CN214507402U - Gallium nitride thermal field with temperature gradient and double temperature equalizing regions - Google Patents
Gallium nitride thermal field with temperature gradient and double temperature equalizing regions Download PDFInfo
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- CN214507402U CN214507402U CN202120752942.0U CN202120752942U CN214507402U CN 214507402 U CN214507402 U CN 214507402U CN 202120752942 U CN202120752942 U CN 202120752942U CN 214507402 U CN214507402 U CN 214507402U
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Abstract
The utility model relates to a thermal field specifically is a two samming district gallium nitride thermal field with temperature gradient, including furnace body shell, last samming district, lower samming district, its technical essential is: the upper uniform temperature zone comprises a plurality of upper heating modules embedded in the inner wall of the furnace body shell, a plurality of upper thermocouples arranged between two adjacent upper heating modules and between the upper heating modules and the furnace body shell, the lower uniform temperature zone comprises a plurality of lower heating modules embedded in the inner wall of the furnace body shell, a plurality of lower thermocouples arranged between two adjacent lower heating modules and between the lower heating modules and the furnace body shell, the upper heating modules and the lower heating modules are connected with an external heating power supply with adjustable power, a heat dissipation zone is further arranged between the upper uniform temperature zone and the lower uniform temperature zone, and the heat dissipation zone comprises an annular cooling water channel which is oppositely provided with a cooling water inlet channel and a cooling water outlet channel and is arranged inside the furnace body shell. The structure is simple, and the problem of product quality reduction is solved.
Description
Technical Field
The utility model relates to a thermal field specifically is a two samming district gallium nitride thermal field with temperature gradient.
Background
Aiming at the growth of gallium nitride crystals, because the temperature of the upper part of a thermal field is required to be lower than that of the lower part of the thermal field due to the requirement of special process conditions, a gallium nitride thermal field with double uniform temperature areas is generated at present, an upper heating module and a lower heating module are used for heating, the temperature difference between the upper part and the lower part of the thermal field is realized, but the thermal field also has some problems:
1. the heating modules of the two temperature equalizing areas are all a whole, when the resistance wires in the heating modules are partially damaged, all the resistance wires need to be replaced, and the maintenance cost is high; and the temperature of the two temperature equalizing regions can not be accurately adjusted, the growth temperature required by the gallium nitride crystal can not be met, and the product quality is influenced.
2. After the lower part of the thermal field is heated, hot gas can move upwards, so that the temperature of the upper part is increased, the temperature is different from the temperature required by the growth of gallium nitride crystals, the monitoring and the adjustment cannot be carried out, partial material steam is crystallized, and the quality of a final product after deposition is influenced.
Disclosure of Invention
An object of the utility model is to provide a two samming district gallium nitride thermal fields with temperature gradient, its simple structure, cost of maintenance is low, has solved the problem that the product quality descends because upper portion high temperature, unable accurate temperature regulation arouse.
The technical scheme of the utility model is that:
two samming district gallium nitride thermal fields with temperature gradient, including the furnace body shell, arrange in the last samming district on the inside upper portion of furnace body shell, arrange in the lower samming district of the inside lower part of furnace body shell, its technical essential is: the upper uniform temperature zone comprises a plurality of upper heating modules embedded in the inner wall of a furnace body shell, upper thermocouples are uniformly arranged between every two adjacent upper heating modules, between the upper surface of the upper heating module at the uppermost end and the furnace body shell and between the lower surface of the upper heating module at the lowermost end and the furnace body shell, the lower uniform temperature zone comprises a plurality of lower heating modules embedded in the inner wall of the furnace body shell, lower thermocouples are uniformly arranged between every two adjacent lower heating modules, between the upper surface of the lower heating module at the uppermost end and the furnace body shell and between the lower surface of the lower heating module at the lowermost end and the furnace body shell, the upper heating modules and the lower heating modules are connected with an external heating power supply capable of adjusting power, a heat dissipation zone is further arranged between the upper uniform temperature zone and the lower uniform temperature zone and comprises an annular cooling water channel arranged in the furnace body shell, and a cooling water inlet channel is oppositely arranged on the annular cooling water channel, A cooling water outlet passage.
The gallium nitride thermal field with the double uniform temperature zones and the temperature gradient is characterized in that the upper heating modules and the lower heating modules are three resistance wire heating modules, the three upper heating modules are an upper heating module A, an upper heating module B and an upper heating module C from top to bottom, and the three lower heating modules are a lower heating module A, a lower heating module B and a lower heating module C from top to bottom.
In the gallium nitride thermal field with the double uniform temperature zones and the temperature gradient, the number of the upper thermocouples is four, and the four upper thermocouples are an upper thermocouple D, an upper thermocouple E, an upper thermocouple F and an upper thermocouple G from top to bottom in sequence.
In the gallium nitride thermal field with the double uniform temperature zones and the temperature gradient, the number of the lower thermocouples is four, and the four lower thermocouples are a lower thermocouple D, a lower thermocouple E, a lower thermocouple F and a lower thermocouple G from top to bottom in sequence.
In the gallium nitride thermal field with the double uniform temperature zones and the temperature gradient, the temperature measuring ends of the upper thermocouple and the lower thermocouple respectively extend into the upper heating module and the lower heating module.
The utility model has the advantages that:
1. the upper uniform temperature zone consists of three upper heating modules, the lower uniform temperature zone consists of three lower heating modules, and the three upper heating modules and the three lower heating modules can independently adjust the heating temperature without mutual interference, so that a double uniform temperature zone thermal field with a temperature gradient can be formed; when the heating module breaks down, only the resistance wire of the heating module where the damaged part is located is detached, so that the maintenance cost is saved.
2. Four thermocouples are uniformly arranged in the upper uniform temperature zone and the lower uniform temperature zone, so that the temperature conditions of different heating modules can be monitored in real time, and the temperature of each heating module is adjusted according to the temperature conditions, so that the temperature of the upper uniform temperature zone and the temperature of the lower uniform temperature zone meet the growth conditions of gallium nitride crystals.
3. The newly added heat dissipation area realizes the cooling of the upward flowing hot gas in the lower uniform temperature area through the cooling water circulating in the annular cooling water channel, and reduces the influence of the high temperature of the lower uniform temperature area on the temperature of the upper uniform temperature area; the purpose of adjusting heat dissipation can be achieved by adjusting the flow rate, flow speed and water temperature of cooling water in the annular cooling water channel.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the figure: 1. the furnace comprises a furnace body shell, 2. an upper uniform temperature zone, 3. an annular cooling water channel, 4. a cooling water outlet channel, 5. a heat dissipation zone, 6. a lower uniform temperature zone, 7. an upper thermocouple D, 8. an upper heating module A, 9. an upper thermocouple E, 10. an upper heating module B, 11. an upper thermocouple F, 12. an upper heating module C, 13. an upper thermocouple G, 14. a cooling water inlet channel, 15. a lower thermocouple D, 16. a lower heating module A, 17. a lower thermocouple E, 18. a lower heating module B, 19. a lower thermocouple F, 20. a lower heating module C, 21. a lower thermocouple G.
Detailed Description
The technical solution of the present invention is further explained by the following specific embodiments with reference to the accompanying drawings.
As shown in FIG. 1, the gallium nitride thermal field with double temperature equalizing zones and temperature gradient comprises a furnace body shell 1, an upper temperature equalizing zone 2 arranged at the upper part inside the furnace body shell 1, and a lower temperature equalizing zone 6 arranged at the lower part inside the furnace body shell 1.
Wherein, the upper temperature equalizing zone 2 comprises a plurality of upper heating modules embedded in the inner wall of the furnace body shell 1, upper thermocouples are uniformly arranged between two adjacent upper heating modules, between the upper surface of the upper heating module at the uppermost end and the furnace body shell 1, and between the lower surface of the upper heating module at the lowermost end and the furnace body shell 1, the lower temperature equalizing zone 6 comprises a plurality of lower heating modules embedded in the inner wall of the furnace body shell 1, lower thermocouples are uniformly arranged between two adjacent lower heating modules, between the upper surface of the lower heating module at the uppermost end and the furnace body shell 1, and between the lower surface of the lower heating module at the lowermost end and the furnace body shell 1, a plurality of upper heating modules and a plurality of lower heating modules are connected with an external heating power supply capable of adjusting power, a heat dissipation zone 5 is also arranged between the upper temperature equalizing zone 2 and the lower temperature equalizing zone 6, the heat dissipation zone 5 comprises an annular cooling water channel 3 arranged in the furnace body shell 1, the annular cooling water channel 3 is oppositely provided with a cooling water inlet channel 14 and a cooling water outlet channel 4.
In this embodiment, the upper heating modules and the lower heating modules are all three resistance wire heating modules, the three upper heating modules are an upper heating module A8, an upper heating module B10 and an upper heating module C12 from top to bottom, and the three lower heating modules are a lower heating module a16, a lower heating module B18 and a lower heating module C20 from top to bottom.
The number of the upper thermocouples is four, and the four upper thermocouples are an upper thermocouple D7, an upper thermocouple E9, an upper thermocouple F11 and an upper thermocouple G13 from top to bottom in sequence. The number of the lower thermocouples is four, and the four lower thermocouples are a lower thermocouple D15, a lower thermocouple E17, a lower thermocouple F19 and a lower thermocouple G21 from top to bottom in sequence. The temperature measuring ends of the upper thermocouple and the lower thermocouple respectively extend into the corresponding upper heating module and the lower heating module.
The working principle is as follows:
firstly, an external heating power supply of a lower heating module B18 is started and power is adjusted, after a lower thermocouple E17 and a lower thermocouple F19 feed back to determine that a lower uniform temperature zone 6 is generated and the required temperature is reached, external heating power supplies of a lower heating module A16 and a lower heating module C20 are started, and the lower uniform temperature zone 6 with a temperature gradient is formed on the basis of the generated lower uniform temperature zone 6 according to the feedback adjustment power of a lower thermocouple D15 and a lower thermocouple G21; then, the heat dissipation capacity is adjusted by adjusting the flow rate, flow speed and water temperature of cooling water passing through the annular cooling water channel 3 of the heat dissipation area 5, so that the fed-back temperature of the upper thermocouple G13 is not higher than the preset temperature under the condition that the upper heating module C12 does not output heating; and finally, starting a heating power supply of the upper heating module B10 and adjusting power, after the upper thermocouple E9 and the upper thermocouple F11 feed back to determine that the upper uniform temperature zone 2 is generated and reaches the required temperature, starting external heating power supplies of the upper heating module A8 and the upper heating module C12, forming the upper uniform temperature zone 2 with a temperature gradient on the basis of the generated upper uniform temperature zone 2 according to the feedback adjustment power of the upper thermocouple D7 and the upper thermocouple G13, and finally enabling the lower uniform temperature zone 6 and the upper uniform temperature zone 2 to reach the growth temperature condition of gallium nitride crystals.
Claims (5)
1. The gallium nitride thermal field with double temperature equalizing areas and temperature gradients comprises a furnace body shell, an upper temperature equalizing area arranged on the upper part inside the furnace body shell, and a lower temperature equalizing area arranged on the lower part inside the furnace body shell, and is characterized in that: the upper uniform temperature zone comprises a plurality of upper heating modules embedded in the inner wall of a furnace body shell, upper thermocouples are uniformly arranged between every two adjacent upper heating modules, between the upper surface of the upper heating module at the uppermost end and the furnace body shell and between the lower surface of the upper heating module at the lowermost end and the furnace body shell, the lower uniform temperature zone comprises a plurality of lower heating modules embedded in the inner wall of the furnace body shell, lower thermocouples are uniformly arranged between every two adjacent lower heating modules, between the upper surface of the lower heating module at the uppermost end and the furnace body shell and between the lower surface of the lower heating module at the lowermost end and the furnace body shell, the upper heating modules and the lower heating modules are connected with an external heating power supply capable of adjusting power, a heat dissipation zone is further arranged between the upper uniform temperature zone and the lower uniform temperature zone and comprises an annular cooling water channel arranged in the furnace body shell, and a cooling water inlet channel is oppositely arranged on the annular cooling water channel, A cooling water outlet passage.
2. The dual uniform temperature zone gallium nitride thermal field with temperature gradient of claim 1, characterized in that: the heating device comprises an upper heating module, a lower heating module, a heating wire, a lower heating wire, a lower heating module.
3. The dual uniform temperature zone gallium nitride thermal field with temperature gradient of claim 1, characterized in that: the number of the upper thermocouples is four, and the four upper thermocouples are an upper thermocouple D, an upper thermocouple E, an upper thermocouple F and an upper thermocouple G from top to bottom in sequence.
4. The dual uniform temperature zone gallium nitride thermal field with temperature gradient of claim 1, characterized in that: the number of the lower thermocouples is four, and the four lower thermocouples are a lower thermocouple D, a lower thermocouple E, a lower thermocouple F and a lower thermocouple G from top to bottom in sequence.
5. The dual uniform temperature zone gallium nitride thermal field with temperature gradient of claim 1, characterized in that: the temperature measuring ends of the upper thermocouple and the lower thermocouple respectively extend into the corresponding upper heating module and the lower heating module.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202120752942.0U CN214507402U (en) | 2021-04-14 | 2021-04-14 | Gallium nitride thermal field with temperature gradient and double temperature equalizing regions |
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| CN202120752942.0U CN214507402U (en) | 2021-04-14 | 2021-04-14 | Gallium nitride thermal field with temperature gradient and double temperature equalizing regions |
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| CN214507402U true CN214507402U (en) | 2021-10-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117232259A (en) * | 2023-11-15 | 2023-12-15 | 国镓芯科(成都)半导体科技有限公司 | Sectional type samming heating furnace |
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2021
- 2021-04-14 CN CN202120752942.0U patent/CN214507402U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117232259A (en) * | 2023-11-15 | 2023-12-15 | 国镓芯科(成都)半导体科技有限公司 | Sectional type samming heating furnace |
| CN117232259B (en) * | 2023-11-15 | 2024-01-26 | 国镓芯科(成都)半导体科技有限公司 | Sectional type samming heating furnace |
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