CN217542765U - Test system of chemical filter material - Google Patents
Test system of chemical filter material Download PDFInfo
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- CN217542765U CN217542765U CN202221398175.9U CN202221398175U CN217542765U CN 217542765 U CN217542765 U CN 217542765U CN 202221398175 U CN202221398175 U CN 202221398175U CN 217542765 U CN217542765 U CN 217542765U
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Abstract
The utility model discloses a test system of chemical filter material relates to the air filtration field, has set gradually air intake system, adsorption test system, detecting system and tail gas processing system according to gaseous flow direction, air intake system department is provided with high efficiency filter, test system of chemical filter material still includes control system, air intake system, adsorption test system, detecting system and tail gas processing system respectively with control system electrical connection. The chemical filter material can simulate the use environment of the chemical filter material by changing the test parameters such as the type, concentration and flow rate of the gas entering the air. Not only can the efficiency time curve of the filter material be obtained, but also the service life of the filter material can be analyzed; the data processing is carried out by using a proprietary data acquisition and analysis system, and the optimal service environment parameters of the filter material are obtained, so that the estimation of the actual service life of the chemical filter material is facilitated, the timely updating of the product before failure is ensured, and the use experience of a user is further improved.
Description
Technical Field
The utility model relates to an air filter field, in particular to test system of chemistry filter material.
Background
With the development of national science and technology, in the high-tech industries of integrated semiconductor devices, disk drives, liquid crystal displays and the like, due to the increase of complexity of product processes and the reduction of line widths of product processes, more gaseous molecular pollutants are generated in the air. Research shows that gaseous molecular pollutants can cause product yield reduction, performance degradation, failure and the like, for example, in the semiconductor industry, AMC can cause T-shaped coverage, corrosion effect, non-uniform oxide layer growth, wafer surface characteristic change, gate oxide layer integrity reduction and the like of photoresist. Thus, most industrial cleanrooms contain high efficiency filters (HEPA) or ultra high efficiency filters (ULPA), which are very effective for controlling particles above 0.05 μm, but are ineffective for AMC with average sizes of 10A to 100A. Meanwhile, with the increasing importance of air quality in China and households, chemical filters including airport terminals, museums, nuclear power stations, building sewage treatment plants, sewage aeration treatment plants, household air purifiers and the like are in obvious demand. Accordingly, filter manufacturers are actively pushing out various chemical filter products in order to remove gaseous molecular contaminants. Research shows that no mature chemical filter material testing system and testing method exist in the market at present.
The traditional filter is mostly made of glass fiber materials, the filter material testing method adopts a filter material testing table, testing gas is aerosol, and testing conditions are not changeable.
SUMMERY OF THE UTILITY MODEL
The utility model provides a technical problem provide one kind can the accurate measurement go out chemical filter material to different input gaseous absorption efficiency, adsorption capacity and pierce through the cycle.
The utility model provides a technical scheme that its technical problem adopted is: the utility model provides a test system of chemical filter material, has set gradually air intake system, adsorption test system, detecting system and tail gas processing system according to gaseous flow direction, air intake system department is provided with high efficiency filter, test system of chemical filter material still includes control system, air intake system, adsorption test system, detecting system and tail gas processing system respectively with control system electrical connection.
Further, the method comprises the following steps: and a gas generator is arranged at the air inlet system.
Further, the method comprises the following steps: the adsorption test system comprises an upper test tube and a lower test tube, wherein the upper test tube and the lower test tube are clamped tightly through a clamp, so that a closed space is formed between the upper test tube and the lower test tube, an upstream gas sensor is arranged in the upper test tube, a downstream gas sensor is arranged in the lower test tube, a pressure difference sensor is connected to the upper test tube, one pressure interface of the pressure difference sensor is connected into the upper test tube, the other pressure interface of the pressure difference sensor is connected into the lower test tube, and the upstream gas sensor, the downstream gas sensor and the pressure difference sensor are respectively and electrically connected with a control system.
Further, the method comprises the following steps: the tail gas treatment system comprises a tail gas discharge pipe, a waste gas treatment chemical filter group is arranged on the tail gas discharge pipe, one end of the tail gas discharge pipe is connected with the lower test pipe, and the other end of the tail gas discharge pipe is connected with a fan.
Further, the method comprises the following steps: and a flow meter and a tail gas sensor are arranged on the tail gas discharge pipe and between the waste gas treatment chemical filter group and the fan, and the flow meter and the tail gas sensor are respectively electrically connected with the control system.
The utility model has the advantages that: the test system of the chemical filter material is mainly used for testing the core index of the chemical filter material, and can simulate the service environment of the chemical filter material by changing the test parameters such as the type, concentration and flow rate of inlet gas. The test equipment can be simultaneously suitable for the sandwich and the granular adsorption filter material, not only can obtain the adsorption efficiency time curve of the filter material, but also can analyze the service life of the filter material; the data processing is carried out by using a proprietary data acquisition and analysis system, and the optimal service environment parameters of the filter material are obtained, so that the estimation of the actual service life of the chemical filter material is facilitated, the timely update of the product before failure is ensured, and the use experience of a user is further improved.
Drawings
FIG. 1 is a schematic diagram of a test system for chemical filter material;
labeled as: 1. a high efficiency filter; 2. a gas generator; 3. mounting a test tube; 4. a test tube is arranged; 5. an upstream gas sensor; 6. a downstream gas sensor; 7. a differential pressure sensor; 8. a tail gas discharge pipe; 9. an exhaust gas treatment chemical filter bank; 10. a fan; 11. a flow meter; 12. an exhaust gas sensor; 13. and (5) controlling the system.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and the following detailed description.
As shown in fig. 1, an embodiment of the present application provides a test system for a chemical filter material, the test system for a chemical filter material is sequentially provided with an air intake system, an adsorption test system, a detection system, and a tail gas treatment system according to a flow direction of gas, the air intake system is provided with a high efficiency filter 1, the test system for a chemical filter material further includes a control system 13, and the air intake system, the adsorption test system, the detection system, and the tail gas treatment system are respectively electrically connected to the control system 13. The air inlet system is used for allowing gas to be tested to enter the test system of the chemical filter material, and the adsorption test system adopts a clamp to ensure that the test environment is closed and input gas is not leaked, so that the safety of test personnel and the test environment is ensured; the method comprises the steps of monitoring and testing parameter changes in the testing process, installing different types of gas sensors on the front section and the rear section of an adsorption testing system respectively by the detection system, detecting concentration changes of gas passing through a chemical filter material, connecting an output signal with the internet, drawing a gas filtering efficiency and time curve on a computer, and determining the penetration value and the adsorption capacity of the tested chemical filter material through the curve. The tail gas treatment system uses the chemical filtering system to carry out harmless treatment on the gas which is not absorbed, so that the discharged tail gas meets the gas discharge requirement. The high-efficiency filter 1 is used for filtering impurities, bacteria and the like in the gas, so that the gas to be detected is clean.
On the basis, the gas generator 2 is arranged at the air inlet system, and the gas generator 2 is used for controlling the temperature, the humidity, the concentration and the flow of the gas, so that the test condition can be changed.
On the basis, the adsorption test system comprises an upper test tube 3 and a lower test tube 4, wherein the upper test tube 3 and the lower test tube 4 are clamped by a clamp, so that a closed space is formed between the upper test tube 3 and the lower test tube 4, the test environment is ensured to be closed, input gas is not leaked, and the safety of test personnel and the test environment is ensured; fig. 1 shows a state that an upper test tube and a lower test tube are not clamped, a filter material to be tested is placed between the upper test tube 3 and the lower test tube 4, an upstream gas sensor 5 is arranged in the upper test tube 3, the upstream gas sensor 5 is used for detecting the concentration of a certain harmful substance in the upstream gas of an adsorption test system, a downstream gas sensor 6 is arranged in the lower test tube 4, the downstream gas sensor 6 is used for detecting the concentration of a certain harmful substance in the downstream gas of the adsorption test system, a pressure difference sensor 7 is connected to the upper test tube 3, one pressure interface of the pressure difference sensor 7 is connected to the upper test tube 3, the other pressure interface is connected to the lower test tube 4, the pressure difference sensor 7 is used for detecting the pressure difference between the upstream gas and the downstream gas, and the upstream gas sensor 5, the downstream gas sensor 6 and the pressure difference sensor 7 are respectively and electrically connected to a control system 13.
On the basis, the tail gas treatment system includes tail gas discharge pipe 8, be provided with exhaust-gas treatment chemical filter group 9 on the tail gas discharge pipe 8, exhaust-gas treatment chemical filter group 9 is arranged in filtering the harmful substance that is not adsorbed in the gas after the adsorption test for the tail gas of emission accords with the emission requirement, the one end of tail gas discharge pipe 8 is connected with test tube 4 down, be connected with fan 10 on the other end of tail gas discharge pipe 8, the fan provides power for the discharge of tail gas.
On the basis, a flow meter 11 and a tail gas sensor 12 are arranged on the tail gas discharge pipe 8 and between the waste gas treatment chemical filter group 9 and the fan, the flow meter 11 and the tail gas sensor 12 are electrically connected with a control system 13 respectively, the flow meter 11 is used for detecting the flow rate of tail gas discharge, and the tail gas sensor 12 is used for detecting the concentration of harmful substances in tail gas.
The above-mentioned embodiments, further detailed description of the objects, technical solutions and advantages of the present invention, it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. A test system of chemical filter materials is characterized in that: the chemical filter material testing system is characterized in that an air inlet system, an adsorption testing system, a detection system and a tail gas treatment system are sequentially arranged in the flowing direction of gas, a high-efficiency filter (1) is arranged at the air inlet system, the chemical filter material testing system further comprises a control system (13), and the air inlet system, the adsorption testing system, the detection system and the tail gas treatment system are respectively and electrically connected with the control system (13).
2. The test system for chemical filter material of claim 1, wherein: and a gas generator (2) is arranged at the air inlet system.
3. The test system for chemical filter material of claim 1, wherein: the adsorption test system comprises an upper test tube (3) and a lower test tube (4), wherein the upper test tube (3) and the lower test tube (4) are clamped tightly through a clamp, a closed space is formed between the upper test tube (3) and the lower test tube (4), an upstream gas sensor (5) is arranged in the upper test tube (3), a downstream gas sensor (6) is arranged in the lower test tube (4), the upper test tube (3) is connected with a differential pressure sensor (7), one pressure interface of the differential pressure sensor (7) is connected into the upper test tube (3), the other pressure interface is connected into the lower test tube (4), and the upstream gas sensor (5), the downstream gas sensor (6) and the differential pressure sensor (7) are respectively electrically connected with a control system (13).
4. The test system for chemical filter material of claim 1, wherein: the tail gas treatment system comprises a tail gas discharge pipe (8), a waste gas treatment chemical filter group (9) is arranged on the tail gas discharge pipe (8), one end of the tail gas discharge pipe (8) is connected with a lower test pipe (4), and the other end of the tail gas discharge pipe (8) is connected with a fan (10).
5. The test system for chemical filter according to claim 4, wherein: be located on tail gas discharge pipe (8) and be provided with flowmeter (11) and tail gas sensor (12) between exhaust-gas treatment chemical filter group (9) and fan (10), flowmeter (11) and tail gas sensor (12) respectively with control system (13) electrical connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221398175.9U CN217542765U (en) | 2022-06-06 | 2022-06-06 | Test system of chemical filter material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221398175.9U CN217542765U (en) | 2022-06-06 | 2022-06-06 | Test system of chemical filter material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217542765U true CN217542765U (en) | 2022-10-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221398175.9U Active CN217542765U (en) | 2022-06-06 | 2022-06-06 | Test system of chemical filter material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217542765U (en) |
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2022
- 2022-06-06 CN CN202221398175.9U patent/CN217542765U/en active Active
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