CN110440974A - A kind of micro- air bag multi-dimension force sensor with overload protection function - Google Patents
A kind of micro- air bag multi-dimension force sensor with overload protection function Download PDFInfo
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- CN110440974A CN110440974A CN201910637074.9A CN201910637074A CN110440974A CN 110440974 A CN110440974 A CN 110440974A CN 201910637074 A CN201910637074 A CN 201910637074A CN 110440974 A CN110440974 A CN 110440974A
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- Prior art keywords
- air bag
- cavity
- sensor
- micro
- baroceptor
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0618—Overload protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The present invention relates to a kind of micro- air bag multi-dimension force sensor with overload protection function, belongs to sensor technical field.The sensor includes circuit board, baroceptor array, seal protection lid and contact head.Baroceptor array includes m baroceptor.Seal protection lid includes seal protection lid main body, sensor cavity volume array, upper groove and lower groove.Sealing ring is installed in lower groove.Sensor cavity volume array includes m sensor cavity.Baroceptor is located in corresponding sensor cavity body.The bottom of seal protection lid main body and the bottom of sealing ring are fitted close with the top of circuit board.Contact head includes contact head main body and m air bag cavity.The upper end of sensor cavity is located in air bag cavity that is corresponding and communicating therewith.The lower end of contact head main body stretches in upper groove, and is fitted close with upper groove.The present invention has good leakproofness and higher measurement accuracy, can prevent baroceptor from can not work normally because of overload.
Description
Technical field
The present invention relates to sensor technical fields, and in particular to a kind of micro- air bag multi-dimensional force biography with overload protection function
Sensor.
Background technique
During precise operation, multi-dimensional force is the important component of the mankind and the perception of intelligent robot environmental information,
The information between ambient enviroment and effective object is fed back.Thus multi-dimension force sensor becomes robot and directly acts on objects outside
Necessary medium.And the multi-dimension force sensor of flexible surface increases the contact area between objects outside, so as to more preferable
Perception and objects outside between information.
When extraneous imposed load is more than the range of micro- air bag multi-dimension force sensor, sensor core sector-meeting is easily damaged, and is influenced
The acquisition of pressure information.And micro- air bag multi-dimension force sensor not can guarantee load in range ability in actual use.Cause
This, the overload protection of micro- air bag multi-dimension force sensor is directly related to the use and safety of sensor.
Summary of the invention
The purpose of the present invention is to provide a kind of micro- air bag multi-dimension force sensor with overload protection function, the sensor
With good leakproofness and higher measurement accuracy, it can prevent baroceptor from can not work normally because of overload.
To achieve the above object, the invention adopts the following technical scheme:
A kind of micro- air bag multi-dimension force sensor with overload protection function, including it is circuit board, baroceptor array, close
Seal protection cap and contact head；The baroceptor array includes m spaced air pressure transmissions being mounted at the top of circuit board
Sensor, m are the integer greater than 1.
The sensor cavity battle array that the seal protection lid includes seal protection lid main body, is arranged in seal protection lid main body
It arranges, the upper groove of seal protection lid body top is set and the lower groove of seal protection lid bottom part body is set；Under described
It is equipped in groove and its close-fitting sealing ring；The sensor cavity volume array includes m interval setting and and air pressure transmission
The one-to-one sensor cavity of sensor；The sealing ring include be set in sensor cavity volume array periphery sealing ring one and
Sealing ring two for separating adjacent sensors cavity；The baroceptor is located in corresponding sensor cavity body；It is described
The bottom of seal protection lid main body and the bottom of sealing ring are fitted close with the top of circuit board.
The contact head includes contact head main body and m spaced airbag chambers for being provided with contact head bottom part body
Body；The upper end of the sensor cavity is located in air bag cavity that is corresponding and communicating therewith；The lower end of the contact head main body
It stretches in upper groove, and is fitted close with upper groove.
Further, several location holes are offered on the circuit board；If the bottom of the seal protection lid main body is equipped with
The dry positioning column being adapted with location hole；The positioning column stretches in corresponding location hole, and is fitted close with location hole.
Further, the top of the sensor cavity is equipped with and the blow vent that is connected inside sensor cavity；It is described
Blow vent is cylinder.
Further, the baroceptor welding is bonded on circuit boards on circuit boards or by electric conductor.
Further, the bottom of the seal protection lid main body is bonded in the top of circuit board using adhesive.
Further, the thickness of the sealing ring is 0.1~1mm bigger than the height of lower groove；The sealing ring uses rubber
Material.
Further, the material of the contact head is rubber, silica gel, any one in silicon rubber.
Further, the value of m is 4.
Further, air or nitrogen are filled in the air bag cavity and sensor cavity.
Further, the air bag cavity includes the air bag cavity one and airbag chamber body two set gradually from up to down；Institute
It states blow vent to stretch in corresponding air bag cavity one, the sensor cavity stretches in corresponding air bag cavity two.
Compared to the prior art, the invention has the benefit that
(1) contact head of micro- air bag multi-dimension force sensor of the present invention with overload protection function is made by outside
When firmly, deformation occurs that the intracorporal air pressure of each airbag chamber is caused to generate variation for each air bag cavity in contact head, passes through acquisition
The each baroceptor of circuit sweeps obtains the intracorporal air pressure of each airbag chamber, intracorporal by airbag chamber further according to decoupling matrices
Air pressure change can derive the size and Orientation of three-dimensional force suffered by micro- air bag multi-dimension force sensor.
(2) micro- air bag multi-dimension force sensor of the present invention has good flexibility, it can be achieved that with objects outside
Good contact, contact head therein can be very good transmitting three-dimensional force, and seal protection lid is simple and compact for structure, will using sealing ring
Each sensor cavity separates, and the leakproofness of each air bag cavity and sensor cavity may be implemented, and guarantees baroceptor inspection
The precision of survey, baroceptor are placed in the sensor cavity body of seal protection lid, can be prevented external suffered by multi-dimension force sensor
Stress is excessive, and causing contact head to squeeze baroceptor can not work normally it.
(3) micro- air bag multi-dimension force sensor of the present invention is capable of detecting when the size and Orientation of suffered three-dimensional force, mentions
The detection accuracy of high three-dimensional force sensor, the failure of baroceptor caused by pre- antioverloading.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is top view of the invention；
Fig. 3 is the sectional view along A-A of Fig. 2；
Fig. 4 is the structural schematic diagram of seal protection lid；
Fig. 5 is the bottom view of seal protection lid；
Fig. 6 is the B-B direction cross-sectional view of Fig. 5；
Fig. 7 is the bottom view of contact head；
Fig. 8 is the C-C of Fig. 7 to cross-sectional view.
Wherein:
100, circuit board, 101, location hole, 200, baroceptor, 300, sealing ring, 301, sealing ring one, 302, sealing
Circle two, 400, seal protection lid, 401, seal protection lid main body, 402, upper groove, 403, sensor cavity, 404, blow vent,
405, positioning column, 406, lower groove, 500, contact head, 501, air bag cavity one, 502, air bag cavity two.
Specific embodiment
The present invention will be further described with reference to the accompanying drawing:
A kind of micro- air bag multi-dimension force sensor with overload protection function as shown in FIG. 1 to FIG. 3, including circuit board
100, baroceptor array, seal protection lid 400 and contact head 500；The baroceptor array includes being welded on or leading to
The m spaced baroceptors 200 that electric conductor is bonded in 100 top of circuit board are crossed, m is the integer greater than 1.M gas
Pressure sensor 200 is distributed in array.In the present embodiment, the value of m is 4.As shown in Figure 1,4 baroceptors 200 exist
The top of circuit board 100 is in 2*2 rectangular array.Gap is equipped between adjacent baroceptor 200.The circuit board 100
For any one in printed circuit board, flexible circuit board, Rigid Flex, flexible circuit board uses polyimides or polyester thin
Film is substrate.The baroceptor 200 is electrically connected with the pad realization on circuit board 100.
As shown in Figure 4-Figure 6, the seal protection lid 400 includes seal protection lid main body 401, is arranged in seal protection lid
Sensor cavity volume array in main body, the upper groove 402 that 401 top of seal protection lid main body is set and it is arranged in seal protection
The lower groove 406 of 401 bottom of lid main body.The wall thickness of the lower groove 406 is 1~10mm.Be equipped in the lower groove 406 with
Its close-fitting sealing ring 300, the shape of sealing ring 300 are identical with the shape of lower groove 406.Lower groove 406, for preventing
Sealing ring.Sealing ring 300, for individually being sealed each air bag cavity and its corresponding sensor cavity.The sensing
Device array of cavities include the setting of m interval and with the one-to-one sensor cavity 403 of baroceptor 200.The sealing ring
300 include being set in the sealing ring 1 of sensor cavity volume array periphery and close for separating adjacent sensors cavity
Seal 2 302.In the present embodiment, as shown in Figure 1, sealing ring 1 is rectangle, sealing ring 2 302 is cross, the two
Form a matrix pattern.The shape of lower groove 406 is also matrix pattern.It is designed in this way in the periphery of each sensor cavity 403
Sealing ring 300 can be such that each air bag cavity and its corresponding sensor cavity individually seals, avoid each air bag cavity and its
It influences each other between corresponding sensor cavity, improves detection accuracy.The thickness of the sealing ring 300 is bigger than the height of lower groove
0.1~1mm is compressed with ensuring sealing ring between lower groove 406 and circuit board 100, avoids improving sealing effect there are gap
Fruit.The sealing ring 300 uses rubber material.The sealing ring 300 is by press-in connection in lower groove 406 and circuit board 100
Between, or be bonded between lower groove 406 and circuit board 100 by adhesive.The baroceptor 200 is located at corresponding
In sensor cavity 403.The top of the bottom of the seal protection lid main body 401 and the bottom of sealing ring 300 with circuit board 100
Portion is fitted close.The top of the sensor cavity 403 is equipped with and the blow vent 404 that is connected inside sensor cavity 403；Institute
Blow vent 404 is stated as cylinder.The shape of the inner cavity of sensor cavity 403 and the shape of baroceptor 200 are corresponding.
The arrangement mode of sensor cavity 403 is also consistent with the arrangement mode of baroceptor 200.Sensor cavity 403, for placing
Baroceptor 200.
Further, several location holes 101 are offered on the circuit board 100；The bottom of the seal protection lid main body 401
Portion is equipped with several positioning columns 405 being adapted with location hole 101；The positioning column stretches in corresponding location hole, and with it is fixed
Position hole is fitted close.The positioning column 405 is cylinder, a diameter of 0.5~5mm, and the height of positioning column is less than the depth of location hole
Degree.When seal protection lid is installed to circuit board, positioning column is extend into corresponding location hole 101, and and location hole
101 transition fits.The setting of positioning column and positioning hole, on the one hand plays connection function, makes seal protection lid and is equipped with air pressure
The circuit board of sensor connects together, and on the other hand plays the role of positioning, it is ensured that each baroceptor installation accuracy.For
Stable connection and leakproofness are further increased, the bottom of the seal protection lid main body 401 is bonded in electricity using adhesive
The top of road plate 100.
As shown in Figs. 7-8, the contact head 500 includes contact head main body and the m for being provided with contact head bottom part body
Spaced air bag cavity.The height of the contact head is 0.5~10mm.The upper end of the sensor cavity is located at corresponding
And in the air bag cavity communicated therewith；The lower end of the contact head main body stretches in upper groove, and is fitted close with upper groove.
The air bag cavity includes the air bag cavity 1 and airbag chamber body 2 502 set gradually from up to down.
Preferably, the material of the contact head 500 is rubber, silica gel, any one in silicon rubber.Air bag cavity one
Shape and the shape of blow vent are adapted.The shape of air bag cavity two and the shape of sensor cavity are adapted.The blow vent
404 stretch in corresponding air bag cavity 1, and the inner wall of the periphery wall of blow vent and air bag cavity one is fitted close, gas
The height of blister cavities body one is 1~10mm higher than the height of blow vent, can guarantee air bag cavity bottom and sensor cavity body surface in this way
Face is in close contact, it is ensured that leakproofness.The sensor cavity 403 stretches in corresponding air bag cavity 2 502, sensor cavity
Outer wall and air bag cavity two inner wall be fitted close.
Further, air or nitrogen are filled in the air bag cavity and sensor cavity.
The theoretical calculation process of four 200 three-dimensional forces of baroceptor shown in Fig. 1 are as follows:
When 500 upper surface of contact head is by applied external force F=[Fx,Fy,Fz] when, four air bag cavitys generate deformation and lead
Cause internal gas volume compression, gas pressure intensity P=[P1,P2,P3,P4] corresponding change occurs.Each intracorporal gas pressure intensity of airbag chamber
Baroceptor signal acquisition can be scanned by Acquisition Circuit.Three-dimensional force suffered by micro- air bag multi-dimension force sensor, can lead to
Following formula parsing is crossed to obtain:
Wherein, Fx、FyAnd FzRespectively indicate the power on the direction x, y and z suffered by micro- air bag multi-dimension force sensor；ωijTable
Show decoupling matrices coefficient；Pi, i=1,2 ..., 4 respectively indicate the gas pressure intensity in four each air bags.
The present invention selects flexible circuit board that sensor can be made preferably to post with end effector of robot surface.Sealing ring
One effect is to guarantee not generating gas flowing between cavity and the external world, and the effect of sealing ring two avoids between each sensor cavity
Gas exchanges, it is ensured that the leakproofness of air pressure in each sensor cavity body, to guarantee the accurate of each baroceptor detection three-dimensional force
Property.The main reason for causing air pressure change in sensor cavity body for air bag cavity two in contact head deformation, in order to reduce theory
Air bag cavity two is designed as axisymmetric cylindrical body by the difficulty of analysis, in addition considers to increase between contact head and seal protection lid
Area in sealing contact, increase blow vent.
Embodiment described above only describe the preferred embodiments of the invention, not to model of the invention
It encloses and is defined, without departing from the spirit of the design of the present invention, those of ordinary skill in the art are to technical side of the invention
The various changes and improvements that case is made should all be fallen into the protection scope that claims of the present invention determines.
Claims (10)
1. a kind of micro- air bag multi-dimension force sensor with overload protection function, it is characterised in that: including circuit board, air pressure sensing
Device array, seal protection lid and contact head；The baroceptor array includes the m interval setting being mounted at the top of circuit board
Baroceptor, m is integer greater than 1；
The seal protection lid include seal protection lid main body, the sensor cavity volume array being arranged in seal protection lid main body,
The upper groove of seal protection lid body top is set and the lower groove of seal protection lid bottom part body is set；The lower groove
In be equipped with and its close-fitting sealing ring；The sensor cavity volume array includes m interval setting and and baroceptor
One-to-one sensor cavity；The sealing ring includes being set in the sealing ring one of sensor cavity volume array periphery and being used for
The sealing ring two that adjacent sensors cavity is separated；The baroceptor is located in corresponding sensor cavity body；The sealing
The bottom of protection cap main body and the bottom of sealing ring are fitted close with the top of circuit board；
The contact head includes contact head main body and m spaced air bag cavitys for being provided with contact head bottom part body；Institute
The upper end for stating sensor cavity is located in air bag cavity that is corresponding and communicating therewith；The lower end of the contact head main body stretches to
In upper groove, and it is fitted close with upper groove.
2. a kind of micro- air bag multi-dimension force sensor with overload protection function according to claim 1, it is characterised in that:
Several location holes are offered on the circuit board；The bottom of the seal protection lid main body is equipped with what several and location hole was adapted
Positioning column；The positioning column stretches in corresponding location hole, and is fitted close with location hole.
3. a kind of micro- air bag multi-dimension force sensor with overload protection function according to claim 1, it is characterised in that:
The top of the sensor cavity is equipped with and the blow vent that is connected inside sensor cavity；The blow vent is cylinder.
4. a kind of micro- air bag multi-dimension force sensor with overload protection function according to claim 1, it is characterised in that:
The baroceptor welding is bonded on circuit boards on circuit boards or by electric conductor.
5. a kind of micro- air bag multi-dimension force sensor with overload protection function according to claim 1, it is characterised in that:
The bottom of the seal protection lid main body is bonded in the top of circuit board using adhesive.
6. a kind of micro- air bag multi-dimension force sensor with overload protection function according to claim 1, it is characterised in that:
The thickness of the sealing ring is 0.1~1mm bigger than the height of lower groove；The sealing ring uses rubber material.
7. a kind of micro- air bag multi-dimension force sensor with overload protection function according to claim 1, it is characterised in that:
The material of the contact head is rubber, silica gel, any one in silicon rubber.
8. a kind of micro- air bag multi-dimension force sensor with overload protection function according to claim 1, it is characterised in that:
The value of m is 4.
9. a kind of micro- air bag multi-dimension force sensor with overload protection function according to claim 1, it is characterised in that:
Air or nitrogen are filled in the air bag cavity and sensor cavity.
10. a kind of micro- air bag multi-dimension force sensor with overload protection function according to claim 3, feature exist
In: the air bag cavity includes the air bag cavity one and airbag chamber body two set gradually from up to down；The blow vent stretches to
In corresponding air bag cavity one, the sensor cavity is stretched in corresponding air bag cavity two.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910637074.9A CN110440974B (en) | 2019-07-15 | 2019-07-15 | Micro-airbag multi-dimensional force sensor with overload protection function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910637074.9A CN110440974B (en) | 2019-07-15 | 2019-07-15 | Micro-airbag multi-dimensional force sensor with overload protection function |
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| CN110440974A true CN110440974A (en) | 2019-11-12 |
| CN110440974B CN110440974B (en) | 2020-11-13 |
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| CN201910637074.9A Active CN110440974B (en) | 2019-07-15 | 2019-07-15 | Micro-airbag multi-dimensional force sensor with overload protection function |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113288151A (en) * | 2021-05-14 | 2021-08-24 | 中国科学院合肥物质科学研究院 | Flexible force sensor capable of sensing muscle hardness and muscle hardness detection method |
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| CN108007633A (en) * | 2017-11-13 | 2018-05-08 | 中国科学院合肥物质科学研究院 | A kind of micro- gasbag-type flexible 3 D force snesor |
| CN108593199A (en) * | 2017-02-27 | 2018-09-28 | 综合测试电子系统有限公司 | Test device, test system and method for test mechanical pressure sensor |
| CN109804231A (en) * | 2016-09-08 | 2019-05-24 | 霍尼韦尔国际公司 | Flush type cavity sense die diaphragm retainer for force snesor |
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2019
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7841238B2 (en) * | 2004-10-18 | 2010-11-30 | Silverbrook Research Pty Ltd | Pressure sensor with temperature compensation |
| CN100999079A (en) * | 2006-12-28 | 2007-07-18 | 中国科学院合肥物质科学研究院 | Bionic finger surface flexible contact sensor array of robot paw |
| CN109804231A (en) * | 2016-09-08 | 2019-05-24 | 霍尼韦尔国际公司 | Flush type cavity sense die diaphragm retainer for force snesor |
| CN108593199A (en) * | 2017-02-27 | 2018-09-28 | 综合测试电子系统有限公司 | Test device, test system and method for test mechanical pressure sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113288151A (en) * | 2021-05-14 | 2021-08-24 | 中国科学院合肥物质科学研究院 | Flexible force sensor capable of sensing muscle hardness and muscle hardness detection method |
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