CN110596908B - Alignment method and device for multi-path light beam combination - Google Patents

Alignment method and device for multi-path light beam combination Download PDF

Info

Publication number
CN110596908B
CN110596908B CN201910871218.7A CN201910871218A CN110596908B CN 110596908 B CN110596908 B CN 110596908B CN 201910871218 A CN201910871218 A CN 201910871218A CN 110596908 B CN110596908 B CN 110596908B
Authority
CN
China
Prior art keywords
light
swinging
light beam
path
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910871218.7A
Other languages
Chinese (zh)
Other versions
CN110596908A (en
Inventor
韩旭东
徐新行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN201910871218.7A priority Critical patent/CN110596908B/en
Publication of CN110596908A publication Critical patent/CN110596908A/en
Application granted granted Critical
Publication of CN110596908B publication Critical patent/CN110596908B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C1/00—Measuring angles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The invention discloses an alignment method and device for multi-path light beam combination, which comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth swinging element, a light combination element, a light guide element, a light splitting element, a collimator and a beam reducing light tube, wherein an ith light beam emitted by the ith light source is reflected by the i-1 st swinging element and the i-2 th swinging element in sequence and enters the beam combination element, the beam combination element combines all paths of light beams, the light guide element divides the combined light output by the beam combination element into one path of light serving as a monitoring light beam, the light splitting element divides the monitoring light beam into one path of light which enters the collimator, and divides the other path of light which enters the beam reducing light tube. The alignment method and the alignment device for the multi-path light beam combination not only can correct the angle deviation of the light beam in the left-right direction and the high-low direction, but also can correct the position deviation of the light beam in the left-right direction and the high-low direction, does not need layered transmission of the light path, has relatively simple structure of the light path, and overcomes the problems in the prior art.

Description

Alignment method and device for multi-path light beam combination
Technical Field
The present invention relates to the field of beam alignment and beam combination technologies, and in particular, to an alignment method and an alignment apparatus for combining multiple optical beams.
Background
At present, in the field of photoelectric countermeasure, optical devices such as a fixed light guide mirror and a fixed beam combining mirror are adopted, and multi-path light beams are aligned and combined by a method of combining the light beams one by one.
In the chinese invention patent application with application publication No. CN108919480A, an automatic alignment device for combining multiple laser beams in the same wavelength band is disclosed, which adopts a two-dimensional placing table to realize automatic correction of the angular deviation of the laser beams, and adopts a translation table to realize automatic correction of the position deviation of the laser beams, so that the device has high beam combining precision and small installation and adjustment difficulty, and has an automatic compensation function for each beam deviation caused by temperature, stress change and the like. However, in order to realize the correction of the position difference of the light beam in the left and right directions, the light path must be transmitted in an up-down layered manner, and at least two sets of electric translation tables are needed to realize the correction of the position deviation of the light beam in the left and right directions. Therefore, the device not only has a complex light path composition structure, but also occupies a large volume and space, and cannot be applied to occasions where light path layered transmission cannot be realized for beam combination.
Disclosure of Invention
In view of the above, an object of the present invention is to provide an alignment method and apparatus for combining multiple optical beams, which can not only correct the angular deviation of the optical beams in the left-right and high-low directions, but also correct the positional deviation of the optical beams in the left-right and high-low directions, and do not require layered transmission of optical paths, and the optical path structure is relatively simple, thereby overcoming the problems in the prior art.
In order to solve the technical problems, the invention provides the following technical scheme:
an alignment device used in the method comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a light combining element, a light guiding element, a light splitting element, a collimator and a beam contracting light tube, wherein N is a positive integer greater than 1, and the swinging element comprises a two-dimensional swing table and a reflecting element arranged on the two-dimensional swing table;
the ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N;
the light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element;
the alignment correction is respectively carried out on each path of light beam according to the following steps, and the method comprises the following steps:
adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;
adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;
and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.
Preferably, the alignment device further comprises a wavelength gating element disposed on the optical path between the light guide element and the light splitting element, and the wavelength gating element is configured to allow the light of the wavelength band specified by the instruction to pass through and prevent the light of other wavelength bands except the light of the specified wavelength band from passing through according to the instruction.
Preferably, the two-dimensional swing table can swing respectively along two axes which are perpendicular to each other on the plane where the two-dimensional swing table is located.
Preferably, the swing element further comprises a base, and the two-dimensional swing table is mounted on the base.
Preferably, the light guide element is configured to reflect the combined light output by the beam combining element into one path of light, enter the main working optical path, and transmit the one path of light as the monitoring light beam.
Preferably, the angle deviation of the light beam fed back by the collimator and the reference light path is (x，y) Wherein a three-dimensional rectangular coordinate system is established by taking the direction of the reference light path as the direction of the z axis,xrepresenting the angle of the projection of the light beam in the plane xoz with the z-axis,ythe included angle between the projection of the light beam in the yoz plane and the z axis is shown, and the adjustment amount of the swing angle of the reflecting element of the i-2 th swing element is
Figure BDA0002202868340000031
So that the angular deviation of the light beam from the reference light path is within a first preset range,
Figure BDA0002202868340000032
the angle of adjustment of the reflecting element of the i-2 th rocking element around the E axis of the two-dimensional rocking platform is shown,
Figure BDA0002202868340000033
the angle of adjustment of the reflective element of the i-2 th rocking element around the F-axis of the two-dimensional rocking platform is shown, where the E-axis is in the vertical direction and the F-axis is in the horizontal direction when the two-dimensional rocking platform is installed in the apparatus.
Preferably, the position deviation of the light beam fed back by the beam reducing tube from the reference light path is (L)x，Ly) Wherein a three-dimensional rectangular coordinate system L is established by taking the direction of the reference light path as the z-axis directionxDenotes a deviation value L in the x-axis direction of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy planeyThe deviation value of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy plane in the y-axis direction is shown; the adjustment amount of the swing angle of the reflecting element of the i-1 th swing element is
Figure BDA0002202868340000034
So that the positional deviation of the light beam from the reference light path is within a second preset range, where M represents the distance from the incident point of the light beam on the reflecting element of the i-1 th rocking element to the incident point of the light beam on the next rocking element,
Figure BDA0002202868340000035
the angle of adjustment of the reflecting element of the i-1 th rocking element around the two-dimensional pendulum table E axis is shown,
Figure BDA0002202868340000036
the angle of adjustment of the reflective element of the i-1 th pendulum element around the F-axis of a two-dimensional pendulum platform, which is mounted in the apparatus with its E-axis in the vertical direction and the F-axis in the horizontal direction, is shown.
Preferably, N is 2, the 1 st to 2 nd swinging elements are used as beam combining elements, the 1 st light beam emitted by the 1 st light source is sequentially reflected by the 1 st to 1 st swinging elements and the 1 st to 2 nd swinging elements, the 2 nd light beam emitted by the 2 nd light source is sequentially reflected by the 2 nd to 1 st swinging elements and the 2 nd to 2 nd swinging elements and enters the 1 st to 2 nd swinging elements, and the 1 st to 2 nd swinging elements transmit the 2 nd light beam and combine the 1 st light beam and the 2 nd light beam.
An alignment device for combining multiple paths of light beams comprises a 1 st to an Nth light source, a 1 st-1 st to an Nth swinging element, a 1 st-2 nd to an Nth-2 th swinging element, a light combining element, a light guiding element, a light splitting element, a collimator, a beam reducing collimator and a processor, wherein N is a positive integer greater than 1, and the swinging element comprises a two-dimensional placing table and a reflecting element arranged on the two-dimensional placing table;
the ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N;
the light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element;
the processor is respectively connected with the collimator and the beam contracting light tube and is used for respectively carrying out alignment correction on each path of light beam according to the following steps, and the method comprises the following steps:
adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;
adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;
and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.
Preferably, N is 2, the 1 st to 2 nd swinging elements are used as beam combining elements, the 1 st light beam emitted by the 1 st light source is sequentially reflected by the 1 st to 1 st swinging elements and the 1 st to 2 nd swinging elements, the 2 nd light beam emitted by the 2 nd light source is sequentially reflected by the 2 nd to 1 st swinging elements and the 2 nd to 2 nd swinging elements and enters the 1 st to 2 nd swinging elements, and the 1 st to 2 nd swinging elements transmit the 2 nd light beam and combine the 1 st light beam and the 2 nd light beam.
Known from the above technical solutions, the alignment device used in the alignment method for combining multiple light beams provided by the present invention includes a 1 st to nth light source, a 1 st to nth swing element, a 1 st to nth-1 st swing element, a 1 st to nth-2 nd swing element, a light combining element, a light guiding element, a light splitting element, a collimator, and a beam reduction tube, where N is a positive integer greater than 1, an ith light beam emitted by the ith light source is reflected by the ith-1 st swing element and the ith-2 th swing element in sequence and is incident to the light combining element, i is greater than or equal to 1 and less than or equal to N, the light combining element combines the light beams, the light guiding element separates one path of light from the combined light output by the light combining element and is incident to the light splitting element, the light splitting element splits one path of the monitoring light beam and emits the other path of light to the beam reduction tube, the collimator is used for detecting the angle deviation of the incident beam and the reference light path, and the beam contracting light tube is used for detecting the position deviation of the incident beam and the reference light path. Carrying out alignment correction on the ith light beam emitted by the ith light source according to the following process: firstly, adjusting the swing angle of a reflecting element of an i-2 th swing element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so that the angle deviation of the i-th light beam and the reference light path is within a first preset range, then adjusting the swing angle of the reflecting element of the i-1 th swing element according to the position deviation of the i-th light beam and the reference light path fed back by the beam reducing tube so that the position deviation of the i-th light beam and the reference light path is within a second preset range, and adjusting the swing angle of the reflecting element of the i-2 th swing element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so that the angle deviation of the i-th light beam and the reference light path is within the first preset range. According to the method, alignment correction is respectively carried out on each light beam. Therefore, the alignment method for the multi-path light beam combination not only can correct the angle deviation of the light beam in the left-right direction and the height direction, but also can correct the position deviation of the light beam in the left-right direction and the height direction, does not need layered transmission of the light path, can be applied to occasions where the light path cannot be propagated in an up-down layered mode for beam combination, has a relatively simple light path structure and relatively small occupied space, and overcomes the problems in the prior art.
The invention also provides an alignment device for combining the multiple paths of light beams, which can achieve the beneficial effects.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a flowchart illustrating alignment correction performed on an ith light beam in an alignment method for combining multiple light beams according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a two-dimensional swing table and a base in an embodiment of the invention;
fig. 3 is a schematic diagram of an alignment apparatus used when the alignment method for combining multiple optical beams includes 2 light sources according to an embodiment of the present invention;
fig. 4 is a top view of the alignment device shown in fig. 3.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention provides an alignment method for combining multiple paths of light beams, wherein the alignment device comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a light combining element, a light guide element, a light splitting element, a collimator and a beam reducing light pipe, and N is a positive integer greater than 1.
The ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N. The light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element, the light splitting element is used for dividing the monitoring light beam into one path of light to be incident to the collimator, and dividing the other path of light to be incident to the beam contracting collimator, the collimator is used for detecting the angle deviation between the incident light beam and the reference light path, and the beam contracting collimator is used for detecting the position deviation between the incident light beam and the reference light path.
An i-1 th swinging element and an i-2 th swinging element are sequentially arranged on a propagation light path of an i-th light beam emitted by an i-th light source, the emitted i-th light beam is reflected by the i-1 th swinging element and the i-2 th swinging element in sequence and propagates to a beam combining element, and the beam combining element combines the light beams to form a beam. The two-dimensional swing table can swing in the two-dimensional direction to drive the reflection element to swing, and the incident position or the incident angle of a light beam can be adjusted.
The method respectively performs alignment correction on each path of light beam according to the following process, and respectively performs alignment correction on the ith light beam emitted by the ith light source according to the following steps, please refer to fig. 1, which specifically includes the following steps:
s10: and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.
Firstly, according to the angle deviation of the ith light beam and the reference light path fed back by the collimator, the swinging angle of the reflecting element of the ith-2 swinging element is adjusted to enable the angle deviation of the ith light beam and the reference light path to be within a first preset range, and the ith light beam and the reference light path are initially adjusted to be parallel. The first preset range refers to an angular deviation range which allows the pointing direction of one light beam to be parallel to the reference light path when the light beam is considered to be parallel to the reference light path.
Specifically, when the swinging element is operated according to the data fed back by the collimator, the angular deviation of the beam fed back by the collimator from the reference light path is assumed to be (x，y) WhereinxRepresenting the angle of the projection of the light beam in the plane xoz with the z-axis,yrepresenting the angle between the projection of the light beam in the yoz plane and the z-axis, wherein a three-dimensional rectangular coordinate system is established by taking the direction of the reference light path as the z-axis direction, the adjustment amount of the swing angle of the reflecting element of the i-2 th swing element is
Figure BDA0002202868340000071
Figure BDA0002202868340000072
The angle of adjustment of the reflecting element of the i-2 th rocking element around the E axis of the two-dimensional rocking platform is shown,
Figure BDA0002202868340000073
and (3) indicating an angle of adjusting the reflecting element of the i-2 th swinging element around an F axis of a two-dimensional swinging table, wherein the E axis of the two-dimensional swinging table is in a vertical direction and the F axis of the two-dimensional swinging table is in a horizontal direction when the two-dimensional swinging table is installed in the device, so that the angular deviation of the light beam from the reference light path is within a first preset range.
S11: and adjusting the swinging angle of the reflecting element of the i-1 th swinging element according to the position deviation of the i-th light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the i-th light beam and the reference light path is within a second preset range.
After the adjustment of the previous step, according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube at the moment, the swinging angle of the reflecting element of the (i-1) th swinging element is adjusted, so that the position deviation of the ith light beam and the reference light path is in a second preset range, and the position of the ith light beam and the position of the reference light path are coincided. The position of the ith light beam is adjusted by adjusting the swinging angle of the reflecting element of the (i-1) th swinging element, wherein the position adjustment of the ith light beam in the left-right direction is included, and the position adjustment of the ith light beam in the high-low direction is also included. The second preset range is a position deviation range which is allowed to exist between one path of light beam and the reference light path when the path of light beam is considered to be overlapped with the reference light path.
Specifically, when the oscillating element is operated according to the data fed back by the beam reducing tube, the positional deviation of the beam fed back by the beam reducing tube from the reference light path is assumed to be (L)x，Ly) Wherein a three-dimensional rectangular coordinate system L is established by taking the direction of the reference light path as the z-axis directionxDenotes a deviation value L in the x-axis direction of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy planeyIndicating the deviation value of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy plane in the y-axis direction, the adjustment amount of the swing angle of the reflecting element of the i-1 th swing element is
Figure BDA0002202868340000081
M denotes the distance from the point of incidence of the light beam on the reflecting element of the i-1 th rocking element to the point of incidence of the light beam on the next rocking element,
Figure BDA0002202868340000082
the angle of adjustment of the reflecting element of the i-1 th rocking element around the two-dimensional pendulum table E axis is shown,
Figure BDA0002202868340000083
indicating the angle of the reflecting element of the i-1 th swinging element adjusted around the F axis of the two-dimensional swinging table, so that the position deviation of the light beam and the reference light path is within a second preset range, wherein the E axis of the two-dimensional swinging table is along the vertical directionStraight, with the F axis in the horizontal direction.
S12: and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.
After the adjustment in step S11, the ith light beam is not parallel to the reference light path, the step aligns and corrects the angular deviation of the ith light beam again, and adjusts the swing angle of the reflection element of the (i-2) th swing element again according to the angular deviation of the ith light beam and the reference light path fed back in real time by the collimator, so that the angular deviation of the ith light beam and the reference light path is within a first preset range, and the ith light beam and the reference light path are finally adjusted and parallel. Thus, alignment correction of the ith light beam emitted from the ith light source is completed.
According to the method, alignment correction is independently performed on each light beam, and finally the light beams emitted by the 1 st light source to the Nth light source are all aligned. In practical applications, the value of N may be 2 or other values, and is within the protection scope of the present invention.
It can be seen that the alignment method for combining multiple light beams in the embodiment can correct the angular deviation of the light beams in the left-right and high-low directions, can correct the position deviation of the light beams in the left-right and high-low directions, does not need layered transmission of the light paths, can be applied to the occasions where the light paths cannot be layered and propagated up and down to combine the light beams, and has the advantages of relatively simple structure of the light paths and relatively small occupied space, thereby overcoming the problems in the prior art.
In a further preferred embodiment, the alignment device further includes a wavelength gating element disposed on the optical path between the light guiding element and the light splitting element, and the wavelength gating element is configured to allow the light of the wavelength band specified by the instruction to pass through and prevent the light of other wavelength bands except for the light of the specified wavelength band from passing through according to the instruction. In the prior art, when alignment correction is performed on a certain light beam, other light sources need to be turned off and a light source corresponding to the light beam to be corrected needs to be turned on, and the operation is complicated.
More specifically, the two-dimensional swing table can swing along two axes which are perpendicular to each other on a plane where the two-dimensional swing table is located. Referring to fig. 2 exemplarily, fig. 2 is a schematic structural diagram of a two-dimensional swing table and a base in this embodiment, two axes E and F perpendicular to each other on a plane where the two-dimensional swing table 200 is located are provided, the two-dimensional swing table 200 can swing with the axis E as a rotation axis and with the axis F as a rotation axis, and the two-dimensional swing table 200 swings to drive a reflection element to swing together. The further pendulum element further comprises a base 201, the two-dimensional pendulum platform 200 being mounted on said base 201. When arranging the light path and installing each component in practical application, can set for the two-dimensional swing table E axle of swing component to be vertical axle, and the F axle of two-dimensional swing table is the horizontal axis, and around the swing of two-dimensional swing table E axle namely around the vertical axle swing of two-dimensional swing table, swing around two-dimensional swing table F axle namely around the horizontal axis swing of two-dimensional swing table.
In practical application, when the optical path is arranged, the light guide element may reflect the merged light output by the beam merging element into the main working optical path, and transmit a path of light as a monitoring beam to enter the light splitting element. Preferably, the light guide element may reflect 99.99% of the energy of the combined light to enter the main working optical path, and transmit 0.01% of the energy of the combined light to serve as the monitoring light beam.
The following describes the alignment method for combining multiple optical beams according to the present invention in detail by taking the value of N as 2 as a specific embodiment. Referring to fig. 3, fig. 3 is a schematic diagram of an alignment apparatus used in the method of the present embodiment, and fig. 4 is a top view of the alignment apparatus shown in fig. 3, it can be seen that the alignment apparatus used includes a 1 st light source 100, a 1 st-1 st swinging element 102, a 1 st-2 st swinging element 103, a 2 nd light source 101, a 2 nd-1 st swinging element 104, a 2 nd-2 nd swinging element 105, a light guiding element 106, a light splitting element 107, a collimator 108, and a beam reducing light pipe 109.
The 1 st light beam emitted by the 1 st light source 100 is reflected by the 1 st-1 st swinging element 102 and enters the 1 st-2 nd swinging element 103, the 1 st-2 nd swinging element serves as a beam combining element, and the 1 st light beam emitted by the 1 st light source 100 is reflected by the 1 st-1 st swinging element and the 1 st-2 nd swinging element in sequence. The 2 nd light beam emitted from the 2 nd light source 101 is reflected by the 2 nd-1 st oscillating element 104 and the 2 nd-2 nd oscillating element 105 in order to be incident on the 1 st-2 nd oscillating element, and the 1 st-2 nd oscillating element 103 transmits the 2 nd light beam, so that the 1 st light beam and the 2 nd light beam are combined.
The light guide element 106 reflects the merged light output from the 1 st to 2 nd swinging elements 103 into the main working optical path, and transmits a path of light as a monitoring beam to enter the light splitting element 107. The beam splitting element 107 splits one path of light of the monitoring beam to be incident on the collimator 108, and splits the other path of light to be incident on the beam reducing tube 109, the collimator 108 is used for detecting the angle deviation between the incident beam and the reference light path, and the beam reducing tube 109 is used for detecting the position deviation between the incident beam and the reference light path. And a wavelength gating element 110 on the optical path between the light guide element 106 and the light splitting element 107, wherein the wavelength gating element 110 is used for allowing the light with the wavelength band specified by the instruction to pass through according to the instruction, and preventing the light with other wavelength bands except the light with the specified wavelength band from passing through.
In this embodiment, the alignment correction may be performed on the 1 st light beam emitted by the 1 st light source and the 2 nd light beam emitted by the 2 nd light source according to the processes of the above steps S10 to S12, specifically, the alignment correction may be performed on the 1 st light beam emitted by the 1 st light source according to the following steps, including the following steps:
s20: and adjusting the swinging angle of the reflecting element of the 1 st-2 nd swinging element according to the angle deviation of the 1 st light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the 1 st light beam and the reference light path to be within a first preset range.
S21: and adjusting the swinging angle of the reflecting element of the 1 st-1 st swinging element according to the position deviation of the 1 st light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the 1 st light beam and the reference light path is in a second preset range.
S22: and adjusting the swinging angle of the reflecting element of the 1 st-2 nd swinging element according to the angle deviation of the 1 st light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the 1 st light beam and the reference light path to be within a first preset range.
The alignment correction of the 2 nd light beam emitted by the 2 nd light source is carried out according to the following steps:
s30: and adjusting the swinging angle of the reflecting element of the 2 nd-2 nd swinging element according to the angle deviation of the 2 nd light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the 2 nd light beam and the reference light path to be within a first preset range.
S31: and adjusting the swinging angle of the reflecting element of the 2 nd-1 st swinging element according to the position deviation of the 2 nd light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the 2 nd light beam and the reference light path is in a second preset range.
S32: and adjusting the swinging angle of the reflecting element of the 2 nd-2 nd swinging element according to the angle deviation of the 2 nd light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the 2 nd light beam and the reference light path to be within a first preset range.
Correspondingly, the embodiment of the invention also provides an alignment device for combining the multiple paths of light beams, which comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a light combining element, a light guide element, a light splitting element, a collimator, a beam reducing light pipe and a processor, wherein N is a positive integer greater than 1, and the swinging element comprises a two-dimensional swing table and a reflecting element arranged on the two-dimensional swing table.
The ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N.
The light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element, the light splitting element is used for dividing the monitoring light beam into one path of light to be incident to the collimator, and dividing the other path of light to be incident to the beam contracting collimator, the collimator is used for detecting the angle deviation between the incident light beam and the reference light path, and the beam contracting collimator is used for detecting the position deviation between the incident light beam and the reference light path.
The processor is respectively connected with the collimator and the beam contracting light tube and is used for respectively carrying out alignment correction on each path of light beam according to the following steps, and the method comprises the following steps:
adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;
adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;
and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.
The aligning device for combining the multiple light beams can correct the angle deviation of the light beams in the left-right direction and the height direction, can correct the position deviation of the light beams in the left-right direction and the height direction, does not need light path layered transmission, can be applied to occasions where the light beams cannot be combined by means of upper-lower layered transmission of the light paths, and is relatively simple in light path structure and relatively small in occupied space, so that the problems in the prior art are solved.
In this embodiment, for specific implementation of each optical element included in the apparatus, reference may be made to the detailed description of the above embodiment of the alignment method for combining multiple light beams, which is not repeated in this embodiment.
In a specific example, the value of N may be 2, and the alignment device for combining multiple light beams in this embodiment includes a 1 st light source, a 1 st-1 st swing element, a 1 st-2 st swing element, a 2 nd light source, a 2 nd-1 st swing element, a 2 nd-2 nd swing element, a light guide element, a light splitting element, a collimator, a beam reduction tube, and a processor.
The 1 st light beam emitted by the 1 st light source is reflected by the 1 st-1 st swinging element and enters the 1 st-2 nd swinging element, the 1 st-2 nd swinging element is used as a beam combining element, and the 1 st light beam emitted by the 1 st light source is reflected by the 1 st-1 st swinging element and the 1 st-2 nd swinging element in sequence. The 2 nd light beam emitted by the 2 nd light source is reflected by the 2 nd-1 st swinging element and the 2 nd-2 nd swinging element in sequence and enters the 1 st-2 nd swinging element, and the 1 st-2 nd swinging element transmits the 2 nd light beam so as to combine the 1 st light beam and the 2 nd light beam.
The light guide element reflects the merged light output by the 1 st to 2 nd swinging elements into a main working light path, transmits a path of light as a monitoring light beam, and then enters the light splitting element. The beam splitting element splits the monitoring light beam into one path of light to be incident to the collimator and splits the other path of light to be incident to the beam contracting tube, the collimator is used for detecting the angle deviation of the incident beam and the reference light path, and the beam contracting tube is used for detecting the position deviation of the incident beam and the reference light path. And the wavelength gating element is arranged on the optical path between the light guide element and the light splitting element and is used for allowing the light with the wave band specified by the instruction to pass through according to the instruction and preventing the light with other wave bands except the light with the specified wave band from passing through.
The processor is respectively connected with the collimator and the beam reducing light tube and is used for respectively carrying out alignment correction on the 1 st light beam emitted by the 1 st light source and the 2 nd light beam emitted by the 2 nd light source according to the method process.
The present invention provides a method and an apparatus for aligning a multi-beam combination. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.

Claims (10)

1. An alignment method for combining multiple paths of light beams is characterized in that the used alignment device comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a beam combining element, a light guide element, a light splitting element, a collimator and a beam reducing light pipe, wherein N is a positive integer larger than 1, and the swinging element comprises a two-dimensional swing table and a reflecting element arranged on the two-dimensional swing table;
the ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N;
the light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element;
the alignment correction is respectively carried out on each path of light beam according to the following steps, and the method comprises the following steps:
adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;
adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;
and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.
2. The method as claimed in claim 1, wherein the alignment device further comprises a wavelength gating element disposed on the optical path between the light guiding element and the light splitting element, the wavelength gating element being configured to allow the light of the wavelength band specified by the command to pass through and prevent the light of other wavelength bands except for the light of the specified wavelength band from passing through according to the command.
3. The alignment method as claimed in claim 1, wherein the two-dimensional stage can swing along two axes perpendicular to each other on the plane of the two-dimensional stage.
4. The alignment method as claimed in claim 3, wherein the wobble element further comprises a base, and the two-dimensional stage is mounted on the base.
5. The method as claimed in claim 1, wherein the light guide element is configured to reflect the combined light output by the beam combining element into the main working optical path and transmit the combined light as the monitoring light beam.
6. The alignment method as claimed in claim 1, wherein the angle deviation between the feedback beam and the reference beam path of the collimator is (x，y) Wherein a three-dimensional rectangular coordinate system is established by taking the direction of the reference light path as the direction of the z axis,xrepresenting the angle of the projection of the light beam in the plane xoz with the z-axis,ythe included angle between the projection of the light beam in the yoz plane and the z axis is shown, and the adjustment amount of the swing angle of the reflecting element of the i-2 th swing element is
Figure FDA0002657873930000021
So that the angular deviation of the light beam from the reference light path is within a first preset range,
Figure FDA0002657873930000022
the angle of adjustment of the reflecting element of the i-2 th rocking element around the E axis of the two-dimensional rocking platform is shown,
Figure FDA0002657873930000023
the angle of adjustment of the reflective element of the i-2 th rocking element around the F-axis of the two-dimensional rocking platform is shown, where the E-axis is in the vertical direction and the F-axis is in the horizontal direction when the two-dimensional rocking platform is installed in the apparatus.
7. The alignment method as claimed in claim 1, wherein the position deviation of the feedback beam from the reference beam path is (L)x，Ly) Wherein a three-dimensional rectangular coordinate system L is established by taking the direction of the reference light path as the z-axis directionxDenotes a deviation value L in the x-axis direction of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy planeyThe deviation value of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy plane in the y-axis direction is shown; the adjustment amount of the swing angle of the reflecting element of the i-1 th swing element is
Figure FDA0002657873930000024
So that the positional deviation of the light beam from the reference light path is within a second preset range, where M represents the distance from the incident point of the light beam on the reflecting element of the i-1 th rocking element to the incident point of the light beam on the next rocking element,
Figure FDA0002657873930000025
the angle of adjustment of the reflecting element of the i-1 th rocking element around the two-dimensional pendulum table E axis is shown,
Figure FDA0002657873930000031
the angle of adjustment of the reflective element of the i-1 th pendulum element around the F-axis of a two-dimensional pendulum platform, which is mounted in the apparatus with its E-axis in the vertical direction and the F-axis in the horizontal direction, is shown.
8. The alignment method for multi-path light beam combination according to any of claims 1-7, wherein N is 2, the 1 st-2 nd swinging component is used as the combining component, the 1 st light beam emitted by the 1 st light source is reflected by the 1 st-1 st swinging component and the 1 st-2 nd swinging component in sequence, the 2 nd light beam emitted by the 2 nd light source is reflected by the 2 nd-1 st swinging component and the 2 nd-2 nd swinging component in sequence and is incident on the 1 st-2 nd swinging component, the 1 st-2 nd swinging component transmits the 2 nd light beam, and the 1 st light beam and the 2 nd light beam are combined.
9. An alignment device for combining multiple paths of light beams is characterized by comprising a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a beam combining element, a light guide element, a light splitting element, a collimator, a beam reducing collimator and a processor, wherein N is a positive integer greater than 1, and the swinging element comprises a two-dimensional swing table and a reflecting element arranged on the two-dimensional swing table;
the ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N;
the light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element;
the processor is respectively connected with the collimator and the beam contracting light tube and is used for respectively carrying out alignment correction on each path of light beam according to the following steps, and the method comprises the following steps:
adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;
adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;
and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.
10. The alignment apparatus as claimed in claim 9, wherein N is 2, the 1 st-2 nd swinging component serves as the beam combining component, the 1 st light beam emitted from the 1 st light source is reflected by the 1 st-1 st swinging component and the 1 st-2 nd swinging component in sequence, the 2 nd light beam emitted from the 2 nd light source is reflected by the 2 nd-1 st swinging component and the 2 nd-2 nd swinging component in sequence and is incident on the 1 st-2 nd swinging component, and the 1 st-2 nd swinging component transmits the 2 nd light beam and combines the 1 st light beam and the 2 nd light beam.
CN201910871218.7A 2019-09-16 2019-09-16 Alignment method and device for multi-path light beam combination Active CN110596908B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910871218.7A CN110596908B (en) 2019-09-16 2019-09-16 Alignment method and device for multi-path light beam combination

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910871218.7A CN110596908B (en) 2019-09-16 2019-09-16 Alignment method and device for multi-path light beam combination

Publications (2)

Publication Number Publication Date
CN110596908A CN110596908A (en) 2019-12-20
CN110596908B true CN110596908B (en) 2020-11-06

Family

ID=68859697

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910871218.7A Active CN110596908B (en) 2019-09-16 2019-09-16 Alignment method and device for multi-path light beam combination

Country Status (1)

Country Link
CN (1) CN110596908B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111558772B (en) * 2020-04-23 2021-07-27 中国科学院西安光学精密机械研究所 Laser diode light beam pointing adjusting device and adjusting method
CN115421311B (en) * 2022-11-04 2023-01-13 中国航天三江集团有限公司 High-precision light beam synthesis light path auxiliary alignment device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5136149A (en) * 1990-04-23 1992-08-04 Dainippon Screen Mfg. Co., Ltd. Method of focusing optical head on object body and automatic focusing device for optical inspection system including tilt detection
CN102566318A (en) * 2012-02-12 2012-07-11 中国科学院光电技术研究所 Light beam transmission stabilizing device
CN102608764A (en) * 2012-03-31 2012-07-25 中国科学院光电技术研究所 Multi-beam aperture splicing and synthesizing system based on light beam pointing stability control
CN102662241A (en) * 2012-05-16 2012-09-12 中国科学院光电技术研究所 Laser beam common-aperture power synthesis system based on beam stabilization closed-loop control
CN108919480A (en) * 2018-06-25 2018-11-30 中国科学院长春光学精密机械与物理研究所 A kind of automatic alignment apparatus for the same band combination of multi-path laser beam

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5136149A (en) * 1990-04-23 1992-08-04 Dainippon Screen Mfg. Co., Ltd. Method of focusing optical head on object body and automatic focusing device for optical inspection system including tilt detection
CN102566318A (en) * 2012-02-12 2012-07-11 中国科学院光电技术研究所 Light beam transmission stabilizing device
CN102608764A (en) * 2012-03-31 2012-07-25 中国科学院光电技术研究所 Multi-beam aperture splicing and synthesizing system based on light beam pointing stability control
CN102662241A (en) * 2012-05-16 2012-09-12 中国科学院光电技术研究所 Laser beam common-aperture power synthesis system based on beam stabilization closed-loop control
CN108919480A (en) * 2018-06-25 2018-11-30 中国科学院长春光学精密机械与物理研究所 A kind of automatic alignment apparatus for the same band combination of multi-path laser beam

Also Published As

Publication number Publication date
CN110596908A (en) 2019-12-20

Similar Documents

Publication Publication Date Title
CN108919480B (en) Automatic alignment device for multi-channel laser beam combination in same wave band
CN110596908B (en) Alignment method and device for multi-path light beam combination
CN104345409B (en) The manufacturing method of Wavelength division multiplexing transmission apparatus, Wavelength division multiplexing transmission apparatus
WO2011007658A1 (en) Capturing device, capturing method, and capturing program
CN106842605B (en) Light splitting device based on polarization spectroscope
CN102436038B (en) Optical path coupler, optical path coupling device and optical path coupling method
CN112713935B (en) Free space optical communication scanning tracking method, system, device and medium
JPH10233738A (en) Optical communication system
US9645389B2 (en) Light guiding device, method for producing same, and LD module
CN111988091B (en) Spatial light coupling device
CN106680945B (en) A kind of light collimation coupling operational platform
CN111239931A (en) Coupling method of light emitter and light emitter
US10686548B2 (en) Projection of multiple beams using cylindrical lenses
CN114488434A (en) Optical fiber automatic coupling system and method
CN115070201A (en) Light splitting system and method capable of continuously distributing laser power
JP7124712B2 (en) Optical communication device
CN101878089B (en) Device for machining a workpiece by means of parallel laser beams
CN114745058B (en) Multi-element conformal array laser communication device and communication method
CN201628816U (en) Light splitting system
JP4585378B2 (en) Hybrid optical axis correction device for optical space communication system
JP2007282144A (en) Optical space communication apparatus
CN117091628B (en) Double-magneto-optical trap divergent laser alignment adjustment system
CN215986612U (en) Coupling device of multi-path parallel optical device
Yufang et al. Research of beam control system component simulation and separation method of the kinematic coupling
JP2001094513A (en) Bidirectional optical spatial transmission device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant