CN110375962B - Device and method for calibrating focal plane of optical system based on front-end cluster illumination - Google Patents
Device and method for calibrating focal plane of optical system based on front-end cluster illumination Download PDFInfo
- Publication number
- CN110375962B CN110375962B CN201910751750.5A CN201910751750A CN110375962B CN 110375962 B CN110375962 B CN 110375962B CN 201910751750 A CN201910751750 A CN 201910751750A CN 110375962 B CN110375962 B CN 110375962B
- Authority
- CN
- China
- Prior art keywords
- focal plane
- optical system
- light source
- calibrating
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 56
- 238000005286 illumination Methods 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 25
- 210000001747 pupil Anatomy 0.000 claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims description 22
- 230000000007 visual effect Effects 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 2
- 235000017491 Bambusa tulda Nutrition 0.000 description 2
- 241001330002 Bambuseae Species 0.000 description 2
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 2
- 239000011425 bamboo Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
Abstract
The invention discloses a device and a method for calibrating a focal plane of an optical system based on front-end cluster illumination. The device comprises an eyepiece group and a double Gaussian objective group with a full-symmetry structure, wherein light rays form a focal plane calibration device light path through the double Gaussian objective group and the eyepiece group, one side of the light path, which is close to the objective group, is a focal plane, one side of the light path, which is close to the eyepiece group, is an exit pupil, and the light rays enter human eyes through the exit pupil to be observed visually. The invention can calibrate the focal planes of different optical systems and optical lenses with high precision, and compared with the prior art, the invention has the remarkable advantages that: the light source is uniform in illumination, the feedback brightness of concentrated illumination is high, the aperture utilization rate of a tested system is high, the cost of the measuring device is low, and the practical operation is simple and convenient to use.
Description
Technical Field
The invention belongs to the field of optical system testing and adjustment, and particularly relates to a device and a method capable of illuminating a focal plane of an optical system and calibrating the focal plane.
Background
The rapid development of optical technology has resulted in the development of powerful optical industry and optical technology. In which correction, inspection and investigation of the optical system in most cases requires accurate determination of the position of its focal plane so as to coincide with the plane of the reticle, scale plate, photosensitive material, photoreceptors etc. assembly. There are different methods and apparatuses for determining the focal plane position of an optical system due to the wide variety of types, application ranges and characteristics of the optical system.
The visual means for determining the focal position of an optical system has heretofore taken up an important position in the manufacture and testing of optical instruments. However, due to the improvement of the quality of the optical system and the enhancement of the light flux of the lens, the focal plane position of the optical system is required to have higher calibration and inspection precision. The devices commonly used for calibrating the focal plane of an optical system are as follows: 1) An auto-collimation interference check light path is established for the optical system by using an interferometer and a plane mirror, and the focal position of the lens of the interferometer is marked by interference check, and is also the focal position of the optical system. The method has the defects that an interferometer is needed to be used for interferometry, an auto-collimation light path is needed to be precisely built, the requirement on professional knowledge is high, and the operation is complicated; 2) The focusing surface was directly observed using a conventional visual device, a gaussian eyepiece. The method has the defects of low detection precision, the illumination light source firstly passes through the spectroscope and then enters the optical system, the illuminance at the focusing surface position is greatly reduced, the visual definition is reduced, and the detection precision is not high.
Disclosure of Invention
Aiming at the defects of low detection precision, poor reliability, low illuminance on a focal plane and the like of the conventional visual device when the focal plane of an optical system is determined, the invention designs the device which has the advantages of simple structure, convenient operation, high detection precision, high resolution and high brightness and can carry out external illumination on the focal plane of the optical system and calibrate the focal plane. The invention aims to solve the defects of low detection precision, poor resolution, low illumination of a focal plane, and the like of the conventional optical system focal plane calibration visual device.
The specific technical scheme of the invention is as follows:
the invention provides a device for calibrating a focal plane of an optical system based on front bundling illumination, which comprises an eyepiece group and a double Gaussian objective group with a full-symmetry structure, wherein light rays form a focal plane calibration device light path through the double Gaussian objective group and the eyepiece group, one side of the light path, which is close to the objective group, is a focal plane, one side, which is close to the eyepiece group, is an exit pupil, and the light rays enter human eyes through the exit pupil to carry out visual observation.
Still further, the magnification of the eyepiece group is 12.5 times.
Still further still include connecting sleeve and diopter adjustment section of thick bamboo, two gauss formula objective group and eyepiece group pass through connecting sleeve and connect, diopter adjustment section of thick bamboo reserves the adjustment volume of a plurality of diopter.
Still further still, still include leading cluster light source cover mechanism, leading cluster light source cover mechanism sets up in the one side that the burnt face calibration device is close to two gauss formula objective group, the illuminance region that leading cluster light source cover mechanism formed includes light source stack centralized region and light source outside region.
Further, the front-mounted cluster light source cover mechanism comprises a plurality of LED light sources which are respectively arranged on annular conical surfaces with the included angles of 30 degrees and 60 degrees with the optical axis.
Still further, the LED light source is white light, and the divergence angle is 150 °.
Still further, the light source superposition concentration zone is approximately 260mm circular.
The invention also provides an optical system focal plane calibration method based on front-end cluster illumination, which comprises the following steps:
Step one: placing the cross reticle near the focal plane, and opening a front bundling light source cover to enable uniform light to directly illuminate the cross reticle; the clearest cross image is visually observed at the exit pupil position by adjusting the front and back positions of the cross reticle, and the cross reticle is determined to coincide with the focal plane;
step two: placing a plane reflecting mirror in front of the optical system of the focal plane to be calibrated, and placing the cross reticle and the focal plane calibration device which are well positioned in the first step near the focal plane of the optical system of the focal plane to be calibrated;
Step three: rotating the azimuth angle of the plane reflector, visually searching an unclear image of the cross reticle reflected by the plane reflector at the exit pupil position, placing the reflected image near the center of a field of view of the focal plane calibration device, and fixing the plane reflector;
Step four: under the condition that the relative positions of the cross reticle and the focal plane calibration device are kept unchanged, the cross reticle and the focal plane calibration device are integrally translated back and forth, when the image of the cross reticle and the image reflected by the plane mirror are the clearest in the exit pupil position, the left and right positions of the cross reticle are finely adjusted, the two clear images are overlapped, and at the moment, the focal plane calibration of the optical system is completed.
Furthermore, in the first step, before the front cluster light source cover is opened, the method further comprises a step of adjusting the vision adjusting cylinder to find an optimal use position.
The invention has the following beneficial effects:
The invention can calibrate the focal planes of different optical systems and optical lenses with high precision, and compared with the prior art, the invention has the remarkable advantages that: the light source is uniform in illumination, the feedback brightness of concentrated illumination is high, the aperture utilization rate of a tested system is high, the cost of the measuring device is low, and the practical operation is simple and convenient to use.
Drawings
FIG. 1 is a model diagram of a focal plane calibration apparatus.
Fig. 2 is a front-end cluster light source cover light source distribution diagram.
Fig. 3 is a diagram of illuminance areas of a front-end cluster light source.
FIG. 4 is a light path diagram of a focal plane calibration device.
FIG. 5 is a schematic diagram of focal plane calibration test
In the figure, 1: a front cluster light source cover mechanism; 2: an objective lens group mechanism; 3: a connecting sleeve; 4: a visibility adjustment barrel; 5: an eyepiece group mechanism; 6: the LED light sources are distributed in a overlooking manner; 7: a light source superposition concentration area; 8: an area outside the light source; 9: a focal plane; 10: an objective lens group; 11: an eyepiece group; 12: an exit pupil. 13: a planar mirror; 14: an optical system to be calibrated; 15: a cross reticle (focal plane); 16: and a focal plane calibration device.
Detailed Description
The invention is described in further detail below with reference to the drawings and the detailed description.
As shown in fig. 1, a device for calibrating the focal plane of an optical system based on front-end cluster illumination comprises a front-end cluster light source cover 1, an objective lens group mechanism 2, a connecting sleeve 3, a vision adjusting cylinder 4 and an eyepiece mechanism 5. The invention designs the double Gaussian objective lens group 10, uses a fully symmetrical structure, saves the system cost, and then carries out optical design of the eyepiece lens group 11 with the magnification of 12.5 times, and finally completes the optical path of the focal plane calibration device of FIG. 4. The left side of the light path is a focal plane 9, and the light enters human eyes through an exit pupil 12 for visual observation. The double gauss type objective lens set 10 is finally installed in the objective lens set mechanism 2; the eyepiece group 11 is installed in the eyepiece group mechanism 5; the objective lens mechanism 2 is fixedly connected with the eyepiece lens mechanism 5 through the connecting sleeve 3, and the diopter adjusting cylinder 4 reserves an adjusting quantity of +/-5 diopters, so that diopter adjustment can be facilitated.
As shown in fig. 2, the front cluster light source cover 1 of the device is placed at the leftmost side of the focal plane calibration device, the light sources of the front cluster light source cover are distributed into 8 LED light sources, and the 8 LED light sources are respectively stuck to annular conical surfaces with included angles of 30 degrees and 60 degrees with the optical axis. The LED light source is white light, and the divergence angle is 150 degrees. The front-mounted cluster light source cover mechanism 1 has a circular light source superposition area 7 for illuminating the focal plane 9, the size of which is approximately 260 mm.
As shown in fig. 3, the light sources of the device form a light source superposition centralized area 7 according to the working distance of the device, the divergence angle of the LED light sources and the arrangement overlook distribution 6 of the LED light sources, the light source illumination is uniform, the centralized illumination is carried out, and the light source external area 8 is not received when the system is checked. The front-mounted cluster light source cover mechanism 1 performs high-brightness and large-area illumination on the focal plane 9, and the focal plane calibration of the optical system is completed through visual observation of the exit pupil 12.
The focal plane calibration method of the optical system based on front-end cluster illumination by using the device is described below with reference to the focal plane calibration and inspection principle of fig. 5.
Step one: firstly, placing a cross reticle 15 near the position of a focal plane 9, and adjusting a vision adjusting cylinder 4 to find an optimal use position; then the front cluster light source cover 1 is opened to enable the uniform light to directly illuminate the cross reticle 15; the clearest cross image is visually observed at the position of the exit pupil 12 by adjusting the front and back positions of the cross reticle 15, and the cross reticle 15 is determined to coincide with the focal plane 9;
Step two: placing a plane reflecting mirror 13 in front of an optical system 14 of a focal plane to be calibrated, and placing a cross reticle 15 and a focal plane calibration device 16 which have determined relevant positions in the step one near the focal plane of the optical system of the focal plane to be calibrated;
Step three: the azimuth angle of the plane mirror 13 is rotated, an unclear image of the cross reticle reflected by the plane mirror is visually found at the position of the exit pupil 12, the reflected image is placed near the center of the field of view of the focal plane calibration device 16, and the plane mirror 13 is fixed;
Step four: under the condition that the relative positions of the cross reticle 15 and the focal plane calibration device 16 are kept unchanged, the cross reticle 15 and the focal plane calibration device 16 are integrally translated back and forth, when the position of the exit pupil 12 is the clearest of the image of the cross reticle and the image reflected by the plane mirror, the left and right positions of the cross reticle 15 are finely adjusted, the two clear images are overlapped, and at the moment, the focal plane calibration of the optical system is completed.
In summary, the invention designs a device for calibrating the focal plane of an optical system based on front-end cluster illumination, which can be used for high-precision calibration and observation of the focal plane position of the optical system. The calibration device mainly comprises a front bundling light source cover mechanism, an objective lens group mechanism, a connecting sleeve, a vision adjusting cylinder and an eyepiece group mechanism. The invention aims to solve the problems of low detection precision, poor resolution, low illumination of a focusing surface and the like in the traditional device for calibrating the focusing surface of the optical system, so that the focusing surface calibrating device based on front-end cluster illumination has the characteristics of simple structure, convenient operation, high detection precision, resolution, high brightness and the like, and has great application value.
The above description is only of the preferred embodiments of the present invention, and is not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The method is realized by adopting a device for calibrating the focal plane of the optical system based on front-end cluster illumination, the device comprises an eyepiece group, a double Gaussian objective group with a full-symmetry structure and a front-end cluster light source cover mechanism, light rays form a focal plane calibration device light path through the double Gaussian objective group and the eyepiece group, one side of the light path, which is close to the objective group, is a focal plane, one side, which is close to the eyepiece group, is an exit pupil, the light rays enter human eyes through the exit pupil to be observed visually, the front-end cluster light source cover mechanism is arranged on one side, which is close to the double Gaussian objective group, of the focal plane calibration device, and a light illumination area formed by the front-end cluster light source cover mechanism comprises a light source superposition concentration area and a light source external area;
The method comprises the following steps:
Step one: placing the cross reticle near the focal plane, and opening a front bundling light source cover to enable uniform light to directly illuminate the cross reticle; the clearest cross image is visually observed at the exit pupil position by adjusting the front and back positions of the cross reticle, and the cross reticle is determined to coincide with the focal plane;
step two: placing a plane reflecting mirror in front of the optical system of the focal plane to be calibrated, and placing the cross reticle and the focal plane calibration device which are well positioned in the first step near the focal plane of the optical system of the focal plane to be calibrated;
Step three: rotating the azimuth angle of the plane reflector, visually searching an unclear image of the cross reticle reflected by the plane reflector at the exit pupil position, placing the reflected image near the center of a field of view of the focal plane calibration device, and fixing the plane reflector;
Step four: under the condition that the relative positions of the cross reticle and the focal plane calibration device are kept unchanged, the cross reticle and the focal plane calibration device are integrally translated back and forth, when the image of the cross reticle and the image reflected by the plane mirror are the clearest in the exit pupil position, the left and right positions of the cross reticle are finely adjusted, the two clear images are overlapped, and at the moment, the focal plane calibration of the optical system is completed.
2. The method for calibrating the focal plane of the optical system based on front-end cluster illumination according to claim 1, wherein the method comprises the following steps: in the first step, before the front cluster light source cover is opened, the method further comprises a step of adjusting the vision adjusting cylinder to find the optimal use position.
3. The method for calibrating the focal plane of the optical system based on front-end cluster illumination according to claim 1, wherein the method comprises the following steps: the magnification of the eyepiece group is 12.5 times.
4. The method for calibrating the focal plane of the optical system based on front-end cluster illumination according to claim 1, wherein the method comprises the following steps: the dual-Gaussian objective lens group is connected with the eyepiece group through the connecting sleeve, and the diopter adjusting cylinder is reserved with a plurality of diopter adjusting amounts.
5. The method for calibrating the focal plane of the optical system based on front-end cluster illumination according to claim 1, wherein the method comprises the following steps: the front-mounted cluster light source cover mechanism comprises a plurality of LED light sources which are respectively arranged on annular conical surfaces with the included angles of 30 degrees and 60 degrees with the optical axis.
6. The method for calibrating the focal plane of the optical system based on front-end cluster illumination according to claim 5, wherein the method comprises the following steps: the LED light source is white light, and the divergence angle is 150 degrees.
7. The method for calibrating the focal plane of the optical system based on front-end cluster illumination according to claim 1, wherein the method comprises the following steps: the light source superposition concentration zone is a circle of approximately 260 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910751750.5A CN110375962B (en) | 2019-08-15 | Device and method for calibrating focal plane of optical system based on front-end cluster illumination |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910751750.5A CN110375962B (en) | 2019-08-15 | Device and method for calibrating focal plane of optical system based on front-end cluster illumination |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110375962A CN110375962A (en) | 2019-10-25 |
| CN110375962B true CN110375962B (en) | 2024-05-31 |
Family
ID=
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB617157A (en) * | 1945-05-22 | 1949-02-02 | J P Brandt Aktiebolag | Apparatus for determining the distance between the optical centres of two or more juxtaposed lenses or lens systems |
| US2986071A (en) * | 1956-02-10 | 1961-05-30 | Perkin Elmer Corp | Photographic objectives |
| CN1044985A (en) * | 1990-03-22 | 1990-08-29 | 中国测试技术研究院 | The far and near mirror-symmetrical conversion method that changes of mapping telescope collimation axis |
| CN201740465U (en) * | 2010-08-17 | 2011-02-09 | 福州开发区鸿发光电子技术有限公司 | Sighting telescope for shimmer night-vision gun |
| CN105892036A (en) * | 2016-06-07 | 2016-08-24 | 南京理工大学 | Head-mounted monocular wide-angle low-illumination-level CMOS night-vision device |
| CN106500967A (en) * | 2016-11-03 | 2017-03-15 | 中国科学院西安光学精密机械研究所 | A kind of day blind ultraviolet imaging enhancer spatial resolution test device and method |
| CN106814546A (en) * | 2015-11-30 | 2017-06-09 | 上海微电子装备有限公司 | Focal plane detection device, focal plane scaling method and silicon wafer exposure method |
| CN107656371A (en) * | 2017-10-16 | 2018-02-02 | 苏州耐德佳天成光电科技有限公司 | Optical system with diopter adjustment function |
| CN107727368A (en) * | 2017-10-13 | 2018-02-23 | 中国科学院上海技术物理研究所 | A kind of device and method for demarcating focal surface of collimator tube position |
| CN208421405U (en) * | 2018-06-26 | 2019-01-22 | 吉林鸿锋机械电子设备有限公司 | A kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus |
| CN208705566U (en) * | 2018-10-17 | 2019-04-05 | 成都赛诺特光学有限公司 | A kind of measurement of graticle is apart from Target observator |
| CN210513624U (en) * | 2019-08-15 | 2020-05-12 | 中科院南京天文仪器有限公司 | Device for calibrating focal plane of optical system based on front cluster illumination |
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB617157A (en) * | 1945-05-22 | 1949-02-02 | J P Brandt Aktiebolag | Apparatus for determining the distance between the optical centres of two or more juxtaposed lenses or lens systems |
| US2986071A (en) * | 1956-02-10 | 1961-05-30 | Perkin Elmer Corp | Photographic objectives |
| CN1044985A (en) * | 1990-03-22 | 1990-08-29 | 中国测试技术研究院 | The far and near mirror-symmetrical conversion method that changes of mapping telescope collimation axis |
| CN201740465U (en) * | 2010-08-17 | 2011-02-09 | 福州开发区鸿发光电子技术有限公司 | Sighting telescope for shimmer night-vision gun |
| CN106814546A (en) * | 2015-11-30 | 2017-06-09 | 上海微电子装备有限公司 | Focal plane detection device, focal plane scaling method and silicon wafer exposure method |
| CN105892036A (en) * | 2016-06-07 | 2016-08-24 | 南京理工大学 | Head-mounted monocular wide-angle low-illumination-level CMOS night-vision device |
| CN106500967A (en) * | 2016-11-03 | 2017-03-15 | 中国科学院西安光学精密机械研究所 | A kind of day blind ultraviolet imaging enhancer spatial resolution test device and method |
| CN107727368A (en) * | 2017-10-13 | 2018-02-23 | 中国科学院上海技术物理研究所 | A kind of device and method for demarcating focal surface of collimator tube position |
| CN107656371A (en) * | 2017-10-16 | 2018-02-02 | 苏州耐德佳天成光电科技有限公司 | Optical system with diopter adjustment function |
| CN208421405U (en) * | 2018-06-26 | 2019-01-22 | 吉林鸿锋机械电子设备有限公司 | A kind of heavy caliber parallel light tube focal plane high-precision is split as autocollimatic marking apparatus |
| CN208705566U (en) * | 2018-10-17 | 2019-04-05 | 成都赛诺特光学有限公司 | A kind of measurement of graticle is apart from Target observator |
| CN210513624U (en) * | 2019-08-15 | 2020-05-12 | 中科院南京天文仪器有限公司 | Device for calibrating focal plane of optical system based on front cluster illumination |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107796329B (en) | A kind of convex aspheric surface reflecting mirror surface shape detection device and detection method | |
| CN108195322B (en) | Multi-band multi-optical axis parallelism detection system and detection method thereof | |
| CN110186653B (en) | Optical axis consistency calibration and split image fixed focus adjustment device and method for non-imaging system | |
| CN104713577B (en) | Laser pick-off optical axis and visible ray plain shaft parallelism adjustment system and adjusting process | |
| CN111006855B (en) | Method and device for calibrating optical axis of large-caliber off-axis reflective vacuum parallel light tube | |
| WO2021088341A1 (en) | Fast installation and adjustment method for offner-type spectral imaging optical system | |
| CN107490851B (en) | Optical detection device and method for left and right zoom system of operating microscope | |
| US5523836A (en) | Method and apparatus for orienting a lens' refractive characteristics and lay-out properties | |
| CN103424243B (en) | Target system for distortion test | |
| CN110375962B (en) | Device and method for calibrating focal plane of optical system based on front-end cluster illumination | |
| CN103454072B (en) | Coefficient of stray light and point source transmitance composite test method and system | |
| CN103148807B (en) | Ultraviolet and visible ray double-plain shaft parallelism calibrating installation under external field environment | |
| CN209673053U (en) | A kind of more plain shaft parallelism detection systems of multiband | |
| CN114323577B (en) | Imaging lens performance detection system | |
| CN114815284B (en) | Method for eliminating optical interval adjustment error by using optical lens with folded light path | |
| CN108759872A (en) | The optical system and its method of double aperture slit synthesis asterism in a kind of parallel light path | |
| CN115877585A (en) | Calibration device and calibration method for single eyepiece set cemented prism | |
| CN210513624U (en) | Device for calibrating focal plane of optical system based on front cluster illumination | |
| CN208921614U (en) | A kind of novel microscopical imaging spectrometer transmitance detector | |
| CN208805602U (en) | A kind of filtering apparatus | |
| CN220933287U (en) | Collimator for verifying correctness of internal parameter calibration parameters of camera | |
| CN110375962A (en) | The device and method for demarcating optical system focal plane is illuminated based on preposition boundling | |
| CN217845590U (en) | Objective lens aberration testing device | |
| CN105807580A (en) | Workpiece six freedom degree position and attitude measurement sensor device | |
| CN214843650U (en) | Multi-view-field wavefront measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |