CN110512277A - A kind of automatic weighing crystal pull grower - Google Patents
A kind of automatic weighing crystal pull grower Download PDFInfo
- Publication number
- CN110512277A CN110512277A CN201910712416.9A CN201910712416A CN110512277A CN 110512277 A CN110512277 A CN 110512277A CN 201910712416 A CN201910712416 A CN 201910712416A CN 110512277 A CN110512277 A CN 110512277A
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- component
- inner cylinder
- connecting rod
- cooling
- crystal
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- 239000013078 crystal Substances 0.000 title claims abstract description 45
- 238000005303 weighing Methods 0.000 title claims abstract description 34
- 238000004804 winding Methods 0.000 claims abstract description 16
- 230000003028 elevating effect Effects 0.000 claims abstract description 9
- 238000001816 cooling Methods 0.000 claims description 37
- 239000007788 liquid Substances 0.000 claims description 35
- 238000010438 heat treatment Methods 0.000 claims description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 238000009413 insulation Methods 0.000 claims description 9
- 230000006698 induction Effects 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000002826 coolant Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000004260 weight control Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
A kind of automatic weighing crystal pull grower proposed by the present invention, including bracket, elevating mechanism, rotating mechanism, Weighing mechanism, growth furnace and controller, elevating mechanism includes guide post, pulley, rope, connecting rod and winding component, Weighing mechanism is rack-mount, pulley rotation is mounted on Weighing mechanism, rope is fixedly connected around pulley with winding component, it is rack-mount to wind component, the rope other end is fixedly connected with the connecting rod, connecting rod first end is slidably connected with guide post, guide post is arranged vertically, rotating mechanism includes motor and seed rod, motor is mounted at the top of connecting rod second end, the output shaft of motor is detachably fixed through connecting rod and with seed rod, growth furnace includes furnace body, furnace body has furnace chamber, crucible is equipped in furnace chamber, Weighing mechanism signal connects controller, controller controls respectively Connection winding component, furnace body and motor.The present invention can effectively improve crystal quality, adapt to different crystal production requirements.
Description
Technical field
The present invention relates to technical field of crystal growth, and in particular to a kind of automatic weighing crystal pull grower.
Background technique
Crystal growing furnace is a kind of common crystal growth equipment.When producing crystal, the general promotion speed for considering crystal
The influence to the quality of crystal is spent, but influence of the revolving speed of consideration crystal to the quality of crystal.And it is in the prior art
The temperature gradient of crystal growing furnace is fixed, and cannot be adjusted according to actual requirement.
Summary of the invention
Technical problems based on background technology, a kind of automatic weighing crystal pull grower proposed by the present invention.
A kind of automatic weighing crystal pull grower proposed by the present invention, including bracket, elevating mechanism, rotating mechanism,
Weighing mechanism, growth furnace and controller；
Elevating mechanism includes guide post, pulley, rope, connecting rod and winding component, and Weighing mechanism is rack-mount,
Pulley rotation is mounted on Weighing mechanism, and rope is fixedly connected around pulley with winding component, and winding component is mounted on bracket
On, the rope other end is fixedly connected with the connecting rod, and connecting rod first end is slidably connected with guide post, and guide post is arranged vertically；
Rotating mechanism includes motor and seed rod, and motor is mounted at the top of connecting rod second end, and the output shaft of motor runs through
Connecting rod is simultaneously detachably fixed with seed rod first end, and seed rod second end is equipped with the collet for clamping seed crystal；
Growth furnace includes furnace body, and furnace body has furnace chamber, and crucible is equipped in furnace chamber, and Weighing mechanism signal connects controller, control
Device processed controls connection winding component, furnace body and motor respectively.
Preferably, furnace body includes shell, inner cylinder and at least one heat insulation felt, and inner cylinder uses insulating heat insulating material system
At heat insulation felt is successively set in inner cylinder from top to bottom and inner cylinder is divided into multiple humidity provinces, and each heat insulation felt middle part is
Equipped with the through-hole passed through for accommodating seed rod and crystal, each humidity province is equipped with the temperature sensing for measuring area's temperature
Device；
The heating component for heating the humidity province is equipped on the inside of the inner cylinder of each humidity province, each humidity province is corresponding
Shell and inner cylinder between be equipped with cooling component for cooling down the humidity province, it is thermally conductive equipped at least one in each humidity province
Bar, heat conducting bar pass through inner cylinder and are fixedly connected with cooling component；
Temperature sensor signal connects controller, and controller controls the heating component and cooling for connecting each humidity province respectively
Component.
Preferably, heating component includes the heater being located on the inside of inner cylinder and is located on heater and inner cylinder inner wall
Between induction heating circle, controller control connection induction heating circle.
Preferably, cooling component includes cooling pipe, and cooling pipe bottom is equipped with inlet, and cooling pipe upper end is equipped with
Liquid mouth, cooling pipe are equipped with heat sink, and heat conducting bar is fixedly connected with heat sink.
It preferably, further include recirculation assembly, recirculation assembly includes cold water storage cistern, circulating pump and condenser, cold water storage cistern, circulating pump
It passes sequentially through pipeline with inlet to connect, liquid outlet, condenser and cold water storage cistern pass sequentially through pipeline and connect, circulating pump and inlet
Between pipeline be equipped with liquid feed valve, pipeline between liquid valve and inlet is equipped with flow control valve, liquid outlet and condensation
Pipeline between device is equipped with liquid valve, and controller controls connection circulating pump, liquid feed valve, liquid valve, condenser and flow respectively
Regulating valve.
Preferably, case inside is successively arranged the first insulating layer and the second insulating layer, the cold water pipe of each cooling component
The liquid feeding end in road is arranged between the first insulating layer and the second insulating layer.
A kind of automatic weighing crystal pull grower proposed by the present invention, has the advantages that
(1) obtain controller according to Weighing mechanism by the way that the cooperation of elevating mechanism, rotating mechanism and weighing mechanism is arranged
The real-time Weight control of crystal winds component and motor action to adapt to the growth requirement of the crystal of different phase, and guide post
It will not misplace for guaranteeing to be promoted, improve crystal quality.
(2) by the way that multiple humidity provinces are arranged, controller can be controlled according to the temperature of temperature sensor humidity province detected
Heating component and/or cooling component work heat and/or cool corresponding humidity province, to automatically adjust different temperatures area
Temperature, formed be suitble to crystal growth needed for temperature gradient, improve crystal quality.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of automatic weighing crystal pull grower proposed by the present invention.
Specific embodiment
Referring to Fig.1, a kind of automatic weighing crystal pull grower proposed by the present invention, including bracket 11, elevating mechanism,
Rotating mechanism, Weighing mechanism 17, growth furnace and controller；
Elevating mechanism includes guide post 12, pulley 13, rope 14, connecting rod 15 and winding component 16, Weighing mechanism 17
It is mounted on bracket 11, pulley 13 is rotatably installed on Weighing mechanism 17, and rope 14 is solid around pulley 13 and winding component 16
Fixed connection, winding component 16 are mounted on bracket 11, and 14 other end of rope is fixedly connected with connecting rod 15, connecting rod 15 first
End is slidably connected with guide post 12, and guide post 12 is arranged vertically；
Rotating mechanism includes motor 18 and seed rod 19, and motor 18 is mounted at the top of 15 second end of connecting rod, motor 18
Output shaft is detachably fixed through connecting rod 15 and with 19 one end of seed rod, and 19 second end of seed rod is equipped with for clamping seed crystal
Collet；
Growth furnace includes furnace body, and furnace body has furnace chamber, and crucible is equipped in furnace chamber, and Weighing mechanism signal connects controller, control
Device processed controls connection winding component 16, furnace body and motor 18 respectively.
In the use of the present invention, component 16 is wound when winding rope 14, since rope 14 bypasses pulley 13, because
This, the weight of crystal and rotating mechanism is pressed on idler wheel 13, and idler wheel 13 is mounted on Weighing mechanism 17, therefore Weighing mechanism
17 can obtain the real-time weight of crystal, controller according to the real-time Weight control of crystal wind component 16 and the movement of motor 18 with
The growth requirement for adapting to the crystal of different phase improves the radial symmetry in temperature field, and guide post 12 is promoted for guaranteeing
It will not misplace, to improve crystal quality.
In the present embodiment, furnace body includes shell 1, inner cylinder 8 and at least one heat insulation felt, and inner cylinder 8 is using insulation
Thermal insulation material is made, and heat insulation felt 4 is successively set in inner cylinder 8 from top to bottom and furnace body is divided into multiple humidity provinces, each every
The through-hole passed through for accommodating seed rod and crystal is equipped in the middle part of hot felt 4, each humidity province is equipped with for measuring area's temperature
Temperature sensor；
The heating component for heating the humidity province, each humidity province pair are equipped on the inside of the inner cylinder 8 of each humidity province
It is equipped with the cooling component for cooling down the humidity province between the shell 1 answered and inner cylinder 8, is equipped at least one in each humidity province
Heat conducting bar 7, heat conducting bar 7 pass through inner cylinder 8 and are fixedly connected with cooling component；
Temperature sensor signal connects controller, and controller controls the heating component and cooling for connecting each humidity province respectively
Component.By the way that multiple humidity provinces are arranged, controller can control heating group according to the temperature of temperature sensor humidity province detected
Part and/or cooling component work heat and/or cool corresponding humidity province, to automatically adjust the temperature in different temperatures area
Degree forms temperature gradient needed for being suitble to crystal growth, improves crystal quality.
In the present embodiment, heating component includes being located on the heater 10 of 8 inside of inner cylinder and being located on heater
Induction heating circle 9 between 10 and 8 inner wall of inner cylinder, controller control connection induction heating circle 9.By induction heating circle 9 into
Row induction heating, it is convenient and efficient, it can be heated to required temperature quickly, it is easily controllable.
In the present embodiment, cooling component includes cooling pipe 5, and 5 bottom of cooling pipe is equipped with inlet, cooling pipe
5 upper ends are equipped with liquid outlet, and cooling pipe 5 is equipped with heat sink 6, and heat conducting bar 7 is fixedly connected with heat sink.Heat conducting bar 7 by pair
Heat is distributed on cooling pipe 5 by the heat derives for the humidity province answered by heat sink 6, and the coolant liquid of flowing takes away heat.
It in the present embodiment, further include recirculation assembly, recirculation assembly includes cold water storage cistern, circulating pump and condenser, cold water
Case, circulating pump and inlet pass sequentially through pipeline and connect, and liquid outlet, condenser and cold water storage cistern pass sequentially through pipeline and connect, circulation
Pipeline between pump and inlet is equipped with liquid feed valve, and the pipeline between liquid valve and inlet is equipped with flow control valve, out
Pipeline between liquid mouth and condenser is equipped with liquid valve, and controller control respectively connects circulating pump, liquid feed valve, liquid valve, cold
Condenser and flow control valve.A circulating cooling system is formd by cold water storage cistern, circulating pump, cold water pipes, condenser, it can be with
Corresponding humidity province is cooled down, the waste of water is effectively prevented, saves water resource, and controller control connection flow
Regulating valve, to adjust the flow velocity of cooling liquid, to adjust cooling velocity and cooling degree.
It further carries out in mode, liquid feed valve, liquid valve and flow control valve are solenoid valve, and controller controls respectively
Liquid feed valve, liquid valve and flow control valve.Solenoid valve is convenient for controlling the disengaging speed of coolant liquid by controller, consequently facilitating control
Refrigeration but degree in order to adjust the temperature in different temperatures area with change temperature gradient adapt to different crystal growth demand.
In the present embodiment, case inside is successively arranged the first insulating layer 2 and the second insulating layer 3, each cooling group
The liquid feeding end of the cold water pipes of part is arranged between the first insulating layer 2 and the second insulating layer 3, convenient for making the cooling positioned at liquid feeding end
Liquid is maintained at lower temperature, quickly takes away heat convenient for subsequent.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (6)
1. a kind of automatic weighing crystal pull grower, which is characterized in that including bracket (11), elevating mechanism, rotating mechanism,
Weighing mechanism (17), growth furnace and controller；
Elevating mechanism includes guide post (12), pulley (13), rope (14), connecting rod (15) and winding component (16), weighing
Mechanism (17) is mounted on bracket (11), and pulley (13) is rotatably installed on Weighing mechanism (17), and rope (14) bypasses pulley
(13) it is fixedly connected with winding component (16), winding component (16) is mounted on bracket (11), rope (14) other end and company
Extension bar (15) is fixedly connected, and connecting rod (15) first end is slidably connected with guide post (12), and guide post (12) is arranged vertically；
Rotating mechanism includes motor (18) and seed rod (19), and motor (18) is mounted at the top of connecting rod (15) second end, motor
(18) output shaft is detachably fixed through connecting rod (15) and with seed rod (19) first end, and seed rod (19) second end is equipped with
Collet for clamping seed crystal；
Growth furnace includes furnace body, and furnace body has furnace chamber, crucible is equipped in furnace chamber, and Weighing mechanism signal connects controller, controller
Control connection winding component (16), furnace body and motor (18) respectively.
2. automatic weighing crystal pull grower according to claim 1, which is characterized in that furnace body include shell (1),
Inner cylinder (8) and at least one heat insulation felt (4), inner cylinder (8) are made of insulating heat insulating material, including heat insulation felt (4) setting
Multiple humidity provinces are divided into cylinder (8) and by inner cylinder (8), are equipped in the middle part of heat insulation felt (4) for accommodating seed rod and crystal
By through-hole, each humidity province is equipped with temperature sensor for measuring area's temperature；
The heating component for heating the humidity province, each humidity province pair are equipped on inner cylinder (8) inside of each humidity province
It is equipped with the cooling component for cooling down the humidity province between the inner cylinder (8) answered and shell (1), is equipped at least in each humidity province
One heat conducting bar (7), heat conducting bar (7) pass through inner cylinder (8) and are fixedly connected with cooling component；
Temperature sensor signal connects controller, and controller controls the heating component for connecting each humidity province and cooling group respectively
Part.
3. automatic weighing crystal pull grower according to claim 2, which is characterized in that heating component includes that ring is set
Heater (10) on the inside of inner cylinder (8) and the induction heating circle being located between heater (10) and inner cylinder (8) inner wall
(9), controller control connection induction heating circle (9).
4. automatic weighing crystal pull grower according to claim 2, which is characterized in that cooling component includes cooling
Pipeline (5), cooling pipe (5) bottom are equipped with inlet, and cooling pipe (5) upper end is equipped with liquid outlet, and cooling pipe (5) is equipped with
Heat sink (6), heat conducting bar (7) are fixedly connected with heat sink (6).
5. automatic weighing crystal pull grower according to claim 3, which is characterized in that it further include recirculation assembly,
Recirculation assembly includes cold water storage cistern, circulating pump and condenser, and cold water storage cistern, circulating pump and inlet pass sequentially through pipeline and connect, out liquid
Mouth, condenser pass sequentially through pipeline with cold water storage cistern and connect, and the pipeline between circulating pump and inlet is equipped with liquid feed valve, liquid valve
Pipeline between inlet is equipped with flow control valve, and the pipeline between liquid outlet and condenser is equipped with liquid valve, control
Device controls connection circulating pump, liquid feed valve, liquid valve, condenser and flow control valve respectively.
6. crystal growing furnace according to claim 3, which is characterized in that case inside is successively arranged the first insulating layer (2)
It is arranged with the liquid feeding end of the second insulating layer (3), the cold water pipes (5) of each cooling component in the first insulating layer (2) and second
Between insulating layer (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910712416.9A CN110512277A (en) | 2019-08-02 | 2019-08-02 | A kind of automatic weighing crystal pull grower |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910712416.9A CN110512277A (en) | 2019-08-02 | 2019-08-02 | A kind of automatic weighing crystal pull grower |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110512277A true CN110512277A (en) | 2019-11-29 |
Family
ID=68624841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910712416.9A Pending CN110512277A (en) | 2019-08-02 | 2019-08-02 | A kind of automatic weighing crystal pull grower |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110512277A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201217711Y (en) * | 2008-07-22 | 2009-04-08 | 北京京运通硅材料设备有限公司 | Real time weighing apparatus for growing crystal of silicon monocrystal stove |
| CN201817575U (en) * | 2010-09-13 | 2011-05-04 | 江苏创大光伏科技有限公司 | Seed crystal lifting and rotating mechanism of single crystal furnace |
| CN202705563U (en) * | 2012-07-16 | 2013-01-30 | 登封市蓝天石化光伏电力装备有限公司 | Kyropoulos method sapphire crystal growth furnace and lifting mechanism thereof |
| CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
| CN104651934A (en) * | 2014-10-17 | 2015-05-27 | 洛阳市西格马炉业有限公司 | Energy-saving sapphire crystal growth furnace |
| CN106757315A (en) * | 2017-04-07 | 2017-05-31 | 天通吉成机器技术有限公司 | A kind of weighing device of single crystal growing furnace |
| CN207047364U (en) * | 2017-07-12 | 2018-02-27 | 福州克雷斯试验设备有限公司 | A kind of crystal growth grate |
| CN210683992U (en) * | 2019-08-02 | 2020-06-05 | 合肥嘉东光学股份有限公司 | Automatic crystal pulling and growing device weighs |
-
2019
- 2019-08-02 CN CN201910712416.9A patent/CN110512277A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201217711Y (en) * | 2008-07-22 | 2009-04-08 | 北京京运通硅材料设备有限公司 | Real time weighing apparatus for growing crystal of silicon monocrystal stove |
| CN201817575U (en) * | 2010-09-13 | 2011-05-04 | 江苏创大光伏科技有限公司 | Seed crystal lifting and rotating mechanism of single crystal furnace |
| CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
| CN202705563U (en) * | 2012-07-16 | 2013-01-30 | 登封市蓝天石化光伏电力装备有限公司 | Kyropoulos method sapphire crystal growth furnace and lifting mechanism thereof |
| CN104651934A (en) * | 2014-10-17 | 2015-05-27 | 洛阳市西格马炉业有限公司 | Energy-saving sapphire crystal growth furnace |
| CN106757315A (en) * | 2017-04-07 | 2017-05-31 | 天通吉成机器技术有限公司 | A kind of weighing device of single crystal growing furnace |
| CN207047364U (en) * | 2017-07-12 | 2018-02-27 | 福州克雷斯试验设备有限公司 | A kind of crystal growth grate |
| CN210683992U (en) * | 2019-08-02 | 2020-06-05 | 合肥嘉东光学股份有限公司 | Automatic crystal pulling and growing device weighs |
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