CN110456004A - One kind of multiple gaseous pollutant scavenging material Testing Platforms - Google Patents
One kind of multiple gaseous pollutant scavenging material Testing Platforms Download PDFInfo
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- CN110456004A CN110456004A CN201910804160.4A CN201910804160A CN110456004A CN 110456004 A CN110456004 A CN 110456004A CN 201910804160 A CN201910804160 A CN 201910804160A CN 110456004 A CN110456004 A CN 110456004A
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- 239000003344 environmental pollutant Substances 0.000 title claims abstract description 35
- 231100000719 pollutant Toxicity 0.000 title claims abstract description 35
- 230000002000 scavenging effect Effects 0.000 title claims abstract description 34
- 238000004154 testing of material Methods 0.000 title claims abstract description 15
- 238000012360 testing method Methods 0.000 claims abstract description 63
- 239000007789 gas Substances 0.000 claims abstract description 55
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims abstract description 50
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 23
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 claims abstract description 21
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 18
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 9
- 229910000037 hydrogen sulfide Inorganic materials 0.000 claims abstract description 9
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 230000002068 genetic effect Effects 0.000 claims abstract description 6
- 230000002572 peristaltic effect Effects 0.000 claims abstract description 5
- 238000004378 air conditioning Methods 0.000 claims abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- 230000002378 acidificating effect Effects 0.000 claims description 2
- 239000005416 organic matter Substances 0.000 claims description 2
- 230000007613 environmental effect Effects 0.000 claims 2
- 238000011056 performance test Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 8
- 238000011109 contamination Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000009298 carbon filtering Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 2
- PAWQVTBBRAZDMG-UHFFFAOYSA-N 2-(3-bromo-2-fluorophenyl)acetic acid Chemical compound OC(=O)CC1=CC=CC(Br)=C1F PAWQVTBBRAZDMG-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 1
- 235000011130 ammonium sulphate Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004035 construction material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 230000000505 pernicious effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 229960001866 silicon dioxide Drugs 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
Abstract
The present invention discloses one kind of multiple gaseous pollutant scavenging material Testing Platforms, it include: five kinds of gaseous pollutant generating systems, using heating formaldehyde and toluene gaseous pollutant occur for generating system, wherein formaldehyde is by the way of needle tubing feed liquor, toluene is by the way of peristaltic pump, and sulfur dioxide, ammonia and hydrogen sulfide use gas cylinder genetic method；The test platform further includes temperature and humidity control system, and psychrometric condition required for being tested using gas cylinder humidification method control scavenging material, air-conditioning maintains test temperature at 23 ± 2 DEG C of room temperature.Present invention is mainly used for the performance tests that scavenging material removes a variety of gaseous pollutants.
Description
Technical field
The present invention relates to the Performance Test Systems that gas purification material removes a variety of gaseous pollutants, and in particular to Yi Zhongduo
Kind gaseous pollutant scavenging material Testing Platform.
Background technique
The manufacturing process of electronic product is complicated and various, and many critical process are needed in constant temperature, constant humidity, ultra-clean
It is carried out under dustfree environment.But production equipment can release high concentration particle object and chemical substance, these substances can all cause production
Yields decline and other production safety hidden danger.Therefore, microelectronic industry in process of production to the design of clean room and
Clean effect has very high requirement and technical standard.In order to guarantee product quality, electronics toilet is to its production environment air
The control of middle pollutant has been upgraded to from past particulate matter to molecular contaminants (Airborne Molecular
Contaminant, AMC), i.e. the control of gaseous pollutant.The presence of AMC in air may cause product when serious fatal
Defect and influence yields.
Semiconductor equipment and materials association SEMI are by the AMC (chemical gaseous molecular contaminants) in electronic workshop points
For 4 classes (international semiconductor technology and materials association SEMIF21-1102 standard): acids (MA, Acid), bases (MB, Base),
Condensable matter (MC, Condensable), dopant (MD, Dopants) and other (ME, Etc).These pollutants may be from
Build outside atmosphere environment, it is also possible to inside toilet, including the added material in production process, plant maintenance
Chemical leakage in journey, the diffusion of cleaning solvent, the construction material used, coating, or even the article such as emgloves etc.
Wherein sour gas pollutant kind common in atmosphere and clean indoor chemicals, toilet includes
SO4-, NO3-, CL-, F, P etc..The presence of sour corrosion gas can pollute corrosion to hard disk, chip surface, make chemistry
Undesirable salt particle is analysed in photoresist lyolysis, causes wiring abnormal welding, the consequences such as element impedance exception.SO2 and NO2 between photoetching
Ammonium sulfate and ammonium nitrate are generated etc. that can react with the NH3 in air, is attached on camera lens, is atomized camera lens, influence lithographic accuracy
It surveys, causes litho pattern to deform, AMC also will affect chip line width processing procedure, and influence of the AMC to product quality, is semiconductors manufacture
The increasingly severeer problem and production environment control urgent problem that industry faces.At present for gaseous state in toilet
The control of pollutant mainly installs chemical filter in fresh air system and FFU, and the core of chemical filter be active carbon,
The scavenging materials such as activated alumina, the generation of gaseous pollutant at present and how scientific and reasonable evaluation test scavenging material is gone
Except the performance of gaseous pollutant is never resolved.
Therefore, there is an urgent need to a variety of gaseous pollutant scavenging material Testing Platforms, to evaluate valence test scavenging material
Remove the performance of gaseous pollutant.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art described above, the invention proposes one kind of multiple gaseous contaminations
Object scavenging material Testing Platform.
The present invention is the technical issues of solution in the prior art, and the technical solution of proposition is as follows: one kind of multiple gaseous contaminations
Object scavenging material Testing Platform, comprising: using heating formaldehyde occurs for five kinds of gaseous pollutant generating systems, generating system
With toluene gaseous pollutant, wherein formaldehyde is by the way of needle tubing feed liquor, and toluene is the titanium dioxide by the way of peristaltic pump
Sulphur, ammonia and hydrogen sulfide use gas cylinder genetic method；The test platform further includes temperature and humidity control system, humidifies method control using gas cylinder
Psychrometric condition required for scavenging material processed is tested, air-conditioning maintain test temperature at 23 ± 2 DEG C of room temperature；Test platform tool
There is complete various sizes of test pole, meets the testing requirement of the scavenging material of different structure form；In addition, the test platform has
There is perfect air-supply air draft measure, exhaust fan is closed in daily test, opens breeze fan, maintains test platform temperature and humidity test
Positive pressure microenvironment when gas leakage occurs, closes pressure fan, opens exhaust fan, exhaust fan will be at active carbon filtering device
The experimental gas managed drains into outside atmosphere and maintains test platform subnormal ambient, penetrates into interior with leakage-preventing gas, harm is strong
Health.
The test platform includes five kinds of gaseous pollutant generating systems, and using heating formaldehyde and toluene occur for generating system
Gaseous pollutant, wherein formaldehyde is by the way of needle tubing feed liquor, and toluene is sulfur dioxide, ammonia by the way of peristaltic pump
Gas cylinder genetic method is used with hydrogen sulfide.
The test platform further includes temperature and humidity control system, using required for gas cylinder humidification method control scavenging material test
Psychrometric condition, air-conditioning maintain test temperature at 23 ± 2 DEG C of room temperature.
The test platform has complete various sizes of test pole, meets the test need of the scavenging material of different structure form
It asks.
The test platform has perfect air-supply air draft measure, and exhaust fan is closed in daily test, opens breeze fan, dimension
Test platform temperature and humidity test positive pressure microenvironment is held, when gas leakage occurs, pressure fan is closed, opens exhaust fan, air draft wind
The processed experimental gas of active carbon filtering device is drained into outside atmosphere and maintains test platform subnormal ambient by machine.
A variety of gaseous pollutant scavenging material Testing Platforms of the invention, are mainly used for scavenging material to a variety of nocuousness
The removal effect of gas.
Compared with prior art, the beneficial effects of the present invention are:
1. five kinds of ammonia, sulfur dioxide, hydrogen sulfide, toluene, formaldehyde gas pollutants can occur simultaneously, and occurrence quantity passes through
Mass flowmenter and accurate temperature control device are adjusted, and gas occurrence quantity is controllable, has good stability.
2. can be used for a variety of pernicious gas removal capacity tests, effective evaluation scavenging material is comprehensive to multiple gases pollutant
Close removal effect.
3. testing scavenging material method for chemical filter producer to instruct, be conducive to standard market.
Detailed description of the invention
Fig. 1 is systematic schematic diagram.
Fig. 2 is air-supply exhaust system figure.
Fig. 3 is gas cylinder genetic method system diagram.
Fig. 4 is formaldehyde and toluene generating system figure.
Fig. 5 is test pole schematic diagram.
Fig. 6 is that stability occurs for sulfur dioxide.
Fig. 7 is that stability occurs for toluene.
Appended drawing reference:
1- compressed air, 2- drying tube, 3- air filter, 4- mass flow controller, 5- humidify bottle, and 6- toluene occurs
Device, 7- Temperature Humidity Sensor, 8- hybrid bottle, 9- sulfur dioxide generator tube, 10- hydrogen sulfide generator tube, 11- ammonia generator tube, 12-
The spare generator tube of formaldehyde, the spare generator tube of 13-, 14- polluted gas Concentration Testing mouth, 15- test pole, 16- suspended body flowmeter,
17- cleans gas circuit, 18- exhaust outlet, 19- testing stand, 20- gas cylinder, the bipolar pressure reducing valve of the 21-, (pollution of 22- mass flowmenter
Object), 23- syringe pump, 24- vaporization chamber, 25- exhaust fan, 26- breeze fan.
Specific embodiment
Technical solution of the present invention is described in further detail in the following with reference to the drawings and specific embodiments, it is described specific
Embodiment is only explained the present invention, is not intended to limit the invention.
Fig. 1 is present system schematic diagram, and a variety of gaseous pollutant scavenging material Testing Platforms of the present invention pass through sky
Air compressor provides stable load gas source, and gas source compressed air 1 is accurate empty by the silica-gel desiccant dehumidifying in drying tube 2
Air filter 3 removes the particle in air, the organic matter and acidic and alkaline gas in active carbon removal air, final to realize load
The drying and cleaning of gas source, airflow portion bypass flows through twin-stage humidification 5, controls humidity by control bypass flow amount, above-mentioned
It is the configuration process of zero gas needed for testing.Pollutant generating system of the invention includes ammonia generator tube 11, sulfur dioxide generation
Pipe 9, hydrogen sulfide generator tube 10, toluene generator 6, formaldehyde 12 5 kinds of gases of spare generator tube, there are one spare generator tube 13,
Wherein ammonia, sulfur dioxide, hydrogen sulfide use gas cylinder genetic method, see Fig. 2, mainly include gas cylinder 20, bipolar pressure reducer 21 and control
Polluted gas processed goes out the mass flow controller 22 of throughput, during use, opens bipolar pressure reducer 21, adjusts to stabilization
Pressure limit, setting mass flow controller controls 22 flow values, is finally sufficiently mixed in mixer 8 with pure air, high
The etch-proof mass flow controller 4 of precision controls mixed flow, and the stability occurred is shown in Fig. 3 (by taking SO2 as an example)；First
Aldehyde and toluene are to see Fig. 4, principle controls fluid flow with syringe pump 23, in vaporization chamber 24 using liquid heating vaporization
Liquid high-temperature heating is evaporated to gas by heating, then is taken it out by pure air, and the stability that toluene and formaldehyde occur is shown in Fig. 5
(by taking toluene as an example).Zero gas and contamination gas are sufficiently mixed in a mixer, are formed the object gas of constant temperature and humidity, are flowed through and be filled with
The test pole 15 of scavenging material, test pole details are shown in Fig. 6, including steady flow segment and visible segments, and gas actual flow is by float-type
16 test of meter show that gas upstream and downstream concentration is detected in polluted gas Concentration Testing mouth 14, and downstream contamination gas is via dirt
Object processing unit is contaminated, most drains into atmosphere through exhaust outlet 18, for quality of protection flow controller 4 after the completion of test, should beat afterwards
Opening or cleaning gas washing road 17 is cleaned up the residual gas in pipeline with pure air.Test pole 15, suspended body flowmeter 16 are warm and humid
The test devices such as sensor 7 are spent in 19 or more testing stand, and hybrid bottle 8, humidification bottle 5, toluene generator 6, sulfur dioxide are sent out
Raw pipe 9, hydrogen sulfide generator tube 10, ammonia generator tube 11, the spare generator tube 12 of formaldehyde, spare generator tube 13 testing stand 19 with
On.In test process, in order to build the microenvironment of positive-pressure constant-temperature constant humidity, exhaust fan 25 to be closed, breeze fan 26 is opened, when
When gas leakage occurs, exhaust fan 25 is opened, closes breeze fan 26, subnormal ambient is built, to prevent toxic gas flowed into chamber
It is interior.
Experimental method used in the present invention is described further below with reference to embodiment:
1. the preparation of test condition:
1.1 adjust the mass flow control of zero gas configuration system, it is ensured that flow and testing humidity stablize 30min；
1.2 open gas cylinder or peristaltic pump (syringe pump), adjust mass flow controller flow, make its concentration to testing
It needs, and guarantees 30min stability；
1.3 fill surveyed scavenging material in test pole；
2. the test of initial vapor concentration and resistance:
After 2.1 ensure stability of flow, resistance when scavenging material is not filled by with differential pressure transmitter test, i.e. empty state hinders
Power；
2.2 fill surveyed scavenging material in test pole；Object gas is flowed through into test pole, is tested with gas measurement device
Downstream concentration until reaching default breakthrough point and recording data, while changing device test resistance, i.e. load resistance using differential pressure；
3. data processing calculates
The calculating of 3.1 preliminary examination efficiency:
CuFor upstream concentration ppm；CDFor downstream concentration ppm
The calculating of 3.2 resistances:
P=P1-P2
P1For load resistance, P2For empty state resistance；
The calculating of 3.2 tolerant amounts:
Q is tolerant amount mg/g；
Q is throughput m3/h；
M is the quality g for filling scavenging material；
CinUpstream concentration ppm；
CoutDownstream concentration ppm；
tinFor the testing time；
tbFor time of break-through.
It should be understood that embodiment and example discussed herein simply to illustrate that, to those skilled in the art
For, it can be improved or converted, and all these modifications and variations all should belong to the protection of appended claims of the present invention
Range.
Claims (6)
1. one kind of multiple gaseous pollutant scavenging material Testing Platforms, air compressor provides stable load gas source, gas
By dehumidifying, air filter removes the particle in air, the organic matter and acidic and alkaline gas in active carbon removal air in source
Enter environmental chamber afterwards, it is characterised in that: there are five types of gaseous pollutant generating systems for setting in environmental chamber: generating system is using heating
Formaldehyde and toluene gaseous pollutant occur for method, and wherein formaldehyde is by the way of needle tubing feed liquor, and toluene is the side using peristaltic pump
Formula, sulfur dioxide, ammonia and hydrogen sulfide use gas cylinder genetic method.
2. a variety of gaseous pollutant scavenging material Testing Platforms according to claim 1, it is characterised in that: air-flow portion
Divide bypass to flow through twin-stage humidification bottle, test is controlled by control bypass flow amount and tests load airflow humidity.
3. a variety of gaseous pollutant scavenging material Testing Platforms according to claim 1, it is characterised in that: further include
Temperature and humidity control system, psychrometric condition required for being tested using gas cylinder humidification method control scavenging material, air-conditioning maintain to survey
Temperature is tried at 23 ± 2 DEG C of room temperature.
4. a variety of gaseous pollutant scavenging material Testing Platforms according to claim 1, it is characterised in that: the test
Platform has complete various sizes of test pole, meets the testing requirement of the scavenging material of different structure form.
5. a variety of gaseous pollutant scavenging material Testing Platforms according to claim 1, it is characterised in that: described five
Kind gaseous pollutant generating system is connected with air supply duct in parallel, and experimental gas is sent respectively to environment cabin.
6. a variety of gaseous pollutant scavenging material Testing Platforms according to claim 1, it is characterised in that the test
Platform has perfect air-supply air draft measure, and exhaust fan is closed in daily test, opens breeze fan, maintains test platform warm and humid
Degree test positive pressure microenvironment, when gas leakage occurs, closes pressure fan, opens exhaust fan, exhaust fan filters active carbon
The processed experimental gas of device drains into outside atmosphere and maintains test platform subnormal ambient, penetrates into interior with leakage-preventing gas,
Harm health.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910804160.4A CN110456004A (en) | 2019-08-28 | 2019-08-28 | One kind of multiple gaseous pollutant scavenging material Testing Platforms |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910804160.4A CN110456004A (en) | 2019-08-28 | 2019-08-28 | One kind of multiple gaseous pollutant scavenging material Testing Platforms |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110456004A true CN110456004A (en) | 2019-11-15 |
Family
ID=68489656
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|---|---|---|---|
| CN201910804160.4A Pending CN110456004A (en) | 2019-08-28 | 2019-08-28 | One kind of multiple gaseous pollutant scavenging material Testing Platforms |
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