CN110561397A - Industrial robot - Google Patents
Industrial robot Download PDFInfo
- Publication number
- CN110561397A CN110561397A CN201811558711.5A CN201811558711A CN110561397A CN 110561397 A CN110561397 A CN 110561397A CN 201811558711 A CN201811558711 A CN 201811558711A CN 110561397 A CN110561397 A CN 110561397A
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- China
- Prior art keywords
- arm
- arm support
- support portion
- base
- sensor
- Prior art date
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- 238000001514 detection method Methods 0.000 claims abstract description 141
- 230000008602 contraction Effects 0.000 claims abstract description 89
- 230000007246 mechanism Effects 0.000 claims abstract description 52
- 230000003287 optical effect Effects 0.000 claims description 14
- 230000000903 blocking effect Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 description 78
- 239000011521 glass Substances 0.000 description 10
- 239000003638 chemical reducing agent Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000032258 transport Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
- B25J17/02—Wrist joints
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/025—Arms extensible telescopic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/023—Cartesian coordinate type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides an industrial robot which can transport a specified object to be transported and reduce the possibility of collision between a hand and a surrounding structure when an arm extends and contracts. The industrial robot is provided with an arm which can extend and contract in the horizontal direction so that the hand can move substantially linearly in a state of facing a certain direction, an arm support part (24) which can rotatably connect the base end side of the arm, and a base (9) which can rotatably support the arm support part (24). When the position of the arm support part (24) relative to the arm support part (24) in the rotation direction of the base (9) when the arm extends and contracts in a manner that the hand moves substantially linearly towards a containing part containing the object to be conveyed is set as an arm extension and contraction allowing position, the industrial robot is provided with a detection mechanism (33) for detecting that the arm support part (24) exists at the arm extension and contraction allowing position, and the detection mechanism (33) is provided with a sensor mounted on the base (9) and a detection component mounted on the arm support part (24).
Description
Technical Field
The present invention relates to an industrial robot for conveying a predetermined conveyance object.
Background
Conventionally, an industrial robot for conveying a glass substrate for a liquid crystal display is known (for example, see patent document 1). The industrial robot described in patent document 1 includes a hand on which a glass substrate is mounted, an arm whose tip end side is connected to the hand, a main body of a support arm, and a base member that supports the main body so as to be movable in a horizontal direction. The arm is constituted by two arm portions, a first arm portion and a second arm portion, and is capable of extending and contracting in the horizontal direction so that the hand can move substantially linearly in a fixed direction.
In the industrial robot described in patent document 1, the main body includes an arm support member that supports the base end side of the arm, a lifting member that fixes the arm support member and can be lifted, a columnar member that supports the lifting member so as to be movable in the vertical direction, a base that constitutes the lower end portion of the main body and is horizontally movable with respect to the base, and a turning member that fixes the lower end of the columnar member and is rotatable with respect to the base.
The industrial robot described in patent document 1 includes an arm driving motor for extending and contracting an arm, an elevating motor for elevating and lowering an elevating and lowering member with respect to a columnar member, a rotating motor for rotating a rotating member with respect to a base with an up-down direction as an axial direction of rotation, and a horizontal moving motor for horizontally moving the base with respect to a base member. The industrial robot described in patent document 1 transports a glass substrate mounted on a hand by a combination of an arm extending and retracting operation, an arm lifting operation, a turning operation, and a horizontal moving operation.
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. 2015 + 188940
Disclosure of Invention
Technical problem to be solved by the invention
glass substrates transported by industrial robots have been increasing in size year by year, and industrial robots have also been increasing in size with the increase in size of glass substrates. When the industrial robot described in patent document 1 is large in size, for example, if the arm extends and contracts while the turning member is not turned to a predetermined position with respect to the base, and the hand collides with a structure or the like around the industrial robot, there is a possibility that damage larger than before may occur. On the other hand, in the industrial robot described in patent document 1, since the rotation motor is controlled based on the detection result of the encoder for detecting the rotation amount of the rotation motor, the arm does not extend and contract normally in a state where the turning member is not turned to a predetermined position with respect to the base.
however, in the industrial robot described in patent document 1, when an error occurs in the encoder or when an error occurs in the power transmission path from the turning motor to the turning member, the arm extends and contracts in a state where the turning member is not turned to a predetermined position with respect to the base, and there is a possibility that the hand may collide with a surrounding structure or the like. Therefore, if the industrial robot described in patent document 1 is increased in size, a larger damage may occur than before.
Therefore, an object of the present invention is to provide an industrial robot that can transport a predetermined transport object and reduce the possibility of collision between a hand and a surrounding structure or the like when an arm extends and contracts.
Technical scheme for solving problems
In order to solve the above-described problems, the present invention provides an industrial robot for conveying a predetermined conveyance object, the industrial robot including: a hand on which a conveyance object is mounted; an arm that is rotatably connected to a hand at a distal end side and is extendable and retractable in a horizontal direction so that the hand moves substantially linearly in a state of facing a certain direction; an arm support portion which is rotatably connected to a base end side of the arm; a base that supports the arm support portion so as to be rotatable in an axial direction in which the arm support portion is rotatable in a vertical direction; an arm driving motor that extends and retracts an arm; a rotation motor that rotates the arm support portion with respect to the base; an encoder for detecting a rotation amount of a motor for rotation, wherein when a position of an arm support portion with respect to an arm support portion in a rotation direction of a base when an arm is extended and contracted so as to move a hand substantially linearly toward a housing portion housing a conveyance target is set as an arm extension and contraction allowing position, the industrial robot includes a detection mechanism for detecting that the arm support portion is present at the arm extension and contraction allowing position, and the detection mechanism includes: a sensor attached to either one of the arm support portion and the base; and a detection member that is attached to either one of the arm support portion and the base and detects the movement of the arm support portion by a sensor.
The industrial robot of the present invention includes a detection mechanism for detecting that the arm support portion exists at an arm expansion/contraction allowing position, which is a position of the arm support portion in a rotation direction of the base, when the arm expands and contracts so that the hand moves substantially linearly toward the accommodating portion accommodating the conveyance target object. In the present invention, the detection means includes a sensor attached to one of the arm support and the base and a detection member attached to the other of the arm support and the base and detecting with the sensor, and the sensor or the detection member is attached to the arm support which actually operates.
Therefore, in the present invention, it is possible to directly detect whether or not the arm support portion is disposed at the arm expansion/contraction allowing position based on the detection result of the detection means. Therefore, in the present invention, even if an error occurs in the encoder or an error occurs in the power transmission path from the turning motor to the arm support portion, if the detection means does not detect that the arm support portion is present at the arm expansion/contraction allowing position, the arm expansion/contraction operation can be stopped, and thus, a collision of the hand with a surrounding structure or the like can be prevented. As a result, in the present invention, the possibility of collision between the hand and a surrounding structure or the like can be reduced when the arm extends or contracts.
In the present invention, it is preferable that the detection mechanism includes a plurality of sensors and one detection member arranged along a rotation direction of the arm support portion with respect to the base. In the case where the detection mechanism includes a plurality of detection members and one sensor arranged in the rotational direction of the arm support with respect to the base, it is impossible to detect the position of the arm support with respect to the rotational direction of the base with the detection mechanism without referring to the detection result of the encoder, but when so configured, the approximate position of the arm support with respect to the rotational direction of the base can be detected with the detection mechanism even without referring to the detection result of the encoder.
In the present invention, the detection mechanism includes, for example, four sensors or four detection members arranged at a 90 ° pitch with respect to the rotation center of the base with respect to the arm support.
In the present invention, it is preferable that the industrial robot includes a control unit for controlling the arm driving motor and the turning motor, the control unit is electrically connected to the encoder and the sensor, the control unit starts the arm driving motor to start the arm extending and retracting operation before a position of the arm support unit turned toward the arm extending and retracting allowable position determined based on a detection result of the encoder reaches the arm extending and retracting allowable position determined based on a detection result of the encoder, and thereafter stops the arm driving motor when the presence of the arm support unit at the arm extending and retracting allowable position is not detected by the detection means although the position of the arm support unit turned toward the arm extending and retracting allowable position determined based on the detection result of the encoder reaches the arm extending and retracting allowable position determined based on the detection result of the encoder.
In this configuration, the control unit starts the arm driving motor and starts the arm extending and retracting operation before the position of the arm support portion that is rotated toward the arm extending and retracting allowable position, which is determined based on the detection result of the encoder, reaches the arm extending and retracting allowable position, which is determined based on the detection result of the encoder. In the case of this configuration, after the control unit starts the arm driving motor and starts the arm extending and retracting operation, the control unit stops the arm driving motor when the detection means does not detect the presence of the arm support unit at the arm extending and retracting allowable position, although the position of the arm support unit that is rotated toward the arm extending and retracting allowable position and that is determined based on the detection result of the encoder reaches the arm extending and retracting allowable position determined based on the detection result of the encoder, and therefore, it is possible to prevent the arm from extending and retracting in a state where the arm support unit is not disposed at the arm extending and retracting allowable position and the hand from colliding with a surrounding structure or the like. That is, with such a configuration, the cycle time of the industrial robot can be shortened, and the possibility of collision between the hand and a surrounding structure or the like can be reduced when the arm is extended or retracted.
In the present invention, it is preferable that the sensor is switched from off to on to output a detection signal when the arm support reaches the arm expansion/contraction allowing position. In this case, for example, the sensor is a transmission type optical sensor having a light emitting element and a light receiving element, the detecting member includes a light shielding portion for shielding a gap between the light emitting element and the light receiving element, and when the light shielding portion shields the gap between the light emitting element and the light receiving element, the sensor detects that the arm support portion is at the arm expansion/contraction allowing position, and outputs a detection signal.
With this configuration, for example, even if a failure occurs in the sensor and the sensor does not output a detection signal, it is possible to prevent the hand from hitting a structure or the like in the vicinity in association with the extension and contraction operation of the arm. That is, when the sensor is switched from on to off and stops outputting the detection signal when the arm support reaches the arm expansion/contraction allowable position (that is, when the sensor outputs the detection signal when the arm support is at a position deviated from the arm expansion/contraction allowable position but does not output the detection signal when the arm support is at the arm expansion/contraction allowable position), when the sensor is defective and the sensor does not output the detection signal, it may be determined that the arm support is at the arm expansion/contraction allowable position although the arm support is at a position deviated from the arm expansion/contraction allowable position. Therefore, in this case, even if the arm support portion is located at a position deviated from the arm expansion/contraction allowing position, the arm expands and contracts, and the hand may collide with a surrounding structure or the like.
On the other hand, when the sensor is switched from off to on and outputs the detection signal when the arm support reaches the arm expansion/contraction allowable position (that is, when the sensor outputs the detection signal when the arm support is at the arm expansion/contraction allowable position but does not output the detection signal when the arm support is at a position deviated from the arm expansion/contraction allowable position), even if the sensor is defective and the sensor does not output the detection signal, the arm support is not determined to be at the arm expansion/contraction allowable position when the arm support is at the position deviated from the arm expansion/contraction allowable position. Therefore, for example, even if a failure occurs in the sensor and the sensor does not output a detection signal, it is possible to prevent the hand from colliding with a surrounding structure or the like in accordance with the extension and contraction operation of the arm.
In the present invention, it is preferable that the sensor is a transmission-type optical sensor including a light emitting element and a light receiving element, the detecting member includes a light blocking portion for blocking a gap between the light emitting element and the light receiving element, the light blocking portion blocks the gap between the light emitting element and the light receiving element when the arm support portion reaches the arm expansion/contraction allowing position, and a virtual extension line which is an extension line of an end surface of the light blocking portion in a rotation direction of the arm support portion with respect to the base passes through a rotation center of the arm support portion with respect to the base when viewed in the up-down.
With this configuration, at the moment when the arm support portion reaches the arm expansion/contraction allowing position and the light shielding portion starts shielding the gap between the light emitting element and the light receiving element, the entire end surface of the arm support portion in the rotation direction of the base reaches the position where the optical axes of the light emitting element and the light receiving element are arranged, with respect to the light shielding portion in the rotation direction of the base, in the rotation direction of the arm support portion with respect to the base. Therefore, when the arm support portion reaches the arm expansion/contraction allowing position, the variation in the light-shielding state between the light-emitting element and the light-receiving element formed by the light-shielding portion can be suppressed. As a result, it is possible to detect with high accuracy whether or not the arm support portion is at the arm expansion/contraction allowing position.
Effects of the invention
As described above, in the industrial robot according to the present invention, the possibility of collision between the hand and a surrounding structure or the like can be reduced when the arm extends and contracts.
Drawings
fig. 1 is a plan view of an industrial robot according to an embodiment of the present invention.
fig. 2 is a side view of the industrial robot shown in fig. 1.
Fig. 3 is a schematic plan view of a glass substrate manufacturing system incorporating the industrial robot shown in fig. 1.
Fig. 4 is a sectional view for explaining the structure of the connection portion between the base and the arm support portion shown in fig. 2.
fig. 5 is a block diagram showing an arm driving motor, a turning motor, and the like connected to a control unit of the industrial robot shown in fig. 1.
fig. 6(a) is a plan view for explaining the structure of the base from the direction E-E in fig. 4, and (B) is a bottom view for explaining the structure of the revolving frame from the direction F-F in fig. 4.
Fig. 7 is an enlarged view of a portion G of fig. 4.
Fig. 8(a) is a plan view for explaining the structure of the detection member shown in fig. 6, and (B) is a plan view for explaining a state at the moment when the arm supporting portion reaches the arm expansion/contraction allowing position and the light shielding portion of the detection member blocks the gap between the light emitting element and the light receiving element.
fig. 9 is a diagram for explaining an operation of the industrial robot shown in fig. 1.
Description of the reference numerals
1 robot (Industrial robot)
2 substrate (glass substrate, object to be conveyed)
3 hand
4 arm
9 base station
13 substrate processing apparatus (storage part)
14 substrate storage device (storage part)
19 Motor (Motor for arm drive)
24 arm support
25 Motor (rotating motor)
27 encoder
30 control part
33 detection mechanism
34 sensor
35 detecting part
35a light-shielding part
35b, 35c end face
40 light emitting element
41 light receiving element
Center of rotation of the C1 arm support part with respect to the base
Virtual extension lines of VL1 and VL2
Detailed Description
Embodiments of the present invention will be described below with reference to the drawings.
(Overall Structure of Industrial robot)
Fig. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. Fig. 2 is a side view of the industrial robot 1 shown in fig. 1. Fig. 3 is a schematic plan view of the glass substrate manufacturing system 12 incorporated in the industrial robot 1 shown in fig. 1. Fig. 4 is a sectional view for explaining the structure of the connection portion between the base 9 and the arm support portion 24 shown in fig. 2. Fig. 5 is a block diagram showing motors 19, 22, 25, 28 and the like connected to the control unit 30 of the industrial robot 1 shown in fig. 1.
An industrial robot 1 of the present embodiment (hereinafter referred to as "robot 1") is a horizontal articulated robot that conveys a glass substrate 2 (hereinafter referred to as "substrate 2") of a liquid crystal display as a conveyance target object. The robot 1 includes two hands 3 for mounting the substrate 2, two arms 4 having distal ends respectively connected to the two hands 3, a main body 5 for supporting the two arms 4, and a base member 6 for supporting the main body 5 so as to be movable in a horizontal direction. The main body 5 includes an arm holder 7 which can be raised and lowered to support the base end side of the arm 4, a support frame 8 which can be raised and lowered to support the arm holder 7, a base 9 which constitutes a lower end portion of the main body 5 and which is horizontally movable with respect to the base member 6, and a revolving frame 10 which fixes a lower end of the support frame 8 and which is rotatable with respect to the base 9.
As shown in fig. 3, the robot 1 is incorporated into a glass substrate manufacturing system 12, for example, and used. The manufacturing system 12 includes, for example, four substrate processing apparatuses 13 that perform predetermined processing on the substrate 2, and two substrate storage apparatuses 14 that store the substrate 2 before or after the processing. The robot 1 carries the substrate 2 into the substrate processing apparatus 13 and carries the substrate 2 out of the substrate processing apparatus 13, and at least one of carries the substrate 2 into the substrate storage apparatus 14 and carries the substrate 2 out of the substrate storage apparatus 14. The substrate processing apparatus 13 and the substrate storage apparatus 14 of the present embodiment are storage sections that store substrates 2 as objects to be conveyed.
The two board storage devices 14 are arranged so as to sandwich the robot 1 in an X direction (see fig. 3) which is a moving direction of the main body 5 with respect to the base member 6. Two substrate processing apparatuses 13 of the four substrate processing apparatuses 13 are disposed on one side of the robot 1 in a Y direction (see fig. 3) orthogonal to the X direction and the vertical direction, and the remaining two substrate processing apparatuses 13 are disposed on the other side of the robot 1 in the Y direction. Two substrate processing apparatuses 13 arranged on one side of the robot 1 in the Y direction are arranged adjacent to each other in the X direction, and two substrate processing apparatuses 13 arranged on the other side of the robot 1 in the Y direction are arranged adjacent to each other in the X direction.
The arm 4 is constituted by two arm portions, a first arm portion 17 and a second arm portion 18. The base end side of the first arm portion 17 is rotatably coupled to the arm holder 7. The base end side of the second arm portion 18 is rotatably connected to the tip end side of the first arm portion 17. The hand 3 is rotatably connected to the distal end side of the second arm portion 18. The arm 4 can be extended and contracted in the horizontal direction so that the hand 3 moves substantially linearly in a state of facing a certain direction.
Specifically, the arm 4 can be extended and contracted in the horizontal direction so that the hand 3 is oriented in a certain direction and the connecting portion between the hand 3 and the arm 4 moves substantially linearly. Further, when the substrate 2 is transferred to the substrate processing apparatus 13, the arm 4 extends and contracts so that the hand 3 moves substantially linearly in the Y direction in a state of facing a certain direction, and when the substrate 2 is transferred to the substrate storage apparatus 14, the arm 4 extends and contracts so that the hand 3 moves substantially linearly in the X direction in a state of facing a certain direction. That is, when viewed in the vertical direction, the moving direction of the hand 3 when the substrate 2 is transferred to the substrate processing apparatus 13 and the moving direction of the hand 3 when the substrate 2 is transferred to the substrate storage apparatus 14 are orthogonal to each other.
The robot 1 includes an arm driving mechanism that drives the arm 4. Specifically, the robot 1 includes two arm drive mechanisms that individually drive the two arms 4. The arm drive mechanism includes a motor 19 as an arm drive motor for extending and retracting the arm 4, a speed reducer for reducing and transmitting the power of the motor 19, and an encoder for detecting the amount of rotation of the motor 19. The motor 19 is a servo motor. The motor 19 is controlled based on the detection result of the encoder.
The support frame 8 holds the hand 3 and the arm 4 via the arm holder 7 so as to be movable up and down. The support frame 8 includes a columnar first support frame 20 that elevatably holds the arm holder 7, and a columnar second support frame 21 that elevatably holds the first support frame 20. The robot 1 includes a lifting mechanism that lifts and lowers the arm rest 7 relative to the first support frame 20 and also lifts and lowers the first support frame 20 relative to the second support frame 21, a guide mechanism that guides the first support frame 20 in the vertical direction, and a guide mechanism that guides the arm rest 7 in the vertical direction.
The lifting mechanism includes a motor 22 for lifting the arm support 7 and lifting the first support frame 20, a speed reducer for reducing and transmitting the power of the motor 22, and an encoder for detecting the amount of rotation of the motor 22. The motor 22 is a servo motor. The motor 22 is controlled based on the detection result of the encoder. The robot 1 may be provided with a lifting mechanism for lifting and lowering the arm rest 7 with respect to the first support frame 20 and a lifting mechanism for lifting and lowering the first support frame 20 with respect to the second support frame 21 separately.
Revolving frame 10 is formed in a flat substantially rectangular parallelepiped shape having a small vertical thickness. Moreover, revolving frame 10 is formed in a long and thin substantially rectangular parallelepiped shape. The lower end of the second support frame 21 is fixed to the upper surface of the revolving frame 10 on the front end side. The base end side of revolving frame 10 is supported on base 9 so as to be rotatable in the axial direction in which the vertical direction is rotatable. Revolving frame 10 is disposed above base 9. In this embodiment, the arm support portion 24 that rotatably connects the base end sides of the arms 4 is configured by the arm holder 7, the support frame 8, and the revolving frame 10, and the base 9 supports the arm support portion 24 so as to be rotatable in the axial direction in which the vertical direction is rotatable.
The robot 1 includes a turning mechanism for turning the revolving frame 10. That is, the robot 1 includes a turning mechanism that turns the arm support portion 24. The turning mechanism includes a motor 25 as a turning motor for turning the arm support portion 24 with respect to the base 9, a speed reducer 26 for reducing the speed of power of the motor 25 and transmitting the power, and an encoder 27 for detecting the amount of rotation of the motor 25. The motor 25 is a servo motor. The motor 25 is controlled based on the detection result of the encoder 27.
Motor 25 is disposed on the base end side inside revolving frame 10 formed in a hollow shape. The speed reducer 26 constitutes a joint portion connecting the base 9 and the revolving frame 10. The reducer 26 is a hollow reducer having a through hole formed at the center thereof. The casing of the reduction gear 26 is fixed to the base end portion of the revolving frame 10. The output shaft of the speed reducer 26 is fixed to the base 9. The power of the motor 25 is transmitted to an input shaft of the reduction gear 26.
The robot 1 further includes a horizontal movement mechanism for horizontally moving the base 9 with respect to the base member 6, and a guide mechanism for guiding the base 9 in the horizontal direction. The horizontal movement mechanism includes a motor 28 for horizontally moving the base 9, a speed reducer for reducing and transmitting the power of the motor 28, and an encoder for detecting the amount of rotation of the motor 28. The motor 28 is a servo motor. The motor 28 is controlled based on the detection result of the encoder.
As shown in fig. 5, the motors 19, 22, 25, and 28 are electrically connected to the control unit 30 of the robot 1. The control unit 30 is electrically connected to an encoder 27. An encoder for detecting the rotation amount of the motors 19, 22, and 28 is electrically connected to the control unit 30. The control unit 30 includes drive circuits for the motors 19, 22, 25, and 28. The control unit 30 includes a memory circuit such as a ROM or a RAM, an arithmetic circuit such as a CPU, and the like, and controls the motors 19, 22, 25, and 28. The robot 1 transports the substrate 2 to the substrate processing apparatus 13 or the substrate storage apparatus 14 by a combination of the expansion and contraction operation of the arm 4, the lifting operation, the rotation operation, and the horizontal movement operation of the arm 4 and the like.
(Structure of detecting mechanism)
fig. 6(a) is a plan view for explaining the structure of the base 9 from the direction E-E in fig. 4, and fig. 6(B) is a bottom view for explaining the structure of the revolving frame 10 from the direction F-F in fig. 4. Fig. 7 is an enlarged view of a portion G of fig. 4. Fig. 8(a) is a plan view for explaining the structure of the detection member 35 shown in fig. 6, and fig. 8(B) is a plan view for explaining a state at the moment when the arm supporting portion 24 reaches the arm expansion/contraction allowing position and the light shielding portion 35a of the detection member 35 shields the light emitting element 40 and the light receiving element 41.
When the position of the arm support 24 in the direction of rotation of the arm support 24 with respect to the base 9 (i.e., the direction of rotation of the revolving frame 10 with respect to the base 9) when the arm 4 is extended and contracted so that the hand 3 moves substantially linearly toward the substrate processing apparatus 13 or the substrate storage apparatus 14 is set as the arm extension and contraction allowing position, the robot 1 includes a detection mechanism 33 for detecting the presence of the arm support 24 at the arm extension and contraction allowing position. That is, the robot 1 includes a detection mechanism 33 for detecting that the arm support portion 24 is present at an arm expansion/contraction allowing position where the expansion/contraction of the arm 4 is allowed in the manufacturing system 12.
As described above, since the moving direction of the hand 3 when the substrate 2 is transferred to the substrate processing apparatus 13 and the moving direction of the hand 3 when the substrate 2 is transferred to the substrate storage apparatus 14 are orthogonal to each other when viewed in the vertical direction, the substrate storage apparatus 14 is disposed on both sides of the robot 1 in the X direction, and the substrate processing apparatus 13 is disposed on both sides of the robot 1 in the Y direction, the arm telescopic allowable positions are present at four positions at equal intervals in the rotational direction of the arm support portion 24 with respect to the base 9 in the present embodiment.
The detection mechanism 33 includes a sensor 34 attached to the base 9 and a detection member 35 attached to the arm support portion 24 and detecting by the sensor 34. The detection mechanism 33 of the present embodiment includes four sensors 34 and one detection member 35. The four sensors 34 are electrically connected to the control unit 30. The sensor 34 is fixed to the upper surface of the center portion of the base 9 via a predetermined fixing member 36. The detector 35 is fixed to the lower surface of the base end of the revolving frame 10.
The sensor 34 is a transmission type optical sensor having a light emitting element 40 and a light receiving element 41. The optical axis L of the light emitting element 40 and the optical axis L of the light receiving element 41 coincide with each other when viewed in the vertical direction. When light from the light emitting element 40 toward the light receiving element 41 is blocked, the sensor 34 switches from off to on and outputs a detection signal. That is, the sensor 34 is a so-called a-contact sensor. The four sensors 34 are arranged along the rotation direction of the arm support portion 24 with respect to the base 9.
as described above, since the arm expansion/contraction allowing positions are present at four positions at equal intervals in the rotational direction of the arm support portion 24 with respect to the base 9, as shown in fig. 6(a), the four sensors 34 are arranged at a 90 ° pitch with respect to the rotational center C1, which is the rotational center of the arm support portion 24 with respect to the base 9, C1. That is, the four sensors 34 are arranged at a 90 ° pitch with respect to the axial center of the reduction gear 26. The optical axis L is disposed in the center of the sensor 34 in the rotational direction of the arm support portion 24 with respect to the base 9 (see fig. 8).
The detection member 35 is formed by bending a thin steel plate into a predetermined shape. For example, the probe member 35 is formed by bending a thin stainless steel plate into a predetermined shape. The detection member 35 includes a light shielding portion 35a for shielding a gap between the light emitting element 40 and the light receiving element 41 of the sensor 34. The light shielding portion 35a is formed in a substantially rectangular flat plate shape having a predetermined width in the rotational direction of the arm support portion 24 with respect to the base 9.
The light shielding portion 35a is formed in a substantially trapezoidal shape in which the width of the light shielding portion 35a in the rotational direction of the arm support portion 24 with respect to the base 9 gradually narrows toward the rotational center C1. In the present embodiment, as shown in fig. 6(B) and 8(a), when viewed from the top-bottom direction, a virtual extension line VL1, which is an extension line of one end surface 35B of the light shielding portion 35a in the rotational direction of the base 9, of the arm support portion 24 and a virtual extension line VL2, which is an extension line of the other end surface 35C of the light shielding portion 35a in the rotational direction of the base 9, of the arm support portion 24 intersect at the rotational center C1. That is, the virtual extension lines VL1, VL2 pass through the rotation center C1 when viewed in the vertical direction. The angle θ formed by the end surface 35b and the end surface 35C with respect to the rotation center C1 (i.e., the angle θ formed by the virtual extension line VL1 and the virtual extension line VL 2) is, for example, 6 ° when viewed in the up-down direction.
When the light-shielding portion 35a shields a space between the light-emitting element 40 and the light-receiving element 41 of one sensor 34 of the four sensors 34, it is detected that the arm support portion 24 exists at one of the arm expansion/contraction allowable positions of the four positions. That is, when the arm support portion 24 reaches the arm expansion/contraction allowing position, the light blocking portion 35a blocks between the light emitting element 40 and the light receiving element 41, and when the light blocking portion 35a blocks between the light emitting element 40 and the light receiving element 41, the sensor 34 detects that the arm support portion 24 is at the arm expansion/contraction allowing position.
When the light shielding portion 35a shields the space between the light emitting element 40 and the light receiving element 41, the sensor 34 outputs a detection signal. That is, when the arm support portion 24 reaches the arm expansion/contraction allowing position and the light blocking portion 35a blocks between the light emitting element 40 and the light receiving element 41, the sensor 34 switches from off to on and outputs a detection signal. That is, the sensor 34 outputs the detection signal when the arm support portion 24 is at the arm expansion/contraction allowing position (when the light shielding portion 35a shields between the light emitting element 40 and the light receiving element 41), but the sensor 34 does not output the detection signal when the arm support portion 24 is at a position deviated from the arm expansion/contraction allowing position (when the light shielding portion 35a is deviated between the light emitting element 40 and the light receiving element 41).
When the arm 4 extends and contracts in a state where the arm support portion 24 is disposed at the arm extension and contraction allowing position (i.e., in a state where the light shielding portion 35a shields between the light emitting element 40 and the light receiving element 41), the hand 3 moves substantially linearly toward the substrate processing apparatus 13 or the substrate storage apparatus 14. The robot 1 further includes an origin sensor 38 (see fig. 4) for detecting an origin position of the arm support 24 (i.e., an origin position of the revolving frame 10) in a direction of rotation of the arm support 24 with respect to the base 9. Origin sensor 38 is fixed to the lower surface side of the base end portion of revolving frame 10. The origin sensor 38 is, for example, a proximity sensor. A detection member (not shown) for detecting by the origin sensor 38 is fixed to the upper surface side of the base 9. Note that, in fig. 6(B), the origin sensor 38 is not shown.
(operation of Industrial robot)
Fig. 9 is a diagram for explaining the operation of the industrial robot 1 shown in fig. 1.
As described above, the robot 1 transports the substrate 2 to the substrate processing apparatus 13 or the substrate storage apparatus 14 by a combination of the expansion and contraction operation of the arm 4 and the lifting, turning, and horizontal movement operations of the arm 4 and the like. As described above, the robot 1 includes the encoder 27 for detecting the rotation amount of the motor 25, and can specify the position of the arm support 24 in the rotation direction of the arm support 24 with respect to the base 9 based on the detection result of the encoder 27.
In this embodiment, when the substrate 2 is transferred to the substrate processing apparatus 13 or the substrate storage apparatus 14, the control unit 30 starts the motor 19 to start the expansion and contraction operation of the arm 4 before the position of the arm support portion 24 that rotates toward the arm expansion and contraction allowable position, which is determined based on the detection result of the encoder 27, reaches the arm expansion and contraction allowable position, which is determined based on the detection result of the encoder 27 (see the speed curve of the rotation motor and the speed curve of the arm driving motor in fig. 9). That is, in this embodiment, before the detection means 33 detects that the arm support portion 24 is disposed at the arm expansion/contraction allowing position (before the sensor 34 is switched from off to on (that is, before the light-emitting element 40 and the light-receiving element 41 of the sensor 34 are shielded by the light-shielding portion 35 a)), the control portion 30 starts the motor 19 to start the expansion/contraction operation of the arm 4.
After the arm 4 starts the extending/retracting operation, when the position of the arm support portion 24 that has been rotated toward the arm extension/retraction allowing position and that is determined based on the detection result of the encoder 27 reaches the arm extension/retraction allowing position and when the detection mechanism 33 detects that the arm support portion 24 is present at the arm extension/retraction allowing position (when the sensor 34 is switched from off to on), the control portion 30 continues to drive the motor 19 and continues the extending/retracting operation of the arm 4 (see the speed curve of the arm driving motor shown by the solid line in fig. 9).
On the other hand, after the arm 4 starts the extending/retracting operation, although the position of the arm support portion 24 that has rotated toward the arm extension/retraction allowing position, which is determined based on the detection result of the encoder 27, reaches the arm extension/retraction allowing position, which is determined based on the detection result of the encoder 27, the control portion 30 stops the motor 19 (see the speed curve of the arm driving motor shown by the two-dot chain line in fig. 9) when the detection mechanism 33 does not detect the presence of the arm support portion 24 at the arm extension/retraction allowing position (when the sensor 34 is not switched from off to on as shown by the two-dot chain line in fig. 9). After stopping the motor 19, the controller 30 rotates the motor 19 in the reverse direction, for example, to return the hand 3 to the predetermined position.
In this embodiment, since the angle θ formed by the end surfaces 35b and 35C with respect to the rotation center C1 is, for example, 6 ° as described above, when the position of the arm support portion 24 that rotates toward the arm expansion/contraction allowable position is within a range of ± 3 ° from the designed arm expansion/contraction allowable position determined based on the detection result of the encoder 27 after the start of the expansion/contraction operation of the arm 4, and the presence of the arm support portion 24 at the arm expansion/contraction allowable position is not detected by the detection mechanism 33, the control unit 30 stops the motor 19.
That is, after the arm 4 starts the extending and retracting operation, when the position of the arm support portion 24 that is rotated toward the arm extension and retraction allowing position and that is determined based on the detection result of the encoder 27 is within ± 3 ° from the designed arm extension and retraction allowing position and that is determined based on the detection result of the encoder 27, the control portion 30 continues to drive the motor 19 when the detection mechanism 33 detects that the arm support portion 24 is present at the arm extension and retraction allowing position.
(main effect of the present embodiment)
As described above, in this embodiment, the robot 1 includes the detection means 33 for detecting that the arm support portion 24 exists at the arm expansion/contraction allowing position, which is the position of the arm support portion 24 in the rotation direction of the arm support portion 24 with respect to the base 9, when the arm 4 expands and contracts so that the hand 3 moves substantially linearly toward the substrate processing apparatus 13 or the substrate storage apparatus 14. In the present embodiment, the detection mechanism 33 includes the sensor 34 attached to the base 9 and the detection member 35 attached to the arm support portion 24, and the detection member 35 is attached to the arm support portion 24 that actually operates.
Therefore, in this embodiment, it is possible to directly detect whether or not the arm support portion 24 is disposed at the arm expansion/contraction allowing position based on the detection result of the detection mechanism 33. In this embodiment, after the expansion/contraction operation of the arm 4 is started, the control unit 30 stops the motor 19 when the detection mechanism 33 does not detect the presence of the arm support portion 24 at the arm expansion/contraction allowable position, although the position of the arm support portion 24 that has rotated toward the arm expansion/contraction allowable position, which is determined based on the detection result of the encoder 27, reaches the arm expansion/contraction allowable position determined based on the detection result of the encoder 27.
Therefore, in this embodiment, even if an error occurs in the encoder 27 or an error occurs in the speed reducer 26 or the like disposed in the power transmission path from the motor 25 to the arm support portion 24, the hand 3 can be prevented from colliding with a surrounding structure or the like when the arm 4 extends or contracts. As a result, in this embodiment, the possibility of collision between the hand 3 and a surrounding structure or the like can be reduced when the arm 4 extends or contracts.
in this embodiment, when the substrate 2 is transferred to the substrate processing apparatus 13 or the substrate storage apparatus 14, the control unit 30 starts the motor 19 and starts the expansion and contraction operation of the arm 4 before the position of the arm support portion 24 that rotates toward the arm expansion and contraction allowable position, which is determined based on the detection result of the encoder 27, reaches the arm expansion and contraction allowable position, which is determined based on the detection result of the encoder 27. Therefore, in this embodiment, the cycle time of the robot 1 can be shortened. Therefore, in this embodiment, the cycle time of the robot 1 can be shortened, and the possibility of collision between the hand 3 and a surrounding structure or the like when the arm 4 extends and contracts can be reduced.
In the present embodiment, the detection mechanism 33 includes four sensors 34 arranged in the rotational direction of the arm support portion 24 with respect to the base 9. Therefore, in this embodiment, even without referring to the detection result of the encoder 27, the approximate position of the arm support portion 24 with respect to the arm support portion 24 in the rotational direction of the base 9 can be detected by the detection mechanism 33. Further, in the case where the detection mechanism 33 is provided with the four detection members 35 and the one sensor 34 which are arranged in the rotational direction of the arm support portion 24 with respect to the base 9, the position of the arm support portion 24 in the rotational direction with respect to the base 9 cannot be detected by the detection mechanism 33 without referring to the detection result of the encoder 27.
In this embodiment, when the arm support portion 24 reaches the arm expansion/contraction allowing position, the sensor 34 switches from off to on and outputs a detection signal. Therefore, in this embodiment, for example, even if a failure occurs in the sensor 34 and the sensor 34 does not output a detection signal, the hand 3 can be prevented from colliding with a surrounding structure or the like in accordance with the extending and retracting operation of the arm 4.
that is, when the sensor 34 is switched from on to off and the output of the detection signal is stopped when the arm support portion 24 reaches the arm expansion/contraction allowable position (that is, when the arm support portion 24 is at a position deviated from the arm expansion/contraction allowable position, the sensor 34 outputs the detection signal, but when the arm support portion 24 is at the arm expansion/contraction allowable position, the sensor 34 does not output the detection signal), when a failure occurs in the sensor 34 and the sensor 34 does not output the detection signal, it may be determined that the arm support portion 24 is at the arm expansion/contraction allowable position even though the arm support portion 24 is at the position deviated from the arm expansion/contraction allowable position. Therefore, in this case, even if the arm support portion 24 is at a position deviated from the arm expansion/contraction allowing position, the arm 4 expands and contracts, and the hand 3 may hit a surrounding structure or the like.
In contrast, in the present embodiment, when the sensor 34 is switched from off to on and outputs the detection signal when the arm support portion 24 reaches the arm expansion/contraction allowable position (that is, when the sensor 34 outputs the detection signal when the arm support portion 24 is at the arm expansion/contraction allowable position but does not output the detection signal when the arm support portion 24 is at a position deviated from the arm expansion/contraction allowable position), even if the sensor 34 is defective and the sensor 34 does not output the detection signal, the arm support portion 24 is not determined to be at the arm expansion/contraction allowable position when the arm support portion 24 is at the position deviated from the arm expansion/contraction allowable position. Therefore, in this embodiment, for example, even if a failure occurs in the sensor 34 and the sensor 34 does not output a detection signal, the hand 3 can be prevented from hitting a surrounding structure or the like in association with the extending and retracting operation of the arm 4.
In this embodiment, when viewed in the vertical direction, the virtual extension lines VL1, VL2 of the end surfaces 35b, 35C of the light shielding portion 35a pass through the rotation center C1. Therefore, in this embodiment, at the moment when the arm support portion 24 reaches the arm expansion/contraction allowing position and the light shielding portion 35a starts shielding the space between the light emitting element 40 and the light receiving element 41, the entire end surfaces 35b and 35c of the light shielding portion 35a reach the position where the optical axis L of the light emitting element 40 and the light receiving element 41 are arranged in the rotational direction of the arm support portion 24 with respect to the base 9.
For example, as shown in fig. 8(B), at the moment when the light shielding portion 35a starts to shield the space between the light emitting element 40 and the light receiving element 41, the entire end surface 35c of the light shielding portion 35a reaches the position where the optical axis L of the light emitting element 40 and the light receiving element 41 is arranged in the rotational direction of the arm support portion 24 with respect to the base 9. Therefore, in this embodiment, when the arm support portion 24 reaches the arm expansion/contraction allowing position, the variation in the light-shielding state between the light-emitting element 40 and the light-receiving element 41 formed by the light-shielding portion 35a can be suppressed. As a result, in the present embodiment, it is possible to detect with high accuracy whether or not the arm support portion 24 is at the arm expansion/contraction allowing position.
For example, when the end surface 35C is formed such that the virtual extension line of the end surface 35C does not pass through the rotation center C1 when viewed from the vertical direction (see the two-dot chain line in fig. 8B), a part of the end surface 35C of the light shielding portion 35a reaches the position where the optical axis L of the light emitting element 40 and the light receiving element 41 is arranged in the rotational direction of the arm support portion 24 with respect to the base 9 before the light shielding portion 35a starts shielding between the light emitting element 40 and the light receiving element 41. Therefore, in this case, when the arm support portion 24 reaches the arm expansion/contraction allowing position, the light-shielding state between the light-emitting element 40 and the light-receiving element 41 formed by the light-shielding portion 35a is likely to vary.
(other embodiments)
The above embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be made without departing from the spirit of the present invention.
In the above-described embodiment, four sensors 34 may be attached to the arm support portion 24, and one detection member 35 may be attached to the base 9. In the above-described embodiment, one sensor 34 may be attached to the base 9 and four detection members 35 may be attached to the arm support portion 24, or four detection members 35 may be attached to the base 9 and one sensor 34 may be attached to the arm support portion 24. In this case, the four detection members 35 are arranged along the rotational direction of the arm support portion 24 with respect to the base 9, and are arranged at a 90 ° pitch with respect to the rotational center C1 of the arm support portion 24 with respect to the base 9.
In the above-described embodiment, if the substrate storage apparatus 14 is disposed only on one side of the robot 1 in the X direction and the substrate processing apparatus 13 is disposed only on one side of the robot 1 in the Y direction, the number of the sensors 34 included in the detection mechanism 33 may be two. In this case, when viewed from the up-down direction, a line connecting one sensor 34 of the two sensors 34 and the arm support portion 24 with respect to the rotation center C1 of the base 9 and a line connecting the other sensor 34 and the arm support portion 24 with respect to the rotation center C1 of the base 9 form an angle of 90 °.
In the above-described embodiment, if the substrate storage apparatus 14 is disposed only on one side of the robot 1 in the X direction or if the substrate processing apparatus 13 is disposed only on one side of the robot 1 in the Y direction, the number of the sensors 34 included in the detection mechanism 33 may be three. The detection mechanism 33 may include five or more sensors 34 depending on the arrangement of the substrate processing apparatuses 13 and the substrate storage apparatuses 14 or the number of the substrate processing apparatuses 13. Further, depending on the arrangement of the substrate processing apparatuses 13 and the substrate storage apparatuses 14 and the number of the substrate processing apparatuses 13, the plurality of sensors 34 may be arranged at any angle other than the 90 ° direction. For example, when the number of the sensors 34 included in the detection mechanism 33 is four, the four sensors 34 may form an angle other than 90 ° with respect to the rotation center C1 of the arm support portion 24.
In the above-described embodiment, when the light receiving element 41 receives light emitted from the light emitting element 40, the sensor 34 may be switched from off to on to output a detection signal. That is, when the light from the light emitting element 40 to the light receiving element 41 is blocked, the sensor 34 may be switched from on to off to stop the output of the detection signal. In this case, for example, the light shielding portion 35a of the detecting member 35 is formed in an annular shape, and the light shielding portion 35a is formed with an arc-shaped through hole having a center of curvature C1 as a center of curvature, and when the arm support portion 24 is at the arm expansion/contraction allowing position, the light from the light emitting element 40 toward the light receiving element 41 passes through the through hole formed in the light shielding portion 35 a. In this case, as in the above-described embodiment, when the arm support portion 24 reaches the arm expansion/contraction allowing position, the sensor 34 switches from off to on and outputs a detection signal.
When the light receiving element 41 receives the light emitted from the light emitting element 40, the sensor 34 is switched from off to on to output the detection signal, and when the arm support portion 24 reaches a position deviated from the arm expansion/contraction allowable position, the sensor 34 may be switched from off to on to output the detection signal. That is, in the above-described aspect, the sensor 34 may output the detection signal when the arm support portion 24 is at a position deviated from the arm expansion/contraction allowing position, but may not output the detection signal when the arm support portion 24 is at the arm expansion/contraction allowing position.
In the above-described embodiment, the end surfaces 35b and 35c may be formed as follows: when viewed in the vertical direction, the virtual extension lines VL1, VL2 of the end surfaces 35b, 35C of the light shielding portion 35a do not pass through the rotation center C1. In the above-described embodiment, the control unit 30 may start the expansion and contraction operation of the arm 4 by starting the motor 19 after the detection mechanism 33 detects that the arm support portion 24 is disposed at the arm expansion and contraction allowing position. In the above-described embodiment, the sensor 34 may be a reflective optical sensor or a sensor other than an optical sensor. For example, the sensor 34 may also be a proximity sensor.
In the above-described embodiment, the main body 5 is movable in the horizontal direction, but the main body 5 may be fixed. In the above-described embodiment, the arm 4 is configured by two arm portions, i.e., the first arm portion 17 and the second arm portion 18, but the arm 4 may be configured by three or more arm portions. In the above-described embodiment, the robot 1 may be a robot that conveys objects other than the substrate 2.
Claims (7)
1. An industrial robot for conveying a predetermined object to be conveyed,
The industrial robot comprises: a hand on which the conveyance object is mounted; an arm that is coupled to the hand at a distal end side thereof so as to be rotatable and is extendable and retractable in a horizontal direction so that the hand moves substantially linearly in a state of facing a certain direction; an arm support portion that is rotatably coupled to a base end side of the arm; a base that supports the arm support portion so as to be rotatable in an axial direction in which a vertical direction is a rotation direction; an arm driving motor that extends and contracts the arm; a rotation motor that rotates the arm support portion with respect to the base; an encoder for detecting a rotation amount of the motor for rotation, and,
When the position of the arm support portion in the rotation direction of the arm support portion with respect to the base is set as an arm expansion/contraction allowing position when the arm expands and contracts so that the hand moves substantially linearly toward a housing portion housing the conveyance target object,
The industrial robot is provided with a detection mechanism for detecting the existence of the arm supporting part at the arm expansion and contraction allowable position,
the detection mechanism is provided with: a sensor attached to one of the arm support portion and the base; and a detection member attached to the other of the arm support portion and the base and detecting the movement of the arm support portion by the sensor.
2. The industrial robot of claim 1,
The detection mechanism includes a plurality of the sensors and one of the detection members arranged in a rotational direction of the arm support portion with respect to the base.
3. The industrial robot of claim 1,
The detection mechanism includes four sensors or four detection members arranged at a 90 ° pitch with respect to a rotation center of the base with respect to the arm support.
4. The industrial robot according to any one of claims 1 to 3,
A control unit for controlling the arm driving motor and the turning motor,
The control unit is electrically connected to the encoder and the sensor,
The control unit starts the arm driving motor to start the arm extending and retracting operation before a position of the arm support portion that is rotated toward the arm extension and retraction allowing position and that is determined based on a detection result of the encoder reaches the arm extension and retraction allowing position and then stops the arm driving motor when the arm support portion is not detected by the detection mechanism to be present at the arm extension and retraction allowing position, although the position of the arm support portion that is rotated toward the arm extension and retraction allowing position and that is determined based on a detection result of the encoder reaches the arm extension and retraction allowing position and that is determined based on a detection result of the encoder.
5. The industrial robot according to any one of claims 1 to 3,
When the arm support reaches the arm expansion/contraction allowable position, the sensor switches from off to on and outputs a detection signal.
6. The industrial robot of claim 5,
the sensor is a transmission type optical sensor having a light emitting element and a light receiving element,
The detecting member includes a light shielding portion for shielding a gap between the light emitting element and the light receiving element,
When the light-shielding portion shields the light-emitting element and the light-receiving element, the sensor detects that the arm support portion is at the arm expansion/contraction allowable position, and outputs the detection signal.
7. the industrial robot according to any one of claims 1 to 3,
The sensor is a transmission type optical sensor having a light emitting element and a light receiving element,
The detecting member includes a light shielding portion for shielding a gap between the light emitting element and the light receiving element,
When the arm support reaches the arm expansion/contraction allowing position, the light blocking portion blocks a gap between the light emitting element and the light receiving element,
when viewed in the vertical direction, a virtual extension line, which is an extension line of the arm support portion with respect to the end surface of the light shielding portion in the rotational direction of the base, passes through the rotational center of the arm support portion with respect to the base.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-108015 | 2018-06-05 | ||
| JP2018108015 | 2018-06-05 |
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| CN110561397A true CN110561397A (en) | 2019-12-13 |
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| CN (1) | CN110561397A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114683257A (en) * | 2020-12-28 | 2022-07-01 | 日本电产三协株式会社 | Robot and robot control method |
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| Publication number | Publication date |
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| JP7166163B2 (en) | 2022-11-07 |
| JP2019209473A (en) | 2019-12-12 |
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Application publication date: 20191213 |