CN110551993A - 化学水浴薄膜的沉积装置 - Google Patents
化学水浴薄膜的沉积装置 Download PDFInfo
- Publication number
- CN110551993A CN110551993A CN201810550659.2A CN201810550659A CN110551993A CN 110551993 A CN110551993 A CN 110551993A CN 201810550659 A CN201810550659 A CN 201810550659A CN 110551993 A CN110551993 A CN 110551993A
- Authority
- CN
- China
- Prior art keywords
- roller
- water bath
- deposition
- unwinding
- wind
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 230000008021 deposition Effects 0.000 title claims abstract description 54
- 239000000126 substance Substances 0.000 title claims abstract description 21
- 238000006243 chemical reaction Methods 0.000 claims abstract description 83
- 239000000758 substrate Substances 0.000 claims abstract description 83
- 238000000151 deposition Methods 0.000 claims abstract description 63
- 238000004804 winding Methods 0.000 claims abstract description 41
- 238000002955 isolation Methods 0.000 claims abstract description 30
- 239000002131 composite material Substances 0.000 claims abstract description 21
- 238000004140 cleaning Methods 0.000 claims abstract description 8
- 239000010408 film Substances 0.000 claims description 30
- 229910001220 stainless steel Inorganic materials 0.000 claims description 24
- 239000010935 stainless steel Substances 0.000 claims description 24
- 230000007797 corrosion Effects 0.000 claims description 11
- 238000005260 corrosion Methods 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 8
- 238000000926 separation method Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000031700 light absorption Effects 0.000 claims description 4
- 230000005389 magnetism Effects 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 2
- 230000004888 barrier function Effects 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 239000010410 layer Substances 0.000 description 42
- 238000005096 rolling process Methods 0.000 description 19
- 239000000243 solution Substances 0.000 description 19
- 239000011241 protective layer Substances 0.000 description 15
- 238000005507 spraying Methods 0.000 description 11
- 239000008367 deionised water Substances 0.000 description 5
- 229910021641 deionized water Inorganic materials 0.000 description 5
- 239000002390 adhesive tape Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 3
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 241000357293 Leptobrama muelleri Species 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- QCUOBSQYDGUHHT-UHFFFAOYSA-L cadmium sulfate Chemical compound [Cd+2].[O-]S([O-])(=O)=O QCUOBSQYDGUHHT-UHFFFAOYSA-L 0.000 description 1
- 229910000331 cadmium sulfate Inorganic materials 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
Claims (11)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810550659.2A CN110551993A (zh) | 2018-05-31 | 2018-05-31 | 化学水浴薄膜的沉积装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810550659.2A CN110551993A (zh) | 2018-05-31 | 2018-05-31 | 化学水浴薄膜的沉积装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110551993A true CN110551993A (zh) | 2019-12-10 |
Family
ID=68733759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810550659.2A Pending CN110551993A (zh) | 2018-05-31 | 2018-05-31 | 化学水浴薄膜的沉积装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110551993A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023109955A1 (zh) * | 2021-12-16 | 2023-06-22 | 江阴纳力新材料科技有限公司 | 镀膜方法、镀膜系统以及镀膜生产线 |
WO2023109011A1 (zh) * | 2021-12-16 | 2023-06-22 | 江阴纳力新材料科技有限公司 | 镀膜系统和镀膜生产线 |
CN116536656A (zh) * | 2023-04-26 | 2023-08-04 | 哈尔滨工业大学 | 一种常温快速反应的铜网格线消光试剂及其制备方法及其使用方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2008123738A (ru) * | 2008-06-17 | 2009-12-27 | Лев Викторович Мисожников (RU) | Установка для нанесения покрытий в вакууме |
CN102766900A (zh) * | 2012-08-20 | 2012-11-07 | 北京四方继保自动化股份有限公司 | 一种采用化学水浴法制备硫化镉薄膜的方法 |
CN103906857A (zh) * | 2011-09-05 | 2014-07-02 | 富士胶片株式会社 | 化学浴沉积设备、形成缓冲层及制造光电转换装置的方法 |
CN105235116A (zh) * | 2015-09-25 | 2016-01-13 | 惠州易晖能源科技股份有限公司 | 一种卷对卷浸渍镀膜系统 |
KR20160054197A (ko) * | 2014-11-06 | 2016-05-16 | 주식회사 포스코 | 텔레스코프 방지장치 |
CN105714341A (zh) * | 2014-12-05 | 2016-06-29 | 温州市华夏电镀有限公司 | 一种单面电镀装置及其电镀工艺 |
CN208829763U (zh) * | 2018-05-31 | 2019-05-07 | 北京铂阳顶荣光伏科技有限公司 | 化学水浴薄膜的沉积装置 |
-
2018
- 2018-05-31 CN CN201810550659.2A patent/CN110551993A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2008123738A (ru) * | 2008-06-17 | 2009-12-27 | Лев Викторович Мисожников (RU) | Установка для нанесения покрытий в вакууме |
CN103906857A (zh) * | 2011-09-05 | 2014-07-02 | 富士胶片株式会社 | 化学浴沉积设备、形成缓冲层及制造光电转换装置的方法 |
CN102766900A (zh) * | 2012-08-20 | 2012-11-07 | 北京四方继保自动化股份有限公司 | 一种采用化学水浴法制备硫化镉薄膜的方法 |
KR20160054197A (ko) * | 2014-11-06 | 2016-05-16 | 주식회사 포스코 | 텔레스코프 방지장치 |
CN105714341A (zh) * | 2014-12-05 | 2016-06-29 | 温州市华夏电镀有限公司 | 一种单面电镀装置及其电镀工艺 |
CN105235116A (zh) * | 2015-09-25 | 2016-01-13 | 惠州易晖能源科技股份有限公司 | 一种卷对卷浸渍镀膜系统 |
CN208829763U (zh) * | 2018-05-31 | 2019-05-07 | 北京铂阳顶荣光伏科技有限公司 | 化学水浴薄膜的沉积装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023109955A1 (zh) * | 2021-12-16 | 2023-06-22 | 江阴纳力新材料科技有限公司 | 镀膜方法、镀膜系统以及镀膜生产线 |
WO2023109011A1 (zh) * | 2021-12-16 | 2023-06-22 | 江阴纳力新材料科技有限公司 | 镀膜系统和镀膜生产线 |
CN116536656A (zh) * | 2023-04-26 | 2023-08-04 | 哈尔滨工业大学 | 一种常温快速反应的铜网格线消光试剂及其制备方法及其使用方法 |
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Legal Events
Date | Code | Title | Description |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 102600 room 3001, building 6, yard 7, Rongchang East Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Applicant before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210508 Address after: 518000 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant after: Hongyi Technology Co.,Ltd. Address before: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |