CN112695289A - Multi-target double-sided coating magnetron sputtering winding coating equipment - Google Patents
Multi-target double-sided coating magnetron sputtering winding coating equipment Download PDFInfo
- Publication number
- CN112695289A CN112695289A CN202011510439.0A CN202011510439A CN112695289A CN 112695289 A CN112695289 A CN 112695289A CN 202011510439 A CN202011510439 A CN 202011510439A CN 112695289 A CN112695289 A CN 112695289A
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- fixedly connected
- winding
- magnetron sputtering
- film
- box
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- 239000011248 coating agent Substances 0.000 title claims abstract description 35
- 238000000576 coating method Methods 0.000 title claims abstract description 35
- 238000004804 winding Methods 0.000 title claims abstract description 27
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims description 16
- 230000006835 compression Effects 0.000 claims description 10
- 238000007906 compression Methods 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims description 10
- 238000005485 electric heating Methods 0.000 claims description 7
- 238000009413 insulation Methods 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 239000013077 target material Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 5
- 239000010409 thin film Substances 0.000 claims 1
- 238000009826 distribution Methods 0.000 description 8
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a multi-target double-sided coating magnetron sputtering winding coating device, which comprises a shell, a film and a box body, the inner side of the shell is provided with a first winding and unwinding roll, a first guide roll, a second guide roll, a third guide roll and a second winding and unwinding roll, the inner side of the shell is fixedly connected with three mounting seats, the inner surface of each mounting seat is provided with a target electrode, the three mounting seats are respectively positioned at the outer sides of the first guide roller, the second guide roller and the third guide roller, the film is respectively contacted with the first winding and unwinding roll, the first guide roll, the second guide roll, the third guide roll and the second winding and unwinding roll, the invention relates to a multi-target double-sided coating magnetron sputtering winding coating device, which has the characteristics of improving the quality of a film and accelerating the finished product.
Description
Technical Field
The invention belongs to the technical field of magnetron sputtering, and particularly relates to a multi-target double-sided coating magnetron sputtering winding coating device.
Background
Magnetron sputtering is the process of bombarding the surface of a target with high-energy particles in vacuum to deposit target ions sputtered by bombardment on a substrate. During sputtering, after gas is ionized, gas ions fly to the electrode target under the action of an electric field and bombard the surface of the target at high energy, so that the target material is sputtered, and sputtered target particles are deposited on the substrate. Magnetron sputtering includes various types, each has different working principles and application objects, but some problems exist after magnetron sputtering at present: 1. the target material is not strong enough to adhere to the surface of the film, and is easy to bulge; 2. the finished product needs time to cool, and the efficiency is slow. Therefore, a multi-target double-sided coating magnetron sputtering winding coating device needs to be designed.
The invention content is as follows:
the invention aims to solve the problems in the prior art by providing a magnetron sputtering winding coating device for multi-target double-sided coating.
In order to solve the above problems, the present invention provides a technical solution:
the utility model provides a two-sided coating film magnetron sputtering of many targets convolutes filming equipment, includes casing, film and box, the inboard of casing is provided with first receipts and unreels, first deflector roll, second deflector roll, third deflector roll and second receipts and unreel, the three mount pad of inboard fixedly connected with of casing, every the internal surface of mount pad is provided with target electrode, and is three the mount pad is located respectively the outside of first deflector roll, second deflector roll and third deflector roll, the film is received respectively with first receipts and is unreeled, first deflector roll, second deflector roll, third deflector roll and second and unreel the contact, set up two symmetric distribution's logical groove on the casing, the film passes two logical grooves respectively and extends to the outside of casing.
As preferred, the outside fixedly connected with roof of casing, the bottom fixedly connected with of roof supports the seat, the inside wall that supports the seat is provided with the slide rail of two symmetric distributions, every the inside sliding connection of slide rail has the pulley, two fixedly connected with removes the seat between the pulley, remove the connecting block of two symmetric distributions of bottom fixedly connected with of seat, two it is connected with the compression roller to rotate between the connecting block, compression roller and film contact, support the first spring of the inboard fixedly connected with of pressing the seat, the one end of first spring and the interior fixed surface who supports the seat of pressing are connected, the other end of first spring with remove a fixed connection.
As preferred, set up two symmetric distribution's mounting groove on the box, every the inboard fixedly connected with fixed axle of mounting groove, the outside of fixed axle is rotated and is connected with the smooth roller, two smooth roller all contacts with the film, the inboard bottom fixedly connected with heating power case of box, the upper end fixedly connected with drying tube of heating power case, the drying tube runs through the box, the inboard bottom fixed mounting of box has the air pump, fixedly connected with connecting pipe on the air pump, the one end and the heating power case fixed connection of air pump are kept away from to the connecting pipe, fixedly connected with intake pipe on the air pump, the intake pipe runs through the box.
Preferably, one end of the drying pipe, which is far away from the heating power box, is fixedly connected with a flow guide cover, and the flow guide cover is made of silica gel.
Preferably, the inner wall of the heating power box is fixedly connected with a heat insulation layer, and the heat insulation layer is made of rubber and plastic sponge.
As preferred, electric heating pipe is installed to the inboard of heating power case, the inside wall fixedly connected with fixed block of heating power case, the inside of fixed block is provided with the draw-in groove, the inside joint mounting panel of draw-in groove, be provided with the filter screen on the mounting panel, the inside fixedly connected with seal cover of the lateral wall of heating power case, the inside sliding connection of seal cover has the mounting panel, the spacing groove has been seted up to the inside of mounting panel, the outside fixedly connected with supporting shoe of heating power case, the inside sliding connection of supporting shoe has the gag lever post, the one end and the spacing groove sliding connection of gag lever post, the other end fixedly connected with of gag lever post draws the piece, draw the piece and.
Preferably, the outside of the limiting rod is connected with a limiting ring through threads, and the outside of the limiting rod is sleeved with a second spring.
Preferably, one end of the second spring contacts the supporting block, and the other end of the second spring contacts the limit ring.
The invention has the beneficial effects that: the invention relates to a multi-target double-sided coating magnetron sputtering winding coating device, which has the characteristics of improving the quality of a film and accelerating the finished product, and compared with the prior art, the quenching device has the following two beneficial effects in specific use:
firstly, a film after being coated is flattened through the matching of a compression roller and a sliding roller, and a first spring is arranged above a moving seat for mounting the compression roller, so that the compression roller is always attached to the sliding roller, the flattening quality is improved, and the quality of the film is improved;
secondly, through the internally mounted electric heating pipe at the heating-power case, the air pump passes through the intake pipe with the air and pumps in the heating-power case, spouts on the film by the drying duct after electric heating pipe's heating for finished product speed is dried to the film, and hot-blast is spouted more clean behind the filtration of filter screen before the film, prevents that the dust from falling on the film and influencing the quality of product.
Description of the drawings:
for ease of illustration, the invention is described in detail by the following detailed description and the accompanying drawings.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a top plan view of the heat box of the present invention;
FIG. 3 is an enlarged view of the portion A of FIG. 1 according to the present invention;
FIG. 4 is an enlarged view of the portion B of FIG. 1 according to the present invention;
FIG. 5 is a side view of the pressing base of the present invention;
fig. 6 is a bottom view of the movable seat of the present invention.
In the figure: 1. a housing; 2. a first winding and unwinding roll; 3. a first guide roller; 301. a second guide roller; 302. a third guide roller; 4. a mounting seat; 5. a target electrode; 6. secondly, winding and unwinding; 7. a through groove; 8. a film; 9. a top plate; 10. a pressing seat; 11. a first spring; 12. a movable seat; 121. connecting blocks; 13. a compression roller; 14. a pulley; 15. a slide rail; 16. a box body; 17. mounting grooves; 18. a fixed shaft; 19. a sliding roller; 20. a heat box; 21. a drying duct; 211. a pod; 22. an electric heating tube; 23. a fixed block; 24. a card slot; 25. mounting a plate; 26. a filter screen; 27. a limiting groove; 28. sealing sleeves; 29. a support block; 30. a limiting rod; 31. pulling the block; 32. a limiting ring; 33. a second spring; 34. an air pump; 35. a connecting pipe; 36. an air inlet pipe; 37. and (7) an insulating layer.
The specific implementation mode is as follows:
as shown in fig. 1 to 6, the following technical solutions are adopted in the present embodiment:
example (b):
the utility model provides a two-sided coating film magnetron sputtering of many targets coils coating equipment, includes casing 1, film 8 and box 16, the inboard of casing 1 is provided with first receipts and unreels 2, first deflector roll 3, second deflector roll 301, third deflector roll 302 and second receipts and unreel 6, the three mount pad 4 of inboard fixedly connected with of casing 1, every the internal surface of mount pad 4 is provided with target electrode 5, and is three mount pad 4 is located respectively the outside of first deflector roll 3, second deflector roll 301 and third deflector roll 302, film 8 receives with first receipts respectively and unreels 2, first deflector roll 3, second deflector roll 301, third deflector roll 302 and second and unreel 6 contacts, set up two symmetric distribution's logical groove 7 on casing 1, film 8 passes two respectively and leads to groove 7 and extends to the outside of casing 1.
Wherein, the outside fixedly connected with roof 9 of casing 1, the bottom fixedly connected with of roof 9 supports and presses seat 10, the inside wall that supports and press seat 10 is provided with two symmetric distribution's slide rail 15, every the inside sliding connection of slide rail 15 has pulley 14, two fixedly connected with removes seat 12 between the pulley 14, remove the connecting block 121 of two symmetric distribution of the bottom fixedly connected with of seat 12, two it is connected with compression roller 13 to rotate between the connecting block 121, compression roller 13 and the contact of film 8, support the first spring 11 of the inboard fixedly connected with of pressing seat 10, the one end of first spring 11 with support the internal surface fixed connection who presses seat 10, the other end of first spring 11 with remove seat 12 fixed connection.
Wherein, set up two symmetric distribution's mounting groove 17 on the box 16, every the inboard fixedly connected with fixed axle 18 of mounting groove 17, the outside of fixed axle 18 is rotated and is connected with smooth roller 19, two smooth roller 19 all contacts with film 8, the inboard bottom fixedly connected with heating power case 20 of box 16, the upper end fixedly connected with stoving pipe 21 of heating power case 20, stoving pipe 21 runs through box 16, the inboard bottom fixed mounting of box 16 has air pump 34, fixedly connected with connecting pipe 35 on the air pump 34, the one end and the heating power case 20 fixed connection of air pump 34 are kept away from to connecting pipe 35, fixedly connected with intake pipe 36 on the air pump 34, intake pipe 36 runs through box 16.
Wherein, drying tube 21 is kept away from the one end fixedly connected with kuppe 211 of heating power case 20, kuppe 211 is the silica gel material.
The inner wall of the heat box 20 is fixedly connected with a heat insulation layer 37, and the heat insulation layer 37 is made of rubber and plastic sponge.
The electric heating pipe 22 is installed on the inner side of the heat box 20, the fixing block 23 is fixedly connected to the inner side wall of the heat box 20, the clamping groove 24 is formed in the fixing block 23, the mounting plate 25 is clamped in the clamping groove 24, the filter screen 26 is arranged on the mounting plate 25, the sealing sleeve 28 is fixedly connected to the inner side wall of the heat box 20, the mounting plate 25 is slidably connected to the inner portion of the sealing sleeve 28, the limiting groove 27 is formed in the mounting plate 25, the supporting block 29 is fixedly connected to the outer portion of the heat box 20, the limiting rod 30 is slidably connected to the inner portion of the supporting block 29, one end of the limiting rod 30 is slidably connected with the limiting groove 27, the pulling block 31 is fixedly connected to the other end of the limiting rod 30, and the pulling block.
The limiting rod 30 is externally connected with a limiting ring 32 through threads, and the limiting rod 30 is externally sleeved with a second spring 33.
Wherein one end of the second spring 33 contacts the supporting block 29, and the other end of the second spring 33 contacts the limit ring 32.
The using state of the invention is as follows: when the device is used, a film 8 sequentially passes through a first winding and unwinding roll 2, a first guide roll 3, a second guide roll 301, a third guide roll 302 and a second winding and unwinding roll 6, target electrodes 5 on three installation seats 4 are deposited on two sides of the film 8 through discharge sputtering, the film 8 finally comes onto two slide rolls 19 through a through groove 7, the slide roll 19 close to the right side is attached to a press roll 13, the film 8 is located on the slide roll 19 close to the right side and the press roll 13, the film 8 is flattened through the matching between the slide roll 19 close to the right side and the press roll 13, the quality of a product is improved, a first spring 11 is arranged above a moving seat 12 for installing the press roll 13, so that the press roll 13 is always attached to the slide roll 19, an air pump 34 is opened at the moment, the air pump 34 pumps air into a heat power box 20 through an air inlet pipe 36, the air is sprayed on the film 8 through a drying pipe 21 after being heated by an electric heating pipe 22, and, accelerate off-the-shelf speed to hot-blast more clean behind the filtration of filter screen 26 before film 8, prevent that the dust from falling on film 8 and influencing the quality of product, if need change filter screen 26, only need lift up and draw the piece 31, draw the piece 31 with spacing rod 30 leave the spacing groove 27 on the mounting panel 25, then with mounting panel 25 take out from seal cover 28 can, filter screen 26 along with being extracted, very convenience.
While there have been shown and described what are at present considered to be the fundamental principles of the invention and its essential features and advantages, it will be understood by those skilled in the art that the invention is not limited by the embodiments described above, which are merely illustrative of the principles of the invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.
Claims (8)
1. The utility model provides a two-sided coating film magnetron sputtering of multi-target material coils coating equipment which characterized in that: comprises a shell (1), a film (8) and a box body (16), wherein the inner side of the shell (1) is provided with a first winding and unwinding roll (2), a first guide roll (3), a second guide roll (301), a third guide roll (302) and a second winding and unwinding roll (6), the inner side of the shell (1) is fixedly connected with three mounting seats (4), the inner surface of each mounting seat (4) is provided with a target electrode (5), the three mounting seats (4) are respectively positioned at the outer sides of the first guide roller (3), the second guide roller (301) and the third guide roller (302), the film (8) is respectively contacted with the first winding and unwinding roll (2), the first guide roll (3), the second guide roll (301), the third guide roll (302) and the second winding and unwinding roll (6), two through grooves (7) which are symmetrically distributed are formed in the shell (1), and the thin film (8) penetrates through the two through grooves (7) respectively and extends to the outer side of the shell (1).
2. The magnetron sputtering winding coating equipment for multi-target double-sided coating according to claim 1, characterized in that: a top plate (9) is fixedly connected to the outer part of the shell (1), a pressing seat (10) is fixedly connected to the bottom of the top plate (9), two sliding rails (15) which are symmetrically distributed are arranged on the inner side wall of the abutting seat (10), a pulley (14) is connected inside each sliding rail (15) in a sliding manner, a moving seat (12) is fixedly connected between the two pulleys (14), the bottom of the movable seat (12) is fixedly connected with two connecting blocks (121) which are symmetrically distributed, a compression roller (13) is rotatably connected between the two connecting blocks (121), the compression roller (13) is contacted with the film (8), the inner side of the abutting seat (10) is fixedly connected with a first spring (11), one end of the first spring (11) is fixedly connected with the inner surface of the abutting seat (10), the other end of the first spring (11) is fixedly connected with the movable seat (12).
3. The magnetron sputtering winding coating equipment for multi-target double-sided coating according to claim 1, characterized in that: two symmetrically distributed mounting grooves (17) are formed in the box body (16), a fixed shaft (18) is fixedly connected to the inner side of each mounting groove (17), the outside of the fixed shaft (18) is rotatably connected with sliding rollers (19), the two sliding rollers (19) are both contacted with the film (8), the bottom of the inner side of the box body (16) is fixedly connected with a heat box (20), the upper end of the heat box (20) is fixedly connected with a drying pipe (21), the drying pipe (21) penetrates through the box body (16), an air pump (34) is fixedly arranged at the bottom of the inner side of the box body (16), a connecting pipe (35) is fixedly connected to the air pump (34), one end of the connecting pipe (35) far away from the air pump (34) is fixedly connected with the heat power box (20), an air inlet pipe (36) is fixedly connected to the air pump (34), and the air inlet pipe (36) penetrates through the box body (16).
4. The magnetron sputtering winding coating equipment for multi-target double-sided coating according to claim 3, characterized in that: drying tube (21) keep away from one end fixedly connected with kuppe (211) of heating power case (20), kuppe (211) are the silica gel material.
5. The magnetron sputtering winding coating equipment for multi-target double-sided coating according to claim 3, characterized in that: the inner wall of the heating power box (20) is fixedly connected with a heat insulation layer (37), and the heat insulation layer (37) is made of rubber and plastic sponge.
6. The magnetron sputtering winding coating equipment for multi-target double-sided coating according to claim 3, characterized in that: an electric heating pipe (22) is installed on the inner side of the heat box (20), a fixing block (23) is fixedly connected to the inner side wall of the heat box (20), a clamping groove (24) is formed in the fixing block (23), the clamping groove (24) is clamped in an installing plate (25), a filter screen (26) is arranged on the installing plate (25), a sealing sleeve (28) is fixedly connected to the inner portion of the side wall of the heat box (20), the installing plate (25) is connected to the inner portion of the sealing sleeve (28) in a sliding mode, a limiting groove (27) is formed in the installing plate (25), a supporting block (29) is fixedly connected to the outer portion of the heat box (20), a limiting rod (30) is connected to the inner portion of the supporting block (29) in a sliding mode, one end of the limiting rod (30) is connected with the limiting groove (27) in a sliding mode, the pulling block (31) is in contact with the supporting block (29).
7. The magnetron sputtering winding coating equipment for multi-target double-sided coating according to claim 6, characterized in that: the outside of gag lever post (30) has spacing ring (32) through threaded connection, second spring (33) has been cup jointed to the outside of gag lever post (30).
8. The magnetron sputtering winding coating equipment for multi-target double-sided coating according to claim 7, characterized in that: one end of the second spring (33) is contacted with the supporting block (29), and the other end of the second spring (33) is contacted with the limiting ring (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011510439.0A CN112695289A (en) | 2020-12-18 | 2020-12-18 | Multi-target double-sided coating magnetron sputtering winding coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011510439.0A CN112695289A (en) | 2020-12-18 | 2020-12-18 | Multi-target double-sided coating magnetron sputtering winding coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112695289A true CN112695289A (en) | 2021-04-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011510439.0A Pending CN112695289A (en) | 2020-12-18 | 2020-12-18 | Multi-target double-sided coating magnetron sputtering winding coating equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN112695289A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114892131A (en) * | 2022-05-17 | 2022-08-12 | 吴梦伟 | Double-sided multi-station winding type vacuum coating machine |
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|---|---|---|---|---|
| CN101348896A (en) * | 2008-08-27 | 2009-01-21 | 浙江大学 | Winding type two-sided coating equipment |
| CN207877849U (en) * | 2018-01-22 | 2018-09-18 | 无锡光润真空科技有限公司 | Vacuum coater |
| CN209355647U (en) * | 2018-12-27 | 2019-09-06 | 常州市顺龙宏源包装有限公司 | A kind of film drying unit |
| CN209985721U (en) * | 2019-05-05 | 2020-01-24 | 上海市地江建筑科技有限公司 | Coating drying device |
| CN111320009A (en) * | 2018-12-13 | 2020-06-23 | 东莞市锂航自动化科技有限公司 | A pole piece rolling equipment for lithium cell manufacturing |
| CN111785916A (en) * | 2020-07-29 | 2020-10-16 | 吉林大学 | Two-sided quick coating film of PET membrane, coating equipment |
| CN211678624U (en) * | 2019-12-04 | 2020-10-16 | 广州市利辉电子有限公司 | Diffusion barrier drying device |
-
2020
- 2020-12-18 CN CN202011510439.0A patent/CN112695289A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101348896A (en) * | 2008-08-27 | 2009-01-21 | 浙江大学 | Winding type two-sided coating equipment |
| CN207877849U (en) * | 2018-01-22 | 2018-09-18 | 无锡光润真空科技有限公司 | Vacuum coater |
| CN111320009A (en) * | 2018-12-13 | 2020-06-23 | 东莞市锂航自动化科技有限公司 | A pole piece rolling equipment for lithium cell manufacturing |
| CN209355647U (en) * | 2018-12-27 | 2019-09-06 | 常州市顺龙宏源包装有限公司 | A kind of film drying unit |
| CN209985721U (en) * | 2019-05-05 | 2020-01-24 | 上海市地江建筑科技有限公司 | Coating drying device |
| CN211678624U (en) * | 2019-12-04 | 2020-10-16 | 广州市利辉电子有限公司 | Diffusion barrier drying device |
| CN111785916A (en) * | 2020-07-29 | 2020-10-16 | 吉林大学 | Two-sided quick coating film of PET membrane, coating equipment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114892131A (en) * | 2022-05-17 | 2022-08-12 | 吴梦伟 | Double-sided multi-station winding type vacuum coating machine |
| CN114892131B (en) * | 2022-05-17 | 2024-03-22 | 浦江县晶阳博工贸有限公司 | Double-sided multi-station winding type vacuum coating machine |
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Application publication date: 20210423 |