CN114323577B - Imaging lens performance detection system - Google Patents
Imaging lens performance detection system Download PDFInfo
- Publication number
- CN114323577B CN114323577B CN202111506121.XA CN202111506121A CN114323577B CN 114323577 B CN114323577 B CN 114323577B CN 202111506121 A CN202111506121 A CN 202111506121A CN 114323577 B CN114323577 B CN 114323577B
- Authority
- CN
- China
- Prior art keywords
- light
- mark
- imaging lens
- illumination
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 103
- 238000001514 detection method Methods 0.000 title claims abstract description 70
- 238000012360 testing method Methods 0.000 claims abstract description 91
- 238000005286 illumination Methods 0.000 claims abstract description 71
- 238000012544 monitoring process Methods 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims description 11
- 230000009471 action Effects 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 2
- 239000003550 marker Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention discloses an imaging lens performance detection system, belongs to the technical field of optical detection, and solves the technical problem that the existing testing device does not consider the influence of illumination background light, and the inconsistency of signal to noise ratio is probably introduced by illumination uniformity or alignment deviation of illumination and a mark, so that the testing precision is lower. The device comprises an illumination detection assembly, a test mark plate, an imaging lens assembly to be detected and an imaging detection assembly, wherein a light-permeable test mark is arranged on the test mark plate, and the device comprises: the illumination detection assembly is capable of generating a point light source to illuminate the test mark; the imaging lens component to be detected can be compared with the test mark standard, and the test mark can be imaged after the point light source is illuminated; the imaging detection component detects the imaging of the test mark so as to measure the deviation of the relative position after standard comparison and improve the detection accuracy.
Description
Technical Field
The invention belongs to the technical field of optical detection, and particularly relates to an imaging lens performance detection system.
Background
The existing imaging lens optical testing technology is to illuminate marks placed on an imaging lens object plane mask, and an imaging sensor located at the image side of the imaging lens measures mark images of an image plane. The background light illuminating through the chrome layer (opaque area) of the reticle can reduce the signal-to-noise ratio, thereby affecting measurement accuracy, and when the field of view required to be tested is greater than the detection range of the imaging sensor, the signal-to-noise ratio will be greater when the size of the mark is exceeded.
The method in the prior art firstly reduces the detection range of the imaging sensor, but increases the detection difficulty; secondly, spot light spot illumination slightly larger than a single mark is adopted, so that the signal to noise ratio is improved, but the illumination light spot movement is required to be aligned with marks at different positions in a field of view, but the problem of inconsistent signal to noise ratio at the different positions can be introduced, and the errors cannot be eliminated through calibration.
In view of this, the present invention has been made.
Disclosure of Invention
The invention aims to provide an imaging lens performance detection system, which solves the technical problem that the existing testing device does not consider the influence of illumination background light, and the inconsistency of signal to noise ratio is probably introduced by illumination uniformity or the alignment deviation of illumination and a mark, so that the testing precision is lower. The technical scheme of the scheme has a plurality of technical advantages, and the following description is provided:
the utility model provides an imaging lens performance detection system, including illumination detection subassembly, test mark version, imaging lens subassembly, the imaging detection subassembly that awaits measuring, but be provided with the test mark of printing opacity on the test mark version, wherein:
the illumination detection assembly is capable of generating a point light source to illuminate the test mark;
the imaging lens component to be detected can be compared with the test mark standard, and the test mark can be imaged after the point light source is illuminated;
the imaging detection assembly detects the imaging of the test mark to measure the deviation of the relative position after standard comparison.
Compared with the prior art, the technical scheme provided by the invention has the following beneficial effects:
the device provided by the scheme considers that the influence of illumination background light causes larger detection noise, so that the spot light illumination is adopted to detect the position deviation between the illumination light spot and the mask mark in a point light source mode, and the consistency of signal to noise ratio is improved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained from them without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an optical lens performance inspection system
FIG. 2 is a schematic diagram of an optical lens performance inspection system
FIG. 3 is an alignment image of a focused spot and a measurement mark
FIG. 4 is a focused spot, reference mark, and measurement mark alignment image
Fig. 5 is an alignment image of the converging spot and the test spot.
Wherein: 1. an illumination detection assembly; 2. testing the marking plate; 3. an imaging lens to be tested; 4. an imaging detection assembly; 5. an auxiliary moving assembly; 6. a reference mark plate; 101. an illumination light source; 102. illuminating the marking plate; 103. a relay lens group; 104. an aperture stop; 105. a beam splitter; 106. an energy monitoring lens group; 107. an energy sensor; 108. an imaging lens group; 109. an image sensor; 201. testing the marks; 202. an alignment mark; 110. converging the light spots; 602. referencing the alignment mark; 601. reference numerals.
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present invention with reference to specific examples. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. The invention may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present invention. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It is noted that various aspects of the embodiments are described below within the scope of the following claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present disclosure, one skilled in the art will appreciate that one aspect described herein may be implemented independently of any other aspect, and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. In addition, such apparatus may be implemented and/or such methods practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
It should also be noted that the illustrations provided in the following embodiments merely illustrate the basic concept of the present invention by way of illustration, and only the components related to the present invention are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complicated.
In addition, in the following description, specific details are provided in order to provide a thorough understanding of the examples. However, it will be understood by those skilled in the art that aspects may be practiced without these specific details. In order to better understand the aspects of the present invention, the present invention will be described in further detail with reference to the accompanying drawings and detailed description. The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the prior art, the influence of illumination background light is not considered in the test, the noise is larger, and the detection deviation is influenced, and the spot light is adopted for illumination in a spot light mode, namely, the position deviation between an illumination spot and a mask mark can be detected, so that the consistency of signal to noise ratio is improved.
The imaging lens performance detection system as shown in fig. 1 comprises an illumination detection assembly 1, a test mark plate 2, an imaging lens assembly to be detected and an imaging detection assembly 4, wherein a light-permeable test mark 201 is arranged on the test mark plate 2, and the light-permeable test mark 201 is arranged on the test mark plate 2, wherein:
the illumination detection assembly 1 can generate a point light source to illuminate the test mark, and the point light source forms a converging light spot, so that the influence of illumination background light can be reduced, and the measurement precision of the imaging lens to be measured is improved;
the imaging lens assembly to be tested can be in standard contrast with the test mark 201, and can image the test mark after the point light source is illuminated; the imaging lens component to be tested comprises an imaging lens 3 to be tested, and the image surface of the lens can be referenced or the referenced is arranged on a referenced plate 6;
the imaging detection component 4 detects the imaging of the test mark to measure the deviation of the relative position after standard comparison, for example, the imaging detection component 4 comprises an image sensor to form contrast so as to complete the detection of the imaging lens to be detected.
As the specific implementation mode provided by the scheme, the device further comprises an auxiliary moving component 5, wherein the auxiliary moving component 5 is a focusing device or component of an existing product and is used for adjusting the test mark plate 2 and/or the imaging lens component to be tested in a universal mode, and the imaging lens component to be tested comprises the reference mark plate 6 and is used for adjusting the deviation of the relative position after standard comparison. The test mark 201 on the test mark plate 2 is transparent, and the surrounding area of the test mark 201 is reflective.
The test mark on the test mark plate 2 is positioned on the object plane of the imaging lens 3 to be detected, and the imaging lens to be detected images and image planes of the test mark are detected by the imaging detection component. The auxiliary moving component 5 can drive the illumination detecting component 1 and the imaging detecting component 4 to move in the field of view of the imaging lens 3 to be detected, and is aligned with the test marks in the field of view in sequence, so that the test mark plate 2 and the reference mark plate 6 can be adjusted, and further the performance, such as distortion, field curvature, wave aberration and the like, in the whole field of view of the imaging lens 3 can be tested.
The structure of the point light source is shown in fig. 2, specifically:
the illumination detection assembly comprises an illumination light source 101, an illumination mark plate 102, a monitoring illumination assembly, a light splitting assembly and an imaging assembly, wherein the illumination mark plate 102 is provided with a light transmission mark 1021, and the illumination light source 101 is a light source with adjustable light intensity and/or switchable wavelength, wherein:
the illumination of the illumination light source 101 illuminates the bright illumination mark plate 102, and the light enters the light splitting component through the light transmission mark;
the light splitting assembly divides light into two paths, the first light path enters the monitoring illumination assembly for monitoring the light intensity fluctuation of the illumination light source, the second light path is converged on the test mark plate 2 to form a converging light spot 110, the light-transmitting mark 1021 can be illuminated, and the light-transmitting mark is used for detection illumination of the imaging lens assembly to be detected, and the light-transmitting mark is specific:
the monitoring illumination assembly comprises an energy monitoring mirror group 106 and an energy sensor 107, wherein: the first light path passes through the energy monitoring lens group 106 and enters the energy sensor 107 to monitor the light intensity fluctuation of the illumination light source;
the beam splitting component comprises a relay lens group 103, an aperture diaphragm 104 and a spectroscope 105, wherein the relay lens group 103 comprises a first relay lens and a second relay lens, the first relay lens is placed above the second relay lens by using a reference of fig. 2, the aperture diaphragm 104 uses the existing product with adjustable aperture size, the emergent NA of the illumination detection component 1 is ensured to adapt to imaging lenses 3 to be detected of different NA, and partial light is finally detected by an energy sensor 107 through an energy monitoring lens group 106 after being reflected by the spectroscope 105, wherein:
the light of the illumination light source 101 enters the first relay lens, the aperture diaphragm 104, the spectroscope 105 and the second relay lens through the light transmission mark 1021, the light is divided into two paths through the spectroscope 105, after being reflected by the spectroscope 105, the light is finally detected by the energy sensor 107 through the energy monitoring lens group 106, and the other part of light is converged on the test mark plate 2 through the action of the second relay lens to form a converging light spot 110, namely, a point light source is formed and enters the imaging lens assembly to be detected;
the imaging assembly includes an imaging optics 108 and an image sensor 109, wherein: the second path of light part forms reflected light through the test mark plate 2, enters the image lens group 108 under the action of the light splitting component, is transmitted to the image sensor through the image lens group 108 to form detection surface imaging, and the second path of light part forms reflected light through the test mark plate 2 and enters the imaging component to be imaged under the action of the light splitting component, specifically:
the test mark 201 is smaller than the converging light spot 110 in size, the test mark 201 on the test mark plate 2 is smaller than the converging light spot 110 in size, the mark area is transparent, and the surrounding area reflects light. The converging light spot 110 covers the test mark 201 on the test mark plate 2, wherein a part of light passes through the test mark 201, enters the imaging lens 3 to be tested, is finally detected to be a mark image by the imaging detection component 4 arranged on the image side of the optical lens, and the rest of light is reflected by the test mark plate 2, passes through the relay lens group 103, the spectroscope 105 and the imaging lens group 108 and finally forms an image on the detection surface of the image sensor 109.
Fig. 3 shows an image detected by the image sensor 109 when the light-transmitting marks on the illumination mark plate 102 are circular, and the test marks 201 on the test mark plate 2 are square. Wherein the outer circular profile is the profile image of the converging spot 110 and the inner square hole profile is the profile image of the test mark 201 on standard mark plate 2. The relative positional deviation between the two is measured, and the mark image 110 and the test mark 201 can be aligned horizontally by moving the position of the illumination detection assembly 1. Vertically moving the illumination detection assembly 1 such that the profile is the sharpest, a vertical alignment of the two is achieved.
In the above technical solution, the imaging lens assembly to be tested includes the imaging lens to be tested and the reference mark plate 6, and the reference mark plate 6 is provided with the reflective reference alignment mark 602;
an alignment mark 202 is arranged in a region formed by the plurality of test marks 201, the alignment mark 202 reflects light, the size of the alignment mark is smaller than that of the convergent light spot 110 formed by the point light source, the surrounding region of the alignment mark 202 transmits light, and the light transmission region is larger than that of the convergent light spot 110;
the reference alignment mark 602 passes through the size of the focused light spot 110 of the mark image size formed by the imaging lens to be detected at the object side, and can be detected by the image sensor 109 through the light transmission area around the alignment mark 202, and the outline of the light transmission area of the reference alignment mark 602 is smaller than the focused light spot 110 size and larger than the size of the reference mark 202 through the outline image size formed by the imaging lens 3 to be detected at the object side, specifically:
the illumination detection assembly 1 may assist in achieving alignment of the test mark plate 2 and the reference mark plate 6. The test mark plate 2 is provided with an alignment mark 202, the alignment mark 202 reflects light, the size of the alignment mark is smaller than that of the converging light spot 110 of the illumination detection assembly 1, the surrounding area of the alignment mark 202 is transparent, and the transparent area is larger than that of the converging light spot 110. The reference mark plate 6 is provided with a reference alignment mark 602, the reference alignment mark 602 reflects light, the size of a mark formed by the reference alignment mark 602 on the object side through the imaging lens 3 to be detected is smaller than that of the converging light spot 110 of the illumination detection assembly 1, the transparent area around the alignment mark 202 can be detected by the image sensor 109 of the illumination detection assembly 1, and the outline of the transparent area of the reference alignment mark 602 is formed on the object side through the imaging lens 3 to be detected, the size of the outline formed by the reference alignment mark 602 on the object side is smaller than that of the converging light spot 110 of the illumination detection assembly 1 but larger than that of the reference mark 202.
The converging light spot 110 of the illumination detection assembly 1 covers the alignment mark 202, the alignment mark 202 is imaged on the detection surface of the image sensor 109, and at the same time, part of the light of the converging light spot 110 passes through the light transmission area around the mark of the quasi-mark 202 and the imaging lens 3 to be detected illuminates the reference alignment mark 602, and the reference alignment mark 602 is imaged in a reflection mode and is imaged on the detection surface of the image sensor 109. The vertical axis position deviation of the alignment mark 202 and the reference alignment mark 602 can be known by testing the position deviation of the images on the detection surface of the image sensor 109. The vertical alignment of the test mark plate 2 or the reference mark plate 6 can be realized by adjusting the test mark plate 2 or the reference mark plate 6, and the sharpest and clear imaging outline of the test mark plate and the reference mark plate can be ensured, and the vertical alignment can also be realized.
Referring to fig. 4, a series of alignment marks 202 and reference alignment marks 602 are processed in the field of view of the imaging lens 3 to be tested on the test mark plate 2 and the reference mark plate 6, one-to-one correspondence. By assisting the moving component 5, the illumination detection component is driven to move and sequentially align with the alignment mark 202 and the reference alignment mark 602, so that performance measurement such as distortion, curvature of field and the like in the whole field of view can be realized. The illumination detection assembly 1 can also directly measure the mark image of the measurement mark 603 on the reference mark plate 6 on the object side of the imaging lens 3 to be tested, so as to test part of the performance of the imaging lens 3 to be tested, such as distortion, field curvature, MTF, etc.
The scheme that the reference mark plate 6 is not required to be installed is provided, the imaging lens assembly to be tested comprises an imaging lens, the image surface of the imaging lens is provided with a reference mark 601, the reference mark 601 corresponds to a test mark 201 on the test mark plate 2 and is used for standard comparison, and the scheme is that:
the reference mark surface is positioned on the image surface of the imaging lens to be detected, and the reference marks 601 on the mark surface are in one-to-one correspondence with the test marks 201 on the test mark plate 2, so that the standard comparison function is achieved, the requirement on the movement performance of the auxiliary moving assembly 5 can be improved and reduced, and meanwhile, the influence of the system error of the imaging sensor can be eliminated, so that the measurement accuracy is improved.
As shown in fig. 5, the illumination mark plate 102 of the illumination detection assembly 1 has a plurality of light-transmitting marks, which are in one-to-one correspondence with the marks on the test mark plate 2 and the reference mark plate, and the relay lens group 103 can automatically focus, so that the auxiliary movement assembly 5 is not required to drive the illumination detection assembly 1 to move, and illumination and alignment of all marks can be realized, so that the auxiliary movement assembly 5 can be partially or completely eliminated.
The product provided by the invention is described in detail above. The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the core concepts of the invention. It should be noted that it will be apparent to those skilled in the art that several improvements and modifications can be made to the invention without departing from the inventive concept, and these improvements and modifications fall within the scope of the appended claims.
Claims (10)
1. Imaging lens performance detection system, its characterized in that, including illumination detection subassembly (1), test mark version (2), imaging lens (3) subassembly, imaging detection subassembly (4), supplementary removal subassembly (5) that await measuring, be provided with test mark (201) that can transmit light on test mark version (2), wherein:
-the illumination detection assembly (1) is capable of generating a point light source to illuminate the test mark (201);
an alignment mark (202) is arranged in an area formed by the plurality of test marks (201), the alignment mark (202) reflects light, the size of the alignment mark is smaller than a convergent light spot (110) formed by the point light source, the surrounding area of the alignment mark (202) transmits light, and the light transmission area is larger than the convergent light spot (110);
the imaging lens (3) assembly to be tested can be in standard contrast with the test mark (201), and can image the test mark (201) after the point light source is illuminated;
the auxiliary moving assembly (5) is used for universally adjusting the imaging lens (3) assembly to be detected and adjusting the deviation of the relative position after standard comparison;
the imaging lens (3) component to be tested comprises an imaging lens (3) to be tested and a reference mark plate (6), wherein a reflective reference alignment mark (602) is arranged on the reference mark plate (6), the image surface of the imaging lens (3) to be tested is provided with a reference mark (601), and the reference mark (601) corresponds to the test mark (201) on the test mark plate (2) one by one, so that a standard comparison effect is achieved;
the imaging detection assembly (4) detects imaging of the test marker (201) to measure deviation of relative position after standard contrast.
2. Imaging lens performance detection system according to claim 1, characterized in that the auxiliary moving assembly (5) is further adapted to adjust the test marking plate (2) in a universal way, to adjust the deviation of the relative position after the standard comparison;
the test mark (201) on the test mark plate (2) is transparent, and the surrounding area of the test mark (201) reflects light.
3. The imaging lens performance detection system according to claim 2, wherein the illumination detection assembly (1) comprises an illumination light source (101), an illumination marking plate (102), a monitoring illumination assembly, a light splitting assembly and an imaging assembly, the illumination marking plate (102) being provided with a light transmissive marking, wherein:
the light of the illumination light source (101) illuminates the illumination mark plate (102) and the light enters the light splitting assembly through the light transmissive mark;
the light splitting assembly divides light into two paths, a first light path enters the monitoring illumination assembly for monitoring the light intensity fluctuation of the illumination light source (101), and a second light path is converged on the test mark plate (2) to form a converging light spot (110), so that the light-transmitting mark can be illuminated and the light-transmitting mark is used for detection illumination of the imaging lens (3) assembly to be detected;
the second path of light part forms reflected light through the test marking plate (2), and enters the imaging assembly for imaging under the action of the light splitting assembly; and/or the number of the groups of groups,
the illumination light source (101) is a light source with adjustable light intensity and/or switchable wavelength.
4. An imaging lens performance detection system according to claim 3, characterized in that the test mark (201) has a smaller size than the converging spot (110).
5. The imaging lens performance detection system of claim 3, wherein the monitoring illumination assembly comprises an energy monitoring lens group (106) and an energy sensor (107), wherein:
the first light path enters the energy sensor (107) through an energy monitoring lens group (106) to monitor the light intensity fluctuation of the illumination light source (101).
6. The imaging lens performance detection system according to claim 3, wherein the beam splitting assembly includes a relay lens group (103), an aperture stop (104), and a beam splitter (105), the relay lens group (103) including a first relay lens and a second relay lens, wherein:
the light of the illumination light source (101) passes through the light transmission mark and enters the first relay lens, the aperture diaphragm (104), the spectroscope (105) and the second relay lens, the light is divided into two paths by the spectroscope (105), and the second path of light is converged on the test mark plate (2) through the action of the second relay lens to form a converging light spot (110), namely, a point light source is formed and enters the imaging lens (3) component to be tested.
7. The imaging lens performance detection system according to claim 6, wherein the aperture stop (104) is provided with an aperture-size adjustable structure.
8. The imaging lens performance detection system of claim 6, wherein the imaging assembly comprises an imaging lens group (108) and an image sensor (109), wherein:
the second path of light part forms reflected light through the test mark plate (2), enters the image lens group under the action of the light splitting component, and is transmitted to the image sensor (109) through the image lens group so as to form detection surface imaging.
9. The imaging lens performance detection system according to claim 8, wherein the reference alignment mark (602) passes through a size of the converging light spot (110) of a mark image formed by the imaging lens (3) to be detected at an object side, and is detected by the image sensor (109) through a light transmission area around the alignment mark (202), and a contour of the light transmission area of the reference alignment mark (602) passes through a contour image formed by the imaging lens (3) to be detected at the object side is smaller than the size of the converging light spot (110) and is larger than the size of the reference mark (601).
10. Imaging lens performance detection system according to claim 1, characterized in that the imaging lens (3) assembly to be detected comprises an imaging lens, an image surface of the imaging lens is provided with a reference mark (601), and the reference mark (601) corresponds to a test mark (201) on the test mark plate (2) for standard comparison.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111506121.XA CN114323577B (en) | 2021-12-10 | 2021-12-10 | Imaging lens performance detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111506121.XA CN114323577B (en) | 2021-12-10 | 2021-12-10 | Imaging lens performance detection system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114323577A CN114323577A (en) | 2022-04-12 |
| CN114323577B true CN114323577B (en) | 2024-04-02 |
Family
ID=81051629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111506121.XA Active CN114323577B (en) | 2021-12-10 | 2021-12-10 | Imaging lens performance detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114323577B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115876447B (en) * | 2023-02-17 | 2023-06-06 | 聚时科技(深圳)有限公司 | Single wavelength optical device detection device |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02133913A (en) * | 1988-11-15 | 1990-05-23 | Nikon Corp | Alignment apparatus |
| US5783833A (en) * | 1994-12-12 | 1998-07-21 | Nikon Corporation | Method and apparatus for alignment with a substrate, using coma imparting optics |
| JP2000121495A (en) * | 1998-10-12 | 2000-04-28 | Matsushita Electric Ind Co Ltd | Screen inspection method |
| CN1655064A (en) * | 2005-03-07 | 2005-08-17 | 上海微电子装备有限公司 | In-situ detection method for stray light in step scan projection mask aligner |
| CN101551594A (en) * | 2009-04-30 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | System and method for detecting odd aberration of projection objective of photoetching machine based on dipolar illumination |
| CN102073217A (en) * | 2009-11-20 | 2011-05-25 | 上海微电子装备有限公司 | Real-time measuring device and method for wave aberration |
| CN102269938A (en) * | 2011-08-25 | 2011-12-07 | 中国科学院上海光学精密机械研究所 | Detection method of wave aberration of projection objective based on self-adapting noise reduction of space image |
| CN102375351A (en) * | 2010-08-11 | 2012-03-14 | 上海微电子装备有限公司 | Signal normalization mask alignment system |
| CN203133474U (en) * | 2013-02-01 | 2013-08-14 | 中国科学院光电研究院 | Device for online detection of wave aberration of projection objective |
| CN203133473U (en) * | 2013-01-29 | 2013-08-14 | 中国科学院光电研究院 | Online measurement device of projection objective wave aberration of photoetching machine |
| CN105651493A (en) * | 2016-03-01 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | Wave aberration detecting system and method with knife edge as detection marker |
| CN106154761A (en) * | 2015-04-15 | 2016-11-23 | 上海微电子装备有限公司 | A kind of veiling glare measurement apparatus and measuring method |
| CN109855842A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | A kind of wave aberration detection system and measurement method |
| CN109883656A (en) * | 2019-03-26 | 2019-06-14 | 北京全欧光学检测仪器有限公司 | The non-detection device and method for improving imaging lens |
| CN113702000A (en) * | 2021-08-18 | 2021-11-26 | 中国科学院深圳先进技术研究院 | Aberration detection system and aberration detection method of optical imaging lens |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107290943B (en) * | 2016-03-31 | 2019-01-29 | 上海微电子装备（集团）股份有限公司 | Coaxial mask alignment equipment, lithographic equipment and alignment methods |
-
2021
- 2021-12-10 CN CN202111506121.XA patent/CN114323577B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02133913A (en) * | 1988-11-15 | 1990-05-23 | Nikon Corp | Alignment apparatus |
| US5783833A (en) * | 1994-12-12 | 1998-07-21 | Nikon Corporation | Method and apparatus for alignment with a substrate, using coma imparting optics |
| JP2000121495A (en) * | 1998-10-12 | 2000-04-28 | Matsushita Electric Ind Co Ltd | Screen inspection method |
| CN1655064A (en) * | 2005-03-07 | 2005-08-17 | 上海微电子装备有限公司 | In-situ detection method for stray light in step scan projection mask aligner |
| CN101551594A (en) * | 2009-04-30 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | System and method for detecting odd aberration of projection objective of photoetching machine based on dipolar illumination |
| CN102073217A (en) * | 2009-11-20 | 2011-05-25 | 上海微电子装备有限公司 | Real-time measuring device and method for wave aberration |
| CN102375351A (en) * | 2010-08-11 | 2012-03-14 | 上海微电子装备有限公司 | Signal normalization mask alignment system |
| CN102269938A (en) * | 2011-08-25 | 2011-12-07 | 中国科学院上海光学精密机械研究所 | Detection method of wave aberration of projection objective based on self-adapting noise reduction of space image |
| CN203133473U (en) * | 2013-01-29 | 2013-08-14 | 中国科学院光电研究院 | Online measurement device of projection objective wave aberration of photoetching machine |
| CN203133474U (en) * | 2013-02-01 | 2013-08-14 | 中国科学院光电研究院 | Device for online detection of wave aberration of projection objective |
| CN106154761A (en) * | 2015-04-15 | 2016-11-23 | 上海微电子装备有限公司 | A kind of veiling glare measurement apparatus and measuring method |
| CN105651493A (en) * | 2016-03-01 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | Wave aberration detecting system and method with knife edge as detection marker |
| CN109855842A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | A kind of wave aberration detection system and measurement method |
| CN109883656A (en) * | 2019-03-26 | 2019-06-14 | 北京全欧光学检测仪器有限公司 | The non-detection device and method for improving imaging lens |
| CN113702000A (en) * | 2021-08-18 | 2021-11-26 | 中国科学院深圳先进技术研究院 | Aberration detection system and aberration detection method of optical imaging lens |
Non-Patent Citations (3)
| Title |
|---|
| Line-scanning confocal microscopic imaging based on virtual structured modulation;赵家旺等;中国光学;第14卷(第2期);第431-444页 * |
| 光学瞄准镜相对畸变测试技术研究;白雪等;长春理工大学学报（自然科学报））;第34卷(第1期);第46-48页 * |
| 微光信号探测对准技术;杨兴平等;电子工业专用设备;第7-12页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114323577A (en) | 2022-04-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20130010286A1 (en) | Method and device of differential confocal and interference measurement for multiple parameters of an element | |
| CN109253989A (en) | A kind of laser differential confocal chromatography fixed-focus method and apparatus | |
| CN1997871A (en) | Device and method for inspecting the internal surfaces of holes | |
| CN104515469A (en) | Light microscope and microscopy method for examining a microscopic specimen | |
| US5917586A (en) | Lens meter for measuring the optical characteristics of a lens | |
| JP2002071513A (en) | Interferometer for immersion microscope objective and evaluation method of the immersion microscope objective | |
| CN112556990A (en) | Lens refractive index measuring device and measuring method thereof | |
| CN109186477B (en) | Method and device for measuring central thickness of rear-mounted pupil laser differential confocal lens | |
| CN114323577B (en) | Imaging lens performance detection system | |
| CN110514142A (en) | A kind of surface shape detection apparatus and surface testing method | |
| US5416574A (en) | Automated optical measurement apparatus | |
| CN112747904A (en) | Method for assembling and adjusting infrared transfer function measuring instrument | |
| US3912396A (en) | Electronic lens tester | |
| CN109540474B (en) | Rear-mounted pupil laser differential confocal focal length measuring method and device | |
| US3361025A (en) | Method and apparatus of detecting flaws in transparent bodies | |
| US4213701A (en) | Lens testing apparatus and method | |
| US4359282A (en) | Optical measuring method and apparatus | |
| CN107329373B (en) | A kind of overlay error measuring device and method | |
| JP2008026049A (en) | Flange focal distance measuring instrument | |
| CN217505161U (en) | Numerical aperture testing device for self-focusing lens | |
| CN217655026U (en) | Bright and dark field detection device | |
| CN111044263A (en) | Optical element testing device | |
| JP2003050109A (en) | Surface shape measuring device and measuring method | |
| CN210863100U (en) | Lens refractive index measuring device | |
| JP5325481B2 (en) | Measuring method of optical element and manufacturing method of optical element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |