CN110371952A - A kind of flexible resistive humidity sensor and preparation method thereof - Google Patents
A kind of flexible resistive humidity sensor and preparation method thereof Download PDFInfo
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- CN110371952A CN110371952A CN201910596948.0A CN201910596948A CN110371952A CN 110371952 A CN110371952 A CN 110371952A CN 201910596948 A CN201910596948 A CN 201910596948A CN 110371952 A CN110371952 A CN 110371952A
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
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- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
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- C01B32/182—Graphene
- C01B32/194—After-treatment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2204/00—Structure or properties of graphene
- C01B2204/20—Graphene characterized by its properties
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Abstract
The invention discloses a kind of flexible resistive humidity sensors and preparation method thereof, the sensor includes flexible substrates, graphene pattern layer, external measuring circuit, graphene pattern layer is arranged on a flexible substrate, graphene pattern layer is connected with external measuring circuit, and the pattern of graphene pattern layer is connection.The preparation method comprises the steps of: the CO that 2~5W is utilized as on flexible substrates surface2Laser device laser etches graphene conductive pattern；The both ends for being formed by graphene pattern are connect with non-essential resistance measuring circuit.Humidity sensor of the invention itself is ultra-thin, and structure is simple；Design has the space that grows a lot, and can provide different performances by designing different patterns；It can be prepared using printing technology, be easy to be mass produced preparation；Precision with higher and flexibility.
Description
Technical field
The present invention relates to sensor and its preparation method, specially a kind of flexible resistive humidity sensor and preparation method thereof.
Background technique
Since humidity has important influence to actual activity in several cases, thus the humidity for detecting humidity passes
Sensor has a wide range of applications, such as the fields such as military affairs, meteorology, agricultural, Industry Control, medical instrument.Humidity sensor it is wet
Quick element can be mainly divided into resistance-type and condenser type two types, and traditional humidity sensor mainly uses ceramics, You Jigao
The problems such as molecule and semiconductor material etc., there are mechanical equivalent of light fragility, rigidity, insufficient sensitivity, usage scenario are limited.
In recent years, greatly developing with novel flexible sensor and novel nano-material, flexible humidity sensor and base
Occur in succession in the humidity sensor of nano material, flexible sensor has the advantage of high flexibility, and nano material humidity passes
Sensor then has the advantage of hypersensitivity, how to realize the flexible humidity sensor based on nano material, thus in conjunction with two kinds
Advantage has become one of humidity sensor research hotspot in recent years.
Existing flexible nano material humidity sensor device mostly uses greatly MEMS or transistor technology, finished product
Technique is fine, can reach higher precision and flexibility, but simultaneously, and corresponding preparation difficulty is larger, prepare fundamental importance compared with
Height, it is with high costs, it is difficult to realize quickly large-scale preparation.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, it is an object of the present invention to provide a kind of high sensitivities
Flexible resistive humidity sensor, it is a further object of the present invention to provide a kind of difficulty, and the not high flexible resistive of low, cost is wet
Spend the preparation method of sensor.
Technical solution: a kind of flexible resistive humidity sensor of the present invention, including flexible substrates, graphene pattern
Layer, external measuring circuit, graphene pattern layer are arranged on a flexible substrate, and graphene pattern layer is connected with external measuring circuit,
The pattern of graphene pattern layer is connection.Graphene pattern can according to need carry out design, have very high flexible
Property, therefore the variation range of graphene pattern resistance, precision etc. are adjustable.
Flexible substrates are the fexible films for having identical moisture absorption linear expansion property with polyimides, and fexible film is polyamides
Imines or Sodium Polyacrylate.
Graphene pattern layer directly passes through laser ablation flexible substrates itself and is carbonized preparation.Alternatively, graphene pattern layer is logical
It crosses and covers graphene oxide layer on fexible film surface, be then made, do not required soft by laser ablation redox graphene
Property substrate can be stablized under laser is effectively reduced into graphene, does not also need directly to handle flexible substrates itself, keep away
Exempt from laser to damage substrate.Graphene oxide layer is by being added dropwise the dry shape of graphene oxide dispersion on fexible film surface
At.Meanwhile after having prepared graphene, need to clean remaining graphene oxide using deionized water, prevent to measuring below
It interferes.
Extraneous measuring circuit includes electric resistance measuring apparatus and relative humidity display device.The resistance of graphene pattern layer with
Pattern width of fringe increases and reduces.
The preparation method of above-mentioned flexible resistive humidity sensor comprising the steps of:
(a) on flexible substrates surface, using using power to be the CO of 2~5W2Laser device laser etches graphene conductive figure
Case；
(b) both ends for being formed by graphene pattern are connect with non-essential resistance measuring circuit.
Working principle: since flexible substrates itself have moisture absorption linear expansion property, with the linear change of humidity,
The size of flexible substrates will follow linear change, so that linear stretch variation occurs for graphene pattern, cause graphite
The resistance Development pattern of alkene pattern changes, this can obtain humidity and graphene pattern resistance and the variation relation of humidity is bent
Line.Based on this curve, it will be able to realize that laser prepares the humidity detecting function of graphene flexible resistive humidity sensor.
The utility model has the advantages that compared to the prior art the present invention, has the characteristics that following conspicuousness: humidity sensor ultra-thin, knot
Structure is simple；Design has the space that grows a lot, and can provide different performances by designing different patterns；Energy
It is enough to be prepared using printing, it is easy to be mass produced；Precision with higher and flexibility.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is a kind of structural schematic diagram of graphene pattern layer 2 of the invention.
Fig. 3 is the piezoresistive characteristic test curve of sensor obtained by the embodiment of the present invention 4.
Specific embodiment such as Fig. 1~2, pattern are the graphene pattern layers 2 of connection in flexible substrates 3, graphene figure
The both ends of pattern layer 2 are connected with the external measuring circuit 1 for measuring resistance, and access relative humidity display module.External measurement
Circuit 1 can measure resistance and output signal is sent to relative humidity display module, and relative humidity display module can be by data
It is converted into relative humidity and shows.External measuring circuit 1 includes electric resistance measuring apparatus and relative humidity display device.Graphene figure
The resistance of pattern layer 2 reduces as pattern width of fringe increases.During actual measurement, with moisture absorption linear expansion property
Different expansion status can be presented in fexible film according to the difference of humidity, thus different numbers can be presented in the resistance of graphene pattern
Value, can obtain corresponding relative humidity according to this numerical value and show.Flexible substrates 3 are that have identical moisture absorption with polyimides
The fexible film of linear expansion property.
In following embodiment, CO2The maximum power of laser is 50W.
Embodiment 1
The preparation method of flexible resistive humidity sensor comprising the steps of:
(1) in polyimide flex film surface, the CO for being 4W with power2Laser device laser etches graphene conductive figure
Case；
(2) both ends for being formed by graphene pattern are connect with non-essential resistance measuring circuit.
Embodiment 2
The preparation method of flexible resistive humidity sensor comprising the steps of:
(1) in Sodium Polyacrylate fexible film surface, the CO for being 5W with power2Laser device laser etches graphene conductive figure
Case；
(2) both ends for being formed by graphene pattern are connect with non-essential resistance measuring circuit.
Embodiment 3
The preparation method of flexible resistive humidity sensor comprising the steps of:
(1) in polyimide flex film surface, the CO for being 4W with power2Laser device laser etches graphene conductive figure
Case；
(2) both ends for being formed by graphene pattern are connect with non-essential resistance measuring circuit.
Embodiment 4
The preparation method of flexible resistive humidity sensor comprising the steps of:
(1) graphene oxide dispersion is added dropwise in polyimide flex film surface, dry, the CO for being 2W with power2Swash
Light device laser ablation graphene conductive pattern；
(2) flexible substrates are placed in deionized water and are impregnated, clean remaining graphene oxide, prevented to measuring below
It interferes；
(3) both ends for being formed by graphene pattern are connect with non-essential resistance measuring circuit.
Under the preparation method, graphene pattern control is to carry out extension test, pattern lines to sensor shown in Fig. 2
Duan Kuandu control is 2mm, 4mm, 8mm, respectively corresponds three different electrical response characteristic curves, such as Fig. 3.It can from curve graph
To find out, in the case where same pattern, the resistance of pattern reduces as the width of line segment increases.
Embodiment 5
The preparation method of flexible resistive humidity sensor comprising the steps of:
(1) graphene oxide dispersion is added dropwise on Sodium Polyacrylate fexible film surface, dry, the CO for being 3W with power2
Laser device laser etches graphene conductive pattern；
(2) flexible substrates are placed in deionized water and are impregnated, clean remaining graphene oxide, prevented to measuring below
It interferes；
(3) both ends for being formed by graphene pattern are connect with non-essential resistance measuring circuit.
Embodiment 6
The preparation method of flexible resistive humidity sensor comprising the steps of:
(1) graphene oxide dispersion is added dropwise in polyimide flex film surface, dry, the CO for being 2W with power2Swash
Light device laser ablation graphene conductive pattern；
(2) flexible substrates are placed in deionized water and are impregnated, clean remaining graphene oxide, prevented to measuring below
It interferes；
(3) both ends for being formed by graphene pattern are connect with non-essential resistance measuring circuit.
Claims (9)
1. a kind of flexible resistive humidity sensor, it is characterised in that: including flexible substrates (3), graphene pattern layer (2), outer
It connects measuring circuit (1), the graphene pattern layer (2) is arranged on flexible substrates (3), the graphene pattern layer (2) and outer
It connects measuring circuit (1) to be connected, the pattern of the graphene pattern layer (2) is connection.
2. a kind of flexible resistive humidity sensor according to claim 1, it is characterised in that: the flexible substrates (3)
It is the fexible film that there is identical moisture absorption linear expansion property with polyimides, the fexible film is polyimides or polypropylene
Sour sodium.
3. a kind of flexible resistive humidity sensor according to claim 1, it is characterised in that: the graphene pattern layer
(2) it directly itself is carbonized and is prepared by laser ablation flexible substrates (3).
4. a kind of flexible resistive humidity sensor according to claim 1, it is characterised in that: the graphene pattern layer
(2) it by covering graphene oxide layer on fexible film surface, is then made by laser ablation redox graphene.
5. a kind of flexible resistive humidity sensor according to claim 4, it is characterised in that: the graphene oxide layer
(2) it is formed by the way that graphene oxide dispersion drying is added dropwise on flexible substrates (3) surface.
6. a kind of flexible resistive humidity sensor according to claim 1, it is characterised in that: the external measuring circuit
It (1) include electric resistance measuring apparatus and relative humidity display device.
7. a kind of flexible resistive humidity sensor according to claim 1, it is characterised in that: the graphene pattern layer
(2) resistance reduces as pattern width of fringe increases.
8. a kind of preparation method of flexible resistive humidity sensor, it is characterised in that comprise the steps of:
(a) on flexible substrates (3) surface, laser ablation graphene conductive pattern is utilized；
(b) both ends for being formed by graphene pattern are connect with non-essential resistance measuring circuit.
9. a kind of preparation method of flexible resistive humidity sensor according to claim 8, it is characterised in that: the step
Suddenly the power that uses of laser is 2~5W in (a).
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| CN201910596948.0A CN110371952B (en) | 2019-07-03 | 2019-07-03 | Flexible resistance type humidity sensor and preparation method thereof |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110723726A (en) * | 2019-11-04 | 2020-01-24 | 中国科学院福建物质结构研究所 | Laser reduction graphene film and preparation method thereof |
| CN110723725A (en) * | 2019-11-04 | 2020-01-24 | 中国科学院福建物质结构研究所 | Low-power laser reduction graphene film and preparation method thereof |
| CN110823420A (en) * | 2019-11-07 | 2020-02-21 | 东南大学 | Preparation method of flexible piezoresistive tension sensor by laser and tension sensor prepared by preparation method |
| CN112545454A (en) * | 2020-11-03 | 2021-03-26 | 深圳市刷新智能电子有限公司 | Sweat detection sensing device and sweat amount detection method |
| CN112662104A (en) * | 2020-12-10 | 2021-04-16 | 中电保力（北京）科技有限公司 | Composite test material based on graphene oxide and preparation method and application thereof |
| CN113135563A (en) * | 2021-05-25 | 2021-07-20 | 北京航空航天大学 | Graphene paper capable of continuously regulating and controlling water wettability and application thereof |
| CN115266832A (en) * | 2022-07-08 | 2022-11-01 | 浙江农林大学 | Preparation method of graphene oxide flexible leaf surface humidity sensor |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110723726A (en) * | 2019-11-04 | 2020-01-24 | 中国科学院福建物质结构研究所 | Laser reduction graphene film and preparation method thereof |
| CN110723725A (en) * | 2019-11-04 | 2020-01-24 | 中国科学院福建物质结构研究所 | Low-power laser reduction graphene film and preparation method thereof |
| CN110823420A (en) * | 2019-11-07 | 2020-02-21 | 东南大学 | Preparation method of flexible piezoresistive tension sensor by laser and tension sensor prepared by preparation method |
| CN110823420B (en) * | 2019-11-07 | 2021-09-07 | 东南大学 | Preparation method of flexible piezoresistive tension sensor by laser and tension sensor prepared by preparation method |
| CN112545454A (en) * | 2020-11-03 | 2021-03-26 | 深圳市刷新智能电子有限公司 | Sweat detection sensing device and sweat amount detection method |
| CN112662104A (en) * | 2020-12-10 | 2021-04-16 | 中电保力（北京）科技有限公司 | Composite test material based on graphene oxide and preparation method and application thereof |
| CN112662104B (en) * | 2020-12-10 | 2022-04-15 | 中电保力（北京）科技有限公司 | Composite test material based on graphene oxide and preparation method and application thereof |
| CN113135563A (en) * | 2021-05-25 | 2021-07-20 | 北京航空航天大学 | Graphene paper capable of continuously regulating and controlling water wettability and application thereof |
| CN115266832A (en) * | 2022-07-08 | 2022-11-01 | 浙江农林大学 | Preparation method of graphene oxide flexible leaf surface humidity sensor |
| CN115266832B (en) * | 2022-07-08 | 2024-05-10 | 浙江农林大学 | Preparation method of graphene oxide flexible leaf surface humidity sensor |
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