CN110592559B - Display screen line protection device and method - Google Patents
Display screen line protection device and method Download PDFInfo
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- CN110592559B CN110592559B CN201910874116.0A CN201910874116A CN110592559B CN 110592559 B CN110592559 B CN 110592559B CN 201910874116 A CN201910874116 A CN 201910874116A CN 110592559 B CN110592559 B CN 110592559B
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
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Abstract
The invention relates to a display screen circuit protection device, which comprises a vapor deposition device, a pipeline, a first electrode, a coil, a second electrode, a rotating mechanism, a connector, a rotation auxiliary mechanism and a first driving mechanism, wherein the pipeline penetrates through the middle part of the vapor deposition device, the pipeline is rotatably connected with the rotating mechanism through the connector, the connector is connected with one end of the rotation auxiliary mechanism, the side wall of the vapor deposition device is provided with the first driving mechanism symmetrical to the rotation auxiliary mechanism, and the top and the bottom of the vapor deposition device are provided with the first electrode and the second electrode; the invention also discloses a method for protecting the display screen circuit, which can generate two electric fields with completely opposite directions, wherein one of the two metal plates is forced downwards, and the other metal plate is forced upwards by the second coil, so that the vent pipe rotates, plasma is uniformly diffused, and the thicknesses of the formed films are consistent.
Description
Technical Field
The invention relates to a display screen production process, in particular to a display screen circuit protection device and a display screen circuit protection method.
Background
The display screen is a common device in life, and is used for mobile phones, televisions and the like. The display screen currently uses metal lines as a conductive substrate, covers silicon nitride as a metal line protection layer, and has surface hardness equivalent to that of glass.
In the display screen production process, often need use the vapor deposition device to obtain the film, but among the vapor deposition device of current, produce plasma through radio frequency power supply, electrode etc. and plasma is under the effect of not receiving the external force, can't the even diffusion to the device inside, fully contacts with the base plate, and the film thickness that this kind of apparatus for producing can't guarantee to obtain is unanimous mutually, and then has leaded to the product quality subalternation problem that obtains.
Disclosure of Invention
The invention aims to solve the technical problem that the existing vapor deposition device can not ensure the thickness of the obtained film to be consistent, so that the quality of the obtained product is poor and the like.
The invention solves the technical problems through the following technical means:
a display screen line protection device comprises a vapor deposition device, a pipeline, a first electrode, a coil, a second electrode, a rotating mechanism, a connector, a rotary auxiliary mechanism and a first driving mechanism, wherein the pipeline is arranged in the middle of the vapor deposition device in a penetrating manner, the pipeline is rotatably connected with the rotating mechanism through the connector, one end, far away from the pipeline, of the rotating mechanism is connected with one end of the rotary auxiliary mechanism, the other end of the rotary auxiliary mechanism is slidably connected with a groove arranged on the side wall of the vapor deposition device, the first driving mechanism symmetrical to the rotary auxiliary mechanism is arranged on the side wall of the vapor deposition device, the rotary auxiliary mechanism is matched with the first driving mechanism to rotate, the first electrode and the second electrode are arranged at the top and the bottom of the vapor deposition device, wherein,
the coil includes first coil, second coil, and first coil and second coil set up and be in same vertical plane with second electrode, first electrode respectively along vapor deposition device side diagonal, first coil and second coil link to each other with the vapor deposition device respectively.
One end of the pipeline is connected with the air inlet device, the other end of the pipeline is connected with the tail gas collecting device, the environment protection is facilitated, the first coil and the second coil can be externally connected with a power supply and can generate an electric field, the position of the first coil and the position of the second coil are arranged along the diagonal line of the side face of the gas phase precipitation device and are respectively connected with the second electrode and the first electrode in the same vertical face, two electric fields with completely opposite directions can be generated, meanwhile, the rotation auxiliary mechanism and the first driving mechanism are matched to drive the coils to rotate, the gas inside the rotating mechanism is thrown out, the gas diffusion is enabled to be better and uniform, the second electrode can be connected with an external radio frequency power supply, the radio frequency power supply is matched with the second electrode, radio frequency signals are loaded on the second electrode, a large amount of plasmas are generated, and the gas phase precipitation is realized to generate a film under the action of the electric field.
As a further scheme of the invention: the first electrode comprises a first upper electrode plate and a first lower electrode plate, and the first upper electrode plate and the first lower electrode plate are arranged in an up-and-down symmetrical mode; in this embodiment, the first upper electrode plate is welded to the top of the rear side of the vapor deposition device, the first lower electrode plate is arranged below the first upper electrode plate, and meanwhile, one side surface of the first upper electrode plate is fixedly connected with the inner wall of the vapor deposition device in a welding manner; a second coil is arranged between the first lower electrode plate and the bottom of the vapor deposition device;
the second electrode comprises a second upper electrode and a second lower electrode which are arranged in a vertically symmetrical mode, the second lower electrode is welded and arranged on the inner side of the bottom of the vapor deposition device, one side face of the second upper electrode is welded with the inner wall of the vapor deposition device, and a first coil is arranged between the second upper electrode and the top of the vapor deposition device.
As a further scheme of the invention: the rotating mechanism comprises a vent pipe, through holes and metal plates, the vent pipe is of a cavity structure with two open sides, the vent pipe is provided with a plurality of through holes, gas can be emitted out through the through holes, the vent pipe is symmetrically provided with the metal plates, and the metal plates are provided with light base plates.
The number of the metal plates is preferably two, and the metal plates are connected with the vent pipes through bolts, so that the metal plates are convenient to disassemble; the metal sheet is made for the plastic slab, and the metal sheet thickness is very thin, specifically can set for according to actual conditions, sets up the light base plate simultaneously on the metal sheet, and the light base plate can set up on the metal sheet through modes such as pasting or joint, can once only form the film on a plurality of base plates like this.
As a further scheme of the invention: the connector includes first connector, second connector, the one end of advancing the pipe is linked together and rotates with one side of first connector and is connected, the opposite side of first connector is linked together and rotates with the one end of breather pipe and is connected, the other end of breather pipe is linked together with one side of second connector, the opposite side and the exit tube of second connector are linked together.
As a further scheme of the invention: rotatory complementary unit includes first connecting rod, second connecting rod and first magnet, the lower extreme and the breather pipe bolted connection of first connecting rod, the upper end of first connecting rod is a whole with the one end fixed connection of second connecting rod, the first annular groove sliding connection that sets up on the other end of second connecting rod and the lateral wall of vapor deposition device, first annular groove sets up in the lateral wall of vapor deposition device, and the gliding one end of second connecting rod and first annular groove cooperation still fixedly is provided with first magnet, and first annular groove inner wall is through smooth processing, and during the slip, and first magnet leaves certain clearance with first annular groove.
As a further scheme of the invention: the first driving mechanism comprises a second magnet, a third connecting rod, a box body and a first motor, one end of the box body is connected with the right side wall of the vapor deposition device through a bolt, the first motor is detachably connected with the right side inner wall of the box body, an output shaft of the first motor is connected with one end of the third connecting rod, the third connecting rod is Z-shaped, a second magnet is arranged at one end, close to the side wall of the vapor deposition device, of the third connecting rod, the third connecting rod can slide relative to the second annular groove, and the ends, close to the first magnet, of the second magnet and the first magnet are different magnetic poles; the second annular groove and the first annular groove are symmetrical relative to the side wall of the vapor deposition device, the inner wall of the second annular groove is subjected to smoothing treatment, and a certain gap is reserved between the second magnet and the second annular groove when the second annular groove slides.
As a further scheme of the invention: the rotary auxiliary mechanism and the first driving mechanism are replaced by a second driving mechanism, the second driving mechanism comprises a driving rod, a second motor and a supporting plate, the supporting plate is fixedly arranged on the right side wall of the vapor deposition device, the top of the supporting plate is in bolted connection with the second motor, the second motor is a servo motor, an output shaft of the second motor is fixedly connected with a second connector, and the second motor rotates to drive the rotating mechanism to rotate.
The invention has the advantages that:
1. according to the invention, one end of the pipeline is connected with the air inlet device, the other end of the pipeline is connected with the tail gas collecting device, so that the environment is protected, the first coil and the second coil can be externally connected with a power supply and can generate an electric field by being connected with the power supply, the positions of the first coil and the second coil are arranged along the side diagonal of the gas phase precipitation device, so that two electric fields with completely opposite directions can be generated, under the action of the electric field force formed by the first coil, the rotating mechanism rotates, plasma is uniformly diffused, and the thicknesses of formed films are consistent.
2. In the invention, the metal plate can also be provided with the substrate, and a thin film with consistent thickness can be better formed on the substrate in the rotating process; the working efficiency is greatly improved.
3. According to the invention, the servo controller controls the first motor of the first driving mechanism to rotate, and at the moment, the second connecting rod is driven to rotate together under the action of magnetic force, so that the thin films can be fully and uniformly distributed on the substrate arranged on the metal plate, and meanwhile, the metal plate rotates to ensure that the plasmas are uniformly distributed in the vapor deposition device, and the uniform formation of the thin films on the substrate is facilitated.
4. According to the invention, the display screen circuit protection device can be used for uniformly coating the film on the circuit, so that the formed protection layer has consistent thickness, and the subsequent processing and finished product sale are facilitated.
Drawings
Fig. 1 is a schematic structural diagram of a display screen line protection device according to embodiment 1 of the present invention.
Fig. 2 is a schematic electric field diagram of the display screen circuit protection device in embodiment 1 of the present invention.
Fig. 3 is a perspective view of the rotating mechanism in embodiment 1 of the present invention.
Fig. 4 is a schematic structural diagram of a display screen line protection device according to embodiment 2 of the present invention.
In the figure: 1-vapor deposition device, 2-pipeline, 3-first electrode, 301-first upper electrode plate, 302-first lower electrode plate, 4-coil, 401-first coil, 402-second coil, 5-second electrode, 501-second upper electrode, 502-second lower electrode, 6-rotating mechanism, 601-breather pipe, 602-through hole, 603-metal plate, 7-base plate, 8-connector, 801-first connector, 802-second connector, 9-rotation auxiliary mechanism, 901-first connecting rod, 902-second connecting rod, 903-first magnet, 10-first driving mechanism, 1001-second magnet, 1002-third connecting rod, 1003-box, 1004-first motor, 11-second driving mechanism, 1101-drive rod, 1102-second motor, 1103-support plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Taking the direction shown in fig. 1 as the setting direction of the device, fig. 1 is a schematic structural diagram of a display screen line protection device provided in embodiment 1 of the present invention; referring to fig. 1, a line protection device for a display screen comprises a vapor deposition device 1, a pipeline 2, a first electrode 3, a coil 4, a second electrode 5, a rotating mechanism 6, a connector 8, a rotation auxiliary mechanism 9 and a first driving mechanism 10, wherein the pipeline 2 is arranged in the middle of the vapor deposition device 1 in a penetrating manner, the pipeline 2 is rotatably connected with the rotating mechanism 6 through the connector 8, one end of the rotating mechanism 6, which is far away from the pipeline 2, is connected with one end of the rotation auxiliary mechanism 9, the other end of the rotation auxiliary mechanism 9 is slidably connected with a groove arranged on the side wall of the vapor deposition device 1, the first driving mechanism 10 symmetrical to the rotation auxiliary mechanism 9 is arranged on the side wall of the vapor deposition device 1, the rotation auxiliary mechanism 9 is matched with the first driving mechanism 10 to drive the rotating mechanism 6 to rotate, the top and the bottom of the vapor deposition device 1 are respectively provided with the first electrode 3 and the second electrode 5 in a staggered manner, wherein,
the coils 4 comprise a first coil 401 and a second coil 402, the first coil 401 and the second coil 402 are arranged along the diagonal line of the side surface of the vapor deposition device 1, as shown in fig. 2, the first coil 401 is positioned on the top wall of the right end of the inner cavity of the vapor deposition device 1, and correspondingly, the second coil 402 is positioned on the bottom wall of the left end of the inner cavity of the vapor deposition device 1; the first coil 401 is disposed between the first electrode 3 and the vapor deposition device 1, and the first coil 401 is disposed between the second electrode 5 and the vapor deposition device 1.
Furthermore, one end of the pipeline 2 is connected with the gas inlet device, the other end is connected with the tail gas collecting device, which is beneficial to environmental protection, the first coil 401 and the second coil 402 can be externally connected with a power supply, which is connected with the power supply to generate an electric field, the positions of the first coil 401 and the second coil 402 are arranged along the diagonal line of the side surface of the gas phase precipitation device 1, meanwhile, the first coil 401 and the second coil 402 are respectively positioned on the same vertical surface with the second electrode 5 and the first electrode 3, which can generate two electric fields with completely opposite directions, and meanwhile, the rotation auxiliary mechanism 9 and the first driving mechanism 10 are matched to drive the coil 4 to rotate, so that the gas in the rotating mechanism 6 is thrown out, the gas diffusion is better and uniform, the second electrode 5 can be connected with an external radio frequency power supply, the radio frequency power supply is matched with the second electrode 5, and a radio frequency signal is loaded on the second electrode 5, generating a large amount of plasma, and realizing the film deposition by vapor deposition under the action of an electric field.
Further, fig. 2 is a schematic diagram of an electric field of the screen circuit protection device in embodiment 1 of the present invention, and fig. 2 is also a left side view or a right side view of the interior of the screen circuit protection device, as shown in fig. 2, the first electrode 3 includes a first upper electrode plate 301 and a first lower electrode plate 302, and the first upper electrode plate 301 and the first lower electrode plate 302 are arranged in an up-and-down symmetric manner; in this embodiment, taking the direction shown in fig. 2 as an example, the first upper electrode plate 301 is welded to the inner wall of the vapor deposition device 1 at the upper left, and meanwhile, one side surface of the first upper electrode plate 301 is welded and fixedly connected to the inner wall of the vapor deposition device 1, and the first lower electrode plate 302 is arranged at the lower left of the first upper electrode plate 301 and the left side surface is welded to the vapor deposition device 1.
Preferably, in this embodiment, a gap is left between the first lower electrode plate 302 and the bottom of the vapor deposition apparatus 1, and the second coil 402 is placed in the gap.
The second electrode 5 comprises a second upper electrode 501 and a second lower electrode 502, the second upper electrode 501 and the second lower electrode 502 are arranged in an up-and-down symmetrical manner, in this embodiment, the second lower electrode 502 is welded on the inner wall of the lower right of the vapor deposition device 1, and one side surface of the second upper electrode 501 is welded on the inner wall of the vapor deposition device 1.
Preferably, in this embodiment, a gap is left between the second upper electrode 501 and the top of the vapor deposition apparatus 1, the first coil 401 is placed in the gap, and the substrate 7 may be disposed on the second lower electrode 502 for forming a thin film.
Further, fig. 3 is a schematic perspective view of a rotation mechanism in embodiment 1 of the present invention, and as shown in fig. 3, the rotation mechanism 6 includes a vent pipe 601, through holes 602, and a metal plate 603, the vent pipe 601 is a cavity structure with two open sides, the vent pipe 601 is provided with a plurality of through holes 602, gas can be released through the through holes 602, and the vent pipe 601 is symmetrically provided with a plurality of metal plates 603, in this embodiment, the number of the metal plates 603 is preferably two, and the metal plates 603 are connected to the vent pipe 601 by bolts, so that disassembly is convenient.
Preferably, in this embodiment, the thickness of the metal plate 603 is very thin, which may be set according to practical situations, for example, the thickness is set to be 1-3mm, and in order to improve the working efficiency, a light substrate is disposed on the metal plate 603, and the light substrate may be disposed on the metal plate 603 by means of pasting or clamping, so that a thin film may be formed on a plurality of substrates at one time.
Further, connector 8 includes first connector 801, second connector 802, the one end of advancing pipe 201 is linked together and rotates with one side of first connector 801 and is connected, the opposite side of first connector 801 is linked together and rotates with the one end of breather pipe 601 and is connected, the other end of breather pipe 601 links to each other with one side of second connector 802, plays the sealing effect.
In order to ensure that the rotating mechanism 6 can rotate better, in the embodiment, the rotation auxiliary mechanism 9 is symmetrically arranged up and down at one end of the vent pipe 601, the rotation assisting mechanism 9 includes a first link 901, a second link 902, and a first magnet 903, the lower end of the first link 901 is connected with the air pipe 601 by bolts, the upper end of the first link 901 is fixedly connected with one end of the second link 902 into a whole, the other end of the second connecting rod 902 is slidably connected with a first annular groove (not shown in the figure) arranged on the side wall of the vapor deposition device 1, the first annular groove is arranged on the side wall of the vapor deposition device 1, a first magnet 903 is fixedly arranged at one end of the second connecting rod 902, which is matched with the first annular groove in a sliding manner, the inner wall of the first annular groove is subjected to smoothing treatment, and a certain gap is reserved between the first magnet 903 and the first annular groove when the first connecting rod is slid.
The first driving mechanism 10 comprises a second magnet 1001, a third connecting rod 1002, a box 1003 and a first motor 1004, wherein one end of the box 1003 is in bolted connection with the right side wall of the vapor deposition device 1, the first motor 1004 is detachably connected with the right side inner wall of the box 1003, in the embodiment, the first motor is in bolted connection, meanwhile, an output shaft of the first motor 1004 is connected with one end of the third connecting rod 1002, the third connecting rod 1002 is in a Z shape, one end of the third connecting rod 1002, which is close to the side wall of the vapor deposition device 1, is provided with the second magnet 1001, the first magnet 903 and the second magnet 1001 are unlike magnetic poles and can attract each other, the third connecting rod 1002 can slide relative to the second annular groove, and one end of the second magnet 1001 and the first magnet 903 are unlike magnetic poles; the magnet 1001 and the second annular groove are provided with a certain gap when sliding.
The second annular groove is the same as the first annular groove; the first motor 1004 is a servo motor, and is connected to an external servo controller, and the third link 1002 is in a vertical state when the first motor 1004 is in an initial state.
It should be noted that the servo controller is commonly used in the art to control the rotation of the servo motor in cooperation, and will not be described in detail herein.
When the rotating mechanism works, the first motor 1004 rotates to drive the third connecting rod 1002 to rotate, and the second magnet 1001 and the first magnet 903 attract each other, so that the second connecting rod 902 is driven to rotate, and the rotating mechanism 6 is further driven to rotate; a second annular groove corresponding to the upper half part of the first annular groove is arranged on the outer surface of the side wall of the vapor deposition device 1, the side wall between the second annular groove and the first annular groove is thinner and can be set to be 1-2cm, and the first annular groove is in sliding connection with the first driving mechanism 10.
The working principle is as follows:
when the rotating mechanism works, the first motor 1004 rotates to drive the third connecting rod 1002 to rotate, and the second magnet 1001 and the first magnet 903 attract each other, so that the second connecting rod 902 is driven to rotate, and the rotating mechanism 6 is further driven to rotate; pipeline 2's one end links to each other with air inlet unit, the other end links to each other with tail gas collection device, do benefit to the environmental protection, first coil 401, second coil 402 can external power supply, through linking to each other with the power, can produce the electric field, and first coil 401, the position of second coil 402 sets up along vapor deposition device 1 side diagonal, the first motor of servo controller control 1004 rotates, this moment under the effect of magnetic force, drive second connecting rod 902 and rotate together, can make like this and fully evenly be covered with the film on the base plate that sets up on the metal sheet 603, metal sheet 603 rotates simultaneously and has guaranteed that the plasma distributes evenly in vapor deposition device 1, also do benefit to the even formation of film on the base plate 7.
Example 2
Fig. 4 is a schematic structural diagram of a display screen line protection device according to embodiment 2 of the present invention, and as shown in fig. 4, a difference between embodiment 2 and embodiment 1 is that the rotation assisting mechanism 9 and the first driving mechanism 10 are replaced by a second driving mechanism 11, the second driving mechanism 11 includes a driving rod 1101, a second motor 1102 and a supporting plate 1103, the supporting plate 1103 is fixedly disposed on a right side wall of the vapor deposition device 1, a top of the supporting plate 1103 is connected with the second motor 1102 by a bolt, the second motor 1102 is a servo motor, an output shaft of the second motor 1102 is fixedly connected with a second connector 802, and the second motor 1102 rotates to drive the rotating mechanism 6 to rotate; the rest is the same as in example 1.
The working principle is as follows: when the second motor 1102 works, the metal plate 603 is driven to rotate by the rotation of the second motor 1102; the metal plate 603 is rotated to uniformly form a thin film.
Example 3
A display screen circuit protection method comprises the following steps:
s1, manufacturing a metal wire, and sputtering a metal circuit on the glass substrate by adopting a sputtering method on the existing display screen;
s2, coating a photoresist on the metal circuit of the substrate by a coating method, wherein the photoresist can be purchased in the market and the type of the photoresist can be selected according to actual needs;
s3, carrying out exposure, and carrying out exposure by using a mask according to the design requirements of the display screen product;
s4, placing the exposed display screen in the display screen circuit protection device described in embodiment 1, attaching a layer of shielding cloth to only expose the metal circuit, then starting the display screen circuit protection device to form a thin film on the metal circuit, and forming a protection layer on the circuit by using a photomask masking method.
In this embodiment, the protective layer is preferably a graphene material.
The working principle is as follows: through the display screen circuit protection device, the film can be uniformly coated on the circuit, and the thickness of the formed protective layer is consistent, so that the subsequent processing and the sale of finished products are facilitated.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (9)
1. A display screen circuit protection device is characterized by comprising a vapor deposition device (1), a pipeline (2), a first electrode (3), a coil (4), a second electrode (5), a rotating mechanism (6), a connector (8), a rotary auxiliary mechanism (9) and a first driving mechanism (10), wherein the pipeline (2) penetrates through the middle part of the vapor deposition device (1), the pipeline (2) is rotatably connected with the rotating mechanism (6) through the connector (8), one end of the rotating mechanism (6), which is far away from the pipeline (2), is connected with one end of the rotary auxiliary mechanism (9), the other end of the rotary auxiliary mechanism (9) is slidably connected with a groove arranged on the side wall of the vapor deposition device (1), the first driving mechanism (10) which is symmetrical to the rotary auxiliary mechanism (9) is arranged on the side wall of the vapor deposition device (1), the rotation auxiliary mechanism (9) and the first driving mechanism (10) are matched with the auxiliary rotating mechanism (6) to rotate, and the top and the bottom of the vapor deposition device (1) are respectively provided with a first electrode (3) and a second electrode (5) in a staggered manner;
the coil (4) comprises a first coil (401) and a second coil (402), wherein the first coil (401) and the second coil (402) are arranged along the diagonal of the side surface of the vapor deposition device (1) and are respectively positioned on the same vertical surface with the second electrode (5) and the first electrode (3); the first coil (401) and the second coil (402) are respectively connected with the vapor deposition device (1);
rotary mechanism (6) include breather pipe (601), through-hole (602) and metal sheet (603), breather pipe (601) are the open cavity structure in both sides, a plurality of through-holes (602) have been seted up on breather pipe (601), and the symmetry is provided with a plurality of metal sheets (603) on breather pipe (601) simultaneously, set up the light base plate on metal sheet (603), the both ends of breather pipe (601) link to each other with connector (8).
2. A display screen circuit protection device according to claim 1, wherein the first electrode (3) comprises a first upper electrode plate (301) and a first lower electrode plate (302), and the first upper electrode plate (301) and the first lower electrode plate (302) are arranged vertically symmetrically; the first upper electrode plate (301) is welded on the inner wall of the top of the rear side of the vapor deposition device (1), the first lower electrode plate (302) is arranged below the first upper electrode plate (301), and meanwhile, one side surface of the first upper electrode plate (301) is fixedly connected with the inner wall of the vapor deposition device (1) in a welding manner; a second coil (402) is arranged between the first lower electrode plate (302) and the bottom of the vapor deposition device (1);
the second electrode (5) comprises a second upper electrode (501) and a second lower electrode (502), the second upper electrode (501) and the second lower electrode (502) are arranged in an up-down symmetrical mode, the second lower electrode (502) is arranged on the front side of the bottom of the vapor deposition device (1), one side face of the second upper electrode (501) is connected with the inner wall of the vapor deposition device (1), and a first coil (401) is arranged between the second upper electrode (501) and the top of the vapor deposition device (1).
3. A display screen circuit protection device according to claim 2, wherein the connector (8) comprises a first connector (801) and a second connector (802), one end of the inlet pipe (201) is connected with one side of the first connector (801) in a rotating manner, the other side of the first connector (801) is connected with one end of the vent pipe (601) in a communicating manner in a rotating manner, and the other end of the vent pipe (601) is connected with one side of the second connector (802).
4. The display screen circuit protection device according to claim 3, wherein the rotation assisting mechanism (9) comprises a first connecting rod (901), a second connecting rod (902) and a first magnet (903), the lower end of the first connecting rod (901) is connected with the vent pipe (601) through a bolt, the upper end of the first connecting rod (901) is fixedly connected with one end of the second connecting rod (902) into a whole, the other end of the second connecting rod (902) is connected with a first annular groove arranged on the side wall of the vapor deposition device (1) in a sliding manner, the first annular groove is arranged on the side wall of the vapor deposition device (1), and the first magnet (903) is fixedly arranged at the end, matched with and sliding in the first annular groove, of the second connecting rod (902).
5. The display screen circuit protection device according to claim 1, wherein the first driving mechanism (10) comprises a second magnet (1001), a third connecting rod (1002), a box body (1003) and a first motor (1004), one end of the box body (1003) is connected with the side wall of the vapor deposition device (1), the first motor (1004) is detachably connected with the inner wall of the box body (1003), an output shaft of the first motor (1004) is connected with one end of the third connecting rod (1002), which is close to the side wall of the vapor deposition device (1), is provided with the second magnet (1001), the third connecting rod (1002) slides relative to the second annular groove, and the second annular groove and the first annular groove are symmetrical about the side wall of the vapor deposition device (1).
6. A display screen circuit protection device according to claim 5, wherein the inner walls of the first annular groove and the second annular groove are smoothed, and when sliding, a gap is left between the first magnet (903) and the first annular groove; a gap is reserved between the second magnet (1001) and the second annular groove, and the ends, close to the second magnet (1001) and the first magnet (903), of the second magnet (1001) and the first magnet (903) are of unlike magnetic poles.
7. A display screen line protection device according to claim 5, wherein the first motor (1004) is a servo motor and is connected with an external servo controller.
8. The display screen circuit protection device according to claim 7, wherein the rotation assisting mechanism (9) and the first driving mechanism (10) are replaced by a second driving mechanism (11), the second driving mechanism (11) comprises a driving rod (1101), a second motor (1102) and a supporting plate (1103), the supporting plate (1103) is fixedly arranged on the right side wall of the vapor deposition device (1), the top of the supporting plate (1103) is connected with the second motor (1102) through a bolt, an output shaft of the second motor (1102) is fixedly connected with the second connector (802), and the second motor (1102) rotates to drive the rotating mechanism (6) to rotate.
9. A display screen line protection method using the display screen line protection device according to any one of claims 1 to 8, comprising the steps of:
s1, manufacturing a metal wire, and sputtering a metal circuit on the glass substrate by adopting a sputtering method on the existing display screen;
s2, coating a photoresist on the metal circuit of the substrate by a coating method;
s3, carrying out exposure, and carrying out exposure by using a mask according to the design requirements of the display screen product;
s4, placing the exposed display screen in the display screen circuit protection device, pasting a layer of shielding cloth to only leak out the metal circuit, starting the display screen circuit protection device to generate a film on the metal circuit, and forming a protection layer on the circuit by a light shield masking mode.
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| US4422407A (en) * | 1980-09-17 | 1983-12-27 | Compagnie Industrille Des Telecommunications Cit-Alcatel | Apparatus for chemically activated deposition in a plasma |
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| CN104156131A (en) * | 2014-08-20 | 2014-11-19 | 深圳市华星光电技术有限公司 | Touch panel manufacturing method |
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| US4422407A (en) * | 1980-09-17 | 1983-12-27 | Compagnie Industrille Des Telecommunications Cit-Alcatel | Apparatus for chemically activated deposition in a plasma |
| CN103388129A (en) * | 2013-07-31 | 2013-11-13 | 中国科学院金属研究所 | Method for depositing thin film on inner surface of long tube by virtue of plasma enhanced chemical vapor deposition (PECVD) |
| CN104156131A (en) * | 2014-08-20 | 2014-11-19 | 深圳市华星光电技术有限公司 | Touch panel manufacturing method |
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