CN110534468A - Guide device and guide method for silicon wafer flower basket - Google Patents
Guide device and guide method for silicon wafer flower basket Download PDFInfo
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- CN110534468A CN110534468A CN201910788311.1A CN201910788311A CN110534468A CN 110534468 A CN110534468 A CN 110534468A CN 201910788311 A CN201910788311 A CN 201910788311A CN 110534468 A CN110534468 A CN 110534468A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/18—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3411—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H10P72/3412—Batch transfer of wafers
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Abstract
本发明公开了一种硅片花篮的导片装置，包括：支承硅片花篮、且可驱动硅片花篮左右平移的平移驱动装置，支承平移驱动装置、且可驱动平移驱动装置垂直升降的升降驱动装置，以及沿前后方向设置、且朝向硅片花篮的平置皮带传送带，该皮带传送带朝向硅片花篮的一端可前后伸缩，且皮带传送带可逐一伸入各储片仓中。本发明还提供采用上述导片装置的硅片花篮导片方法，导片方法包括插片方法和出片方法。本发明的导片装置和导片方法适用于内腔分隔出至少两个储片仓的硅片花篮。
The invention discloses a guide device for a silicon wafer flower basket, comprising: a translation drive device that supports the silicon wafer flower basket and can drive the left and right translation of the silicon wafer flower basket, and a lift drive that supports the translation drive device and can drive the translation drive device to vertically lift The device, and a flat belt conveyor arranged in the front-rear direction and facing the silicon wafer flower basket, the end of the belt conveyor belt facing the silicon wafer flower basket can be retracted back and forth, and the belt conveyor belt can extend into each wafer storage bin one by one. The present invention also provides a silicon wafer flower basket guide method using the above guide device, and the guide method includes a chip insertion method and a chip output method. The guide device and guide method of the present invention are suitable for silicon wafer flower baskets whose inner cavity is divided into at least two wafer storage bins.
Description
技术领域technical field
本发明涉及硅片花篮的导片装置和导片方法。The invention relates to a guide device and a guide method for a silicon wafer flower basket.
背景技术Background technique
硅片花篮是承载硅片的器具，硅片花篮可通过导片装置进行导片，导片包括插片或出片。导片装置设有皮带传送带，皮带传送带可向空的硅片花篮逐片插放硅片（即插片），使硅片花篮插满一排硅片；且硅片花篮中的硅片可由皮带传送带逐片输出（即出片）。The silicon wafer flower basket is a device for carrying silicon wafers. The silicon wafer flower basket can be guided by a guide device, and the guide includes inserting or discharging. The guide device is equipped with a belt conveyor, and the belt conveyor can insert silicon wafers (ie, insert wafers) into the empty wafer basket one by one, so that the wafer basket is filled with a row of silicon wafers; The conveyor belt outputs piece by piece (ie, piece out).
现有硅片花篮是根据方片或准方片的尺寸来设计的，但随着太阳能电池技术的发展，将整片硅片（方片或准方片）等分分割成至少两个分片（分片整体为长方形）已成为趋势。而现有的硅片花篮仅能插放一排硅片（方片或准方片），为了承载分片，需要对现有硅片花篮进行改进，将现有硅片花篮的内腔分隔出至少两个储片仓，各储片仓沿左右方向依次设置，且各储片仓分别设置可逐层插放平置分片的插槽架。The existing silicon wafer flower baskets are designed according to the size of square wafers or quasi-square wafers, but with the development of solar cell technology, the whole wafer (square wafer or quasi-square wafer) is equally divided into at least two pieces. (The shard as a whole is a rectangle) has become a trend. However, the existing silicon wafer basket can only insert one row of silicon wafers (square wafers or quasi-square wafers). In order to support the slicing, the existing silicon wafer flower basket needs to be improved, and the inner cavity of the existing silicon wafer flower basket needs to be separated. There are at least two film storage bins, each of which is arranged in sequence along the left and right directions, and each of the film storage bins is respectively provided with a slot rack capable of inserting and laying flat slices layer by layer.
显然，需要针对改进后的硅片花篮设计新的的导片装置和导片方法。Clearly, a new guide device and guide method need to be designed for the improved wafer basket.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于提供一种硅片花篮的导片装置和导片方法，适用于内腔分隔出至少两个储片仓的硅片花篮。The purpose of the present invention is to provide a guide device and guide method for a silicon wafer flower basket, which are suitable for a silicon wafer flower basket with at least two wafer storage bins separated by an inner cavity.
为实现上述目的，本发明提供一种硅片花篮的导片装置，所述硅片花篮的内腔分隔出至少两个储片仓，各储片仓沿左右方向依次设置，各储片仓分别设有可逐层插放平置硅片的插槽架；所述导片装置包括：In order to achieve the above purpose, the present invention provides a wafer guide device for a silicon wafer flower basket, wherein the inner cavity of the wafer flower basket is divided into at least two wafer storage bins, each wafer storage bin is arranged in sequence along the left and right directions, and each wafer storage bin is respectively A slot frame capable of inserting and laying silicon wafers layer by layer is provided; the guide device includes:
支承硅片花篮、且可驱动硅片花篮左右平移的平移驱动装置，A translation drive device that supports the silicon wafer flower basket and can drive the left and right translation of the silicon wafer flower basket,
支承平移驱动装置、且可驱动平移驱动装置垂直升降的升降驱动装置，A lift drive device that supports the translation drive device and can drive the translation drive device to rise and fall vertically,
以及沿前后方向设置、且朝向硅片花篮的平置皮带传送带，该皮带传送带朝向硅片花篮的一端可前后伸缩，且皮带传送带可逐一伸入各储片仓中。and a flat belt conveyor belt arranged in the front and rear direction and facing the silicon wafer flower basket, the end of the belt conveyor belt facing the silicon wafer flower basket can be stretched back and forth, and the belt conveyor belt can extend into each wafer storage bin one by one.
优选的，所述平移驱动装置包括：平置载台，以及设于载台顶面、且相互平行的一对电动滑台；该对电动滑台沿左右方向设置；当硅片花篮置于该对电动滑台上，该对电动滑台可驱动硅片花篮左右平移。Preferably, the translational drive device includes: a flat loading stage, and a pair of electric sliding stages arranged on the top surface of the loading stage and parallel to each other; the pair of electric sliding stages are arranged along the left and right directions; when the silicon wafer flower basket is placed on the On the pair of electric slides, the pair of electric slides can drive the silicon wafer flower basket to translate left and right.
优选的，所述升降驱动装置包括：顶端与载台底面连接的升降气缸。Preferably, the lift driving device comprises: a lift cylinder whose top end is connected to the bottom surface of the carrier.
本发明还提供一种硅片花篮的插片方法，所述硅片花篮的内腔分隔出至少两个储片仓，各储片仓沿左右方向依次设置，各储片仓分别设有可逐层插放平置硅片的插槽架；所述插片方法采用上述导片装置，包括如下步骤：The present invention also provides a method for inserting silicon wafer flower baskets. The inner cavity of the silicon wafer flower basket is divided into at least two wafer storage bins. The slot frame for placing the silicon wafers in layers is inserted; the inserting method adopts the above-mentioned guide device, and includes the following steps:
将空的硅片花篮置于一对电动滑台上，该对电动滑台驱动硅片花篮沿左右方向平移，使各储片仓依次与皮带传送带对位，且每次对位后执行单个储片仓的插片动作；Place the empty wafer baskets on a pair of electric slides. The pair of electric slides drives the wafer baskets to translate in the left and right directions, so that each storage bin is aligned with the belt conveyor in turn, and a single storage is performed after each alignment. Katakura's inserting action;
所述单个储片仓的插片动作包括如下步骤：当该储片仓与皮带传送带对位后，升降气缸调整硅片花篮的高度，使该储片仓的插槽架的顶端槽位与皮带传送带相配合，皮带传送带朝向硅片花篮的一端伸进该储片仓中，皮带传送带向插槽架逐片输送硅片，且升降气缸驱动插槽架逐层下移，使硅片逐层插放至插槽架中，当插槽架插满硅片，皮带传送带退出该储片仓；The chip inserting action of the single storage bin includes the following steps: after the storage bin is aligned with the belt conveyor, the lifting cylinder adjusts the height of the silicon wafer basket, so that the top slot of the slot frame of the storage bin is aligned with the belt. The conveyor belt is matched, and the belt conveyor extends into the storage bin toward the end of the wafer basket. The belt conveyor conveys the silicon wafers to the slot rack one by one, and the lifting cylinder drives the slot rack to move down layer by layer, so that the silicon wafers are inserted layer by layer. Put it into the slot rack, when the slot rack is full of silicon wafers, the belt conveyor will exit the storage bin;
当各储片仓的插槽架都插满硅片，即完成整个硅片花篮的插片。When the slot racks of each wafer storage compartment are filled with silicon wafers, the insertion of the entire wafer basket is completed.
本发明还提供一种硅片花篮的出片方法，所述硅片花篮的内腔分隔出至少两个储片仓，各储片仓沿左右方向依次设置，各储片仓分别设有可逐层插放平置硅片的插槽架；所述出片方法采用上述导片装置，包括如下步骤：The present invention also provides a method for unloading a silicon wafer flower basket, wherein the inner cavity of the silicon wafer flower basket is divided into at least two wafer storage bins, each wafer storage bin is arranged in sequence along the left and right directions, and each wafer storage bin is respectively provided with The slot frame for laying the silicon wafers in layers is inserted; the wafer-out method adopts the above-mentioned guiding device, and includes the following steps:
将各插槽架都插满硅片的硅片花篮置于一对电动滑台上，该对电动滑台驱动硅片花篮沿左右方向平移，使各储片仓依次与皮带传送带对位，且每次对位后执行单个储片仓的出片动作；Place the silicon wafer baskets filled with silicon wafers in each slot frame on a pair of electric slides, and the pair of electric slides drives the silicon wafer baskets to translate in the left and right directions, so that each storage bin is aligned with the belt conveyor in turn, and After each alignment, perform the film output action of a single film storage bin;
所述单个储片仓的出片动作包括如下步骤：当该储片仓与皮带传送带对位后，升降气缸调整硅片花篮的高度，使该储片仓的插槽架的底端槽位与皮带传送带相配合，皮带传送带朝向硅片花篮的一端伸进该储片仓中，升降气缸驱动插槽架逐层上移，且皮带传送带将插槽架中的硅片逐片输出，当插槽架中的硅片全部输出后，皮带传送带退出该储片仓；The film output action of the single storage bin includes the following steps: after the storage bin is aligned with the belt conveyor, the lift cylinder adjusts the height of the silicon wafer basket, so that the bottom end slot of the slot frame of the storage bin is in the same position as the bottom end of the slot frame. The belt conveyor is matched with the belt conveyor, the end of the belt conveyor toward the silicon wafer basket extends into the storage bin, the lifting cylinder drives the slot rack to move up layer by layer, and the belt conveyor outputs the silicon wafers in the slot rack one by one. After all the wafers in the rack are output, the belt conveyor exits the wafer storage bin;
当各插槽架中的硅片都被皮带传送带输出，即完成整个硅片花篮的出片。When the silicon wafers in each slot rack are output by the belt conveyor, the whole wafer basket is finished.
本发明的优点和有益效果在于：提供一种硅片花篮的导片装置及方法，适用于内腔分隔出至少两个储片仓的硅片花篮。The advantages and beneficial effects of the present invention are as follows: a guide device and method for a silicon wafer flower basket are provided, which are suitable for a silicon wafer flower basket whose inner cavity is divided into at least two wafer storage bins.
附图说明Description of drawings
图1是硅片花篮的示意图；Fig. 1 is the schematic diagram of the silicon wafer flower basket;
图2和图3是导片装置的示意图。2 and 3 are schematic views of the guide device.
具体实施方式Detailed ways
下面结合附图和实施例，对本发明的具体实施方式作进一步描述。以下实施例仅用于更加清楚地说明本发明的技术方案，而不能以此来限制本发明的保护范围。The specific embodiments of the present invention will be further described below with reference to the accompanying drawings and embodiments. The following examples are only used to illustrate the technical solutions of the present invention more clearly, and cannot be used to limit the protection scope of the present invention.
如图1所述，本发明的导片装置和导片方法适用于硅片花篮10，该硅片花篮10的内腔分隔出至少两个储片仓（图1中以两个储片仓11、12示例），各储片仓沿左右方向依次设置，各储片仓分别设有可逐层插放平置硅片的插槽架；As shown in FIG. 1 , the guide device and guide method of the present invention are applicable to the wafer basket 10 , and the inner cavity of the silicon wafer basket 10 is divided into at least two wafer storage bins (in FIG. 1 , two wafer storage bins 11 , 12 example), each storage bin is arranged in sequence along the left and right direction, and each storage bin is respectively provided with a slot rack that can insert the flat silicon wafers layer by layer;
如图2和图3所述，本发明提供适用于上述硅片花篮10的导片装置，该导片装置包括：As shown in FIG. 2 and FIG. 3 , the present invention provides a guide device suitable for the above-mentioned silicon wafer flower basket 10, and the guide device includes:
支承硅片花篮10、且可驱动硅片花篮10左右平移的平移驱动装置20，a translation drive device 20 that supports the silicon wafer flower basket 10 and can drive the silicon wafer flower basket 10 to translate left and right,
支承平移驱动装置20、且可驱动平移驱动装置20垂直升降的升降驱动装置30，A lift drive device 30 that supports the translation drive device 20 and can drive the translation drive device 20 to vertically ascend and descend,
以及沿前后方向设置、且朝向硅片花篮10的平置皮带传送带40，该皮带传送带40朝向硅片花篮10的一端可前后伸缩，且皮带传送带40可逐一伸入各储片仓中；and a flat belt conveyor 40 disposed along the front and rear direction and facing the silicon wafer flower basket 10, the belt conveyor 40 can be stretched back and forth toward one end of the silicon wafer flower basket 10, and the belt conveyor 40 can extend into each wafer storage bin one by one;
所述平移驱动装置20包括：平置载台21，以及设于载台21顶面、且相互平行的一对电动滑台22；该对电动滑台22沿左右方向设置；当硅片花篮10置于该对电动滑台22上，该对电动滑台22可驱动硅片花篮10左右平移；The translational drive device 20 includes: a flat loading stage 21, and a pair of electric sliding stages 22 arranged on the top surface of the loading stage 21 and parallel to each other; the pair of electric sliding stages 22 are arranged in the left-right direction; when the silicon wafer flower basket 10 placed on the pair of electric slides 22, the pair of electric slides 22 can drive the silicon wafer flower basket 10 to translate left and right;
所述升降驱动装置30包括：顶端与载台21底面连接的升降气缸31。The lift driving device 30 includes a lift cylinder 31 whose top end is connected to the bottom surface of the stage 21 .
本发明还提供适用于上述硅片花篮10的导片方法，导片方法包括插片方法和出片方法，具体如下。The present invention also provides a guide method suitable for the above-mentioned silicon wafer flower basket 10. The guide method includes a chip insertion method and a chip discharge method, as follows.
本发明提供适用于上述硅片花篮10的插片方法，采用上述导片装置，包括如下步骤：The present invention provides a wafer insertion method suitable for the above-mentioned silicon wafer flower basket 10, using the above-mentioned guiding device, including the following steps:
将空的硅片花篮10置于一对电动滑台22上，该对电动滑台22驱动硅片花篮10沿左右方向平移，使各储片仓11、12依次与皮带传送带40对位，且每次对位后执行单个储片仓的插片动作；The empty wafer basket 10 is placed on a pair of electric slides 22, and the pair of electric slides 22 drives the wafer basket 10 to translate in the left-right direction, so that the wafer storage bins 11 and 12 are aligned with the belt conveyor 40 in turn, and After each alignment, perform the inserting action of a single storage bin;
所述单个储片仓（以储片仓11为例）的插片动作包括如下步骤：当该储片仓11与皮带传送带40对位后，升降气缸31调整硅片花篮10的高度，使该储片仓11的插槽架的顶端槽位与皮带传送带40相配合，皮带传送带40朝向硅片花篮10的一端伸进该储片仓11中，皮带传送带40向插槽架逐片输送硅片50，且升降气缸31驱动插槽架逐层下移，使硅片50逐层插放至插槽架中，当插槽架插满硅片50，皮带传送带40退出该储片仓11，如图2所述；The chip insertion action of the single storage bin (taking the storage bin 11 as an example) includes the following steps: after the storage bin 11 is aligned with the belt conveyor 40, the lift cylinder 31 adjusts the height of the wafer basket 10 so that the The top slot of the slot rack of the wafer storage bin 11 is matched with the belt conveyor 40. The belt conveyor 40 extends into the wafer storage bin 11 toward the end of the wafer basket 10, and the belt conveyor 40 conveys the silicon wafers to the slot rack one by one. 50, and the lifting cylinder 31 drives the slot racks to move down layer by layer, so that the silicon wafers 50 are inserted into the slot racks layer by layer. as described in Figure 2;
当各储片仓11、12的插槽架都插满硅片，即完成整个硅片花篮10的插片。When the slot racks of the wafer storage bins 11 and 12 are all filled with silicon wafers, the wafer insertion of the entire wafer basket 10 is completed.
本发明还提供适用于上述硅片花篮10的出片方法，采用上述导片装置，包括如下步骤：The present invention also provides a wafer output method suitable for the above-mentioned silicon wafer flower basket 10, using the above-mentioned guide device, including the following steps:
将各插槽架都插满硅片50的硅片花篮10置于一对电动滑台22上，该对电动滑台22驱动硅片花篮10沿左右方向平移，使各储片仓11、12依次与皮带传送带40对位，且每次对位后执行单个储片仓的出片动作；Place the wafer baskets 10 filled with silicon wafers 50 in each slot frame and place them on a pair of electric slides 22. The pair of electric slides 22 drives the wafer baskets 10 to translate in the left and right directions, so that the wafer storage bins 11 and 12 Align with the belt conveyor 40 in turn, and perform the film output action of a single film storage bin after each alignment;
所述单个储片仓（以储片仓11为例）的出片动作包括如下步骤：当该储片仓11与皮带传送带40对位后，升降气缸31调整硅片花篮10的高度，使该储片仓11的插槽架的底端槽位与皮带传送带40相配合，皮带传送带40朝向硅片花篮10的一端伸进该储片仓中，升降气缸31驱动插槽架逐层上移，且皮带传送带40将插槽架中的硅片逐片输出，当插槽架中的硅片全部输出后，皮带传送带40退出该储片仓11，如图3所述；The film output action of the single storage bin (taking the storage bin 11 as an example) includes the following steps: after the storage bin 11 is aligned with the belt conveyor 40, the lift cylinder 31 adjusts the height of the wafer basket 10 so that the The bottom slot of the slot frame of the wafer storage bin 11 is matched with the belt conveyor 40, and the end of the belt conveyor 40 toward the silicon wafer flower basket 10 extends into the wafer storage bin, and the lift cylinder 31 drives the slot frame to move up layer by layer, And the belt conveyor 40 outputs the silicon wafers in the slot rack one by one, when all the silicon wafers in the slot rack are output, the belt conveyor 40 exits the wafer storage bin 11, as shown in FIG. 3 ;
当各插槽架中的硅片都被皮带传送带40输出，即完成整个硅片花篮10的出片。When the silicon wafers in each slot rack are output by the belt conveyor 40 , the whole wafer basket 10 is finished.
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明技术原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。The above are only the preferred embodiments of the present invention. It should be pointed out that for those skilled in the art, without departing from the technical principles of the present invention, several improvements and modifications can be made. These improvements and modifications It should also be regarded as the protection scope of the present invention.
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