CN102566318A - Light beam transmission stabilizing device - Google Patents
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- CN102566318A CN102566318A CN2012100304563A CN201210030456A CN102566318A CN 102566318 A CN102566318 A CN 102566318A CN 2012100304563 A CN2012100304563 A CN 2012100304563A CN 201210030456 A CN201210030456 A CN 201210030456A CN 102566318 A CN102566318 A CN 102566318A
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Abstract
The invention provides a light beam transmission stabilizing device for transmitting an emitted light beam from a laser to an illumination system, and a light beam control module is arranged on the transmission optical path, wherein the light beam control module comprises a first light beam control unit (41), a second light beam control unit (42), and a third light beam control unit (43). A spectroscope (44) is arranged on an emergent light path of the light beam control module, the spectroscope (44) divides the light beam into two beams, wherein one light beam enters an illumination system (5), and the other beam enters a light beam measuring module (45). The light beam measuring module (45) is connected with a controller (46) for supplying measured data to the controller (46). The controller (46) are connected with the first light beam control unit (41), the second light beam control unit (42) and the third light beam control unit (43) of the light beam control module for supplying control signal to the light beam control module to regulate the light beam position deviation and directional deviation.
Description
Technical field
The present invention relates to be used for the beam Propagation field, particularly relate to a kind of beam Propagation stabilising arrangement.
Background technology
Optical projection lithography is to utilize the optical projection image-forming principle, with the integrated circuit on the mask (IC) figure repeat with substep or the mode of step-scan exposure with high-resolution figure transfer to the gluing silicon chip.
Shown in Figure 1 is the optical projection lithography system, and it mainly comprises beam expander orthopedic systems 3, beam Propagation system 4, lithography illuminating system 5, mask 6, lithographic objective 7, silicon chip 8.Light beam 2 is sent by the light source that radiation luminous energy is provided 1; Successively through beam expander orthopedic systems 3; Expand the light beam 2 of bundle shaping, beam Propagation system 4 is laggard goes into photoetching illuminator 5, and lithography illuminating system 5 provides light beam pupil shape, even illuminating bundle that coherence factor is adjustable for mask 6.Integrated circuit on the mask 6 (IC) figure is transferred on the silicon chip 8 through the imaging of lithographic objective 7.
Influence for isolated 1 pair of optical projection lithography system of light source; Distance between light source 1 and the lithography illuminating system 5 is separated by generally at 5～20 meters; For the beam Propagation of long distance, the small position deviation of light source 1 outgoing beam, the vibration of pointing in deviation or the beam Propagation process all will make the light beam 2 that gets into lithography illuminating system 5 can not satisfy the system performance requirement.Therefore in light beam 2 transmission courses, must comprise the light beam stabilising arrangement, be used for real-time regulated light-beam position deviation and point to deviation, guarantee that the light beam 2 of entering lithography illuminating system 5 is stable.
Chinese patent CN101487983A provides a kind of light beam transmission apparatus that is applied to the photolithographic exposure system; As shown in Figure 2; The Beam Control module that this device is made up of the first Beam Control unit 141 and the second Beam Control unit 142; Light velocity measurement module 16 is formed with controller 17; The first Beam Control unit 141 and the second Beam Control unit 142 all adopt single two-dimentional controllable mirrors structure, by the position deviation and the sensing deviation of light velocity measurement module 16 real-time measuring beams, by the first Beam Control unit 141 of controller 17 control bundle control modules and the rotation of the second Beam Control unit 142; The position and the sensing of adjustment light beam have guaranteed that illuminator has the stable heart far away and homogeneity.Can realize real-time control on this Systems Theory to light-beam position and sensing; But in practical application; The position deviation of light beam with point to deviation deviation main source and have two kinds: first kind be each pulsed light beam 2 of sending by light-pulse generator 1 all the location deviation with point to deviation; This deviation belongs to high frequency, the small quantity deviation; Second kind be by ground vibration or light beam 2 position deviations that other Effect of Environmental produced with point to deviation, this deviation belongs to low frequency, more a large amount of deviations.Because the first Beam Control unit 141 and the second Beam Control unit 142 that adopt among the Chinese patent CN101487983A all are to be made up of single two-dimentional controllable mirrors; And single two-dimentional controllable mirrors will accomplish that response frequency is fast, and then the setting range of two-dimentional controllable mirrors will be less; In like manner, it is bigger that the setting range of two-dimentional controllable mirrors is done, and then response frequency will reduce.Therefore single two-dimentional controllable mirrors can not satisfy the performance requirement of required high regulating frequency in Beam Control unit and wide adjusting range simultaneously, promptly can not satisfy simultaneously position deviation and the adjusting of pointing to deviation; And this patent structure adopted, and to form the Beam Control module by the first Beam Control unit 141 and the second Beam Control unit 142 be interactional to the light-beam position deviation with the adjusting of pointing to deviation; Promptly the first Beam Control unit 141 can exert an influence to the sensing deviation of light beam when regulating the light-beam position deviation; The second Beam Control unit 142 can influence the position deviation of light beam in the sensing deviation of regulating light beam, this just makes that the control algolithm of light beam transmission apparatus is comparatively complicated.
Summary of the invention
In order to overcome the defective of prior art, the purpose of this invention is to provide a kind of can the position deviation of light beam the separation with the sensing deviation, position deviation and sensing deviation are carried out the independent beam Propagation stabilising arrangement of controlling.
In order to realize above-mentioned purpose of the present invention, the technical scheme that the present invention proposes is:
A kind of beam Propagation stabilising arrangement; Comprise Beam Control module and controller 46; Also comprise light velocity measurement module (45; It is characterized in that said Beam Control module is positioned on the delivery optics, the Beam Control module comprises the first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43; Light beam successively through the first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43 after spectroscope 44 beam splitting; Light beam is divided into first light beam and second light beam through behind the said spectroscope 44; Described first light beam occupies most energy of elementary beam; And the entering lithography illuminating system is transmitted in continuation forward; Described second light beam gets into light velocity measurement module 45, and described controller 46 links to each other with light velocity measurement module 45 with the Beam Control module, is used for to the Beam Control module control signal being provided.
The first Beam Control unit 41 is high by regulating frequency; The high frequency two dimension controllable mirrors 411 that range of adjustment is little is low with regulating frequency; The low frequency two dimension controllable mirrors 412 that range of adjustment is big is formed, and the described second Beam Control unit 42 is high by regulating frequency, and the high frequency two dimension controllable mirrors 421 that range of adjustment is little is low with regulating frequency; The low frequency two dimension controllable mirrors 422 that range of adjustment is big is formed; Described the 3rd Beam Control unit 43 is high by regulating frequency, and the high frequency two dimension controllable mirrors 431 that range of adjustment is little is low with regulating frequency, and the low frequency two dimension controllable mirrors 432 that range of adjustment is big is formed.
In the described Beam Control module; The described first Beam Control unit 41 and the second Beam Control unit 42 and the 3rd Beam Control unit 43 rotation processes guarantee that the corner of two Beam Control unit wherein is consistent; Promptly the mirror surface of the high frequency of the first Beam Control unit 41 and the second Beam Control unit 42 two dimension controllable mirrors 411, high frequency two dimension controllable mirrors 421 remains parallelly in rotation process, or the mirror surface of the high frequency of the second Beam Control unit 42 and the 3rd Beam Control unit 43 two dimension controllable mirrors 421, the two-dimentional controllable mirrors 431 of high frequency remains parallel in rotation process.
Described high frequency two dimension controllable mirrors 411, high frequency two dimension controllable mirrors 421, high frequency two dimension controllable mirrors 431 adopt the two-dimentional controllable mirrors of same model or different model; Described low frequency two dimension controllable mirrors 412, low frequency two dimension controllable mirrors 422, low frequency two dimension controllable mirrors 432 adopt two-dimentional controllable mirrors same model or different model, and the position of high frequency two dimension controllable mirrors in each Beam Control unit and low frequency two dimension controllable mirrors can exchange.
In the described Beam Control module; Also can select described second Beam Control unit 42 and the 3rd Beam Control unit 43 rotation process corners to be consistent; Promptly the mirror surface of the low frequency of the second Beam Control unit 42 and the 3rd Beam Control unit 43 two dimension controllable mirrors 422, low frequency two dimension controllable mirrors 432 remains parallel in rotation process; Do not influence the sensing deviation of light beam in the time of position deviation that light beam is regulated in the rotation of the second Beam Control unit 42 and the 3rd Beam Control unit 43, the sensing deviation of light beam is regulated in the rotation of the first Beam Control unit 41.
Optional, one or two or the light path turning mirror more than three or three also can be placed in described delivery optics optional position, are used to change the transmission path of light path.
The high frequency two dimension controllable mirrors 411 of the described first Beam Control unit 41 links to each other with controller 46 respectively with low frequency two dimension controllable mirrors 412; The high frequency two dimension controllable mirrors 421 of the described second Beam Control unit 42 links to each other with controller 46 respectively with low frequency two dimension controllable mirrors 422, and the high frequency two dimension controllable mirrors 431 of described the 3rd Beam Control unit 43 links to each other with controller 46 respectively with low frequency two dimension controllable mirrors 432.
Described light velocity measurement module 45 comprises light-beam position measuring unit 60 and beam-pointing measuring unit 70.
Optional, described light velocity measurement module 45 comprises two light-beam position measuring units 70.
The present invention's beneficial effect compared with prior art mainly shows:
1) because the present invention uses the Beam Control cellular construction of two-dimentional controllable mirrors that regulating frequency is high, range of adjustment is little and the two-dimentional controllable mirrors combination that regulating frequency is low, range of adjustment is big, can realize simultaneously high-frequency and large-scale light-beam position deviation and effective control of pointing to deviation.
2) because the Beam Control module that the present invention adopts three Beam Control unit to form can realize light-beam position deviation and the independent regulation of pointing to deviation have been simplified control algolithm, improve control efficiency.
Description of drawings
Fig. 1 is a photolithographic exposure system architecture synoptic diagram;
Fig. 2 is the said light beam transmission apparatus synoptic diagram of patent CN101487983A;
Fig. 3 is the first Beam Control unit of the present invention, 41 structural representations;
Fig. 4 is the light beam transmission apparatus first example structure synoptic diagram of the present invention;
Fig. 5 is the light beam transmission apparatus second example structure synoptic diagram of the present invention;
Fig. 6 a is a position measurement schematic diagram of the present invention;
Fig. 6 b is sensing measuring principle figure of the present invention;
Fig. 7 is a kind of structural representation of light velocity measurement module of the present invention;
Fig. 8 is the another kind of structural representation of light velocity measurement module of the present invention.
Element sequence number tabulation of the present invention:
Beam expander orthopedic systems 3, beam Propagation system 4,
Lithography illuminating system 5, mask 6,
Projection objective system 7, silicon chip 8,
Beam Control unit 141, Beam Control unit 142,
The pivot angle scope 23 of high frequency two dimension controllable mirrors, the pivot angle scope 24 of low frequency two dimension controllable mirrors,
41, the second Beam Control unit 42, the first Beam Control unit,
The 3rd Beam Control unit 43, high frequency two dimension controllable mirrors 411,
Low frequency two dimension controllable mirrors 412, high frequency two dimension controllable mirrors 421,
Low frequency two dimension controllable mirrors 422, high frequency two dimension controllable mirrors 431,
Low frequency two dimension controllable mirrors 432, beam splitter 44,
Light velocity measurement module 45, controller 46,
Turning mirror 47, light-beam position measuring unit 60,
Optical system 61, detector 62,
Beam-pointing measuring unit 70, optical system 71,
Turning mirror 452.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment embodiment of the present invention is done to describe in further detail.
Fig. 3 is the first Beam Control unit of the present invention, 41 structural representations.The present invention adopted, and first Beam Control unit 41 is fast by response frequency, range of adjustment the is little high frequency two dimension controllable mirrors 411 and the low frequency two dimension controllable mirrors 412 that response frequency is slow, setting range is big constitute, and high frequency two dimension controllable mirrors 411 is fixed on the low frequency two dimension controllable mirrors 412.Through just can change the sensing of incident beam 2 light beam after 41 reflections of the first Beam Control unit to the high frequency two dimension controllable mirrors 411 and the control of low frequency two dimension controllable mirrors 412 rotational angles.Can eliminate the position deviation and sensing deviation of light beam to the adjusting of beam-pointing through a plurality of Beam Control unit.High frequency two dimension controllable mirrors 411 response frequencies are fast, and are little to the range of adjustment of beam-pointing, and low frequency two dimension controllable mirrors 412 response frequencies are slow, and are bigger to the range of adjustment of beam-pointing.Fig. 3 signal has provided the range of adjustment 23 of 411 pairs of beam-pointings of high frequency two dimension controllable mirrors and the range of adjustment 24 of 412 pairs of beam-pointings of low frequency two dimension controllable mirrors.This Beam Control cellular construction that is constituted by two kinds of two-dimentional controllable mirrors can be good at satisfying the required high regulating frequency of adjustment light beam deviation and the performance requirement of wide adjusting range.The low frequency two dimension controllable mirrors 422 that second Beam Control unit 42 is fast by response frequency, range of adjustment is little high frequency two dimension controllable mirrors 421 and response frequency are slow, setting range is big constitutes, and high frequency two dimension controllable mirrors 421 is fixed on the low frequency two dimension controllable mirrors 422.The low frequency two dimension controllable mirrors 432 that the 3rd Beam Control unit 43 is fast by response frequency, range of adjustment is little high frequency two dimension controllable mirrors 431 and response frequency are slow, setting range is big constitutes, and high frequency two dimension controllable mirrors 431 is fixed on the low frequency two dimension controllable mirrors 432.The second Beam Control unit 42, the 3rd Beam Control unit 43 are identical with the function and the principle of the first Beam Control unit 41.
Fig. 4 is a kind of beam Propagation stabilising arrangement first example structure synoptic diagram of the present invention.The Beam Control module of this light beam transmission apparatus is made up of 41, the second Beam Control unit 42, the first Beam Control unit and the 3rd Beam Control unit 43.O
1, O
2And O
3Be respectively the center of rotation of the first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43.Incident beam 2 successively through the first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43, turnover catoptron 47 and spectroscope 44; Spectroscope 44 is divided into two bundles with light beam; A branch of entering illuminator 5, another bundle get into light velocity measurement module 45; Light velocity measurement module 45 links to each other with controller 46; Controller 46 links to each other with the 3rd Beam Control unit 43 with the first Beam Control unit 41, the second Beam Control unit 42 respectively; Light velocity measurement module 45 is transferred to controller 46 with the position deviation of the light beam that measures with the sensing deviation signal; Controller 46 according to the light-beam position deviation that obtains with point to deviation signal and produce the rotation that control signal corresponding drives the first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43 corresponding controllable mirrors, the position deviation of regulating light beam with point to deviation.
For location not and the desirable transmitting beam of pointing to deviation, shown in the figure solid arrow, light beam is the center of rotation O through the first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43 successively
1, O
2And O
3The position deviation of the light beam that light velocity measurement module 45 measures all is 0 with pointing to deviation.The first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43 need not done corresponding rotation and regulate.
When incident beam location deviation and sensing deviation; Shown in Fig. 4 dotted arrow; In order to guarantee to overlap with the transmission path of desirable transmitting beam from the light beam of the 3rd Beam Control unit 43 outgoing; The corner that needs the two-dimentional controllable mirrors of the adjusting first Beam Control unit 41 and the second Beam Control unit 42, feasible light beam and the 3rd Beam Control unit 43 by 42 outgoing of the second Beam Control unit meets at center of rotation O
3Regulate the corner of the two-dimentional controllable mirrors of the 3rd Beam Control unit 43; Feasible light beam and desirable transmitting beam by 43 outgoing of the 3rd Beam Control unit is consistent; Thereby eliminate the position deviation and the angular deviation of light beam, guarantee to get into the stable of lithography illuminating system light-beam position and sensing.Light velocity measurement module 45 detects the position deviation and sensing deviation of light beam in the whole adjustment process; And testing result is converted into control signal, the rotation of the two-dimentional controllable mirrors through the controller 46 controls first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43.
Adopt the advantage of three Beam Control unit arrangements to be to realize to light-beam position deviation and the independent control of pointing to deviation.Guarantee that the first Beam Control unit 41 and second Beam Control unit 42 rotational angle in rotation process are consistent; Promptly the high frequency of the first Beam Control unit 41 and the second Beam Control unit 42 two dimension controllable mirrors 411 is parallel all the time with the reflecting surface of low frequency two dimension controllable mirrors 412; Like this by the light beam of the second Beam Control unit, 42 outgoing all the time with the light beam keeping parallelism that incides the first Beam Control unit 41; The position deviation that the i.e. rotation of the first Beam Control unit 41 and the second Beam Control unit 42 only influences light beam does not influence the sensing deviation of light beam, and the adjusting of beam-pointing deviation is only accomplished by the 3rd Beam Control unit 43.The control signal that deviation is pointed in the adjusting that controller 46 produces is connected with the 3rd Beam Control unit 43; Be used to control the rotation of the 3rd Beam Control unit 43; The control signal of the adjusting position deviation that controller 46 produces is connected with the second Beam Control unit 42 with the first Beam Control unit 41, is used to control the rotation of the first Beam Control unit 41 and the second Beam Control unit 42.
Fig. 5 is a kind of beam Propagation stabilising arrangement second example structure synoptic diagram of the present invention.Incident beam 2 respectively through the first Beam Control unit 41, the second Beam Control unit 42 and 43 reflections of the 3rd Beam Control unit, turnover catoptron 47 and spectroscope 44; Spectroscope 44 is divided into two bundles with light beam; A branch of entering illuminator 5, another bundle get into light velocity measurement module 45; Light velocity measurement module 45 links to each other with controller 46; Controller 46 links to each other with the 3rd Beam Control unit 43 with the first Beam Control unit 41, the second Beam Control unit 42 respectively; Light velocity measurement module 45 is transferred to controller 46 with the position deviation of the light beam that measures with the sensing deviation signal; Controller 46 according to the light-beam position deviation that obtains with point to deviation signal and produce the rotation that control signal corresponding drives the first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43 corresponding controllable mirrors, the position deviation of regulating light beam with point to deviation.
This beam Propagation system is identical with the described beam Propagation system global structure of Fig. 4, and just the function of the first Beam Control unit 41, the second Beam Control unit 42 and the 3rd Beam Control unit 43 and the first Beam Control unit 41, the second Beam Control unit 42 are different with controller 46 connected modes with the 3rd Beam Control unit 43.The first Beam Control unit 41 links to each other with the control signal that deviation is pointed in the adjusting that controller 46 produces, and is used to regulate the sensing deviation of light beam; The second Beam Control unit 42 links to each other with the control signal of the adjusting position deviation that the 3rd Beam Control unit 43 and controller 46 produce, and is used to regulate the position deviation of light beam.The outgoing beam of the transmitting beam that has a deviation after through the adjusting of the first Beam Control unit 41 is parallel with desirable transmitting beam, promptly eliminates light beam and is pointing to deviation; The second Beam Control unit 42 remains consistent with the 3rd Beam Control unit 43 rotational angle in rotation process; The reflecting surface that promptly guarantees the second Beam Control unit 42 and the 3rd Beam Control unit 43 is parallel all the time; By the light beam of the 3rd Beam Control unit 43 outgoing all the time with the parallel beam that incides the second Beam Control unit 42, the second Beam Control unit 42 and the 3rd Beam Control unit 43 rotate the sensing deviation that can not influence light beam.Adjust the corner of the second Beam Control unit 42 and the 3rd Beam Control unit 43, feasible light beam and the 3rd Beam Control unit 43 by 42 outgoing of the second Beam Control unit meets at O
3, the light beam by 43 outgoing of the 3rd Beam Control unit overlaps with desirable transmitting beam transmission path like this, has eliminated the position deviation and sensing deviation of light beam.
The light-beam position measuring unit schematic diagram that Fig. 6 a adopts for the present invention.Optical system 61 is two telecentric beam paths; Detector 62 is positioned at outside one times of focal length of system; Detector 62 stationkeeping, then surveying the ratio obtain facula position departure Δ d and the position deviation amount D of light beam on the detector 62 is Δ d/D=x/f, wherein; X is the distance of detector 62 to optical system 61 focal lengths, and f is system's focal length.Just can calculate the position deviation amount D of actual light beam according to hot spot position deviation amount Δ d on the detector 62.
The beam-pointing measuring unit schematic diagram that Fig. 6 b adopts for the present invention.Detector 72 is positioned at the position of focal plane of optical system 71.The facula position Δ d that detector 72 detects only with the relevant Δ d=of the sensing angle θ θ f of light beam, f is system's focal length.Just can calculate the sensing deviation θ of actual light beam according to the measured value of facula position on the detector.
Fig. 7 is a kind of structural representation of the light velocity measurement module of the present invention's employing.Light beam to be measured is divided into two bundles through beam splitter 451 and treats photometry, and a branch of entering light-beam position measuring unit 60 is measured the position deviation amount of treating photometry, and another bundle gets into beam-pointing measuring unit 70 through turning mirror 452, measures the sensing departure of treating photometry.
The another kind of structural representation of light velocity measurement module that Fig. 8 adopts for the present invention.Light beam to be measured is divided into two bundles through beam splitter 451 and treats photometry; A branch of entering light-beam position measuring unit 60; The position deviation amount of photometry is treated in measurement; Another bundle gets into light-beam position measuring units 60 through turning mirror 452, treats that the difference of the position deviation amount that the sensing departure of photometry can be detected by two location measurement unit 60 detectors obtains with different the finding the solution of distance of beam Propagation to two detectors.
Those of ordinary skill in the art will be appreciated that; Above embodiment is used for explaining the present invention; And be not to be used as qualification of the present invention; As long as in connotation scope of the present invention, all will drop in the scope of claims of the present invention the above embodiment variation, modification.
Claims (9)
1. beam Propagation stabilising arrangement; Comprise Beam Control module and controller (46); Also comprise light velocity measurement module (45); It is characterized in that said Beam Control module is positioned on the delivery optics, the Beam Control module comprises the first Beam Control unit (41), the second Beam Control unit (42) and the 3rd Beam Control unit (43); Light beam passes through the first Beam Control unit (41), the second Beam Control unit (42) and the 3rd Beam Control unit (43) successively after spectroscope (44) beam splitting; Be divided into first light beam and second light beam behind the light beam said spectroscope of process (44); Described first light beam occupies most energy of elementary beam; And the entering lithography illuminating system is transmitted in continuation forward; Described second light beam gets into light velocity measurement module (45), and described controller (46) links to each other with light velocity measurement module (45) with the Beam Control module, is used for to the Beam Control module control signal being provided.
2. described a kind of beam Propagation stabilising arrangement according to claim 1; It is characterized in that; The first Beam Control unit (41) is high by regulating frequency, and high frequency two dimension controllable mirrors (411) and regulating frequency that range of adjustment is little are low, and the low frequency two dimension controllable mirrors (412) that range of adjustment is big is formed; The described second Beam Control unit (42) is high by regulating frequency; High frequency two dimension controllable mirrors (421) and regulating frequency that range of adjustment is little are low, and the low frequency two dimension controllable mirrors (422) that range of adjustment is big is formed, and described the 3rd Beam Control unit (43) is high by regulating frequency; High frequency two dimension controllable mirrors (431) and regulating frequency that range of adjustment is little are low, and the low frequency two dimension controllable mirrors (432) that range of adjustment is big is formed.
3. described a kind of beam Propagation stabilising arrangement according to claim 2; It is characterized in that; In the described Beam Control module; The described first Beam Control unit (41) and the second Beam Control unit (42) and the 3rd Beam Control unit (43) rotation process guarantee that the corner of two Beam Control unit wherein is consistent; Promptly the mirror surface of the high frequency of the first Beam Control unit (41) and the second Beam Control unit (42) two dimension controllable mirrors (411), high frequency two dimension controllable mirrors (421) remains parallelly in rotation process, or the mirror surface of the high frequency of the second Beam Control unit (42) and the 3rd Beam Control unit (43) two dimension controllable mirrors (421), the two-dimentional controllable mirrors of high frequency (431) remains parallel in rotation process.
4. described a kind of beam Propagation stabilising arrangement according to claim 3; It is characterized in that; Described high frequency two dimension controllable mirrors (411), high frequency two dimension controllable mirrors (421), high frequency two dimension controllable mirrors (431) adopt the two-dimentional controllable mirrors of same model or different model; Described low frequency two dimension controllable mirrors (412), low frequency two dimension controllable mirrors (422), low frequency two dimension controllable mirrors (432) adopt two-dimentional controllable mirrors same model or different model, and the position of high frequency two dimension controllable mirrors in each Beam Control unit and low frequency two dimension controllable mirrors can exchange.
5. described a kind of beam Propagation stabilising arrangement according to claim 4; It is characterized in that; In the described Beam Control module; Also can select described second Beam Control unit (42) and the 3rd Beam Control unit (43) rotation process corner to be consistent; Promptly the mirror surface of the low frequency of the second Beam Control unit (42) and the 3rd Beam Control unit (43) two dimension controllable mirrors (422), low frequency two dimension controllable mirrors (432) remains parallel in rotation process; Do not influence the sensing deviation of light beam in the time of position deviation that light beam is regulated in the rotation of the second Beam Control unit (42) and the 3rd Beam Control unit (43), the sensing deviation of light beam is regulated in the rotation of the first Beam Control unit (41).
6. described a kind of beam Propagation stabilising arrangement according to claim 5 is characterized in that, and is optional, and one or two or the light path turning mirror more than three or three also can be placed in described delivery optics optional position, is used to change the transmission path of light path.
7. a kind of beam Propagation stabilising arrangement according to claim 6; It is characterized in that; The high frequency two dimension controllable mirrors (411) of the described first Beam Control unit (41) links to each other with controller (46) respectively with low frequency two dimension controllable mirrors (412); The high frequency two dimension controllable mirrors (421) of the described second Beam Control unit (42) links to each other with controller (46) respectively with low frequency two dimension controllable mirrors (422), and the high frequency two dimension controllable mirrors (431) of described the 3rd Beam Control unit (43) links to each other with controller (46) respectively with low frequency two dimension controllable mirrors (432).
8. described a kind of beam Propagation stabilising arrangement according to claim 7 is characterized in that described light velocity measurement module (45) comprises light-beam position measuring unit (60) and beam-pointing measuring unit (70).
9. described a kind of beam Propagation stabilising arrangement according to claim 8 is characterized in that optional, described light velocity measurement module (45) comprises two light-beam position measuring units (70).
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| CN201210030456.3A CN102566318B (en) | 2012-02-12 | 2012-02-12 | Light beam transmission stabilizing device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104238281A (en) * | 2014-09-15 | 2014-12-24 | 中国科学院上海光学精密机械研究所 | Light beam stabilization device and light beam stabilization method applied to long distance |
| CN104808335A (en) * | 2014-01-27 | 2015-07-29 | 深圳市大德激光技术有限公司 | Spatial light beam transmission mechanism |
| CN110310556A (en) * | 2019-07-30 | 2019-10-08 | 中国人民解放军国防科技大学 | Spatial unwinding relationship verification device for light beam direction finder |
| CN110596908A (en) * | 2019-09-16 | 2019-12-20 | 中国科学院长春光学精密机械与物理研究所 | Alignment method and device for multi-path light beam combination |
| US10613448B2 (en) | 2017-10-03 | 2020-04-07 | Asml Netherlands B.V. | Method and apparatus for determining alignment properties of a beam of radiation |
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| CN104808335A (en) * | 2014-01-27 | 2015-07-29 | 深圳市大德激光技术有限公司 | Spatial light beam transmission mechanism |
| CN104238281A (en) * | 2014-09-15 | 2014-12-24 | 中国科学院上海光学精密机械研究所 | Light beam stabilization device and light beam stabilization method applied to long distance |
| CN104238281B (en) * | 2014-09-15 | 2016-09-07 | 中国科学院上海光学精密机械研究所 | It is applied to remote light beam stabilizing device and beamstability method |
| US10613448B2 (en) | 2017-10-03 | 2020-04-07 | Asml Netherlands B.V. | Method and apparatus for determining alignment properties of a beam of radiation |
| CN110310556A (en) * | 2019-07-30 | 2019-10-08 | 中国人民解放军国防科技大学 | Spatial unwinding relationship verification device for light beam direction finder |
| CN110596908A (en) * | 2019-09-16 | 2019-12-20 | 中国科学院长春光学精密机械与物理研究所 | Alignment method and device for multi-path light beam combination |
| CN110596908B (en) * | 2019-09-16 | 2020-11-06 | 中国科学院长春光学精密机械与物理研究所 | Alignment method and device for multi-path light beam combination |
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