CN104073873A - Reflector cooling water temperature control device - Google Patents
Reflector cooling water temperature control device Download PDFInfo
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- CN104073873A CN104073873A CN201410249260.2A CN201410249260A CN104073873A CN 104073873 A CN104073873 A CN 104073873A CN 201410249260 A CN201410249260 A CN 201410249260A CN 104073873 A CN104073873 A CN 104073873A
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- water
- reverberator
- cooling water
- temperature
- reflector
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Abstract
The invention provides a reflector cooling water temperature control device, comprising a water outlet tank, a thermal resistor, a temperature controller, a valve and a water inlet tank, wherein the water outlet tank is connected with a cooling water pipe of a reflector through a water outlet pipeline, the thermal resistor is positioned in the water outlet pipeline, the water inlet tank is connected with the cooling water pipe of the reflector through a water inlet pipeline, the valve is positioned in the water inlet pipeline, and the temperature controller is connected with the thermal resistor through a signal wire. The reflector cooling water temperature control device solves the problems of instable furnace temperature gradient and single crystal growth failure caused by water temperature fluctuation when the cooling water inlet valve of the reflector is manually adjusted; the functions of feeding back the temperature of cooling water and automatically adjusting the water inlet flow are increased, so that the crystal yield and the qualification rate are effectively increased, and the cost is reduced. The reflector cooling water temperature control device is simple in design structure, safe, reliable, convenient in operation, energy-saving and environment-friendly.
Description
Technical field
The invention relates to a kind of control device that zone melting furnace reverberator coolant water temperature regulates that is applied to.
Background technology
In the process of growth of zone melting single-crystal, reverberator coolant water temperature is to affect into one of brilliant key element.Coolant water temperature affects single crystal growth process by changing thermograde, and the fluctuation of water temperature can make thermograde unstable, is easy to cause the failure of crystal growth.In the process of growth of monocrystalline, the thermal radiation of the output rating of producer and the monocrystalline having drawn out all can cause reverberator coolant water temperature to rise, but the growth due to different diameter monocrystalline, the output rating of radio-frequency coil is different, cause the heat distribution in stove different, in order to maintain stable thermograde, need different coolant water temperatures, require simultaneously water temperature can stable maintenance within the scope of certain.
On existing device structure, there is no the control device of automatic water temperature regulation, during fluctuating temperature, completely according to operator's manual regulation water valve, change the flooding velocity of reverberator, thereby regulate coolant water temperature.This kind of method had relatively high expectations to operator's, and the position of different operating personnel water adjusting valve is different, causes coolant water temperature different, and due to feedback not in time, water temperature control lag, causes fluctuating temperature and causes single crystal growing failure.
Summary of the invention
The object of the invention is to provide a kind of control device of the water coolant of accommodation reflex device automatically water temperature, guarantee coolant water temperature can stable maintenance within the limits prescribed, make to maintain stable thermograde in stove, be convenient to monocrystalline normal growth.
For solving the problems of the technologies described above, the technical scheme that the invention adopts is: reverberator coolant water temperature is controlled device, comprise water tank, hot resistance, temperature controller, valve and water tank inlet, describedly go out water tank and be connected with the water-cooled tube of reverberator by outlet conduit, described hot resistance is positioned at described outlet conduit, described water tank inlet is connected with the water-cooled tube of reverberator by inlet channel, described valve is positioned at described inlet channel, and described temperature controller is connected with hot resistance by signal wire.
Further, described valve is proportional valve.
Further, described temperature controller is PID temperature controller.
Further, also comprise producer coil and monocrystalline, described monocrystalline starts downward stretching from described producer coil, and described reverberator is looped around described monocrystalline periphery.
Advantage and positively effect that the invention has are: reverberator coolant water temperature is controlled device, overcome and produced fluctuating temperature because of manual regulation reverberator water coolant water intaking valve, cause the interior thermograde of stove unstable, cause the difficulty of single crystal growing failure, water coolant water temperature feedback and the automatic function that regulates flooding velocity have been increased, thereby effectively improved crystal forming rate and qualification rate, reduced cost.The design is simple in structure, safe and reliable, convenient operation, energy-conserving and environment-protective.
Accompanying drawing explanation
Fig. 1 is the invention connection diagram;
Fig. 2 is reflector locations schematic diagram.
In figure:
1, go out water tank 2, hot resistance 3, temperature controller
4, valve 5, water tank inlet 6, reverberator
7, producer coil 8, monocrystalline
Embodiment
As shown in Figure 1 and Figure 2, reverberator coolant water temperature is controlled device, comprise water tank 1, hot resistance 2, temperature controller 3, valve 4 and water tank inlet 5, describedly go out water tank 1 and be connected with the water-cooled tube of reverberator 6 by outlet conduit, described hot resistance 2 is positioned at described outlet conduit, described water tank inlet 5 is connected with the water-cooled tube of reverberator 6 by inlet channel, and described valve 4 is positioned at described inlet channel, and described temperature controller 3 is connected with hot resistance 2 by signal wire.
Described valve 4 is proportional valve.
Described temperature controller 3 is PID temperature controller.
Also comprise producer coil 7 and monocrystalline 8, described monocrystalline 8 starts to stretch downwards from described producer coil 7, and described reverberator 6 is looped around described monocrystalline 8 peripheries.
In the process of growth of monocrystalline 8, the thermal radiation of the output rating of producer coil 7 and the monocrystalline having drawn out 8 all can cause reverberator 6 coolant water temperatures to rise, but the growth due to different diameter monocrystalline 8, the output rating of radio-frequency coil is different, cause the heat distribution in stove different, in order to maintain stable thermograde, need different coolant water temperatures, require simultaneously water temperature can stable maintenance within the scope of certain.Example, on existing device structure, does not have the control device of automatic water temperature regulation, during fluctuating temperature, completely according to operator's manual regulation water valve, changes the flooding velocity of reverberator 6, thereby regulates coolant water temperature.This kind of method had relatively high expectations to operator's, and the position of different operating personnel water adjusting valve is different, causes coolant water temperature different, and due to feedback not in time, water temperature control lag, causes fluctuating temperature and causes monocrystalline 8 to grow unsuccessfully.
And the invention provides the control device of a kind of accommodation reflex device automatically 6 water coolant water temperatures, guarantee coolant water temperature can stable maintenance within the limits prescribed, make to maintain stable stable gradient in stove, be convenient to monocrystalline 8 normal growths.The invention is used hot resistance 2 as temperature signal collection unit, measure reverberator 6 water coolant leaving water temperature(LWT)s, gather out the water temperature in water tank 1 outlet conduit, and the temperature value of measurement is fed back to temperature controller 3, temperature controller 3 carries out PID calculating according to the difference between setup parameter and feedback parameter, then calculation result is transformed into control signal, and by temperature controller 3, control signal is outputed to discharge control ratio valve, regulate the water-in flow of water tank inlet 5, thereby reach the object of controlling reverberator 6 coolant water temperatures.As manufacturing technique requirent is: cooling water flow span of control: 10mL-100L, water coolant water temperature span of control: 10 ℃-90 ℃, temperature controller 3 carries out PID calculating according to the difference between setup parameter and feedback parameter, then calculation result is transformed into 4-20mA control signal.
Above the embodiment of the invention is had been described in detail, but described content is only the preferred embodiment of the invention, can not be considered to for limiting practical range of the present invention.All equalization variations of doing according to the invention scope and improvement etc., within all should still belonging to this patent covering scope.
Claims (4)
1. reverberator coolant water temperature is controlled device, it is characterized in that: comprise water tank (1), hot resistance (2), temperature controller (3), valve (4) and water tank inlet (5), describedly go out water tank (1) and be connected with the water-cooled tube of reverberator (6) by outlet conduit, described hot resistance (2) is positioned at described outlet conduit, described water tank inlet (5) is connected with the water-cooled tube of reverberator (6) by inlet channel, described valve (4) is positioned at described inlet channel, and described temperature controller (3) is connected with hot resistance (2) by signal wire.
2. reverberator coolant water temperature according to claim 1 is controlled device, it is characterized in that: described valve (4) is proportional valve.
3. reverberator coolant water temperature according to claim 1 is controlled device, it is characterized in that: described temperature controller (3) is PID temperature controller.
4. reverberator coolant water temperature according to claim 1 is controlled device, it is characterized in that: also comprise producer coil (7) and monocrystalline (8), described monocrystalline (8) starts to stretch downwards from described producer coil (7), and described reverberator (6) is looped around described monocrystalline (8) periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410249260.2A CN104073873A (en) | 2014-06-06 | 2014-06-06 | Reflector cooling water temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410249260.2A CN104073873A (en) | 2014-06-06 | 2014-06-06 | Reflector cooling water temperature control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104073873A true CN104073873A (en) | 2014-10-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410249260.2A Pending CN104073873A (en) | 2014-06-06 | 2014-06-06 | Reflector cooling water temperature control device |
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| CN (1) | CN104073873A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112176397A (en) * | 2020-10-22 | 2021-01-05 | 云南鑫耀半导体材料有限公司 | Circulating water temperature control device for growing single crystal by VGF method and application |
-
2014
- 2014-06-06 CN CN201410249260.2A patent/CN104073873A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112176397A (en) * | 2020-10-22 | 2021-01-05 | 云南鑫耀半导体材料有限公司 | Circulating water temperature control device for growing single crystal by VGF method and application |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141001 |
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| WD01 | Invention patent application deemed withdrawn after publication |