CN110487726A - Fixed-point type laser damage threshold evaluation system - Google Patents
Fixed-point type laser damage threshold evaluation system Download PDFInfo
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- CN110487726A CN110487726A CN201910874468.6A CN201910874468A CN110487726A CN 110487726 A CN110487726 A CN 110487726A CN 201910874468 A CN201910874468 A CN 201910874468A CN 110487726 A CN110487726 A CN 110487726A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
Abstract
The present invention relates to a kind of fixed-point type laser damage threshold evaluation system, laser beam emitting device sets gradually Nd:YAG laser, spatial filter, beam expander and axicon lens；Beam collimation looped system is equipped with X, the rotatable feedback mirrors of Y-direction, attenuator, wave plate, spectroscope I, spectroscope II, energy meter, condenser lens I, hot spot screen, CCD camera I, condenser lens II, X, Y-direction piezo controller；Spectroscope I following settings energy meter, spectroscope II following settings condenser lens I, hot spot screen and CCD camera I, energy meter connect computer with CCD camera I, and computer passes through X respectively, and Y-direction piezo controller connects X, the rotatable feedback mirrors of Y-direction；Adjustable clamp is placed in three-dimensional mobile platform by clamp supporting table, and three-dimensional mobile platform connects computer by three-dimensional motion controller；CCD camera II is used to observe the microstructure of workpiece test zone after simultaneously recording laser predose, and is fed back to computer.
Description
Technical field
The present invention relates to a kind of damage from laser test macro, especially a kind of fixed-point type laser damage threshold evaluation system.
Background technique
In high power/energy laser fusion facility, need using a large amount of optical element, under the irradiation of light laser,
Optical element surface it is easy to appear Laser Induced Damage, these impaired locis have become inhibit laser-produced fusion system output power and
The key factor of service life.Therefore, the power of optical element resisting laser damage ability is that measurement laser fusion facility performance is good
As soon as bad important indicator, this needs to develop an accurate, reliable laser damage threshold (Laser-induced damage
Threshold, LIDT) evaluation system.
When there are mechanical defects such as impression, scratch, micro-crack etc. or chemical imperfection such as metal particle, salt for element surface
When the pollutants such as deposited particles, element damage performance can be declined.In order to the damage threshold to these defects carry out evaluation and
Calibration, it is necessary to accurate fixed test be carried out to defect, the defect kind adversely affected to element damage performance is explored with this
Class and scale.In damage from laser test process, since laser is by the thermal deformation of itself, ambient vibration and air agitation etc.
Beam drift or bending, shake, the unstability of light beam can often occur in communication process for the influence of factor, the laser beam of outgoing
It will seriously affect the collimation of shoot laser, to influence the accuracy to test position.It is tested in existing damage from laser
During system carries out to test the specific defective locations of element surface, it usually will appear the serious inclined of damage from laser point
It moves, i.e., impaired loci is not present at test target (defect) position.
Existing frequently-used method is to iris out actual damage by hand on the screen after observing impaired loci on the computer screen
The appearance position of point, then workpiece mobile platform is adjusted by the defect movement to be measured of workpiece to position of drawing a circle, laser damage is carried out again
Wound test.Due to the uncontrollability and non-repeatability in laser offset direction and angle, it is sometimes desirable to attempt the multiple above process
Impaired loci can be beaten in specified defective locations, therefore, this method is time-consuming and laborious, and has many uncertain factors.In addition,
The judgement occurred in existing damage from laser test process to damage is based on tester to element test position before and after laser irradiation
The observation for the varying topography set, therefore, the subjective factor of tester are easy to influence judgement whether damage occurs, meanwhile,
Some impaired locis lesser, that naked eyes are not easy to identify are then easy to be ignored, to influence the accurate of damage performance test result
Property.In conclusion realizing element surface fault location laser damage threshold to sufficiently hold the overall performance of laser fusion facility
Accurate evaluation seem particularly significant.
Summary of the invention
The purpose of the present invention is to provide a kind of fixed-point type laser damage threshold evaluation systems, effectively damage from laser are inhibited to survey
The drift of light beam during examination, and can quickly determine impaired loci specific location and damage spot size, realize different shape, size
The fixed test of workpiece surface specific position laser damage threshold.
Technical solution of the present invention: a kind of fixed-point type laser damage threshold evaluation system is configured with laser beam emitting device, light
Beam collimates looped system, three coordinate motion control systems and damage discriminating gear, the laser beam emitting device and sets gradually
Nd:YAG laser, spatial filter, beam expander and axicon lens；The beam collimation looped system is equipped with X to rotatable anti-
Present mirror, the rotatable feedback mirrors of Y-direction, attenuator, wave plate, spectroscope I, spectroscope II, energy meter, condenser lens I, hot spot screen,
CCD camera I, condenser lens II, X are to piezo controller and Y-direction piezo controller；The spectroscope I following settings energy meter is used
To read laser energy value in real time, the spectroscope II following settings condenser lens I, hot spot screen and CCD camera I are focused
Lens I by laser beam focusing on hot spot screen and using CCD camera I detection hot spot physical location, the energy meter and
CCD camera I connection computer, computer pass through X respectively and connect X with Y-direction piezo controller to piezo controller to rotatable anti-
Mirror, the rotatable feedback mirrors of Y-direction are presented, X is controlled to adjust to the rotation angle of rotatable feedback mirrors, the rotatable feedback mirrors of Y-direction from computer
Degree；The three coordinate motions control system is equipped with adjustable clamp, clamp supporting table, spring, three-dimensional mobile platform, X-axis movement
Controller, Y-axis motion controller and Z axis motion controller, the adjustable clamp are placed in above clamp supporting table for clamping
Workpiece for measurement is simultaneously connected by spring with clamp supporting table, and clamp supporting table is fixed in three-dimensional mobile platform, the three-dimensional shifting
Moving platform connects computer by X-axis motion controller, Y-axis motion controller and Z axis motion controller, controls X by computer
Axle motion controller, Y-axis motion controller and Z axis motion controller driving three-dimensional mobile platform and adjustable clamp and work to be measured
Part is made three-dimensional mobile；The damage discriminating gear includes to have the microscopical CCD camera II of long-focus, and CCD camera II is for seeing
The microstructure of workpiece test zone after survey and recording laser predose, and it is fed back to computer, computer utilizes image
The pattern variation of processing software instant analysis damage from laser test front and back workpiece surface test zone, if pixel near test zone
Point is substantially change and when oversize tolerance then determines occur Laser Induced Damage at this, and according to the changing value of pixel
The size of impaired loci is defined, the accuracy and reliability that damage differentiates is guaranteed with this, and realize quantifying for damage spot size
Change evaluation.
Further, the Nd:YAG laser emitting laser forms More's item by spatial filter, beam expander and axicon lens
Line realizes the primary collimation of shoot laser, and using the specific location of laser facula on CCD camera I detection glossing up screen, really
Determine laser beam X to and Y-direction offset and be fed back to computer, X is controlled to piezo controller and Y-direction pressure by algorithm
Electric controller respectively drives X and rotates to rotatable feedback mirrors and the rotatable feedback mirrors of Y-direction to required angle, to adjust laser light
At spot to hot spot screen coordinate origin, the collimation adjustment of laser beam is realized.
Further, the adjustable clamp is divided into left and right two parts, and inside is spaced apart to be equipped with rubber fastening strip, to
It surveys workpiece and is placed in adjustable clamp the positioning and clamping for realizing workpiece for measurement by the contact with rubber fastening strip.
Further, the adjustable clamp is according to the size of workpiece for measurement, by left and right two parts by means of bottom
Spring realizes telescopic adjustment, the positioning and clamping of Lai Shixian workpiece for measurement along wedge-shaped guide groove.
Further, the adjustable clamp can round piece or opposite side distance of the clamping workpiece having a size of 20~φ of φ 100mm
The polygon workpeace of 20~100mm, thickness of workpiece range is 5~25mm, to realize the fixation of Multiple Shape, more dimension workpieces.
Further, the adjustable clamp and workpiece driven from three-dimensional mobile platform realize along X to, Y-direction and Z-direction into
It gives, wherein Y-direction and Z-direction move the specific location to change workpiece surface region to be measured, and X is to movement to ensure that workpiece is to be measured
Region is always positioned at the focal position of condenser lens II, and laser irradiation is relied in workpiece rear surface during guaranteeing laser testing
Plane, lozenges and the damage from laser fixed test of curve surface work pieces surface any position are realized in the driving of three-dimensional mobile platform.
Further, the microscope multiplying power adjustable extent of the CCD camera II is × 0.7 to × 4.5, field range 0.5-
3mm。
The beneficial effects of the present invention are:
The present invention proposes a kind of fixed-point type laser damage threshold evaluation system, can be avoided because laser beam drifts about or shakes
Caused damage measure positional shift, and judgement to damage from laser point and identification are also accurate reliable.The principle of device is reliable,
Structurally consummate, it is convenient to operate, and can accurately realize the Fixed Point Laser damage measure of optical element surface target position, realizes laser
The quantitative and accurate evaluation of impaired loci, the system are suitable for the laser damage threshold evaluation of more sizes, Multiple Shape workpiece, have compared with
Strong engineering application value.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the structural schematic diagram that adjustable clamp of the invention clamps positioning workpiece；
Working principle when Fig. 3 is test piece surface different location of the present invention；
Fig. 4 is that the present invention carries out damage from laser test front and back workpiece part pattern comparison diagram；
The code name of each main component in Fig. 1-4 is given below:
1-Nd:YAG laser, 2-spatial filters, 3-beam expanders, 4-axicon lens, 5-X to rotatable feedback mirrors,
The rotatable feedback mirrors of 6-Y-directions, 7-attenuators, 8-wave plates, 9-spectroscope I, 10-spectroscope II, 11-energy meters, 12-
Condenser lens I, 13-hot spot screens, 14-CCD camera I, 15-condenser lens II, 16-X are to piezo controller, 17-Y-directions
Piezo controller, 18-adjustable clamps, 18-1-rubber fastening strip, 19-clamp supporting tables, 19-1-wedge shape guide groove,
20-springs, 21-three-dimensional mobile platforms, 22-workpieces for measurement, 23-X-axis motion controllers, 24-Y-axis motion controllers,
25-Z axis motion controllers, 26-CCD camera II, 27-computers.
Specific embodiment
The invention will be further described with embodiment with reference to the accompanying drawing.
Embodiment: as shown in Figures 1 to 4, a kind of fixed-point type laser damage threshold evaluation system, mainly by Nd:YAG laser
Device 1, spatial filter 2, beam expander 3, axicon lens 4, X are to rotatable feedback mirrors 5, the rotatable feedback mirrors 6 of Y-direction, attenuator 7, wave plate
8, spectroscope I9, spectroscope II10, energy meter 11, condenser lens I12, hot spot screen 13, CCD camera I14, condenser lens
II15, X are to piezo controller 16, Y-direction piezo controller 17, adjustable clamp 18, rubber fastening strip 18-1, clamp supporting table
19, wedge-shaped guide groove 19-1, spring 20, three-dimensional mobile platform 21, workpiece for measurement 22, X-axis motion controller 23, Y-axis movement control
The composition such as device 24, Z axis motion controller 25, CCD camera II26 and computer 27 processed.
Nd:YAG laser 1, spatial filter 2, beam expander 3 and axicon lens 4 set gradually composition laser beam emitting device；X to
Rotatable feedback mirrors 5, Y-direction rotatable feedback mirrors 6, wave plate 8, spectroscope I9, spectroscope II10, energy meter 11, gather attenuator 7
Focus lens I12, hot spot screen 13, CCD camera I14, condenser lens II15, which are set gradually, constitutes beam collimation looped system；
Spectroscope I9 following settings energy meter 11, to read laser energy value, spectroscope II10 following settings condenser lens in real time
I12, hot spot screen 13 and CCD camera I14, condenser lens I12 by laser beam focusing on hot spot screen 13 and utilize CCD phase
Machine I14 detects the physical location of hot spot, and energy meter 11 connect computer 27 with CCD camera I14, computer 27 pass through respectively X to
Piezo controller 16 and Y-direction piezo controller 17 connect X to rotatable feedback mirrors 5, the rotatable feedback mirrors 6 of Y-direction, by computer 27
Control to adjust rotation angle of the X to rotatable feedback mirrors 5, the rotatable feedback mirrors 6 of Y-direction；Adjustable clamp 18, clamp supporting table
19, spring 20, three-dimensional mobile platform 21, X-axis motion controller 23, Y-axis motion controller 24 and Z axis motion controller 25 form
Three coordinate motion control systems, adjustable clamp 18 are placed in above clamp supporting table 19 for clamping workpiece for measurement 22 and passing through bullet
Spring 20 is connected with clamp supporting table 19, and clamp supporting table 19 is placed in three-dimensional mobile platform 21, and three-dimensional mobile platform 21 passes through X-axis
Motion controller 23, Y-axis motion controller 24 and Z axis motion controller 25 connect computer 27, control X-axis fortune by computer 27
Movement controller 23, Y-axis motion controller 24 and Z axis motion controller 25 drive three-dimensional mobile platform 21 and 18 and of adjustable clamp
Workpiece for measurement 22 makees three-dimensional movement；Discriminating gear is damaged with the microscopical CCD camera II26 of long-focus and the composition of computer 27,
CCD camera II26 is used to observe the microstructure of workpiece test zone after simultaneously recording laser predose, and is fed back to calculating
Machine, computer 27 are become using the pattern that image processing software instant analysis damage from laser tests front and back workpiece surface test zone
Change, if test zone nearby pixel substantially change and when oversize tolerance if determine occur induced with laser damage at this
Hurt, and define the size of impaired loci according to the changing value of pixel, the accuracy and reliability that damage differentiates is guaranteed with this,
And realize the quantitative evaluation of damage spot size.
This system is applicable to two kinds of damage threshold evaluation methods of R:1 and 1:1, since workpiece rear surface is compared to front surface
Laser Induced Damage more easily occurs, this system mainly illustrates that its is worked by taking workpiece rear surface Fixed Point Laser damage measure as an example
Journey.By being stepped up laser energy density (unit J/cm during R:1 damage measure2, energy gradient regard surface to be measured and
It is fixed) irradiation workpiece rear surface tested point, until damage occurs, laser energy density when damage is occurred is defined as the test point
R:1 laser damage threshold.In 1:1 test mode, dozens of tested point is chosen in workpiece rear surface, and each tested point is equal
It is irradiated using different laser energies, incident laser energy is sorted from low to high and is divided into several energy sections,
(there is the number of test points of damage from laser and radiation exposed test in damage from laser probability by counting workpiece in each energy section
Point the ratio between sum) it obtains damage probability curve and is damaged further according to the regulation of zero probability damage method in ISO11254 by linear fit
Hurt probability curve and obtain corresponding laser energy density when damage probability is 0, is defined as the 1:1 damage threshold of workpiece.
The system work process is as shown in Figure 1, be fixed on the adjustable of 19 top of clamp supporting table for workpiece for measurement 22 first
It saves in fixture 18, adjustable clamp 18 can carry out flexible modulation to the two-part spacing in left and right according to the size of workpiece 22 with reality
The clamping and positioning of existing workpiece 22.Controlling three-dimensional mobile platform 21 by computer 27 realizes workpiece 22 along X-axis, Y-axis and Z axis
Three-dimensional is mobile, to ensure that laser beam can focus the defective locations to be measured specified in 22 rear surface of workpiece for measurement, for example, specific
Scratch, crackle, contaminant particle the defects of position etc., the specific adjustment process of 22 spatial position of workpiece is shown in Fig. 3 explanation.
Behind the position for adjusting workpiece 22, the collimation adjustment of laser beam is carried out to do standard for Fixed Point Laser damage measure
It is standby.The laser that wherein Nd:YAG laser 1 issues is the ultraviolet laser (351/355nm) of nanosecond pulse width, by laser 1, space
Filter 2, beam expanding lens 3 and axicon lens 4 form diffraction light-free, the shellfish for being formed by, not changed with propagation distance using diffraction light-free
The ear plug function ring of light realizes that the primary of shoot laser collimates as reference axis, by the Moire fringe that Circular Ring Grating iteration generates.
Beam collimation looped system is subsequently entered by the ultraviolet laser of primary collimation, i.e., laser beam passes through X to rotatable first
Feedback mirrors 5 are reflected into the rotatable feedback mirrors 6 of Y-direction, successively pass through attenuator 7, wave after reflecting by the rotatable feedback mirrors 6 of Y-direction
Piece 8, spectroscope I9, spectroscope II10 and condenser lens II15, irradiation is in workpiece 22 after laser beam line focus lens II15 is focused
The region to be measured of rear surface.Under original state, X is in as shown in the figure to rotatable feedback mirrors 5 and the rotatable feedback mirrors 6 of Y-direction
45 ° of incident angles, smoothly to realize the reflection and propagation of laser beam, and the two can rotate respectively around Y-axis and X-axis.Wherein,
The splitting ratio of spectroscope I9 and spectroscope II10 is 1:1, and energy meter 11 is connected with spectroscope I9, to read and record in real time
The laser energy density issued by laser 1.In addition, spectroscope II10 and condenser lens I12, hot spot screen 13 and CCD camera
I14 is sequentially connected, and laser beam is passed through after being divided by spectroscope II10 and focused on hot spot screen 13 by condenser lens I12, utilizes CCD
Camera I14 detects the specific location of laser facula on glossing up screen 13, if laser beam does not drift about in communication process,
Laser facula is focused on just at the coordinate origin of hot spot screen 13, if parallel lines drift has occurred in laser beam in communication process
It moves, due to the focussing force of condenser lens I12, laser facula still can be focused at the coordinate origin of hot spot screen 13, therefore,
The laser offset amount measured on hot spot screen 13 mainly transmitted as laser during angle drift caused by.Damage from laser test
When, irradiation is in the region to be measured of 22 rear surface of workpiece for measurement, i.e. condenser lens after the final line focus lens II15 of laser beam is focused
The focussing force of II15 can also compensate the parallel lines drift value in laser beam communication process, therefore, to laser drift in this system
The feedback of amount and adjusting are primarily upon the angle drift value in laser beam communication process.The hot spot screen measured according to CCD camera I14
The specific location of laser facula on 13, determine laser beam X to and Y-direction offset and be fed back to computer 27, pass through
Analytical calculation determines the two-dimensional angular drift component of laser beam, controls X respectively by algorithm and drives X to rotatable to piezo controller 16
Feedback mirrors 5 rotate a certain angle around Y-axis, and control Y-direction piezo controller 17 and the rotatable feedback mirrors 6 of Y-direction is driven to rotate around X-axis
Certain angle, the direction rotation for reducing laser beam to angle shift, so that adjusting laser facula places it in hot spot screen 13
At origin, that is, complete the collimation adjustment of laser beam.
Fixed point damage measure can be carried out to 22 rear surface specific position of workpiece for measurement by completing the laser that beam collimation is adjusted,
During damage measure, whether capable of timely and accurately judging that damage occurs with the microscopical CCD camera II26 of long-focus,
Middle microscope multiplying power adjustable extent is × 0.7 to × 4.5, and visual field size is 0.5-3mm.Laser spoke is carried out to test point each time
After preceding and laser irradiation, directly observe and automatically analyzed with image processing software being attached thereto by 27 screen of computer
The test zone microscopic appearance that CCD camera II26 is obtained, and the pattern of test zone same before and after laser irradiation is compared,
Whether judgement damage occurs.Fig. 4 explanation is detailed in the differentiation of workpiece surface damage from laser and evaluation principle before and after laser irradiation.In
During R:1 damage measure, if judging, there is damage from laser in workpiece test position, records energy at this time by computer 27
The real time laser energy density that meter 11 measures, is defined as the R:1 laser damage threshold of the point；In 1:1 damage measure process
In, no matter whether there is Laser Induced Damage after laser irradiation, it is required to record what energy meter 11 measured by computer 27
Real time laser energy density values, and mark out and whether damaged under the energy, it is obtained in conjunction with the fitting of ISO11254 normal linearity
Corresponding laser energy density when damage probability is 0 is obtained, the 1:1 damage threshold of workpiece is defined as.
As shown in Fig. 2, realizing that workpiece for measurement 22 clamps the schematic illustration with positioning for adjustable clamp 18.Adjustable clamp
18 points of tool are left and right two parts, and inside is spaced apart to be equipped with rubber fastening strip 18-1, and workpiece for measurement 22 is placed in adjustable clamp
The positioning and clamping of workpiece 22 is realized in tool 18 by the contact with rubber fastening strip 18-1.The bottom of adjustable clamp 18 passes through
Four section springs 20 are connected with clamp supporting table 19, and four section springs 20 are placed in the wedge-shaped guide groove 19-1 of clamp supporting table 19.
When not being put into workpiece for measurement 22, since the contact limit of 18 or so two parts lower inner surface of adjustable clamp is so that spring 20
In primary compression state.When being put into workpiece for measurement 22,18 or so two parts of adjustable clamp are determined by the size of workpiece 22
Spacing, under the elastic-restoring force effect of spring 20, rubber fastening strip 18-1 on the inside of 18 or so two parts of adjustable clamp
Close-fitting contact, and 22 lower surface of workpiece and adjustable clamp 18 or clamp supporting table 19 are realized with 22 left and right sides of workpiece
Upper surface cooperation contact, to realize the positioning and clamping of different shape, dimension workpiece.The fixture can clamping workpiece having a size of φ
20~φ 100mm (circle) or 20~100mm of opposite side distance (polygon), 5~25mm of thickness of workpiece range.
As shown in figure 3, illustrating to test 22 surface different location of workpiece for measurement so that surface is the workpiece of curved surface face shape as an example
Working principle when laser damage threshold.Before damage measure starts, the focal length for adjusting CCD camera II26 makes its focus and focuses saturating
The focus of mirror II15 accurately intersects, and in damage from laser test process, the horizontal position of workpiece 22 should be adjusted in time, so that CCD
The camera lens focus of camera II26 remains focused at focus and 22 rear surface of the workpiece position to be measured of condenser lens II15, to ensure
Whether the pattern variation and accurate judgement damage for observing test zone before and after laser irradiation in time occur.Under original state,
The center of 21 upper surface of center and three-dimensional mobile platform of 19 lower surface of clamp supporting table is respectively positioned on CCD camera II26
Immediately below the intersection of focus and condenser lens II15 focus at 55mm and clamp supporting table 19 is with a thickness of 5mm, and by initial shape
19 lower surface center of clamp supporting table is defined as the initial coordinate origin (0,0,0) of three-dimensional mobile platform 21 under state.Pass through
Computer 27, which controls X, can adjust three-dimensional movement to motion controller 23, Y-direction motion controller 24 and Z-direction motion controller 25
Simultaneously realize clamp supporting table 19, fixture 18 and workpiece 22 along X to, the feeding of three Y-direction, Z-direction directions in 21 position of platform.Such as Fig. 3
In (a) shown in, need to measure the curve surface work pieces rear surface T of φ 100mm1And T2Laser damage threshold at two.Measure T1Point
Shown in (b) in process such as Fig. 3, by (a) in Fig. 3 it is found that T1Point Y-direction, Z-direction position with condenser lens under original state
The identical i.e. Y of the focal coordinates of II151=0, Z1=55, there is no need to adjust the Y-direction of workpiece for measurement 22 and Z-direction position, due to be measured
22 rear surface of workpiece is curved surface, T1Point and the center of 21 upper surface of three-dimensional mobile platform have one on (X to) in the horizontal direction
Fixed distance X1, therefore, it is necessary to control X to the horizontal position of the adjusting workpiece 22 of motion controller 23 by computer 27, that is, drive
Dynamic three-dimensional mobile platform 21 makes its upper surface midpoint level be moved to the left X1Distance is observed by 27 screen of computer at this time
To tested point T1When high-visible in CCD camera II26 camera lens, it is believed that by tested point T1It is adjusted to condenser lens II15's
Focal point can start Nd:YAG laser 1 and carry out damage from laser test.Measure T2The process of point is as shown such as (c) in Fig. 3,
By (a) in Fig. 3 it is found that T2The X of point to, Y-direction, Z-direction position with the focal coordinates of condenser lens II15 under original state not
Together.Therefore, in measurement T2Before the laser damage threshold of point, Y-direction motion controller 24 and Z-direction fortune are adjusted by computer 27 first
To change the specific location in 22 surface of workpiece region to be measured, i.e. driving three-dimensional mobile platform 21 makes in its upper surface movement controller 25
Point position feeds ﹣ Y along Y-direction and Z-direction respectively2With ﹣ (Z2- 55), at this point, the Y-direction of tested point and Z-direction position have been adjusted to and have focused
The focal position of lens II15 is corresponding.Then, level of the X to the adjusting workpiece 22 of motion controller 23 is controlled by computer 27
Position, i.e. driving three-dimensional mobile platform 21 make its upper surface midpoint level be moved to the left X2Distance passes through computer at this time
27 screens observe tested point T2When high-visible in CCD camera II26 camera lens, it is believed that by tested point T2It is adjusted to focusing
The focal point of lens II15 can start Nd:YAG laser 1 and carry out damage from laser test.It is the work of lozenges shape for surface
Part, test process principle is similar, controls Y-direction motion controller 24 and Z-direction motion controller 25 to change 22 surface of workpiece for measurement
The specific location in region to be measured controls X to motion controller further according to the horizontal distance of region to be measured and CCD camera II26 focus
23 driving workpieces for measurement 22, to moving horizontally, make region to be measured be always positioned at the focal point of condenser lens II15 along X.For surface
For the workpiece of plane surface shape, after adjustment X makes laser focus on 22 rear surface of workpiece for measurement to motion controller 23, damaged in laser
Hurt in test process, only need to control Y-direction motion controller 24 and Z-direction motion controller 25 to adjust 22 surface of workpiece region to be measured
Specific location, without adjusting the position in the horizontal direction of workpiece 22.Therefore, which can effectively be applicable in
It is tested in the workpiece of plane, lozenges and curved surface face shape.
As shown in figure 4, illustrating CCD phase for measuring the laser damage threshold at workpiece rear surface scratch/micro-crack
Local pattern comparison diagram of the workpiece for measurement 22 that machine II26 is obtained before and after damage from laser test.(a) in Fig. 4 is laser irradiation
The pattern for 22 local defect of workpiece that preceding CCD camera II26 is measured, and the image is inputted into computer 27, it is soft by image procossing
Part analyzes scratch defects N before damage measure00Pixel situation and specific size, (b) in Fig. 4 is that 22 rear surface of workpiece for measurement is same
Defect pattern of one position after the laser irradiation of certain energy is analyzed using the image processing software in computer 27 again
Scratch defects N after laser irradiation01Pixel situation and specific size, work as N01With N00When compared to pixel without significant change, judgement
Scratch defects N00Laser Induced Damage not yet occurs for place；Work as N01With N00It is substantially change compared to pixel and oversize is held
When poor, judge that scratch defects N has occurred at this00The damage from laser of induction is defect induction damage occur as shown in Fig. 4 (b)
Wound records the real time laser energy density values that energy meter 11 is read at this time, is defined as the damage from laser of workpiece for measurement 22
Threshold value (in R:1 test mode) or the laser energy density value (in 1:1 test mode) that can induce damage, and by N01With N00's
Dimension difference is defined as the size of damage from laser point, to realize the accurate evaluation of damage threshold and determining for damage spot size
Quantitatively evaluating.
The principle of the invention is reliable, structurally consummate, can effectively inhibit the drift of light beam in damage from laser test process, and energy
Enough quickly to determine impaired loci specific location and size, which can be suitable for more sizes, the fixed point of Multiple Shape workpiece swashs
Light injury threshold evaluation.In addition, mentality of designing of the invention is applied equally to inhibit laser to splash in laser marking machine, only need
It removes CCD camera II and the type of laser used and parameter is changed to required type and parameter.
Claims (7)
1. a kind of fixed-point type laser damage threshold evaluation system, configured with laser beam emitting device, beam collimation looped system,
Three coordinate motion control systems and damage discriminating gear, it is characterised in that: the laser beam emitting device sets gradually Nd:YAG and swashs
Light device, spatial filter, beam expander and axicon lens；The beam collimation looped system is equipped with X to rotatable feedback mirrors, Y-direction
Rotatable feedback mirrors, attenuator, wave plate, spectroscope I, spectroscope II, energy meter, condenser lens I, hot spot screen, CCD camera I,
Condenser lens II, X are to piezo controller and Y-direction piezo controller；The spectroscope I following settings energy meter, to read in real time
Laser energy value is taken, the spectroscope II following settings condenser lens I, hot spot screen and CCD camera I, condenser lens I will swash
Light light beam is focused on hot spot screen and is connected using the physical location of CCD camera I detection hot spot, the energy meter and CCD camera I
Connect computer, computer pass through respectively X connect X with Y-direction piezo controller to piezo controller can to rotatable feedback mirrors and Y-direction
Rotation feedback mirror controls to adjust X to the rotation angle of rotatable feedback mirrors, the rotatable feedback mirrors of Y-direction from computer；Described three sit
It marks kinetic control system and is equipped with adjustable clamp, clamp supporting table, spring, three-dimensional mobile platform, X-axis motion controller, Y-axis fortune
Movement controller and Z axis motion controller, the adjustable clamp are placed in above clamp supporting table for clamping workpiece for measurement and leading to
It crosses spring to be connected with clamp supporting table, clamp supporting table is fixed in three-dimensional mobile platform, and the three-dimensional mobile platform passes through X-axis
Motion controller, Y-axis motion controller and Z axis motion controller connect computer, control X-axis motion controller, Y by computer
Axle motion controller and Z axis motion controller driving three-dimensional mobile platform and adjustable clamp and workpiece for measurement are made three-dimensional mobile；
The damage discriminating gear includes to have the microscopical CCD camera II of long-focus, and CCD camera II is for observing simultaneously recording laser spoke
According to the microstructure of front and back workpiece test zone, and it is fed back to computer, computer utilizes image processing software, that is, time-division
The pattern variation of damage from laser test front and back workpiece surface test zone is analysed, if nearby pixel is substantially change test zone
And then determine occur Laser Induced Damage at this when oversize tolerance, and the ruler of impaired loci is defined according to the changing value of pixel
Very little size guarantees the accuracy and reliability that damage differentiates with this, and realizes the quantitative evaluation of damage spot size.
2. fixed-point type laser damage threshold evaluation system according to claim 1, it is characterised in that: the Nd:YAG laser
Device shoot laser forms the primary collimation that Moire fringe realizes shoot laser, and benefit by spatial filter, beam expander and axicon lens
With CCD camera I detection glossing up screen on laser facula specific location, determine laser beam X to and Y-direction offset and will
It feeds back to computer, controls X by algorithm and respectively drives X to rotatable feedback to piezo controller and Y-direction piezo controller
Mirror and the rotatable feedback mirrors of Y-direction are rotated to required angle, to adjust at laser facula to hot spot screen coordinate origin, are realized and are swashed
The collimation adjustment of light light beam.
3. fixed-point type laser damage threshold evaluation system according to claim 1, it is characterised in that: the adjustable clamp
Be divided into left and right two parts, inside is spaced apart to be equipped with rubber fastening strip, workpiece for measurement be placed in adjustable clamp by with
The positioning and clamping of workpiece for measurement is realized in the contact of rubber fastening strip.
4. fixed-point type laser damage threshold evaluation system according to claim 3, it is characterised in that: the adjustable clamp
According to the size of workpiece for measurement, telescopic adjustment is realized along wedge-shaped guide groove by means of bottom spring by left and right two parts,
To realize the positioning and clamping of workpiece for measurement.
5. fixed-point type laser damage threshold evaluation system according to claim 4, it is characterised in that: the adjustable clamp
Can round piece or opposite side distance 20~100mm of the clamping workpiece having a size of 20~φ of φ 100mm polygon workpeace, thickness of workpiece
Range is 5~25mm, to realize the fixation of Multiple Shape, more dimension workpieces.
6. fixed-point type laser damage threshold evaluation system according to claim 1, which is characterized in that the adjustable clamp
And workpiece is driven from three-dimensional mobile platform and realizes that along X, wherein Y-direction and Z-direction movement are to change workpiece to, the feeding of Y-direction and Z-direction
The specific location in surface region to be measured, X is to movement to ensure that workpiece region to be measured is always positioned at the focus position of condenser lens II
It sets, laser irradiation realizes plane, wedge shape by the driving of three-dimensional mobile platform in workpiece rear surface during guaranteeing laser testing
The damage from laser fixed test in face and curve surface work pieces surface any position.
7. fixed-point type laser damage threshold evaluation system according to claim 1, it is characterised in that: the CCD camera II
Microscope multiplying power adjustable extent be × 0.7 to × 4.5, field range 0.5-3mm.
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