arranging a heater in a liquid medicine tank is also provided, but the heating mode easily causes overhigh local temperature and influences the cleaning quality, and after the OLED substrate is stored for a long time, the temperature of the liquid medicine can be changed or the final cleaning quality can be influenced.
Therefore, how to ensure the temperature of the liquid medicine entering the cleaning station is a technical problem which needs to be solved urgently at present.
Disclosure of Invention
The invention aims to provide a high-precision constant-temperature liquid storage device which can cool and heat liquid medicine, realize constant-temperature heat preservation of the liquid medicine, improve the flat plate cleaning quality of subsequent stations, monitor and control the amount of the liquid medicine, and ensure the normal operation of the production work of an OLED flat plate cleaning machine with the liquid medicine storage device.
In order to achieve the purpose, the invention adopts the technical scheme that:
the invention provides a high-precision constant-temperature liquid storage device which comprises a tank body, wherein a cooling disc, a heater and a circulating pipeline are arranged in the tank body, a temperature control rod and a liquid level ball arm are arranged in the tank body, the temperature control rod is used for detecting the temperature of liquid medicine in a liquid storage tank and feeding back a temperature detection signal to an external controller, the liquid level ball arm is used for detecting the height of the liquid medicine in the liquid storage tank and feeding back a liquid level detection signal to the external controller, and the controller controls the work of a liquid inlet pipe, a liquid outlet pipe, the cooling disc and the heater according to the returned temperature detection signal and the returned liquid level detection signal.
For the above technical solution, the applicant has further optimization measures.
Further, be provided with two temperature control stick in the cell body, including being used for detecting the first temperature control stick of high temperature and being used for detecting microthermal second temperature control stick, first temperature control stick with the signal end of second temperature control stick inserts respectively the controller.
Furthermore, the liquid level cue comprises a floating ball pipe, a floating ball is arranged in the floating ball pipe, and at least four detection points are arranged in the floating ball pipe and respectively and correspondingly detect the upper limit liquid level, the lower limit liquid level, the high liquid level and the low liquid level.
Further, the cooling disc is fixedly arranged at the bottom of the groove body, the heater comprises a plurality of heating pipes horizontally penetrating through the side plate of the groove body and fixed with the side wall, and the heater and the cooling disc are oppositely arranged in the groove body.
Furthermore, still be equipped with circulating line in the cell body, circulating line is used for into water one end be located the cell body and is close to the position of heater and be close to the cell body bottom, and the other end that goes out water then is located the cell body the top of cooling disc.
Furthermore, a window for maintenance is formed in one side plate of the groove body, a maintenance window flange is arranged on the upper cover on the outer side of the window, the maintenance window flange is fixed to the outer wall of the side plate in a welded mode, a maintenance window cover plate is fixed to the outer side of the maintenance window flange, and the maintenance window cover plate is locked to the maintenance window flange through nuts.
Further, a handle is fixed to an outer side of the maintenance window cover plate.
Furthermore, an overflow port is formed in one side plate of the groove body, the overflow port is a through hole formed in the position, close to the upper portion, of the side plate, a limiting groove is formed in the inner side face of the side plate and surrounds the overflow port, a box-shaped flow guide box is clamped on the limiting groove, the top of the flow guide box is open, and the flow guide box is communicated with the overflow port.
Particularly, the invention also provides an OLED panel cleaning machine which comprises a high-precision constant-temperature liquid storage device for storing liquid medicine for cleaning, wherein the high-precision constant-temperature liquid storage device is as described above.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
the high-precision constant-temperature liquid storage device can monitor and control the temperature of the liquid medicine by arranging the temperature control rod, monitor and control the capacity of the liquid medicine in the tank body by the liquid level floating ball rod, ensure the supply of the liquid medicine required by daily production, form the liquid medicine circulation reciprocating in the tank body, realize the liquid turnover between the heater and the cooling disc, improve the temperature consistency of the liquid medicine in the tank body, and further directly be used for cleaning a flat plate when the liquid medicine is conveyed to a cleaning station in an OLED flat plate cleaning machine and ensure the cleaning quality.
Drawings
Some specific embodiments of the invention will be described in detail hereinafter, by way of illustration and not limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:
FIG. 1 is a schematic diagram of the overall structure of a high-precision constant-temperature liquid storage device according to an embodiment of the invention;
fig. 2 is a schematic view showing an internal structure of the high-precision thermostatic liquid storage device shown in fig. 1, in which a top plate and a side plate are removed to show an internal structure of the liquid storage tank.
Wherein the reference numerals are as follows:
1. the device comprises a tank body, 2, a cooling disc, 3, a heater, 4, a circulating pipeline, 5, a temperature control rod, 6, a liquid level cue, 7, an exhaust port, 8, a liquid taking port, 9, an overflow port, 10, a flow guide box, 11, a maintenance window flange, 12, a maintenance window cover plate, 13 and a handle.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", "third" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance, such as the first, second and third heating tubes, in order to be able to describe the product structure more clearly, without limiting its importance.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
This embodiment has described a high accuracy constant temperature stock solution device, as shown in fig. 1, fig. 2, including cell body 1, be provided with cooling disc 2, heater 3 and circulation line 4 in cell body 1 be provided with temperature control stick 5 and liquid level cue 6 in the cell body 1, temperature control stick 5 is used for detecting the liquid medicine temperature in the reservoir and feeds back temperature detected signal to outside controller (not shown in the figure), liquid level cue 6 is used for detecting the liquid medicine height in the reservoir and feeds back liquid level detected signal to outside controller, the controller is according to the temperature detected signal that returns with the work of liquid level detected signal control feed liquor pipe, drain pipe, cooling disc 2 and heater 3.
An exhaust port 7 is arranged on the top plate of the tank body 1 and can be externally connected with an exhaust system for removing volatilized liquid medicine gas, a liquid taking port 8 is arranged on the side plate of the side face, and the liquid taking port 8 is externally connected with a valve and then connected into a subsequent cleaning machine.
So, adopt temperature control stick 5 to monitor and control the liquid medicine temperature in cell body 1, monitor and control the liquid medicine capacity in cell body 1 through liquid level ball arm 6 simultaneously, guarantee that the daily production of supply is required, improve the liquid medicine temperature uniformity in cell body 1, and then can directly be used for dull and stereotyped washing and can guarantee cleaning quality when carrying the liquid medicine to the cleaning station in OLED panel cleaning machine.
Specifically, two temperature control rods 5 are arranged in the tank body 1, and include a first temperature control rod 5 for detecting high temperature and a second temperature control rod 5 for detecting low temperature, and signal ends of the first temperature control rod 5 and the second temperature control rod 5 are respectively connected to the controller. Two temperature control rods 5 are adopted to carry out independent high-low temperature monitoring, so that the monitoring accuracy can be improved, the temperature condition of the liquid medicine can be fed back in time, and the final liquid medicine quality can be improved.
The cooling plate 2 is fixedly arranged at the bottom of the tank body 1, the heater 3 comprises a plurality of heating pipes horizontally arranged on the side plates of the tank body 1 in a penetrating way and is fixed with the side walls, and the heater 3 and the cooling plate 2 are oppositely arranged in the tank body 1. Still be equipped with circulation pipeline 4 in the cell body 1, circulation pipeline 4 is used for the one end of intaking to be located and is close to in the cell body 1 the position of heater 3 just is close to cell body 1 bottom, and the other end of going out water then is located in the cell body 1 the top of cooling pan 2 combines circulation pipeline 4's design, and the liquid medicine circulation that constitutes in cell body 1 is reciprocal, can realize the liquid turnover between heater 3 and cooling pan 2, will effectively equalize the liquid medicine temperature of cell body 1, guarantees that the liquid medicine temperature can maintain a comparatively stable state.
Be provided with overflow mouth 9 on a curb plate of cell body 1, overflow mouth 9 is for seting up the through-hole that the curb plate leaned on the upper position on the medial surface of curb plate, wind overflow mouth 9 is provided with spacing recess the last card of spacing recess is equipped with boxlike water conservancy diversion box 10, the open-top of water conservancy diversion box 10, just water conservancy diversion box 10 with overflow mouth 9 is linked together.
The liquid level cue 6 comprises a ball float tube, a ball float is arranged in the ball float tube, and at least four detection points are arranged in the ball float tube and respectively and correspondingly detect an upper limit liquid level, a lower limit liquid level, a high liquid level and a low liquid level. Wherein, the top position that highly equals overflow port 9 of upper limit liquid level is as the fluid infusion upper limit, and lower limit liquid level is used for monitoring whether there is the liquid medicine in the cell body 1 and lower limit liquid level also is higher than cooling pan 2 and heater 3 to protect interior equipment subassembly, and the high bottom position that highly equals overflow port 9 of high liquid level, and low liquid level is for detecting out the liquid surplus and diminishes, and the monitoring is with warning usefulness in advance, and the height is about the middle part of floating the bulb pipe.
In addition, set up the window of overhauing usefulness on a curb plate of cell body 1 the window outside upper cover is equipped with maintenance window flange 11, maintenance window flange 11 with curb plate outer wall welded fastening maintenance window flange 11's the outside is fixed with maintenance window apron 12, maintenance window apron 12 passes through the nut locking maintenance window flange 11 is last maintenance window apron 12's the outside is fixed with handle 13.
When the maintenance is carried out, the maintenance window cover plate 12 can be rapidly disassembled from the maintenance window flange 11 only by unscrewing the nut, so that the maintenance is convenient, and the maintenance efficiency is improved.
In another embodiment, the OLED panel cleaning machine comprises a high-precision constant-temperature liquid storage device for storing liquid medicine for cleaning, and the high-precision constant-temperature liquid storage device is as described above.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the content of the present invention and implement the invention, and not to limit the scope of the invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the scope of the present invention.
Claims (9)
1. The utility model provides a high accuracy constant temperature stock solution device, includes the cell body, is provided with cooling plate, heater and circulating line in the cell body, its characterized in that be provided with temperature control stick and liquid level cue in the cell body, the temperature control stick is used for detecting the liquid medicine temperature in the reservoir and feeds back temperature detect signal to outside controller, liquid level cue is used for detecting the liquid medicine height in the reservoir and feeds back liquid level detect signal to outside controller, the controller is according to returning temperature detect signal with the work of liquid level detect signal control feed liquor pipe, drain pipe, cooling plate and heater.
2. The high-precision constant-temperature liquid storage device according to claim 1, wherein two temperature control rods are arranged in the tank body, and comprise a first temperature control rod for detecting high temperature and a second temperature control rod for detecting low temperature, and signal ends of the first temperature control rod and the second temperature control rod are respectively connected to the controller.
3. The high-precision constant-temperature liquid storage device according to claim 1, wherein the liquid level ball arm comprises a floating ball tube, a floating ball is arranged in the floating ball tube, and at least four detection points are arranged in the floating ball tube and respectively correspond to an upper limit liquid level, a lower limit liquid level, a high liquid level and a low liquid level.
4. The high-precision constant-temperature liquid storage device according to claim 1, wherein the cooling disc is fixedly arranged at the bottom of the tank body, the heater comprises a plurality of heating pipes horizontally penetrating through a side plate of the tank body and fixed with the side wall, and the heater and the cooling disc are oppositely arranged in the tank body.
5. The high-precision constant-temperature liquid storage device according to claim 4, wherein a circulating pipeline is further arranged in the tank body, one end of the circulating pipeline, which is used for water inflow, is located in the tank body and close to the heater and the bottom of the tank body, and the other end of the circulating pipeline, which is used for water outflow, is located in the tank body and above the cooling disc.
6. The high-precision constant-temperature liquid storage device according to claim 1, wherein a window for maintenance is formed in one side plate of the tank body, a maintenance window flange is arranged on an outer side of the window in a covering mode, the maintenance window flange is fixedly welded to the outer wall of the side plate, a maintenance window cover plate is fixedly arranged on the outer side of the maintenance window flange, and the maintenance window cover plate is locked to the maintenance window flange through a nut.
7. A high-precision thermostatic liquid storage device according to claim 6, wherein a handle is fixed to the outside of the maintenance window cover plate.
8. The high-precision constant-temperature liquid storage device according to claim 1, wherein an overflow port is formed in one side plate of the tank body, the overflow port is a through hole formed in the upper portion of the side plate, a limiting groove is formed in the inner side surface of the side plate and surrounds the overflow port, a box-shaped flow guide box is clamped in the limiting groove, the top of the flow guide box is open, and the flow guide box is communicated with the overflow port.
9. An OLED panel cleaning machine comprising a high precision thermostated reservoir for storing cleaning solution, characterized in that the high precision thermostated reservoir is as claimed in claims 1 to 8.
Priority Applications (1)
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CN201910874588.6A CN110614248A (en) | 2019-09-17 | 2019-09-17 | High-precision constant-temperature liquid storage device and OLED (organic light emitting diode) panel cleaning machine with same |
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CN201910874588.6A CN110614248A (en) | 2019-09-17 | 2019-09-17 | High-precision constant-temperature liquid storage device and OLED (organic light emitting diode) panel cleaning machine with same |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112676247A (en) * | 2020-11-30 | 2021-04-20 | 苏州市康普来表面处理科技有限公司 | Constant-temperature electroplating rinsing bath and constant-temperature aluminum alloy electroplating process |
CN113793819A (en) * | 2021-09-16 | 2021-12-14 | 长江存储科技有限责任公司 | Chemical tank and temperature control method thereof |
CN115763325A (en) * | 2023-01-10 | 2023-03-07 | 苏州桔云科技有限公司 | Liquid medicine storage device for wafer processing and wafer processing equipment |
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CN2470952Y (en) * | 2001-02-01 | 2002-01-09 | 胜开科技股份有限公司 | Washing device for semiconductor package product |
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CN206657253U (en) * | 2016-12-19 | 2017-11-21 | 杭州纽蓝科技有限公司 | A kind of laboratory High Accuracy Constant Temperature water circle device based on technology of Internet of things |
CN108442857A (en) * | 2018-04-28 | 2018-08-24 | 苏州晶洲装备科技有限公司 | A kind of sealing form |
CN109712910A (en) * | 2017-10-26 | 2019-05-03 | 株式会社斯库林集团 | Handle liquid supplying device, substrate board treatment and treatment fluid supply method |
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2019
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EP0776988A2 (en) * | 1995-12-01 | 1997-06-04 | Teisan Kabushiki Kaisha | Temperature regulation apparatus |
CN2470952Y (en) * | 2001-02-01 | 2002-01-09 | 胜开科技股份有限公司 | Washing device for semiconductor package product |
KR20130011389A (en) * | 2011-07-21 | 2013-01-30 | 삼성전자주식회사 | Control apparatus for water level |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112676247A (en) * | 2020-11-30 | 2021-04-20 | 苏州市康普来表面处理科技有限公司 | Constant-temperature electroplating rinsing bath and constant-temperature aluminum alloy electroplating process |
CN112676247B (en) * | 2020-11-30 | 2023-08-04 | 苏州市康普来新材料有限公司 | Constant-temperature aluminum alloy electroplating process using constant-temperature electroplating water washing tank |
CN113793819A (en) * | 2021-09-16 | 2021-12-14 | 长江存储科技有限责任公司 | Chemical tank and temperature control method thereof |
CN115763325A (en) * | 2023-01-10 | 2023-03-07 | 苏州桔云科技有限公司 | Liquid medicine storage device for wafer processing and wafer processing equipment |
CN115763325B (en) * | 2023-01-10 | 2024-02-23 | 苏州桔云科技有限公司 | Liquid medicine storage device for wafer processing and wafer processing equipment |
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