CN110534468A - The film frequency device and guide card method of silicon chip flower basket - Google Patents
The film frequency device and guide card method of silicon chip flower basket Download PDFInfo
- Publication number
- CN110534468A CN110534468A CN201910788311.1A CN201910788311A CN110534468A CN 110534468 A CN110534468 A CN 110534468A CN 201910788311 A CN201910788311 A CN 201910788311A CN 110534468 A CN110534468 A CN 110534468A
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- China
- Prior art keywords
- silicon chip
- flower basket
- chip flower
- stocker
- belt conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Agricultural Chemicals And Associated Chemicals (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
The invention discloses a kind of film frequency devices of silicon chip flower basket, it include: the translation driving device for supporting silicon chip flower basket and silicon chip flower basket or so being driven to translate, bearing translation driving device and the lifting drive that translation driving device can be driven to be vertically moved up or down, and setting and towards the horizontal belt conveyer belt of silicon chip flower basket along the longitudinal direction, the belt conveyor can be elastic towards one end of silicon chip flower basket, and belt conveyor can be protruded into one by one in each stocker storehouse.The present invention also provides the silicon chip flower basket guide card methods using above-mentioned film frequency device, and guide card method includes inserted sheet method and slice method.Film frequency device and guide card method of the invention is suitable for the silicon chip flower basket that inner cavity is separated out at least two stocker storehouses.
Description
Technical field
The present invention relates to the film frequency devices of silicon chip flower basket and guide card method.
Background technique
Silicon chip flower basket is the utensil for carrying silicon wafer, and silicon chip flower basket can carry out guide card by film frequency device, and guide card includes inserted sheet
Or slice.Film frequency device is equipped with belt conveyor, and belt conveyor can insert piecewise silicon wafer (i.e. inserted sheet) to empty silicon chip flower basket,
Silicon chip flower basket is set to stick with row's silicon wafer；And the silicon wafer in silicon chip flower basket can export piecewise (i.e. slice) by belt conveyor.
Existing silicon chip flower basket is designed according to the size of square piece or quasi- square piece, but with the hair of solar battery technology
Exhibition, is divided at least two fragments (fragment generally rectangle) to have become full wafer silicon wafer (square piece or quasi- square piece) equal part
Gesture.And existing silicon chip flower basket is only capable of inserting row's silicon wafer (square piece or quasi- square piece), in order to carry fragment, needs to existing silicon wafer
The gaily decorated basket improves, and the inner cavity of existing silicon chip flower basket is separated out at least two stocker storehouses, and each stocker storehouse is in left-right direction successively
Setting, and the slot frame that can successively insert horizontal fragment is respectively set in each stocker storehouse.
Obviously, it needs to design new film frequency device and guide card method for improved silicon chip flower basket.
Summary of the invention
The purpose of the present invention is to provide a kind of film frequency devices of silicon chip flower basket and guide card method, are separated out suitable for inner cavity
The silicon chip flower basket at least two stocker storehouses.
To achieve the above object, the present invention provides a kind of film frequency device of silicon chip flower basket, the inner cavity point of the silicon chip flower basket
At least two stocker storehouses are separated out, each stocker storehouse is set gradually in left-right direction, and each stocker storehouse, which is respectively equipped with, can successively insert horizontal
The slot frame of silicon wafer；The film frequency device includes:
Bearing silicon chip flower basket and the translation driving device that silicon chip flower basket or so can be driven to translate,
Bearing translation driving device and the lifting drive that translation driving device can be driven to be vertically moved up or down,
And setting and towards the horizontal belt conveyer belt of silicon chip flower basket along the longitudinal direction, the belt conveyor is towards silicon wafer flower
One end of basket can be elastic, and belt conveyor can be protruded into one by one in each stocker storehouse.
Preferably, the translation driving device includes: horizontal microscope carrier, and set on microscope carrier top surface and be parallel to each other one
To electronic slide unit；Electronic slide unit is arranged in this in left-right direction；When silicon chip flower basket is placed in this on electronic slide unit, this is to electric sliding
Platform can drive silicon chip flower basket or so to translate.
Preferably, the lifting drive includes: the lifting cylinder that top is connect with microscope carrier bottom surface.
The present invention also provides a kind of inserted sheet method of silicon chip flower basket, the inner cavity of the silicon chip flower basket is separated out at least two storages
Piece storehouse, each stocker storehouse are set gradually in left-right direction, and each stocker storehouse is respectively equipped with the slot frame that can successively insert horizontal silicon wafer；Institute
Inserted sheet method is stated using above-mentioned film frequency device, is included the following steps:
Empty silicon chip flower basket is placed on a pair of electronic slide unit, this translates electronic slide unit driving silicon chip flower basket in left-right direction,
It aligns each stocker storehouse successively with belt conveyor, and executes the inserted sheet movement in single stocker storehouse after contraposition every time；
The inserted sheet in the single stocker storehouse, which acts, to be included the following steps: after the stocker storehouse and belt conveyor align, lifting air
Cylinder adjusts the height of silicon chip flower basket, matches the top slot position of the slot frame in the stocker storehouse with belt conveyor, belt transmission
One end of band towards silicon chip flower basket is put in the stocker storehouse, and belt conveyor conveys silicon wafer, and lifting cylinder to slot frame piecewise
Driving slot frame successively moves down, and inserts silicon wafer successively into slot frame, when slot frame sticks with silicon wafer, belt conveyor exits this
Stocker storehouse；
When the slot frame in each stocker storehouse all sticks with silicon wafer, that is, complete the inserted sheet of entire silicon chip flower basket.
The present invention also provides a kind of slice method of silicon chip flower basket, the inner cavity of the silicon chip flower basket is separated out at least two storages
Piece storehouse, each stocker storehouse are set gradually in left-right direction, and each stocker storehouse is respectively equipped with the slot frame that can successively insert horizontal silicon wafer；Institute
Slice method is stated using above-mentioned film frequency device, is included the following steps:
The silicon chip flower basket that each slot frame all sticks with silicon wafer is placed on a pair of electronic slide unit, this drives silicon chip flower basket to electronic slide unit
It translates in left-right direction, aligns each stocker storehouse successively with belt conveyor, and execute going out for single stocker storehouse after contraposition every time
Piece movement；
The slice in the single stocker storehouse, which acts, to be included the following steps: after the stocker storehouse and belt conveyor align, lifting air
Cylinder adjusts the height of silicon chip flower basket, matches the bottom end slot position of the slot frame in the stocker storehouse with belt conveyor, belt transmission
One end of band towards silicon chip flower basket is put in the stocker storehouse, and lifting cylinder driving slot frame successively moves up, and belt conveyor will
Silicon wafer in slot frame exports piecewise, and after the silicon wafer in slot frame all exports, belt conveyor exits the stocker storehouse；
When the silicon wafer in each slot frame is all exported by belt conveyor, that is, complete the slice of entire silicon chip flower basket.
Advantages and advantages of the present invention are to provide the film frequency device and method of a kind of silicon chip flower basket, are suitable for interior
Chamber is separated out the silicon chip flower basket at least two stocker storehouses.
Detailed description of the invention
Fig. 1 is the schematic diagram of silicon chip flower basket；
Fig. 2 and Fig. 3 is the schematic diagram of film frequency device.
Specific embodiment
With reference to the accompanying drawings and examples, further description of the specific embodiments of the present invention.Following embodiment is only
For clearly illustrating technical solution of the present invention, and not intended to limit the protection scope of the present invention.
As described in Figure 1, film frequency device of the invention and guide card method are suitable for silicon chip flower basket 10, the silicon chip flower basket 10 it is interior
Chamber is separated out at least two stocker storehouses (with two stocker storehouses 11,12 examples in Fig. 1), and each stocker storehouse is successively set in left-right direction
It sets, each stocker storehouse is respectively equipped with the slot frame that can successively insert horizontal silicon wafer；
As described in Fig. 2 and Fig. 3, the present invention provides the film frequency device for being suitable for above-mentioned silicon chip flower basket 10, which includes:
Bearing silicon chip flower basket 10 and the translation driving device 20 that silicon chip flower basket 10 or so can be driven to translate,
Bearing translation driving device 20 and the lifting drive 30 that translation driving device 20 can be driven to be vertically moved up or down,
And setting and towards the horizontal belt conveyer belt 40 of silicon chip flower basket 10,40 direction of belt conveyor along the longitudinal direction
One end of silicon chip flower basket 10 can be elastic, and belt conveyor 40 can be protruded into one by one in each stocker storehouse；
The translation driving device 20 includes: horizontal microscope carrier 21, and set on 21 top surface of microscope carrier and is parallel to each other a pair of electronic
Slide unit 22；Electronic slide unit 22 is arranged in this in left-right direction；When silicon chip flower basket 10 is placed in this on electronic slide unit 22, this is to electronic
Slide unit 22 can drive silicon chip flower basket 10 or so to translate；
The lifting drive 30 includes: the lifting cylinder 31 that top is connect with 21 bottom surface of microscope carrier.
The present invention also provides the guide card methods for being suitable for above-mentioned silicon chip flower basket 10, and guide card method includes inserted sheet method and slice
Method, it is specific as follows.
The present invention provides the inserted sheet method for being suitable for above-mentioned silicon chip flower basket 10, walks using above-mentioned film frequency device, including as follows
It is rapid:
Empty silicon chip flower basket 10 is placed on a pair of electronic slide unit 22, this is to electronic slide unit 22 driving silicon chip flower basket 10 along right and left
It to translation, aligns each stocker storehouse 11,12 successively with belt conveyor 40, and executes the inserted sheet in single stocker storehouse after contraposition every time
Movement；
The inserted sheet movement of the single stocker storehouse (by taking stocker storehouse 11 as an example) includes the following steps: to pass when the stocker storehouse 11 and belt
After sending band 40 to align, lifting cylinder 31 adjusts the height of silicon chip flower basket 10, make the top slot position of the slot frame in the stocker storehouse 11 with
Belt conveyor 40 matches, and one end of belt conveyor 40 towards silicon chip flower basket 10 is put in the stocker storehouse 11, belt transmission
Band 40 conveys silicon wafer 50 to slot frame piecewise, and lifting cylinder 31 drives slot frame successively to move down, make silicon wafer 50 successively insert to
In slot frame, when slot frame sticks with silicon wafer 50, belt conveyor 40 exits the stocker storehouse 11, as described in Figure 2；
When the slot frame in each stocker storehouse 11,12 all sticks with silicon wafer, that is, complete the inserted sheet of entire silicon chip flower basket 10.
The present invention also provides the slice methods for being suitable for above-mentioned silicon chip flower basket 10, using above-mentioned film frequency device, including it is as follows
Step:
The silicon chip flower basket 10 that each slot frame all sticks with silicon wafer 50 is placed on a pair of electronic slide unit 22, this drives electronic slide unit 22
Silicon chip flower basket 10 translates in left-right direction, aligns each stocker storehouse 11,12 successively with belt conveyor 40, and holds after contraposition every time
The slice movement in the single stocker storehouse of row；
The slice movement of the single stocker storehouse (by taking stocker storehouse 11 as an example) includes the following steps: to pass when the stocker storehouse 11 and belt
After sending band 40 to align, lifting cylinder 31 adjusts the height of silicon chip flower basket 10, make the bottom end slot position of the slot frame in the stocker storehouse 11 with
Belt conveyor 40 matches, and one end of belt conveyor 40 towards silicon chip flower basket 10 is put in the stocker storehouse, lifting cylinder 31
Driving slot frame successively moves up, and belt conveyor 40 exports the silicon wafer in slot frame piecewise, when the silicon wafer in slot frame is complete
After portion's output, belt conveyor 40 exits the stocker storehouse 11, as described in Figure 3；
When the silicon wafer in each slot frame is all exported by belt conveyor 40, that is, complete the slice of entire silicon chip flower basket 10.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (5)
1. the film frequency device of silicon chip flower basket, the inner cavity of the silicon chip flower basket is separated out at least two stocker storehouses, and each stocker storehouse is along a left side
Right direction is set gradually, and each stocker storehouse is respectively equipped with the slot frame that can successively insert horizontal silicon wafer；It is characterized in that, the guide card
Device includes:
Bearing silicon chip flower basket and the translation driving device that silicon chip flower basket or so can be driven to translate,
Bearing translation driving device and the lifting drive that translation driving device can be driven to be vertically moved up or down,
And setting and towards the horizontal belt conveyer belt of silicon chip flower basket along the longitudinal direction, the belt conveyor is towards silicon wafer flower
One end of basket can be elastic, and belt conveyor can be protruded into one by one in each stocker storehouse.
2. the film frequency device of silicon chip flower basket according to claim 1, which is characterized in that the translation driving device includes:
Horizontal microscope carrier, and set on microscope carrier top surface and the electronic slide unit of a pair that is parallel to each other；This sets electronic slide unit in left-right direction
It sets；When silicon chip flower basket is placed in this on electronic slide unit, this can drive silicon chip flower basket or so to translate on electronic slide unit.
3. the film frequency device of silicon chip flower basket according to claim 2, which is characterized in that the lifting drive includes:
The lifting cylinder that top is connect with microscope carrier bottom surface.
4. the inserted sheet method of silicon chip flower basket, the inner cavity of the silicon chip flower basket is separated out at least two stocker storehouses, and each stocker storehouse is along a left side
Right direction is set gradually, and each stocker storehouse is respectively equipped with the slot frame that can successively insert horizontal silicon wafer；It is characterized in that, the inserted sheet
Method uses film frequency device as claimed in claim 3, includes the following steps:
Empty silicon chip flower basket is placed on a pair of electronic slide unit, this translates electronic slide unit driving silicon chip flower basket in left-right direction,
It aligns each stocker storehouse successively with belt conveyor, and executes the inserted sheet movement in single stocker storehouse after contraposition every time；
The inserted sheet in the single stocker storehouse, which acts, to be included the following steps: after the stocker storehouse and belt conveyor align, lifting air
Cylinder adjusts the height of silicon chip flower basket, matches the top slot position of the slot frame in the stocker storehouse with belt conveyor, belt transmission
One end of band towards silicon chip flower basket is put in the stocker storehouse, and belt conveyor conveys silicon wafer, and lifting cylinder to slot frame piecewise
Driving slot frame successively moves down, and inserts silicon wafer successively into slot frame, when slot frame sticks with silicon wafer, belt conveyor exits this
Stocker storehouse；
When the slot frame in each stocker storehouse all sticks with silicon wafer, that is, complete the inserted sheet of entire silicon chip flower basket.
5. the slice method of silicon chip flower basket, the inner cavity of the silicon chip flower basket is separated out at least two stocker storehouses, and each stocker storehouse is along a left side
Right direction is set gradually, and each stocker storehouse is respectively equipped with the slot frame that can successively insert horizontal silicon wafer；It is characterized in that, the slice
Method uses film frequency device as claimed in claim 3, includes the following steps:
The silicon chip flower basket that each slot frame all sticks with silicon wafer is placed on a pair of electronic slide unit, this drives silicon chip flower basket to electronic slide unit
It translates in left-right direction, aligns each stocker storehouse successively with belt conveyor, and execute going out for single stocker storehouse after contraposition every time
Piece movement；
The slice in the single stocker storehouse, which acts, to be included the following steps: after the stocker storehouse and belt conveyor align, lifting air
Cylinder adjusts the height of silicon chip flower basket, matches the bottom end slot position of the slot frame in the stocker storehouse with belt conveyor, belt transmission
One end of band towards silicon chip flower basket is put in the stocker storehouse, and lifting cylinder driving slot frame successively moves up, and belt conveyor will
Silicon wafer in slot frame exports piecewise, and after the silicon wafer in slot frame all exports, belt conveyor exits the stocker storehouse；
When the silicon wafer in each slot frame is all exported by belt conveyor, that is, complete the slice of entire silicon chip flower basket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910788311.1A CN110534468A (en) | 2019-08-26 | 2019-08-26 | The film frequency device and guide card method of silicon chip flower basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910788311.1A CN110534468A (en) | 2019-08-26 | 2019-08-26 | The film frequency device and guide card method of silicon chip flower basket |
Publications (1)
| Publication Number | Publication Date |
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| CN110534468A true CN110534468A (en) | 2019-12-03 |
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| CN201910788311.1A Pending CN110534468A (en) | 2019-08-26 | 2019-08-26 | The film frequency device and guide card method of silicon chip flower basket |
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Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012082022A (en) * | 2009-01-26 | 2012-04-26 | Hirata Corp | Workpiece loading/unloading device and workpiece storage system |
| CN202414789U (en) * | 2011-12-31 | 2012-09-05 | 无锡市奥曼特科技有限公司 | Silicon chip feeding lifting table for loading and unloading system of plate-type plasma enhanced chemical vapor deposition (PECD) device |
| CN104307759A (en) * | 2014-09-25 | 2015-01-28 | 中国电子科技集团公司第四十八研究所 | Feeding system and feeding method for silicon chip quality sorting equipment |
| CN205555525U (en) * | 2016-04-29 | 2016-09-07 | 南京卓胜自动化设备有限公司 | Automatic change silicon chip collection device |
| CN106024980A (en) * | 2016-06-29 | 2016-10-12 | 浙江科技学院 | Automatic chip insertion machine |
| CN205855399U (en) * | 2016-06-07 | 2017-01-04 | 江苏爱多能源科技有限公司 | Silicon chip unloading frame |
| CN207158332U (en) * | 2017-09-06 | 2018-03-30 | 无锡市江松科技有限公司 | The telescopic gaily decorated basket takes sheet devices on piece |
| CN207183294U (en) * | 2017-06-01 | 2018-04-03 | 润峰电力有限公司 | A kind of silk-screen printing exception piece places holder device |
| CN207303060U (en) * | 2017-11-07 | 2018-05-01 | 大庆佳昌晶能信息材料有限公司 | A kind of gallium arsenide wafer Sample storage device |
| CN207752989U (en) * | 2017-09-13 | 2018-08-21 | 深圳市拉普拉斯能源技术有限公司 | A kind of big storage silicon chip Shang Pian mechanisms |
| CN207973193U (en) * | 2017-09-06 | 2018-10-16 | 无锡市江松科技有限公司 | Silicon chip flower basket film frequency device |
| CN108735638A (en) * | 2018-05-30 | 2018-11-02 | 郑州恒之博新能源科技有限公司 | A kind of adjustable solar silicon chip storage device |
| CN108987317A (en) * | 2018-06-12 | 2018-12-11 | 上海集成电路研发中心有限公司 | A kind of silicon wafer film magazine and equipment platform |
| CN208385377U (en) * | 2018-07-11 | 2019-01-15 | 苏州映真智能科技有限公司 | Active gaily decorated basket load system |
| WO2019091662A1 (en) * | 2017-11-09 | 2019-05-16 | Asml Netherlands B.V. | Lithographic apparatus and method |
-
2019
- 2019-08-26 CN CN201910788311.1A patent/CN110534468A/en active Pending
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012082022A (en) * | 2009-01-26 | 2012-04-26 | Hirata Corp | Workpiece loading/unloading device and workpiece storage system |
| CN202414789U (en) * | 2011-12-31 | 2012-09-05 | 无锡市奥曼特科技有限公司 | Silicon chip feeding lifting table for loading and unloading system of plate-type plasma enhanced chemical vapor deposition (PECD) device |
| CN104307759A (en) * | 2014-09-25 | 2015-01-28 | 中国电子科技集团公司第四十八研究所 | Feeding system and feeding method for silicon chip quality sorting equipment |
| CN205555525U (en) * | 2016-04-29 | 2016-09-07 | 南京卓胜自动化设备有限公司 | Automatic change silicon chip collection device |
| CN205855399U (en) * | 2016-06-07 | 2017-01-04 | 江苏爱多能源科技有限公司 | Silicon chip unloading frame |
| CN106024980A (en) * | 2016-06-29 | 2016-10-12 | 浙江科技学院 | Automatic chip insertion machine |
| CN207183294U (en) * | 2017-06-01 | 2018-04-03 | 润峰电力有限公司 | A kind of silk-screen printing exception piece places holder device |
| CN207158332U (en) * | 2017-09-06 | 2018-03-30 | 无锡市江松科技有限公司 | The telescopic gaily decorated basket takes sheet devices on piece |
| CN207973193U (en) * | 2017-09-06 | 2018-10-16 | 无锡市江松科技有限公司 | Silicon chip flower basket film frequency device |
| CN207752989U (en) * | 2017-09-13 | 2018-08-21 | 深圳市拉普拉斯能源技术有限公司 | A kind of big storage silicon chip Shang Pian mechanisms |
| CN207303060U (en) * | 2017-11-07 | 2018-05-01 | 大庆佳昌晶能信息材料有限公司 | A kind of gallium arsenide wafer Sample storage device |
| WO2019091662A1 (en) * | 2017-11-09 | 2019-05-16 | Asml Netherlands B.V. | Lithographic apparatus and method |
| CN108735638A (en) * | 2018-05-30 | 2018-11-02 | 郑州恒之博新能源科技有限公司 | A kind of adjustable solar silicon chip storage device |
| CN108987317A (en) * | 2018-06-12 | 2018-12-11 | 上海集成电路研发中心有限公司 | A kind of silicon wafer film magazine and equipment platform |
| CN208385377U (en) * | 2018-07-11 | 2019-01-15 | 苏州映真智能科技有限公司 | Active gaily decorated basket load system |
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Address after: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8 Applicant after: Changzhou Shichuang Energy Co.,Ltd. Address before: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8 Applicant before: CHANGZHOU SHICHUANG ENERGY TECHNOLOGY Co.,Ltd. |
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20191203 |