CN112304483A - Combined self-decoupling piezoelectric film three-dimensional force sensor and measuring method thereof - Google Patents
Combined self-decoupling piezoelectric film three-dimensional force sensor and measuring method thereof Download PDFInfo
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- CN112304483A CN112304483A CN202011370937.XA CN202011370937A CN112304483A CN 112304483 A CN112304483 A CN 112304483A CN 202011370937 A CN202011370937 A CN 202011370937A CN 112304483 A CN112304483 A CN 112304483A
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 230000000694 effects Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 9
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- 230000008878 coupling Effects 0.000 abstract description 4
- 238000010168 coupling process Methods 0.000 abstract description 4
- 238000005859 coupling reaction Methods 0.000 abstract description 4
- 238000010273 cold forging Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 3
- 239000002033 PVDF binder Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
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- 230000035945 sensitivity Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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- 238000012544 monitoring process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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Abstract
The invention discloses a combined self-decoupling piezoelectric film three-dimensional force sensor and a measuring method thereof, and belongs to the technical field of sensors and measurement and control thereof. The structure includes the casing, stand group, lower cover plate, piezoelectric film, upper cover plate, upper cover, screw, piezoelectric film group. The piezoelectric film is pasted on the surface of the sensor, and the strain of the piezoelectric film is utilized to measure the three-dimensional force. When the sensor upper cover is acted by three-dimensional space force (Fx, Fy and Fz), the piezoelectric film directly measures Fz, the piezoelectric films in the piezoelectric film group are symmetrically distributed and pasted on the upright columns in the upright column group, and the influence of Fz is eliminated through a symmetrical structure, so that Fy and Fx are measured; the invention can realize the measurement of strong impact, transient, high dynamic response and wide-range three-dimensional force and can solve the coupling problem of multi-dimensional force.
Description
Technical Field
The invention belongs to the technical field of sensors and measurement and control thereof, and particularly relates to a combined self-decoupling piezoelectric film three-dimensional force sensor for measuring spatial wide-range impact load by using a device (particularly a cold forging device such as a steel ball cold forging machine) with load signal transient, heavy load and high dynamic response characteristic requirements and a measuring method thereof.
Background
The cold heading equipment is suitable for standard components with large batch and various specifications, has the characteristics of reliable performance, high efficiency, large impact load, stable product quality and the like, and the production rate can reach hundreds of particles per minute, so the detection equipment of the cold heading force not only needs a large range, but also needs quick response capability and high dynamic response capability. The lack of detection capability restricts the development of the cold forging industry in China, and the current detection methods at home and abroad are mainly divided into a piezoelectric type and a resistance strain type. Although the traditional resistance strain type sensor has high measurement accuracy, the traditional resistance strain type sensor cannot meet the requirement of high dynamic response and needs dynamic compensation. The piezoelectric sensor has the characteristics of good stability, short rise time, high natural frequency, good dynamic response characteristic and the like, and is the only sensor which is suitable for directly carrying out dynamic measurement at present.
Chinese patent 201911389906.6 discloses a wide-range piezoelectric film three-dimensional force sensor and a measuring method thereof, the structure of which comprises an upper cover, a screw, a piezoelectric film group and a housing, the sensor is suitable for dynamic measurement of space wide-range load, and the sensor has the advantages of good rigidity, high sensitivity, convenient operation and the like, but the measuring voltage is too large, and the piezoelectric film group structure is more complex. Chinese patent 201110410811.5 discloses a piezoelectric film force sensor, which comprises a PVDF piezoelectric film, a sealing ring, a pre-tightening screw, a connecting screw, an upper cover and a lower cover, is suitable for measuring the space impact load of a cold forging pressing device, and has the advantages of simple structure, wide application range, high force-electricity conversion efficiency, etc., but it can only measure the one-way impact load and can not solve the multidimensional force coupling problem. Chinese patent 201810794105.7 discloses a three-dimensional fingertip force sensor based on PVDF and a force measurement method thereof, which comprises a quadrangular frustum pyramid, a fingertip groove, a piezoelectric film and a sensor base from top to bottom in sequence, wherein the upper surface of the quadrangular frustum pyramid is a contact area of a sensor and a fingertip, and rubber is adopted as a laminating material for surface lamination, so that the impact of mechanical fingers on fragile articles such as glass can be effectively reduced, the gripping is convenient, the three-dimensional force information can be effectively measured, but the measuring range is too small, and the multi-dimensional force coupling problem cannot be solved. Chinese patent 201820892981.9 discloses a force sensor for directly measuring terminal crimping force, which is composed of an upper cover, a circuit board, a piezoelectric film and a lower cover from top to bottom in sequence, and can directly and effectively measure the terminal crimping force and effectively avoid vibration interference, and also has the functions of dirt prevention and dust prevention. But the structure can not effectively divide the load and the measuring range is small, and only the unidirectional load can be measured.
Disclosure of Invention
The invention aims to overcome the defects of the piezoelectric film force sensor and provides a combined self-decoupling piezoelectric film three-dimensional force sensor for strong impact, transient and multidimensional dynamic measurement (particularly relating to a cold forging device) and a measurement method thereof.
The technical scheme adopted by the invention for solving the technical problems is as follows: a combined self-decoupling piezoelectric film three-dimensional force sensor and a measuring method thereof are characterized in that the structure comprises a shell 1, a column group 2, a lower cover plate 3, a piezoelectric film 4, an upper cover plate 5, an upper cover 6, a screw 7, a screw 8, a screw 9, a piezoelectric film group 10 and a screw 11; 4 counter bores 12 and a shell mounting and fixing threaded hole 13 are symmetrically arranged on the inner lower surface a of the shell 1, a through hole 15 is formed in the middle of the shell, and 4 lead through holes 14 are symmetrically formed in the side surface b of the shell; the upright post group 2 consists of a middle upright post 16, an upright post 18, an upright post 20, an upright post 23 and an upright post 25, the piezoelectric film group 10 consists of a piezoelectric film 17, a piezoelectric film 19, a piezoelectric film 22 and a piezoelectric film 24, the piezoelectric film 19 and the piezoelectric film 24 are symmetrically distributed along the X direction and are respectively adhered to the surface d of the upright post 20 and the surface h of the upright post 25, the piezoelectric film 17 and the piezoelectric film 22 are symmetrically distributed along the Y direction and are respectively adhered to the surface c of the upright post 18 and the surface g of the upright post 23, the middle upright post 16 is used for load sharing pressure, threaded holes 26 are respectively formed in the upper surfaces e of the upright post 18, the upright post 20, the upright post 23 and the upright post 25, through holes 21 are formed in the upper surface f of the middle upright post 16, and the upright post group 2 is connected with the shell 1 through 4; a rectangular lower cover groove 27 is formed in the upper surface i of the lower cover plate 3, 4 threaded holes 28 and 4 rectangular grooves 29 are symmetrically arranged, a counter bore 30 is formed in the lower surface j of each rectangular groove 29, and a through hole 31 is formed in the middle of the rectangular lower cover groove 27; the lower surface k of the lower cover plate 3 is uniformly provided with 5 square grooves 32 for placing the upright post group 2, and the lower cover plate 3 and the upright post group 2 are connected through 4 screws 9; 4 counter bores 33 and 4 rectangular grooves 35 are symmetrically arranged on the lower surface l of the upper cover plate 5, rectangular upper cover grooves 34 are formed, threaded holes 36 are formed in the upper surface m of each rectangular groove 35, the piezoelectric film 4 is adhered to the upper surface n of each rectangular upper cover groove 34, a through hole 37 is formed in the middle of the upper surface n, and the upper cover plate 2 is connected with the lower cover plate 3 through 4 screws 8; 4 counter bores 38 and 4 upper cover installation fixing threaded holes 39 are symmetrically arranged on the upper surface o of the upper cover 6, a through hole 40 is formed in the middle of the upper surface o, and the upper cover 6 is connected with the upper cover plate 5 through 4 screws 7.
As a further limitation of the present technical solution, the lower cover plate 3 and the upper cover plate 5 are respectively provided with a rectangular lower cover groove 27 and a rectangular upper cover groove 34 for placing the piezoelectric film 4, the lower cover plate 3 and the upper cover plate 5 are respectively provided with 4 symmetrically arranged rectangular grooves 29 and rectangular grooves 35 for wire passing, and the housing 1 is provided with 4 symmetrically arranged wire through holes 14 for wire passing.
As a further limitation to the present technical solution, the lower surface of the piezoelectric film 4 is in contact with the upper surface n of the rectangular upper cover groove 34.
As a further limitation to the technical solution, the measuring method is that 5 piezoelectric films are all applied on the surface of the sensor, and the strain of the piezoelectric films is used to measure the three-dimensional force; when the sensor upper cover 6 is acted by spatial forces Fx, Fy and Fz, the piezoelectric effects of the piezoelectric film 4, the piezoelectric film 17, the piezoelectric film 19, the piezoelectric film 22 and the piezoelectric film 24 output the acting forces in the form of corresponding electric charge quantities through the conducting wires, wherein the piezoelectric film 4 directly measures Fz; the piezoelectric film 19 and the piezoelectric film 24 cancel the influence of Fz by the symmetrical arrangement to measure Fx, and the piezoelectric film 17 and the piezoelectric film 22 cancel the influence of Fz by the symmetrical arrangement to measure Fy.
Compared with the prior art, the invention has the advantages and positive effects that:
the combined self-decoupling piezoelectric film three-dimensional force sensor adopts a parallel load-sharing structural form based on a surface area division principle, and has the characteristics of small coupling coefficient, wide range, high rigidity, high sensitivity, high resolution, high stability, high inherent frequency and high force-electricity conversion efficiency;
2 the combined self-decoupling piezoelectric film three-dimensional force sensor is applied to different surfaces of the sensor through 5 piezoelectric films, the strain of the piezoelectric films is utilized to measure the three-dimensional force, the phenomenon that the measurement voltage is overlarge due to direct loading is avoided, the piezoelectric films are used for directly measuring Fz, the influence of the Fz is eliminated through a symmetrical structure, and then the Fx and Fy are measured, and the measurement result is more accurate and can dynamically measure the direction and the size of a strong impact load and a three-dimensional transient load;
the combined self-decoupling piezoelectric film three-dimensional force sensor can be used for measuring strong impact heavy load in a cold die forging process of a steel ball cold forging machine, can also be used for measuring strong impact load and three-dimensional transient load of forming and processing processes such as cold heading, stamping and the like in heavy-load equipment such as forging machinery, a punch press, a stamping hammer and the like, can be used as an online three-dimensional force monitoring module to be used on other devices or used as a feedback element in a control system, and has very wide application.
Drawings
Fig. 1 is a schematic view of the overall structure of the preferred embodiment of the present invention.
FIG. 2 is an isometric view of the housing of the preferred embodiment of the present invention.
Fig. 3 is a side view of a column set according to a preferred embodiment of the present invention.
Fig. 4 is an isometric view a of the lower cover plate of the preferred embodiment of the present invention.
Fig. 5 is an isometric view b of the lower cover plate of the preferred embodiment of the present invention.
FIG. 6 is an isometric view of the upper cover plate of the preferred embodiment of the present invention.
Fig. 7 is an axial view of the upper cover in accordance with the preferred embodiment of the present invention.
Reference numbers in the figures: the piezoelectric module comprises a shell 1, a column group 2, a lower cover plate 3, a piezoelectric film 4, an upper cover plate 5, an upper cover 6, screws 7, screws 8, screws 9, a piezoelectric film group 10, screws 11, counter bores 12, shell mounting and fixing threaded holes 13, lead through holes 14, through holes 15, a middle column 16, a piezoelectric film 17, columns 18, piezoelectric films 19, columns 20, piezoelectric films 22, columns 23, piezoelectric films 24, columns 25, threaded holes 26, through holes 21, rectangular lower cover grooves 27, threaded holes 28, rectangular grooves 29, counter bores 30, through holes 31, square grooves 32, counter bores 33, rectangular upper cover grooves 34, rectangular grooves 35, threaded holes 36, through holes 37, counter bores 38, upper cover mounting and fixing threaded holes 39 and through holes 40.
Detailed Description
The invention is described in further detail below with reference to the figures and preferred embodiments.
As shown in fig. 1, the structure comprises a shell 1, a column group 2, a lower cover plate 3, a piezoelectric film 4, an upper cover plate 5, an upper cover 6, screws 7, screws 8, screws 9, a piezoelectric film group 10 and screws 11.
The 4 screws 11 connect the column group 2 with the shell 1, the 4 screws 9 connect the lower cover plate 3 and the column group 2, the 4 screws 8 connect the upper cover plate 2 with the lower cover plate 3, and the 4 screws 7 connect the upper cover 6 with the upper cover plate 5.
The lower cover plate 3 and the upper cover plate 5 are respectively provided with a rectangular lower cover groove 27 and a rectangular upper cover groove 34 which are matched for use and used for placing the piezoelectric film 4, the lower cover plate 3 and the upper cover plate 5 are respectively provided with 4 rectangular grooves 29 and rectangular grooves 35 which are symmetrically arranged and matched for use and used for passing through a wire, and the shell 1 is provided with 4 wire through holes 14 which are symmetrically arranged and used for passing through a wire.
The working principle of the invention is as follows: the measuring method is characterized in that 5 piezoelectric films are all pasted on the surface of a sensor, and the strain of the piezoelectric films is utilized to measure the three-dimensional force; when the sensor upper cover 6 is acted by spatial forces Fx, Fy and Fz, the piezoelectric effects of the piezoelectric film 4, the piezoelectric film 17, the piezoelectric film 19, the piezoelectric film 22 and the piezoelectric film 24 output the acting forces in the form of corresponding electric charge quantities through the conducting wires, wherein the piezoelectric film 4 directly measures Fz; the piezoelectric film 19 and the piezoelectric film 24 cancel the influence of Fz by the symmetrical arrangement to measure Fx, and the piezoelectric film 17 and the piezoelectric film 22 cancel the influence of Fz by the symmetrical arrangement to measure Fy.
The charge quantity output by the piezoelectric film 4 is Q1, the charge quantity output by the piezoelectric film 17 is Q2, the charge quantity output by the piezoelectric film 19 is Q3, the charge quantity output by the piezoelectric film 22 is Q4, and the charge quantity output by the piezoelectric film 24 is Q5, so that the specific method for measuring the three-dimensional forces Fx, Fy and Fz by the sensor is as follows:
where d33 is the piezoelectric constant.
The above description is not intended to limit the invention, nor is the invention limited to the above examples. The above-mentioned embodiments are further detailed to explain the objects, technical solutions and advantages of the present invention, and it should be understood that the modifications, substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. The combined self-decoupling piezoelectric film three-dimensional force sensor is characterized by comprising a shell (1), an upright column group (2), a lower cover plate (3), a piezoelectric film (4), an upper cover plate (5), an upper cover (6), a screw (7), a screw (8), a screw (9), a piezoelectric film group (10) and a screw (11); 4 counter bores (12) and a shell mounting and fixing threaded hole (13) are symmetrically arranged on the inner lower surface (a) of the shell (1), a through hole (15) is formed in the middle of the shell, and 4 lead through holes (14) are symmetrically formed in the side surface (b); the upright post set (2) is composed of a middle upright post (16), an upright post (18), an upright post (20), an upright post (23) and an upright post (25), the piezoelectric film set (10) is composed of a piezoelectric film (17), a piezoelectric film (19), a piezoelectric film (22) and a piezoelectric film (24), the piezoelectric film (19) and the piezoelectric film (24) are symmetrically distributed along the X direction and are respectively pasted on the surface (d) of the upright post (20) and the surface (h) of the upright post (25), the piezoelectric film (17) and the piezoelectric film (22) are symmetrically distributed along the Y direction and are respectively pasted on the surface (c) of the upright post (18) and the surface (g) of the upright post (23), the middle upright post (16) is used for load sharing pressure, threaded holes (26) are respectively formed in the upper surfaces (e) of the upright post (18), the upright post (20), the upright post (23) and the upright post (25), and a through hole (21) is formed in the upper surface (f) of the middle upright post (16), the upright post group (2) is connected with the shell (1) through 4 screws (11); a rectangular lower cover groove (27) is formed in the upper surface (i) of the lower cover plate (3), 4 threaded holes (28) and 4 rectangular grooves (29) are symmetrically arranged, a counter bore (30) is formed in the lower surface (j) of each rectangular groove (29), and a through hole (31) is formed in the middle of each rectangular lower cover groove (27); the lower surface (k) of the lower cover plate (3) is uniformly provided with 5 square grooves (32) for placing the upright post group (2), and the lower cover plate (3) and the upright post group (2) are connected through 4 screws (9); 4 counter bores (33) and 4 rectangular grooves (35) are symmetrically arranged on the lower surface (l) of the upper cover plate (5), rectangular upper cover grooves (34) are formed, threaded holes (36) are formed in the upper surface (m) of each rectangular groove (35), the piezoelectric film (4) is pasted on the upper surface (n) of each rectangular upper cover groove (34), a through hole (37) is formed in the middle of the upper surface (n), and the upper cover plate (2) is connected with the lower cover plate (3) through 4 screws (8); the upper cover is characterized in that 4 counter bores (38) and 4 upper cover mounting and fixing threaded holes (39) are symmetrically arranged on the upper surface (o) of the upper cover (6), a through hole (40) is formed in the middle of the upper surface (o), and the upper cover (6) is connected with the upper cover plate (5) through 4 screws (7).
2. The combined self-decoupling piezoelectric film three-dimensional force sensor and the measuring method thereof as claimed in claim 1, wherein the lower cover plate (3) and the upper cover plate (5) are respectively provided with a rectangular lower cover groove (27) and a rectangular upper cover groove (34) which are used in cooperation for placing the piezoelectric film (4), the lower cover plate (3) and the upper cover plate (5) are respectively provided with 4 symmetrically arranged rectangular grooves (29) and rectangular grooves (35) which are used in cooperation for passing wires, the housing (1) is provided with 4 symmetrically arranged wire through holes (14) for passing wires; the lower surface of the piezoelectric film (4) is in contact with the upper surface (n) of the rectangular upper cover groove (34).
3. The combined self-decoupling piezoelectric film three-dimensional force sensor and the measuring method thereof as claimed in claim 1, wherein the measuring method is that 5 piezoelectric films are all applied on the surface of the sensor, and the strain of the piezoelectric films is utilized to measure the three-dimensional force; when the sensor upper cover (6) is acted by spatial forces Fx, Fy and Fz, the piezoelectric effect of the piezoelectric film (4), the piezoelectric film (17), the piezoelectric film (19), the piezoelectric film (22) and the piezoelectric film (24) outputs the acting force in the form of corresponding electric charge quantity through a lead, wherein the piezoelectric film (4) directly measures the Fz; the piezoelectric film (19) and the piezoelectric film (24) are symmetrically arranged to eliminate the influence of Fz so as to measure Fx, and the piezoelectric film (17) and the piezoelectric film (22) are symmetrically arranged to eliminate the influence of Fz so as to measure Fy; assuming that the charge quantity output by the piezoelectric film (4) is Q1, the charge quantity output by the piezoelectric film (17) is Q2, the charge quantity output by the piezoelectric film (19) is Q3, the charge quantity output by the piezoelectric film (22) is Q4 and the charge quantity output by the piezoelectric film (24) is Q5, the specific method for measuring the three-dimensional forces Fx, Fy and Fz by the sensor is as follows:
where d33 is the piezoelectric constant.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113739975A (en) * | 2021-08-27 | 2021-12-03 | 南京航空航天大学 | Structure decoupling six-dimensional force sensor |
| CN115326268A (en) * | 2022-08-31 | 2022-11-11 | 东北电力大学 | Coaxial series three-dimensional mechanical self-decoupling force sensor |
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| CN115326268A (en) * | 2022-08-31 | 2022-11-11 | 东北电力大学 | Coaxial series three-dimensional mechanical self-decoupling force sensor |
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